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CN209326840U - 压力传感器及压力变送器 - Google Patents

压力传感器及压力变送器 Download PDF

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Publication number
CN209326840U
CN209326840U CN201822213406.4U CN201822213406U CN209326840U CN 209326840 U CN209326840 U CN 209326840U CN 201822213406 U CN201822213406 U CN 201822213406U CN 209326840 U CN209326840 U CN 209326840U
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pressure
pressure sensor
sensitive element
modulation module
signal modulation
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因德拉·J·鲁姆巴
李春明
梁海健
赵周宇
彭栋
艾米·赫特尔
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Therm O Disc Inc
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Therm O Disc Inc
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Priority to CN201822213406.4U priority Critical patent/CN209326840U/zh
Priority to US16/518,466 priority patent/US11047753B2/en
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Publication of CN209326840U publication Critical patent/CN209326840U/zh
Priority to EP23173261.1A priority patent/EP4235133A3/en
Priority to CN201980040895.2A priority patent/CN112543864B/zh
Priority to CN202210878382.2A priority patent/CN115371856B/zh
Priority to EP19842694.2A priority patent/EP3755982B1/en
Priority to JP2021537843A priority patent/JP7114814B2/ja
Priority to PCT/US2019/067915 priority patent/WO2020139768A1/en
Priority to JP2022119415A priority patent/JP7314370B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

本实用新型提供了一种压力传感器及压力变送器，该压力传感器包括：压敏元件，该压敏元件为硅压阻式；信号调制模块，该信号调制模块用于将压敏元件的输出信号调制成预设格式的信号；该压敏元件和该信号调制模块集成在同一个基板上。通过实用新型提供的技术方案，使得压敏元件和信号调制模块能够整合成一个独立的压力元件，使用安装更加简单，整体体积更加小巧紧凑，提高了可靠性。

Description

压力传感器及压力变送器
技术领域
本实用新型涉及传感器领域，具体而言，涉及一种压力传感器及压力变送器。
背景技术
压力变送器是一种将压力转换成气动信号或电动信号进行控制和远传的设备。常规压力变送器，包括压敏元件及控制电路等。压敏元件设置在连接器内，通过导线与设置在压力变送器外壳内的控制电路连接。常规的压力变送器中，压敏元件及控制电路采用结构相互分离的设计方式，使得产品整体体积偏大，可靠性较差。
实用新型内容
为解决上述问题，本实用新型提供一种压力传感器及压力变送器。
本实用新型的一方面，提供一种压力传感器，包括：压敏元件，所述压敏元件为硅压阻式；信号调制模块，用于将所述压敏元件的输出信号调制成预设格式的信号；所述压敏元件和所述信号调制模块集成在同一个基板上。
优选地，所述压敏元件和所述信号调制模块通过表面贴装的方式设置在所述基板上。
优选地，所述压敏元件与所述信号调制模块通过键合方式相互连接；或者，所述压敏元件与所述信号调制模块通过所述基板上的印制电路相互连接。
优选地，所述基板包括：陶瓷基板。
优选地，所述陶瓷基板包括：氧化铝陶瓷基板或氧化锆陶瓷基板。
优选地，所述压敏元件与所述信号调制模块通过所述基板上的印制电路相互连接。
优选地，所述的压力传感器，还包括：保护罩，设置在所述基板上，用于保护所述信号调制模块，和/或所述压敏元件。
优选地，所述的压力传感器，还包括：负载，设置在所述信号调制模块和所述压敏元件的电路中。
本实用新型的另一方面，提供一种压力变送器，包括如上述的压力传感器。
优选地，所述压力传感器设置在所述压力变送器的连接器和外壳之间。
优选地，所述的压力变送器，还包括以下至少两项：第一密封胶，设置在所述连接器的空腔和所述基板的共同的边缘处；密封圈，设置在所述压力传感器与所述外壳相接触的部分；第二密封胶，设置在所述连接器与所述外壳的边沿相接触的地方。
本实用新型提供了一种压力传感器及压力变送器，该压力传感器包括：压敏元件，该压敏元件为硅压阻式；信号调制模块，该信号调制模块用于将压敏元件的输出信号调制成预设格式的信号；该压敏元件和该信号调制模块集成在同一个基板上。通过实用新型提供的技术方案，使得压敏元件和信号调制模块能够整合成一个独立的压力元件，使用安装更加简单，整体体积更加小巧紧凑，提高了可靠性。
附图说明
此处所说明的附图用来提供对本实用新型的进一步理解，构成本申请的一部分，本实用新型的示意性实施例及其说明用于解释本实用新型，并不构成对本实用新型的不当限定。在附图中：
图1是根据本实用新型的压力传感器的一个实施例的结构示意图；
图2是根据本实用新型的压力传感器的另一个实施例的结构示意图；
图3是根据本实用新型的压力变送器的一个实施例的结构示意图；
图4是根据本实用新型的压力变送器的连接器的一个实施例的结构示意图；
图5是如图4所示连接器的仰视图；
图6是根据本实用新型的压力变送器的外壳的一个实施例的结构示意图；
图7是根据本实用新型的压力变送器的一个实施例的轴向截面的结构示意图。
具体实施方式
下文中将参考附图并结合实施例来详细说明本实用新型。需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。
