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GB1243930A - Improvements in or relating to the production of monocrystals - Google Patents

Improvements in or relating to the production of monocrystals

Info

Publication number
GB1243930A
GB1243930A GB02654/70A GB1265470A GB1243930A GB 1243930 A GB1243930 A GB 1243930A GB 02654/70 A GB02654/70 A GB 02654/70A GB 1265470 A GB1265470 A GB 1265470A GB 1243930 A GB1243930 A GB 1243930A
Authority
GB
United Kingdom
Prior art keywords
crucible
liquid
vessel
monocrystals
march
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB02654/70A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691913682 external-priority patent/DE1913682C3/en
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1243930A publication Critical patent/GB1243930A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/42—Gallium arsenide
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N80/00—Bulk negative-resistance effect devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2208/00—Plastics; Synthetic resins, e.g. rubbers
    • F16C2208/80—Thermosetting resins
    • F16C2208/90—Phenolic resin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1,243,930. Crystal pulling. SIEMENS A.G. 17 March, 1970 [18 March, 1969], No. 12654/ 70. Heading B1S. Monocrystals of compounds which decompose easily at their m.p., e.g. GaAs, are pulled from a melt 6 in a crucible 5 which is disposed in a bath of liquid 7 with the liquid level below the lip of the crucible. The seed crystal support 9 is affixed to and contained within an open-mouthed vessel 8, the lips of which are kept below the level of the liquid 7 whereby the crucible 5 is wholly enclosed. As the crystal 13 grows on the seed 12 the vessel 8 is raised and may also be rotated about its axis. The liquid 7 may be a melt of B 2 O 3 , Ga or CaCl 2 . Vessel 8 may be quartz and crucible 3 of Ir, Rh, Pt or graphite. Induction coil 4 is provided to heat this crucible. The system may be enclosed under vacuum or an atmosphere of A or N, inside tube 1.
GB02654/70A 1969-03-18 1970-03-17 Improvements in or relating to the production of monocrystals Expired GB1243930A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691913682 DE1913682C3 (en) 1969-03-18 Device for the production of single crystals from semiconducting compounds

Publications (1)

Publication Number Publication Date
GB1243930A true GB1243930A (en) 1971-08-25

Family

ID=5728503

Family Applications (1)

Application Number Title Priority Date Filing Date
GB02654/70A Expired GB1243930A (en) 1969-03-18 1970-03-17 Improvements in or relating to the production of monocrystals

Country Status (8)

Country Link
US (1) US3716345A (en)
AT (1) AT323236B (en)
CA (1) CA933070A (en)
CH (1) CH541989A (en)
FR (1) FR2039601A5 (en)
GB (1) GB1243930A (en)
NL (1) NL6917398A (en)
SE (1) SE363244B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113777A (en) * 1973-02-12 1974-10-30
GB2207617A (en) * 1987-08-06 1989-02-08 Atomic Energy Authority Uk Single crystal pulling

