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GB1049124A - Ion pump - Google Patents

Ion pump

Info

Publication number
GB1049124A
GB1049124A GB30182/63A GB3018263A GB1049124A GB 1049124 A GB1049124 A GB 1049124A GB 30182/63 A GB30182/63 A GB 30182/63A GB 3018263 A GB3018263 A GB 3018263A GB 1049124 A GB1049124 A GB 1049124A
Authority
GB
United Kingdom
Prior art keywords
polepieces
titanium
cathode
rod
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB30182/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canadian Patents and Development Ltd
Original Assignee
Canadian Patents and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canadian Patents and Development Ltd filed Critical Canadian Patents and Development Ltd
Publication of GB1049124A publication Critical patent/GB1049124A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Microwave Tubes (AREA)

Abstract

1,049,124. Ion pumps. CANADIAN PATENTS & DEVELOPMENT Ltd. July 30, 1963 [Aug. 23, 1962], No. 30182/63. Heading H1D. The magnetic field producing means N, S of a magnetron-type cold-cathode sputter-ion pump partly bound the glow-discharge region 3 which is to a large extent separate from, but is in direct communication with, the pumping or sorption region 2. The envelope of the pump is formed by upper and lower polepieces 7, 8, a wall 13 of stainless steel or other non-magnetic material, a glass-to-metal seal 6, and a tubular member 11 for connection to a tubulation 19 of a system to be evacuated. Rings 9 of sheet titanium form a cathode with metal sheets 10, preferably of titanium, covering the faces of the polepieces 7, 8. A cylindrical anode 12 is supported by a rod 15. A sputter cathode 4 in the form of a cylindrical sheet or solid rod of titanium is mounted on a rod 5 extending through the seal 6. A number of permanent magnets 14 contact the polepieces 7 and 8 which are preferably of mild steel. Three assemblies as shown may be superimposed (Fig. 4, not shown) to provide a pump capable of increased pumping speeds.
GB30182/63A 1962-08-23 1963-07-30 Ion pump Expired GB1049124A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US218916A US3176906A (en) 1962-08-23 1962-08-23 Ion pump

Publications (1)

Publication Number Publication Date
GB1049124A true GB1049124A (en) 1966-11-23

Family

ID=22817001

Family Applications (1)

Application Number Title Priority Date Filing Date
GB30182/63A Expired GB1049124A (en) 1962-08-23 1963-07-30 Ion pump

Country Status (2)

Country Link
US (1) US3176906A (en)
GB (1) GB1049124A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3391303A (en) * 1965-01-25 1968-07-02 Lewis D. Hall Electronic vacuum pump including a sputter electrode
DE2034904A1 (en) * 1970-07-14 1972-01-27 Siemens Ag Optical memory for coherent optical systems
US3994625A (en) * 1975-02-18 1976-11-30 Varian Associates Sputter-ion pump having improved cooling and improved magnetic circuitry
US7236344B2 (en) * 2005-05-06 2007-06-26 Cool Shield, Inc. Ionic flow generator for thermal management

Also Published As

Publication number Publication date
US3176906A (en) 1965-04-06

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