本实用新型提供了一种压力传感器，图1是根据本实用新型的压力传感器的一个实施例的结构示意图。一种压力传感器，如图1所示，包括：压敏元件110，该压敏元件为硅压阻式；信号调制模块120，用于将压敏元件110的输出信号调制成预设格式的信号；压敏元件110和信号调制模块120集成在同一个基板100上。通过本实用新型的技术方案，采用硅压阻式的压敏元件，使用集成的方式，将压敏元件和信号调制模块整合成一个独立的压力元件，使得该压力元件，使用安装更加简单，整体体积更加小巧紧凑，提高了可靠性。
作为一个较优的实施方式，压敏元件110可以采用相关技术中的多种感压元件，例如微机电系统(Micro-Electro-Mechanical Systems，简称为MEMS)，信号调制模块120可以采用相关技术中用于信号调制的芯片，例如专用集成电路(Application SpecificIntegrated Circuit，简称为ASIC)。
作为一个较优的实施方式，压敏元件110和信号调制模块120可以通过表面贴装的方式设置在基板100上。在该实施方式下，将压敏元件和信号调制模块通过表面贴装的方式设置在基板上，不需要导线连接，减小了压力传感器的体积，整体更为小巧紧凑。
作为另一个较优的实施方式，压敏元件110与信号调制模块120可以通过键合方式相互连接；或者，压敏元件110与信号调制模块120可以通过基板上的印制电路相互连接。在该实施方式下，压敏元件与信号调制模块通过键合方式，或，通过基板上的印制电路相互电连接，使得压敏元件与信号调制模块之间的连接省去了导线的连接，并且生产加工方便，实施性强。
作为另一个较优的实施方式，基板100可以包括陶瓷基板。通过该实施方式，使用陶瓷基板，相比较于常规设计中的玻璃纤维基板，机械强度更好，绝缘性能更好，材料性质更稳定，抗腐蚀能力更强；并且，在该压力传感器的使用过程中，需要与工作介质直接接触时，特别是与液体工作介质直接接触时，适应范围更广；同时，相对于常规方案应用于压力变送器中时，该实施方式下，不需要将陶瓷基板与工作介质做物理隔离，简化了设计及工艺。
优选地，陶瓷基板可以包括氧化铝陶瓷基板或氧化锆陶瓷基板。通过该实施方式，在使用时，提高了该压力传感器的基板的传导性、机械强度和耐高温性。
作为另一个较优的实施方式，上述的压力传感器，如图2所示，还可以包括保护罩230，保护罩230设置在基板上，用于保护信号调制模块，和/或压敏元件(即就是，用于保护以下至少之一的元件：信号调制模块；压敏元件)。在该实施方式下，设置在基板上的保护罩230，罩住信号调制模块，和/或压敏元件，使得在该压力传感器在使用过程中，保护罩内的元器件不易被碰撞到，使用更为安全，可靠性更高。
作为另一个较优的实施方式，上述的压力传感器，还包括：负载140，设置信号调制模块120和压敏元件110的电路中(该负载140包括：被动元器件，如：电阻和电容等，被动元器件均设置在基板上，并与信号调制模块及压敏元件电连接)。通过该实施方式，使得信号调制模块及压敏元件能够得到电流保护，安全性更高。
本实用新型还提供了一种压力变送器，图3是根据本实用新型的压力变送器的一个实施例的结构示意图。一种压力变送器300，包括如上述的压力传感器。通过该技术方案，采用如上述的压力传感器，压力变送器300中不需要像常规设计中那样设计(在常规设计中，分别在连接器350中和外壳360中设置压敏元件及控制电路，并通过导线等方式将其连接并安装起来)，简化了设计；通过该技术方案，简化了生产安装工艺，也使得压力变送器整体的体积更加小巧紧凑，使用更为便利，集成化的设置也提高了产品的可靠性。
图4是根据本实用新型的压力变送器的连接器的一个实施例的结构示意图；图5是如图4所示连接器的仰视图；图6是根据本实用新型的压力变送器的外壳的一个实施例的结构示意图；图7是根据本实用新型的压力变送器的一个实施例的轴向截面的结构示意图。作为一个较优的实施方式，压力传感器400可以设置在压力变送器的连接器450和外壳460之间。如图4、图5、图6、图7所示，压力传感器400可以设置在连接器450的空腔455内部。第一密封胶457可以设置在压力传感器400的底部，并且围绕着基板(如图1中所示的基板100)的边缘处设置，基板上设置有压力传感器400，压力传感器400容纳在连接器450的空腔455内(也就是说，第一密封胶457设置在连接器的空腔455和基板100的共同的边缘处，将压力传感器400与连接器450整合在一起)。压力传感器400的底部(如图4、图5所示)可以被容纳并密封在连接器450的空腔455内部。图5示出了压力传感器400容纳在连接器450内部时连接器的底部的结构示意图。在该实施方式中，压力传感器整体包封在连接器内部，使得压力变送器的结构更为简单、紧凑，压力变送器的性能更为可靠。
作为另一个较优的实施方式，上述压力变送器，还可以包括：密封圈470，密封圈470可以设置在压力传感器400与外壳460相接触的部分(例如：密封圈470可以设置在外壳460的容纳腔465内，并与压力传感器相接触)；和/或，第二密封胶480，第二密封胶480可以设置在连接器与外壳的边沿462相接触的地方。在该实施方式中，通过外壳的容纳腔内的密封圈与压力传感器的底部压合密封，将压力传感器整体包封在外壳内部，使得压力变送器的密封性能更高，在一定程度上提高了产品的可靠性。
以上实施方式仅示出了部分优选的实施方式，需要说明的是，本领域技术人员可以根据实际的需要，选择以下的至少两项：第一密封胶，设置在连接器的空腔和基板的共同的边缘处；密封圈，设置在压力传感器与外壳相接触的部分；第二密封胶，设置在连接器与外壳的边沿相接触的地方。
结合附图1至图7对装配过程进行详细说明。作为一个较优的实施方式，在装配过程中，首先，压力传感器400被设置在连接器450的空腔455内，使得基板100的边缘紧密适配在空腔455的边缘内。然后，将端子(或引线)406连接(例如，通过焊接)到压力传感器400的基板100上的触点105上。之后，第一密封胶457设置在压力传感器400的基板100和空腔455共同的边缘处，将压力传感器400与连接器450整合(集成)在一起，提供了压力传感器与周围环境之间的第一密封。然后，密封圈470可以设置在外壳460的容纳腔465内。连接器450(具有集成的压力传感器400)被设置在外壳460的容纳腔465内，使得压力传感器压紧(压紧并紧靠)密封圈470，同时外壳460的边沿462压接在连接器450上(如图7所示)，从而将连接器450安装到外壳460上，并将压力传感器400整体包封在外壳460的容纳腔465内。用这种方式，提供了压力传感器400与周围环境之间的第二密封。最后，第二密封胶480设置在外壳460的边沿处连接连接器450(例如，在外壳460在连接器450上的压接处)。第二密封胶480提供了压力传感器与周围环境之间的第三密封。
通过上述实施例，提供了一种压力传感器及压力变送器。通过该技术方案，达到了如下技术效果：将压敏元件和信号调制模块整合成一个独立的压力元件，使得该压力元件，使用安装更加简单，整体体积更加小巧紧凑，提高了产品可靠性；并且，集成为一个独立压力元件，压力元件内部的零件位置也相对固定，避免了使用柔性印制电路板和绝缘线材等位置不固定的零件；同时，相对于常规方案应用于压力变送器中时，该实施方式下，不需要将压力传感器与工作介质做物理隔离，简化了设计及工艺。
需要说明的是，这些技术效果并不是上述所有的实施方式所具有的，有些技术效果是某些优选实施方式才能取得的。
以上所述仅为本实用新型的较佳实施例而已，并非用于限定本实用新型的保护范围。凡在本实用新型的精神和原则之内所作的任何修改、等同替换、改进等，均包含在本实用新型的保护范围内。

Claims (10)

1.一种压力传感器，其特征在于，包括：
压敏元件，所述压敏元件为硅压阻式；
信号调制模块，用于将所述压敏元件的输出信号调制成预设格式的信号；
所述压敏元件和所述信号调制模块集成在同一个基板上。
2.根据权利要求1所述的压力传感器，其特征在于，所述压敏元件和所述信号调制模块通过表面贴装的方式设置在所述基板上。
3.根据权利要求2所述的压力传感器，其特征在于，
所述压敏元件与所述信号调制模块通过键合方式相互连接；或者，
所述压敏元件与所述信号调制模块通过所述基板上的印制电路相互连接。
4.根据权利要求3所述的压力传感器，其特征在于，
所述基板包括：陶瓷基板。
5.根据权利要求4所述的压力传感器，其特征在于，
所述陶瓷基板包括：氧化铝陶瓷基板或氧化锆陶瓷基板。
6.根据权利要求1至5中任一项所述的压力传感器，其特征在于，还包括：
保护罩，设置在所述基板上，用于保护所述信号调制模块，和/或所述压敏元件。
7.根据权利要求1至5中任一项所述的压力传感器，其特征在于，还包括：
负载，设置在所述信号调制模块和所述压敏元件的电路中。
8.一种压力变送器，其特征在于，包括根据权利要求1至7中任一项所述的压力传感器。
9.根据权利要求8所述的压力变送器，其特征在于，所述压力传感器设置在所述压力变送器的连接器和外壳之间。
10.根据权利要求9所述的压力变送器，其特征在于，还包括以下至少两项：
第一密封胶，设置在所述连接器的空腔和所述基板的共同的边缘处；
密封圈，设置在所述压力传感器与所述外壳相接触的部分；
第二密封胶，设置在所述连接器与所述外壳的边沿相接触的地方。
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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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Family Cites Families (348)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10185734A (ja) * 1996-12-26 1998-07-14 Hokuriku Electric Ind Co Ltd 圧力センサモジュール
US5974893A (en) 1997-07-24 1999-11-02 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
US6144866A (en) 1998-10-30 2000-11-07 Medtronic, Inc. Multiple sensor assembly for medical electric lead
DK0915326T3 (da) 1997-10-10 2002-03-25 Wika Alexander Wiegand Gmbh Fremgangsmåde til fremstilling af en trykmåletransducer samt trykmåletransducer
NO308228B1 (no) 1997-11-26 2000-08-14 Presens As Dynamisk trykksensor
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US5959212A (en) 1998-04-27 1999-09-28 Texas Instruments Incorporated Capacitive pressure transducer having reduced output error
US6422085B1 (en) 1998-07-21 2002-07-23 Endress + Hauser Gmbh + Co. Flush-diaphragm relative pressure sensor
DE59812186D1 (de) 1998-07-24 2004-12-02 Wika Alexander Wiegand Gmbh Verfahren zur Herstellung eines Messsystems für ein Druckmessgerät
DE59813429D1 (de) 1998-12-15 2006-05-04 Wika Alexander Wiegand Gmbh Messsystem für ein Druckmessgerät sowie Druckmessgerät
US6229190B1 (en) 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
DE19859507C2 (de) 1998-12-22 2003-04-24 Wika Alexander Wiegand Gmbh Kunststoffdruckmittler für Halbleiterindustrie
US6255728B1 (en) 1999-01-15 2001-07-03 Maxim Integrated Products, Inc. Rigid encapsulation package for semiconductor devices
US6578427B1 (en) 1999-06-15 2003-06-17 Envec Mess- Und Regeltechnik Gmbh + Co. Capacitive ceramic relative-pressure sensor
US6272927B1 (en) 1999-10-20 2001-08-14 Texas Instruments Incorporated Hermetically sealed pressure sensing device
JP2001133345A (ja) 1999-11-02 2001-05-18 Fuji Koki Corp 圧力センサ
US6453747B1 (en) 2000-01-12 2002-09-24 Peter A. Weise Hermetic pressure transducer
US6272928B1 (en) 2000-01-24 2001-08-14 Kulite Semiconductor Products Hermetically sealed absolute and differential pressure transducer
DE50016091D1 (de) 2000-02-22 2011-05-19 Endress & Hauser Gmbh & Co Kg Drucksensor
