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GB1265545A - - Google Patents

Info

Publication number
GB1265545A
GB1265545A GB1265545DA GB1265545A GB 1265545 A GB1265545 A GB 1265545A GB 1265545D A GB1265545D A GB 1265545DA GB 1265545 A GB1265545 A GB 1265545A
Authority
GB
United Kingdom
Prior art keywords
source
heated
metal
june
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1265545A publication Critical patent/GB1265545A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • H10P95/00—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

1,265,545. Coating semi-conductor by evaporation. TEXAS INSTRUMENTS Inc. June 11, 1969 [June 24, 1968], No.29557/69. Heading C7F. Metal, e. g. Al, Au, Mo or Ni-Cr in a cavity 22 is heated by e.g. an electron beam source 26 and evaporated on to semi-conductor slices 30 of e.g. Si on e.g. a rotatable plate 32. The thickness of the coating is controlled by measuring the resistance of metal deposited on a glass slide 56. The deposition takes place at a high rate to form a thin film and then at a low rate to form a thicker film. The substrates may be heated to e. g. 250 to 275‹ C. by radiant heaters. A movable shutter may be disposed between source and substrate. In a modification, Fig. 2 (not shown) the substrates may be mounted on a fixed domed surface and the source heated by a tungsten body or by passing a current through the source metal. The thin layer may be Ni-Cr and the thick Al.
GB1265545D 1968-06-24 1969-06-11 Expired GB1265545A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US73940768A 1968-06-24 1968-06-24

Publications (1)

Publication Number Publication Date
GB1265545A true GB1265545A (en) 1972-03-01

Family

ID=24972148

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1265545D Expired GB1265545A (en) 1968-06-24 1969-06-11

Country Status (4)

Country Link
DE (1) DE1930951A1 (en)
FR (1) FR2011590A1 (en)
GB (1) GB1265545A (en)
NL (1) NL6909376A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264718A (en) * 1992-03-04 1993-09-08 Univ Hull Vapour deposited coatings having at least three transitions in structure

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2540767A1 (en) * 1983-02-14 1984-08-17 Instr I Cutting tool provided with a wear-resistant coating consisting of refractory compounds of metals which are difficult to melt and process for manufacturing the said cutting tool

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264718A (en) * 1992-03-04 1993-09-08 Univ Hull Vapour deposited coatings having at least three transitions in structure
GB2264718B (en) * 1992-03-04 1995-04-26 Univ Hull Coatings produced by vapour deposition

Also Published As

Publication number Publication date
NL6909376A (en) 1969-12-30
FR2011590A1 (en) 1970-03-06
DE1930951A1 (en) 1970-01-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee