GB1049124A - Ion pump - Google Patents
Ion pumpInfo
- Publication number
- GB1049124A GB1049124A GB30182/63A GB3018263A GB1049124A GB 1049124 A GB1049124 A GB 1049124A GB 30182/63 A GB30182/63 A GB 30182/63A GB 3018263 A GB3018263 A GB 3018263A GB 1049124 A GB1049124 A GB 1049124A
- Authority
- GB
- United Kingdom
- Prior art keywords
- polepieces
- titanium
- cathode
- rod
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 108010083687 Ion Pumps Proteins 0.000 title abstract 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 238000005086 pumping Methods 0.000 abstract 2
- 239000010936 titanium Substances 0.000 abstract 2
- 229910052719 titanium Inorganic materials 0.000 abstract 2
- 102000006391 Ion Pumps Human genes 0.000 abstract 1
- 229910001209 Low-carbon steel Inorganic materials 0.000 abstract 1
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 abstract 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
- Microwave Tubes (AREA)
Abstract
1,049,124. Ion pumps. CANADIAN PATENTS & DEVELOPMENT Ltd. July 30, 1963 [Aug. 23, 1962], No. 30182/63. Heading H1D. The magnetic field producing means N, S of a magnetron-type cold-cathode sputter-ion pump partly bound the glow-discharge region 3 which is to a large extent separate from, but is in direct communication with, the pumping or sorption region 2. The envelope of the pump is formed by upper and lower polepieces 7, 8, a wall 13 of stainless steel or other non-magnetic material, a glass-to-metal seal 6, and a tubular member 11 for connection to a tubulation 19 of a system to be evacuated. Rings 9 of sheet titanium form a cathode with metal sheets 10, preferably of titanium, covering the faces of the polepieces 7, 8. A cylindrical anode 12 is supported by a rod 15. A sputter cathode 4 in the form of a cylindrical sheet or solid rod of titanium is mounted on a rod 5 extending through the seal 6. A number of permanent magnets 14 contact the polepieces 7 and 8 which are preferably of mild steel. Three assemblies as shown may be superimposed (Fig. 4, not shown) to provide a pump capable of increased pumping speeds.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US218916A US3176906A (en) | 1962-08-23 | 1962-08-23 | Ion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1049124A true GB1049124A (en) | 1966-11-23 |
Family
ID=22817001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB30182/63A Expired GB1049124A (en) | 1962-08-23 | 1963-07-30 | Ion pump |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3176906A (en) |
| GB (1) | GB1049124A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3391303A (en) * | 1965-01-25 | 1968-07-02 | Lewis D. Hall | Electronic vacuum pump including a sputter electrode |
| DE2034904A1 (en) * | 1970-07-14 | 1972-01-27 | Siemens Ag | Optical memory for coherent optical systems |
| US3994625A (en) * | 1975-02-18 | 1976-11-30 | Varian Associates | Sputter-ion pump having improved cooling and improved magnetic circuitry |
| US7236344B2 (en) * | 2005-05-06 | 2007-06-26 | Cool Shield, Inc. | Ionic flow generator for thermal management |
-
1962
- 1962-08-23 US US218916A patent/US3176906A/en not_active Expired - Lifetime
-
1963
- 1963-07-30 GB GB30182/63A patent/GB1049124A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3176906A (en) | 1965-04-06 |
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