TW507073B (en) 2000-03-31 2002-10-21 Tdk Corp Humidity sensor and method for making
DE20007053U1 (de) 2000-04-17 2000-07-27 Wika Alexander Wiegand GmbH & Co, 63911 Klingenberg Druckmessgerät
US6564642B1 (en) 2000-11-02 2003-05-20 Kavlico Corporation Stable differential pressure measuring system
FI112644B (fi) 2000-11-10 2003-12-31 Vaisala Oyj Pintamikromekaaninen absoluuttipaineanturi ja menetelmä sen valmistamiseksi
US6487911B1 (en) 2000-11-21 2002-12-03 Texas Instruments Incorporated Pressure sensor apparatus
US6505398B2 (en) 2000-12-04 2003-01-14 Kavlico Corporation Very high pressure miniature sensing and mounting technique
US6420201B1 (en) 2001-01-03 2002-07-16 Amkor Technology, Inc. Method for forming a bond wire pressure sensor die package
US6432737B1 (en) 2001-01-03 2002-08-13 Amkor Technology, Inc. Method for forming a flip chip pressure sensor die package
US6441503B1 (en) 2001-01-03 2002-08-27 Amkor Technology, Inc. Bond wire pressure sensor die package
US6687642B2 (en) 2001-01-26 2004-02-03 Texas Instruments Incorporated Condition responsive sense system and method
US6581468B2 (en) 2001-03-22 2003-06-24 Kavlico Corporation Independent-excitation cross-coupled differential-pressure transducer
DE20107260U1 (de) 2001-04-27 2001-08-16 WIKA Alexander Wiegand GmbH & Co. KG, 63911 Klingenberg Übertragungsflüssigkeit für die Druckmesstechnik und deren Anwendung
DE10133745A1 (de) 2001-07-11 2003-01-23 Endress & Hauser Gmbh & Co Kg Drucksensor und Verfahren zu dessen Betrieb
US6672171B2 (en) 2001-07-16 2004-01-06 Mks Instruments, Inc. Combination differential and absolute pressure transducer for load lock control
JP4044307B2 (ja) 2001-08-01 2008-02-06 株式会社山武 圧力センサ
US6584853B2 (en) 2001-10-12 2003-07-01 Kavlico Corporation Corrosion-proof pressure transducer
JP3752444B2 (ja) 2001-11-16 2006-03-08 株式会社日立製作所 圧力検出装置
US6806722B2 (en) 2001-12-07 2004-10-19 Samsung Electronics Co., Ltd. Polymer-type humidity sensor
US7057247B2 (en) 2001-12-12 2006-06-06 Kulite Semiconductor Products, Inc. Combined absolute differential transducer
DE10200780A1 (de) 2002-01-10 2003-07-24 Endress & Hauser Gmbh & Co Kg Relativdrucksensor
US6688182B2 (en) 2002-01-31 2004-02-10 Kulite Semiconductor Products, Inc. Static pitot transducer
JP2003232693A (ja) 2002-02-08 2003-08-22 Denso Corp 圧力センサ
DE10215621A1 (de) * 2002-04-09 2003-10-30 Rudolf Ehwald Vorrichtung und Verfahren zur Druckmessung in einem abgeschlossenen Raum
US6647794B1 (en) 2002-05-06 2003-11-18 Rosemount Inc. Absolute pressure sensor
JP3824964B2 (ja) 2002-05-17 2006-09-20 長野計器株式会社 絶対圧型圧力センサ
US6715357B2 (en) 2002-07-10 2004-04-06 Texas Instruments Incorporated Hermetic pressure transducer
US6672170B1 (en) 2002-07-10 2004-01-06 Texas Instruments Incorporated Hermetic pressure transducer
JP3704685B2 (ja) 2002-07-29 2005-10-12 株式会社山武 静電容量センサ
DE10234754A1 (de) 2002-07-30 2004-02-19 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor mit symmetrischem Trennkörperfehler
US7465425B1 (en) 2002-09-09 2008-12-16 Yizhong Sun Sensor and method for detecting analytes in fluids
