GB1084051A - - Google Patents
Info
- Publication number
- GB1084051A GB1084051A GB1084051DA GB1084051A GB 1084051 A GB1084051 A GB 1084051A GB 1084051D A GB1084051D A GB 1084051DA GB 1084051 A GB1084051 A GB 1084051A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cells
- portions
- discharge
- inactive
- cathodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
1,084,051. Ion pumps. EDWARDS HIGH VACUUM INTERNATIONAL Ltd. April 28, 1964 [Jan. 29, 1963], No. 3701/63. Heading H1D. A cellular anode disposed between a pair of parallel cathodes in a Penning-type ion pump is so constructed that portions thereof are unable to support a discharge, with the result that redeposited sputtered material is able to build up on inactive steps of the cathodes adjacent these portions. In Fig. 4 double-walled partitions 5 between the active cells form rectangular cells 7 of such dimensions as to inhibit discharge. Alternatively, thick walls may be used. In Fig. 5 active open cells 11 alternate with inactive closed cells 10. The closure may be effected by lids or, preferably, by inserting solid pieces of metal to avoid difficulties in removing entrapped gas.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US373799A US3332606A (en) | 1964-06-09 | 1964-06-09 | Penning type vacuum pumps |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1084051A true GB1084051A (en) |
Family
ID=23473918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1084051D Active GB1084051A (en) | 1964-06-09 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3332606A (en) |
| GB (1) | GB1084051A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3400349A (en) * | 1966-01-14 | 1968-09-03 | Varian Associates | U-shaped magnetic circuit including three permanent magnets separated by pole pieces |
| US4820226A (en) * | 1987-10-14 | 1989-04-11 | The United States Of America As Represented By The United States Department Of Energy | Getter pump for hydrogen and hydrocarbon gases |
| DE3939571A1 (en) * | 1989-11-30 | 1991-06-06 | Leybold Ag | Ion pump with multi-anode structure and close-mounted outlet - has anode magnetic circuits integral with outer vessel |
| DE102010055420A1 (en) * | 2010-12-21 | 2012-06-21 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Electrode device for use in e.g. sorption pump utilized for generating low pressures in specific range, has anode including structure that is recessed and articulated from single block for forming open and closed penning cells |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3161802A (en) * | 1960-05-27 | 1964-12-15 | Varian Associates | Sputtering cathode type glow discharge device vacuum pump |
-
0
- GB GB1084051D patent/GB1084051A/en active Active
-
1964
- 1964-06-09 US US373799A patent/US3332606A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3332606A (en) | 1967-07-25 |
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