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FR2827041B1 - Dispositif piezoresistif et procedes de fabrication de ce dispositif - Google Patents

Dispositif piezoresistif et procedes de fabrication de ce dispositif

Info

Publication number
FR2827041B1
FR2827041B1 FR0108812A FR0108812A FR2827041B1 FR 2827041 B1 FR2827041 B1 FR 2827041B1 FR 0108812 A FR0108812 A FR 0108812A FR 0108812 A FR0108812 A FR 0108812A FR 2827041 B1 FR2827041 B1 FR 2827041B1
Authority
FR
France
Prior art keywords
making
methods
piezoresistive
piezoresistive device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0108812A
Other languages
English (en)
Other versions
FR2827041A1 (fr
Inventor
Jean Sebastien Danel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0108812A priority Critical patent/FR2827041B1/fr
Priority to EP02291638.1A priority patent/EP1279927B1/fr
Priority to US10/184,941 priority patent/US6927171B2/en
Priority to JP2002193739A priority patent/JP4313001B2/ja
Publication of FR2827041A1 publication Critical patent/FR2827041A1/fr
Application granted granted Critical
Publication of FR2827041B1 publication Critical patent/FR2827041B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Weting (AREA)
FR0108812A 2001-07-03 2001-07-03 Dispositif piezoresistif et procedes de fabrication de ce dispositif Expired - Fee Related FR2827041B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0108812A FR2827041B1 (fr) 2001-07-03 2001-07-03 Dispositif piezoresistif et procedes de fabrication de ce dispositif
EP02291638.1A EP1279927B1 (fr) 2001-07-03 2002-07-01 Procédés de fabrication d'un dispositif piézorésistif
US10/184,941 US6927171B2 (en) 2001-07-03 2002-07-01 Piezoresistive device and manufacturing processes of this device
JP2002193739A JP4313001B2 (ja) 2001-07-03 2002-07-02 ピエゾ抵抗デバイスおよびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0108812A FR2827041B1 (fr) 2001-07-03 2001-07-03 Dispositif piezoresistif et procedes de fabrication de ce dispositif

Publications (2)

Publication Number Publication Date
FR2827041A1 FR2827041A1 (fr) 2003-01-10
FR2827041B1 true FR2827041B1 (fr) 2003-12-12

Family

ID=8865070

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0108812A Expired - Fee Related FR2827041B1 (fr) 2001-07-03 2001-07-03 Dispositif piezoresistif et procedes de fabrication de ce dispositif

Country Status (4)

Country Link
US (1) US6927171B2 (fr)
EP (1) EP1279927B1 (fr)
JP (1) JP4313001B2 (fr)
FR (1) FR2827041B1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007333665A (ja) * 2006-06-19 2007-12-27 Ritsumeikan 加速度センサ及び加速度センサの製造方法
JP5292687B2 (ja) * 2006-10-12 2013-09-18 株式会社デンソー 圧力センサ
FR2997187B1 (fr) * 2012-10-23 2014-12-26 Commissariat Energie Atomique Procede de fabrication d'un capteur piezoresistif.
JP6259967B2 (ja) * 2014-01-30 2018-01-17 地方独立行政法人大阪産業技術研究所 歪抵抗薄膜およびこれを用いた歪センサ素子
CN110780090B (zh) * 2019-12-02 2021-06-18 北京航空航天大学 基于碳化硅材料的压阻式加速度传感器的制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58222527A (ja) * 1982-06-18 1983-12-24 Hitachi Ltd 半導体装置の製造方法
FI78782C (fi) * 1986-01-10 1989-09-11 Valmet Oy Foerfarande foer framstaellning av ett piezoresistivt motstaondselement samt en anordning som tillaempar foerfarandet och en med foerfarandet framstaelld givare speciellt en tryckgivare eller motsvarande.
GB2207804B (en) * 1987-08-06 1990-08-15 Stc Plc Pressure sensor and manufacturing process therefor
JPH07111966B2 (ja) * 1989-12-22 1995-11-29 株式会社東芝 半導体装置の製造方法
US5172205A (en) * 1990-09-26 1992-12-15 Nissan Motor Co., Ltd. Piezoresistive semiconductor device suitable for use in a pressure sensor
EP0702221A3 (fr) * 1994-09-14 1997-05-21 Delco Electronics Corp Capteur intégré sur puce unique
US5661901A (en) * 1995-07-10 1997-09-02 Micron Technology, Inc. Method for mounting and electrically interconnecting semiconductor dice
JP3079983B2 (ja) 1995-12-26 2000-08-21 株式会社日立製作所 半導体型燃焼圧センサ
JP3489309B2 (ja) * 1995-12-27 2004-01-19 株式会社デンソー 半導体力学量センサの製造方法および異方性エッチングマスク
FR2746919B1 (fr) * 1996-03-28 1998-04-24 Commissariat Energie Atomique Capteur a jauge de contrainte utilisant l'effet piezoresistif et son procede de fabrication
US5973590A (en) 1998-03-12 1999-10-26 Kulite Semiconductor Products, Inc. Ultra thin surface mount wafer sensor structures and methods for fabricating same
GB2348958A (en) * 1999-04-15 2000-10-18 Ford Motor Co Pressure sensitive piezo-resistive transducer
US6294429B1 (en) * 1999-11-24 2001-09-25 International Business Machines Corporation Method of forming a point on a floating gate for electron injection

Also Published As

Publication number Publication date
JP2003101034A (ja) 2003-04-04
US6927171B2 (en) 2005-08-09
FR2827041A1 (fr) 2003-01-10
EP1279927A2 (fr) 2003-01-29
EP1279927A3 (fr) 2016-07-20
EP1279927B1 (fr) 2019-02-27
JP4313001B2 (ja) 2009-08-12
US20030008514A1 (en) 2003-01-09

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