EP1411349B1 (de) 2002-10-18 2005-12-21 Siemens Schweiz AG Feuchtigkeitsfühler mit kapazitivem Feuchte-Messelement und Verfahren zur Erfassung der Luftfeuchtigkeit
ATE325338T1 (de) 2002-10-18 2006-06-15 Siemens Schweiz Ag Verfahren zur erfassung der luftfeuchtigkeit mit kapazitivem feuchte-messelement
AU2003287977A1 (en) 2002-11-05 2004-06-07 Endress + Hauser Gmbh + Co. Kg Relative pressure sensor having an atmosphere-side damper
DE10252023B3 (de) 2002-11-06 2004-07-15 Metallux Gmbh Drucksensor
US6742395B1 (en) 2002-12-20 2004-06-01 Texas Instruments Incorporated Hermetic pressure transducer
US6715360B1 (en) 2003-02-19 2004-04-06 Fisher Controls International, Llc Gauge pressure sensor for hazardous applications
JP3915715B2 (ja) 2003-03-07 2007-05-16 株式会社デンソー 半導体圧力センサ
EP1601942B1 (en) 2003-03-10 2008-05-07 Danfoss A/S Silicon pressure sensor with decreased pressure equalization between measured pressure and reference chamber
JP3855950B2 (ja) 2003-03-19 2006-12-13 株式会社デンソー 容量式湿度センサ
US6907790B2 (en) 2003-03-21 2005-06-21 Rosemount Inc. Gage pressure output from an absolute pressure measurement device
DE10316033A1 (de) 2003-04-07 2004-10-21 Endress + Hauser Gmbh + Co. Kg Relativdruckmeßumformer
DE10319417A1 (de) 2003-04-29 2004-11-18 Endress + Hauser Gmbh + Co. Kg Druckaufnehmer mit Temperaturkompensation
JP4020014B2 (ja) * 2003-05-26 2007-12-12 株式会社ジェイテクト 圧力センサ
US7210333B2 (en) 2003-05-30 2007-05-01 Ngk Spark Plug Co., Ltd. Humidity sensor and method of using the humidity sensor
ATE310236T1 (de) 2003-06-27 2005-12-15 Wika Alexander Wiegand Gmbh Drucksensor
US7284440B2 (en) 2003-07-24 2007-10-23 Kulite Semiconductor Products, Inc. Line pressure compensated differential pressure transducer assembly
US7421905B2 (en) * 2003-09-04 2008-09-09 Baker Hughes Incorporated Optical sensor with co-located pressure and temperature sensors
EP1942324B1 (en) * 2003-09-04 2012-04-11 Baker Hughes Incorporated Optical sensor with co-located pressure and temperature sensors
US7111518B1 (en) 2003-09-19 2006-09-26 Silicon Microstructures, Inc. Extremely low cost pressure sensor realized using deep reactive ion etching
DE10343521A1 (de) 2003-09-19 2005-04-21 Beru Ag Druckmessglühkerze für einen Dieselmotor
US6781814B1 (en) 2003-11-03 2004-08-24 Texas Instruments Incorporated Capacitive pressure transducer
US7031863B2 (en) 2003-12-22 2006-04-18 Texas Instruments Incorporated Variable condition responsive sense system and method
JP3976015B2 (ja) * 2004-02-04 2007-09-12 株式会社デンソー 圧力センサ
DE102004012593A1 (de) 2004-03-12 2005-09-29 Robert Bosch Gmbh Sensormodul
CN1961209A (zh) 2004-04-02 2007-05-09 蒂莫西·卡明斯 集成电子传感器
US7028552B2 (en) 2004-05-17 2006-04-18 Kavlico Corporation Reliable piezo-resistive pressure sensor
US7028551B2 (en) 2004-06-18 2006-04-18 Kavlico Corporation Linearity semi-conductive pressure sensor
US7073375B2 (en) 2004-07-02 2006-07-11 Honeywell International Inc. Exhaust back pressure sensor using absolute micromachined pressure sense die
JP2006023115A (ja) 2004-07-06 2006-01-26 Surpass Kogyo Kk 絶対圧形圧力センサの製造方法および製造装置
US7007552B2 (en) 2004-07-26 2006-03-07 Texas Instruments Incorporated Multi-channel pressure sensing apparatus