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3915656A (en) * 1971-06-01 1975-10-28 Tyco Laboratories Inc Apparatus for growing crystalline bodies from the melt
DE2259353C3 (en) * 1972-12-04 1975-07-10 Heraeus-Quarzschmelze Gmbh, 6450 Hanau Crucibles made of quartz glass or fused silica for use in growing single crystals
US3857679A (en) * 1973-02-05 1974-12-31 Univ Southern California Crystal grower
US4045181A (en) * 1976-12-27 1977-08-30 Monsanto Company Apparatus for zone refining
DK371977A (en) * 1977-08-22 1979-02-23 Topsil As METHOD AND APPLIANCE FOR REFINING SALMON MATERIAL
DE3005492C2 (en) * 1980-02-14 1983-10-27 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Process for the production of the purest single crystals by crucible pulling according to Czochralski
DE3466785D1 (en) * 1983-08-06 1987-11-19 Sumitomo Electric Industries Apparatus for the growth of single crystals
EP0139157B1 (en) * 1983-08-31 1988-07-06 Research Development Corporation of Japan Apparatus for growing single crystals of dissociative compounds
JPS60112695A (en) * 1983-11-22 1985-06-19 Sumitomo Electric Ind Ltd Pulling method of compound single crystal
JPS60251191A (en) * 1984-05-25 1985-12-11 Res Dev Corp Of Japan Process for growing single crystal of compound having high dissociation pressure
DE3577405D1 (en) * 1984-12-28 1990-06-07 Sumitomo Electric Industries METHOD FOR PRODUCING POLYCRYSTALS FROM SEMICONDUCTOR CONNECTIONS AND DEVICE FOR CARRYING OUT THE SAME.
JPS623096A (en) * 1985-06-27 1987-01-09 Res Dev Corp Of Japan Growth of compound semiconductor single crystal having high dissociation pressure
SU1592414A1 (en) * 1986-11-26 1990-09-15 Vni Pk T I Elektrotermicheskog Method and apparatus for growing profiled crystals of high-melting compounds
JPH01192789A (en) * 1988-01-27 1989-08-02 Toshiba Corp Crystal-pulling up device and pulling up method
JP2755588B2 (en) * 1988-02-22 1998-05-20 株式会社東芝 Crystal pulling method
US5047112A (en) * 1990-08-14 1991-09-10 The United States Of America As Represented By The United States Department Of Energy Method for preparing homogeneous single crystal ternary III-V alloys
CA2083858C (en) * 1992-01-30 1997-10-14 James William Fleming, Jr. Iridium fiber draw induction furnace
WO1998035074A1 (en) * 1997-02-06 1998-08-13 Crysteco, Inc. Method and apparatus for growing crystals
DE19753477A1 (en) * 1997-12-02 1999-06-10 Wacker Siltronic Halbleitermat Method and heating device for melting semiconductor material
WO2006028868A2 (en) * 2004-09-01 2006-03-16 Rensselaer Polytechnic Institute Method and apparatus for growth of multi-component single crystals
DE102006050901A1 (en) * 2005-11-17 2007-05-31 Solarworld Industries Deutschland Gmbh Production of semiconductor body, e.g. for photovoltaic cell, by directionally recrystallizing portion of source melt to form intermediate crystal, disposing of residue portion, melting portion of intermediate crystal, and crystallizing
US8114218B2 (en) * 2008-09-02 2012-02-14 Siemens Medical Solutions Usa, Inc. Crucible for a crystal pulling apparatus
DE102011089501B4 (en) * 2011-12-21 2013-10-10 Freiberger Compound Materials Gmbh Apparatus and method for vaporizing material from a molten metal
US11434138B2 (en) 2017-10-27 2022-09-06 Kevin Allan Dooley Inc. System and method for manufacturing high purity silicon

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2892739A (en) * 1954-10-01 1959-06-30 Honeywell Regulator Co Crystal growing procedure
NL244873A (en) * 1958-11-17
US3088853A (en) * 1959-11-17 1963-05-07 Texas Instruments Inc Method of purifying gallium by recrystallization
US3198606A (en) * 1961-01-23 1965-08-03 Ibm Apparatus for growing crystals
BE626374A (en) * 1961-12-22

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49113777A (en) * 1973-02-12 1974-10-30
GB2207617A (en) * 1987-08-06 1989-02-08 Atomic Energy Authority Uk Single crystal pulling

Also Published As

Publication number Publication date
CA933070A (en) 1973-09-04
NL6917398A (en) 1970-09-22
AT323236B (en) 1975-06-25
SE363244B (en) 1974-01-14
US3716345A (en) 1973-02-13
FR2039601A5 (en) 1971-01-15
DE1913682A1 (en) 1970-10-15
CH541989A (en) 1973-09-30
DE1913682B2 (en) 1975-07-03

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