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FR2884921B1 - Detecteur capacitif d'humidite et procede de fabrication de celui-ci - Google Patents

Detecteur capacitif d'humidite et procede de fabrication de celui-ci

Info

Publication number
FR2884921B1
FR2884921B1 FR0603419A FR0603419A FR2884921B1 FR 2884921 B1 FR2884921 B1 FR 2884921B1 FR 0603419 A FR0603419 A FR 0603419A FR 0603419 A FR0603419 A FR 0603419A FR 2884921 B1 FR2884921 B1 FR 2884921B1
Authority
FR
France
Prior art keywords
manufacturing
same
capacitive detector
humidity
humidity capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0603419A
Other languages
English (en)
Other versions
FR2884921A1 (fr
Inventor
Naoki Arisaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2884921A1 publication Critical patent/FR2884921A1/fr
Application granted granted Critical
Publication of FR2884921B1 publication Critical patent/FR2884921B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR0603419A 2005-04-22 2006-04-18 Detecteur capacitif d'humidite et procede de fabrication de celui-ci Expired - Fee Related FR2884921B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005125570A JP4609173B2 (ja) 2005-04-22 2005-04-22 容量式湿度センサおよびその製造方法

Publications (2)

Publication Number Publication Date
FR2884921A1 FR2884921A1 (fr) 2006-10-27
FR2884921B1 true FR2884921B1 (fr) 2013-09-27

Family

ID=37068146

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0603419A Expired - Fee Related FR2884921B1 (fr) 2005-04-22 2006-04-18 Detecteur capacitif d'humidite et procede de fabrication de celui-ci

Country Status (4)

Country Link
US (1) US7332995B2 (fr)
JP (1) JP4609173B2 (fr)
DE (1) DE102006018563A1 (fr)
FR (1) FR2884921B1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080238449A1 (en) * 2007-03-27 2008-10-02 Denso Corporation Fluid sensor and impedance sensor
JP2009092633A (ja) * 2007-10-12 2009-04-30 Denso Corp インピーダンスセンサ
WO2010113712A1 (fr) * 2009-03-31 2010-10-07 アルプス電気株式会社 Capteur d'humidité de type capacitif et son procédé de production
US8471304B2 (en) * 2010-06-04 2013-06-25 Carnegie Mellon University Method, apparatus, and system for micromechanical gas chemical sensing capacitor
JP5488534B2 (ja) * 2011-06-06 2014-05-14 株式会社デンソー 湿度センサ及びその製造方法
GB2501312B (en) * 2012-04-20 2017-04-26 Cokebusters Ltd Improvements in or relating to pipeline pigs
KR101874839B1 (ko) * 2012-04-25 2018-07-05 이플러스이엘렉트로닉 게엠베하 습도 센서 장치
DE102013211378B4 (de) * 2013-06-18 2021-05-20 Robert Bosch Gmbh Mikromechanische Feuchtesensorvorrichtung und entsprechendes Herstellungsverfahren sowie mikromechanische Sensoranordnung
US10336606B2 (en) * 2016-02-25 2019-07-02 Nxp Usa, Inc. Integrated capacitive humidity sensor
EP3646016B1 (fr) 2017-06-28 2025-01-15 E+E Elektronik Ges.m.b.H. Dispositif capteur pour la mesure capacitive de l'humidité
CN107831196A (zh) * 2017-09-28 2018-03-23 马清 一种交替叉指式湿度传感器
DE102018215018A1 (de) * 2018-09-04 2020-03-05 Infineon Technologies Ag Feuchtigkeitssensor
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
CN115575464A (zh) * 2022-09-29 2023-01-06 广州奥松电子股份有限公司 自校准湿度传感器
CN117030804B (zh) * 2023-10-10 2023-12-12 冰零智能科技(常州)有限公司 一种传感器及其使用方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5529774A (en) * 1978-08-24 1980-03-03 Shinei Kk Relative humidity detector
JPS6214363U (fr) * 1985-07-12 1987-01-28
EP0311939A3 (fr) * 1987-10-12 1990-10-17 Nihon Parkerizing Co., Ltd. Capteur d'humidité
DE59105040D1 (de) * 1990-09-12 1995-05-04 Endress Hauser Gmbh Co Verfahren zum Herstellen eines kapazitiven Feuchtesensors.
JPH06118045A (ja) 1992-10-06 1994-04-28 Seiko Epson Corp 湿度センサ
JPH08264374A (ja) 1995-03-24 1996-10-11 Tokin Corp 積層セラミックコンデンサの製造方法
JP2002071612A (ja) * 2000-09-05 2002-03-12 Tdk Corp 湿度センサ
JP2002243689A (ja) * 2001-02-15 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
US6580600B2 (en) * 2001-02-20 2003-06-17 Nippon Soken, Inc. Capacitance type humidity sensor and manufacturing method of the same
JP2002243690A (ja) * 2001-02-20 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
JP4501320B2 (ja) * 2001-07-16 2010-07-14 株式会社デンソー 容量式湿度センサ
JP2003156464A (ja) * 2001-11-19 2003-05-30 Denso Corp 容量式湿度センサ
JP4450598B2 (ja) * 2003-10-02 2010-04-14 北陸電気工業株式会社 湿度センサ及びその製造方法

Also Published As

Publication number Publication date
DE102006018563A1 (de) 2006-10-26
JP4609173B2 (ja) 2011-01-12
US7332995B2 (en) 2008-02-19
US20060238290A1 (en) 2006-10-26
FR2884921A1 (fr) 2006-10-27
JP2006300835A (ja) 2006-11-02

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20151231