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FR3114931B1 - Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW) - Google Patents

Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW) Download PDF

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Publication number
FR3114931B1
FR3114931B1 FR2010072A FR2010072A FR3114931B1 FR 3114931 B1 FR3114931 B1 FR 3114931B1 FR 2010072 A FR2010072 A FR 2010072A FR 2010072 A FR2010072 A FR 2010072A FR 3114931 B1 FR3114931 B1 FR 3114931B1
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FR
France
Prior art keywords
acoustic wave
reflective structure
saw
surface acoustic
devices
Prior art date
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Active
Application number
FR2010072A
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English (en)
Other versions
FR3114931A1 (fr
Inventor
Sylvain Ballandras
Emilie Courjon
Florent Bernard
Thierry Laroche
Julien Garcia
Alexandre Clairet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Frecnsys SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Frecnsys SAS filed Critical Frecnsys SAS
Priority to FR2010072A priority Critical patent/FR3114931B1/fr
Priority to US18/247,629 priority patent/US20230308074A1/en
Priority to EP21786397.6A priority patent/EP4222860A2/fr
Priority to JP2023518269A priority patent/JP2023544271A/ja
Priority to PCT/EP2021/076840 priority patent/WO2022069573A2/fr
Publication of FR3114931A1 publication Critical patent/FR3114931A1/fr
Application granted granted Critical
Publication of FR3114931B1 publication Critical patent/FR3114931B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02566—Characteristics of substrate, e.g. cutting angles of semiconductor substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/0259—Characteristics of substrate, e.g. cutting angles of langasite substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02653—Grooves or arrays buried in the substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'invention concerne un dispositif à ondes acoustiques de surface (SAW), comprenant une structure de transducteur interdigité (102, 252) et au moins une structure réflectrice d'ondes acoustiques (104, 106, 254, 256) fournies es sur ou dans un substrat de propagation d'ondes acoustiques (114, 114’), caractérisé en ce que la structure de transducteur interdigité (102) comprend un premier matériau et la au moins une structure réflectrice d’ondes acoustiques (104, 106) comprend un deuxième matériau différent du premier matériau et/ou la structure réflectrice d'ondes acoustiques (104, 106) et la structure de transducteur interdigité (102) ont des paramètres géométriques différents. L’invention concerne en outre un capteur, comprenant un dispositif SAW tel que décrit précédemment, et un procédé pour fabriquer un dispositif SAW comprenant au moins une structure réflectrice d'ondes acoustiques. Figure pour abrégé : figure 1a
FR2010072A 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW) Active FR3114931B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2010072A FR3114931B1 (fr) 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW)
US18/247,629 US20230308074A1 (en) 2020-10-01 2021-09-29 Reflective structure for surface acoustic wave devices (saw)
EP21786397.6A EP4222860A2 (fr) 2020-10-01 2021-09-29 Structure réfléchissante pour dispositifs à ondes acoustiques de surface (saw)
JP2023518269A JP2023544271A (ja) 2020-10-01 2021-09-29 表面弾性波デバイス（ｓａｗ）用の反射構造体
PCT/EP2021/076840 WO2022069573A2 (fr) 2020-10-01 2021-09-29 Structure réfléchissante pour dispositifs à ondes acoustiques de surface (saw)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2010072A FR3114931B1 (fr) 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW)
FR2010072 2020-10-01

Publications (2)

Publication Number Publication Date
FR3114931A1 FR3114931A1 (fr) 2022-04-08
FR3114931B1 true FR3114931B1 (fr) 2022-12-30

Family

ID=74758877

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2010072A Active FR3114931B1 (fr) 2020-10-01 2020-10-01 Structure réflectrice pour dispositifs à ondes acoustiques de surface (SAW)

Country Status (5)

Country Link
US (1) US20230308074A1 (fr)
EP (1) EP4222860A2 (fr)
JP (1) JP2023544271A (fr)
FR (1) FR3114931B1 (fr)
WO (1) WO2022069573A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116318033A (zh) * 2022-09-09 2023-06-23 深圳市汇芯通信技术有限公司 通信器件、传感器件、表面声波谐振器及其制作方法
KR102853691B1 (ko) * 2024-11-20 2025-09-02 (주)와이솔 탄성파 소자 및 이의 제조 방법
KR102848998B1 (ko) * 2024-11-21 2025-08-22 (주)와이솔 탄성파 소자 및 이의 제조 방법

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838007B2 (ja) * 1976-04-20 1983-08-19 日本電気株式会社 弾性表面波共振器とその製造方法
US4290033A (en) * 1979-06-04 1981-09-15 Trw Inc. Shallow bulk acoustic wave devices employing energy trapping
US4353046A (en) * 1980-11-04 1982-10-05 R F Monolithics, Inc. Surface acoustic wave device with reflectors
JPS6278906A (ja) * 1985-10-01 1987-04-11 Kazuhiko Yamanouchi 弾性表面波装置の製造方法
JPH02260908A (ja) * 1989-03-31 1990-10-23 Murata Mfg Co Ltd 弾性表面波装置
US5418866A (en) * 1993-10-08 1995-05-23 E. I. Du Pont De Nemours And Company Surface acoustic wave devices for controlling high frequency signals using modified crystalline materials
US5568001A (en) * 1994-11-25 1996-10-22 Motorola, Inc. Saw device having acoustic elements with diverse mass loading and method for forming same
JPH10107582A (ja) * 1996-09-30 1998-04-24 Kyocera Corp 弾性表面波装置
JP2003188675A (ja) * 2001-12-19 2003-07-04 Alps Electric Co Ltd 表面弾性波素子及びそれを備えたデュプレクサ
JP2003289234A (ja) * 2002-01-28 2003-10-10 Murata Mfg Co Ltd 弾性表面波装置、通信装置
JP2007202087A (ja) * 2005-05-11 2007-08-09 Seiko Epson Corp ラム波型高周波デバイス
US10084427B2 (en) * 2016-01-28 2018-09-25 Qorvo Us, Inc. Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof
JP6445152B2 (ja) * 2016-01-29 2018-12-26 京セラ株式会社 弾性波共振子、弾性波フィルタ、分波器および通信装置
JP6832737B2 (ja) * 2017-02-20 2021-02-24 京セラ株式会社 弾性表面波共振子、分波器および通信装置
WO2020021029A2 (fr) * 2018-07-27 2020-01-30 Frec'n'sys Filtres à ondes acoustiques de surface (saw) à cavité résonante
DE102019102341A1 (de) * 2019-01-30 2020-07-30 RF360 Europe GmbH SAW-Vorrichtung

Also Published As

Publication number Publication date
EP4222860A2 (fr) 2023-08-09
JP2023544271A (ja) 2023-10-23
WO2022069573A3 (fr) 2022-05-27
FR3114931A1 (fr) 2022-04-08
US20230308074A1 (en) 2023-09-28
WO2022069573A2 (fr) 2022-04-07

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