JP4341506B2 (ja) 2004-08-20 2009-10-07 株式会社デンソー 湿度センサおよび湿度検出機能を有する複合センサ
EP1810013B1 (en) 2004-10-18 2012-06-13 Senmatic A/S A humidity sensor and a method for manufacturing the same
US6923069B1 (en) 2004-10-18 2005-08-02 Honeywell International Inc. Top side reference cavity for absolute pressure sensor
JP4455286B2 (ja) 2004-11-09 2010-04-21 株式会社日本自動車部品総合研究所 静電容量式湿度センサ
US7231815B2 (en) 2004-12-02 2007-06-19 Construction Technology Laboratories, Inc. Relative humidity probe for concrete
US7499604B1 (en) 2004-12-12 2009-03-03 Burns David W Optically coupled resonant pressure sensor and process
US7290453B2 (en) 2004-12-28 2007-11-06 Amnon Brosh Composite MEMS pressure sensor configuration
US7836910B2 (en) 2004-12-29 2010-11-23 Rain Bird Corporation Soil moisture sensor and controller
US7000478B1 (en) 2005-01-31 2006-02-21 Texas Instruments Incorporated Combined pressure and temperature transducer
US7355718B2 (en) 2005-04-04 2008-04-08 North Carolina Agricultural And Technical State University Pressure sensor having two materials with different coefficients of thermal expansion configured to reduce temperature dependence
US7635091B2 (en) 2005-04-21 2009-12-22 Honeywell International Inc. Humidity sensor formed on a ceramic substrate in association with heating components
JP4609173B2 (ja) 2005-04-22 2011-01-12 株式会社デンソー 容量式湿度センサおよびその製造方法
US7243552B2 (en) 2005-05-09 2007-07-17 Delphi Technologies, Inc. Pressure sensor assembly
USD543476S1 (en) 2005-07-01 2007-05-29 Wika Alexander Wiegand Gmbh & Co. Kg Pressure gage with axial connector
USD545707S1 (en) 2005-07-01 2007-07-03 Wika Alexander Wiegand Gmbh & Co. Kg Pressure gage with radial connector
USD559716S1 (en) 2005-07-01 2008-01-15 Wika Alexander Wiegand Gmbh & Co. Kg Pressure measurement cartridge for a low and vacuum pressure gas pressure gage
EP1910793B1 (en) 2005-07-29 2010-12-29 Sensata Technologies, Inc. Compensation arrangement and method for operation thereof
US7162926B1 (en) 2005-08-04 2007-01-16 Kavlico Corporation Lead embedded pressure sensor
JP4674529B2 (ja) 2005-11-07 2011-04-20 株式会社デンソー 湿度センサ装置及びその製造方法
US7597005B2 (en) 2005-11-10 2009-10-06 Honeywell International Inc. Pressure sensor housing and configuration
EP2270095A3 (en) 2005-11-25 2014-09-10 Dublin Institute of Technology A holographic sensor
US7467891B2 (en) 2005-11-29 2008-12-23 Sensata Technologies, Inc. Sensor arrangement for measuring a pressure and a temperature in a fluid
DE102005060855A1 (de) 2005-12-20 2007-06-28 Robert Bosch Gmbh Mikromechanischer kapazitiver Druckwandler und Herstellungsverfahren
EP1977207B1 (en) 2006-01-10 2017-04-12 Kyungdong One Corporation Accurate pressure sensor
US7380459B1 (en) 2006-01-17 2008-06-03 Irvine Sensors Corp. Absolute pressure sensor
FR2897937B1 (fr) 2006-02-24 2008-05-23 Commissariat Energie Atomique Capteur de pression a jauges resistives
JP4770530B2 (ja) 2006-03-13 2011-09-14 株式会社デンソー 容量式湿度センサ
DE112007000980A5 (de) 2006-04-24 2009-03-19 Wika Alexander Wiegand Gmbh & Co. Kg Messinstrument in Zweileitertechnik
US7515039B2 (en) 2006-06-05 2009-04-07 Kavlico Corporation Method and apparatus for tire pressure monitoring
