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GB1241371A - Apparatus for electron beam irradiation - Google Patents

Apparatus for electron beam irradiation

Info

Publication number
GB1241371A
GB1241371A GB09316/69A GB1931669A GB1241371A GB 1241371 A GB1241371 A GB 1241371A GB 09316/69 A GB09316/69 A GB 09316/69A GB 1931669 A GB1931669 A GB 1931669A GB 1241371 A GB1241371 A GB 1241371A
Authority
GB
United Kingdom
Prior art keywords
membrane
less
electrons
beam irradiation
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB09316/69A
Inventor
William Henry Thomas Davison
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TI Group Services Ltd
Original Assignee
TI Group Services Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TI Group Services Ltd filed Critical TI Group Services Ltd
Priority to GB09316/69A priority Critical patent/GB1241371A/en
Priority to US29231A priority patent/US3624391A/en
Priority to NL7005508A priority patent/NL7005508A/xx
Publication of GB1241371A publication Critical patent/GB1241371A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02Details
    • H01J33/04Windows

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

1,241,371. Electron beam irradiation apparatus. T.I. (GROUP SERVICES) Ltd. 14 April, 1970 [16 April, 1969], No. 19316/69. Heading H1D. The window of an electron beam irradiation apparatus comprises an electron permeable membrane of titanium or aluminium adapted to withstand atmospheric pressure, and a second membrane spaced from the first and permeable to electrons and to gas. The second membrane may be a mesh of aluminium, titanium, nickel, stainless steel, or non-metallic material and a cooling gas may be circulated between the membranes without disturbing the irradiated material, which may be paint. Preferably, the gas flow is achieved by providing equal and opposite and negative pressures along two edges of the membrane, so that the mean pressure on one side is the same as that on the opposite side, e.g. atmospheric pressure, and the gas flow should be in the same direction as that of the work. The second membrane should absorb less than 50% and preferably less than 30% of the incident electrons and should have apertures less than 5 mm. across. The membrane may include wires that absorb substantially all incident electrons, in which case the area of the membrane should be not less than 80% open. Alternatively, a better distribution of the electron dose in the work may be achieved if the solid parts of the membrane are so thin that the total mass thickness of the solid parts, together with the cooling gas and the first membrane is less than half the range of the electrons used (which is proportional to the mass traversed). In this case the area of the solid parts should be 40-60%.
GB09316/69A 1969-04-16 1969-04-16 Apparatus for electron beam irradiation Expired GB1241371A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB09316/69A GB1241371A (en) 1969-04-16 1969-04-16 Apparatus for electron beam irradiation
US29231A US3624391A (en) 1969-04-16 1970-04-16 Window structure for electron beam irradiation
NL7005508A NL7005508A (en) 1969-04-16 1970-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB09316/69A GB1241371A (en) 1969-04-16 1969-04-16 Apparatus for electron beam irradiation

Publications (1)

Publication Number Publication Date
GB1241371A true GB1241371A (en) 1971-08-04

Family

ID=10127350

Family Applications (1)

Application Number Title Priority Date Filing Date
GB09316/69A Expired GB1241371A (en) 1969-04-16 1969-04-16 Apparatus for electron beam irradiation

Country Status (3)

Country Link
US (1) US3624391A (en)
GB (1) GB1241371A (en)
NL (1) NL7005508A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514636A (en) * 1979-09-14 1985-04-30 Eaton Corporation Ion treatment apparatus
US4261762A (en) * 1979-09-14 1981-04-14 Eaton Corporation Method for conducting heat to or from an article being treated under vacuum
US4743570A (en) * 1979-12-21 1988-05-10 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
US4909314A (en) * 1979-12-21 1990-03-20 Varian Associates, Inc. Apparatus for thermal treatment of a wafer in an evacuated environment
US4680061A (en) * 1979-12-21 1987-07-14 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
DE10007650C2 (en) * 2000-02-19 2003-04-10 Leica Microsystems Light-optical microscope with electron beam device
US7295015B2 (en) * 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
EP1849175B1 (en) * 2005-02-18 2011-08-10 IMS Nanofabrication AG Charged-particle exposure apparatus
WO2007107211A1 (en) * 2006-03-20 2007-09-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for altering the characteristics of three-dimensional shaped parts using electrons
JP5241195B2 (en) * 2006-10-30 2013-07-17 アイエムエス ナノファブリカツィオン アーゲー Charged particle exposure system
US7768267B2 (en) * 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2907704A (en) * 1957-07-19 1959-10-06 High Voltage Engineering Corp Electron irradiation
US3418155A (en) * 1965-09-30 1968-12-24 Ford Motor Co Electron discharge control
US3440466A (en) * 1965-09-30 1969-04-22 Ford Motor Co Window support and heat sink for electron-discharge device
US3486060A (en) * 1967-09-06 1969-12-23 High Voltage Engineering Corp Cooling apparatus with laminar flow for electron permeable windows

Also Published As

Publication number Publication date
NL7005508A (en) 1970-10-20
US3624391A (en) 1971-11-30

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