US7275444B1 (en) 2006-07-13 2007-10-02 Kulite Semiconductor Products, Inc. Pressure transducer apparatus adapted to measure engine pressure parameters
DE102006033467B4 (de) 2006-07-19 2010-03-25 Continental Automotive Gmbh Druckerfassungsvorrichtung
US7487681B1 (en) 2006-08-06 2009-02-10 Silicon Microstructures Inc. Pressure sensor adjustment using backside mask
DE102006050451A1 (de) 2006-10-20 2008-04-24 Endress + Hauser Gmbh + Co. Kg Druckmessgerät
FR2908882B1 (fr) 2006-11-17 2008-12-26 Thales Sa Dispositif de mesure de la pression totale d'un ecoulement et procede mettant en oeuvre le dispositif
DE102006056172A1 (de) 2006-11-27 2008-05-29 Endress + Hauser Gmbh + Co. Kg Elastischer Keramikkörper und Drucksensor mit einem elastischen Keramikkörper
US8661910B2 (en) 2007-01-19 2014-03-04 Ipg, Llc Capacitive sensor
DE102007003544A1 (de) 2007-01-24 2008-07-31 Robert Bosch Gmbh Verfahren zur Herstellung eines Bauteils und Sensorelement
US8324913B2 (en) 2007-04-05 2012-12-04 Micronas Gmbh Moisture sensor and method for measuring moisture of a gas-phase medium
JP4386295B2 (ja) 2007-04-20 2009-12-16 株式会社日本自動車部品総合研究所 湿度センサ
US7967965B2 (en) 2007-05-11 2011-06-28 Honeywell International Inc. Gas sensor
DE102007026243A1 (de) 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
US7974503B2 (en) 2007-06-22 2011-07-05 National Chiao Tung University Fiber grating sensor
US7493822B2 (en) 2007-07-05 2009-02-24 Honeywell International Inc. Small gauge pressure sensor using wafer bonding and electrochemical etch stopping
JP4930254B2 (ja) * 2007-08-01 2012-05-16 株式会社デンソー 半導体装置
US8132457B2 (en) 2007-08-09 2012-03-13 Northern Illinois University Nano-porous alumina sensor
US7683636B2 (en) 2007-10-26 2010-03-23 Honeywell International Inc. Structure for capacitive balancing of integrated relative humidity sensor
WO2009070888A1 (en) 2007-12-07 2009-06-11 Esi Environmental Sensors Inc. Moisture sensor
US7762140B2 (en) 2008-01-10 2010-07-27 Sensata Technologies, Inc. Combined fluid pressure and temperature sensor apparatus
US7578194B1 (en) 2008-02-11 2009-08-25 Sensata Technologies, Inc. Differential fluid pressure measurement apparatus
US7895897B2 (en) 2008-03-03 2011-03-01 Wika Alexander Wiegand Gmbh & Co. Kg Sensor assembly and use of a sensor assembly
US7924028B2 (en) 2008-03-20 2011-04-12 Honeywell International Inc. Method and system for adjusting characteristics of integrated relative humidity sensor
US7698950B2 (en) 2008-04-04 2010-04-20 Wika Alexander Wiegand Gmbh & Co. Kg Pressure sensor assembly for measuring absolute pressure
US7775118B2 (en) 2008-04-24 2010-08-17 Custom Sensors & Technologies, Inc. Sensor element assembly and method
DE102008021091A1 (de) 2008-04-28 2009-10-29 Epcos Ag Drucksensor
US8217475B2 (en) 2008-05-15 2012-07-10 Custom Sensors & Technologies, Inc. Backside controlled MEMS capacitive sensor and interface and method
US7698951B2 (en) 2008-05-27 2010-04-20 Honeywell International Inc. Pressure-sensor apparatus
US7779701B2 (en) 2008-06-02 2010-08-24 Sensata Technologies, Inc. Pressure sensor apparatus
US8082807B2 (en) 2008-06-02 2011-12-27 Custom Sensors & Technologies, Inc. Sensor assembly and method
DE102008002312A1 (de) 2008-06-09 2009-12-10 Wika Alexander Wiegand Gmbh & Co. Kg Manometer
US8024970B2 (en) 2008-06-12 2011-09-27 Honeywell International Inc. Passive humidity sensors and methods for temperature adjusted humidity sensing
ITTO20080483A1 (it) * 2008-06-19 2009-12-20 Eltek Spa Dispositivo sensore di pressione
ITTO20080485A1 (it) * 2008-06-19 2009-12-20 Eltek Spa Dispositivo sensore di pressione
US7673518B2 (en) 2008-06-19 2010-03-09 Kulite Semiconductor Products, Inc. Compact absolute and gage pressure transducer having a mounting apparatus for accurately positioning and aligning a leadless semiconductor chip on an associated header
ITTO20080484A1 (it) * 2008-06-19 2009-12-20 Eltek Spa Dispositivo sensore di pressione
EP2138820B1 (en) 2008-06-25 2016-09-21 Sensata Technologies, Inc. A piezoresistive pressure-measuring plug for a combustion engine
FR2934051B1 (fr) 2008-07-16 2011-12-09 Commissariat Energie Atomique Detecteur d'humidite capacitif a dielectrique hydrophile nanoporeux
DE102008040557B4 (de) 2008-07-18 2023-06-01 Wika Alexander Wiegand Se & Co. Kg Druckmessgerät
CN101368863B (zh) * 2008-07-25 2013-02-20 陈建海 压力传感器
US7992441B2 (en) 2008-07-31 2011-08-09 Sensata Technologies, Inc. Pressure sensor for measuring pressure in a medium
US8643127B2 (en) 2008-08-21 2014-02-04 S3C, Inc. Sensor device packaging
DE102008041942A1 (de) 2008-09-10 2010-03-11 Robert Bosch Gmbh Sensoranordnung, Verfahren zum Betrieb einer Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung
US7866215B2 (en) 2008-10-02 2011-01-11 Kulite Semiconductor Products, Inc. Redundant self compensating leadless pressure sensor
US8020448B2 (en) 2008-10-21 2011-09-20 GM Global Technology Operations LLC Pressure sensor with nonlinear characteristic curve
DE102008043175A1 (de) 2008-10-24 2010-04-29 Endress + Hauser Gmbh + Co. Kg Relativdrucksensor
KR101093612B1 (ko) 2008-11-12 2011-12-15 전자부품연구원 정전용량형 습도센서 및 그 제조방법
US7775117B2 (en) 2008-12-11 2010-08-17 Kulite Semiconductor Products, Inc. Combined wet-wet differential and gage transducer employing a common housing
CN102318025B (zh) 2009-01-30 2015-11-25 威卡亚历山大威甘德股份有限公司 用于确定绝缘室或开关柜中的sf6气体的填充量的测量设备及相应的方法
US7775119B1 (en) 2009-03-03 2010-08-17 S3C, Inc. Media-compatible electrically isolated pressure sensor for high temperature applications
DE102009001892A1 (de) 2009-03-26 2010-09-30 Endress + Hauser Gmbh + Co. Kg Drucksensor
WO2010113712A1 (ja) 2009-03-31 2010-10-07 アルプス電気株式会社 容量型湿度センサ及びその製造方法
US7819014B1 (en) 2009-04-23 2010-10-26 Rosemount Inc. Capacitive gage pressure sensor with vacuum dielectric
IT1394791B1 (it) 2009-05-20 2012-07-13 Metallux Sa Sensore di pressione
US8215176B2 (en) 2009-05-27 2012-07-10 Continental Automotive Systems, Inc. Pressure sensor for harsh media sensing and flexible packaging
US9340414B2 (en) 2009-07-07 2016-05-17 MCube Inc. Method and structure of monolithically integrated absolute pressure sensor
EP2275805A1 (en) 2009-07-16 2011-01-19 Acreo AB Moister sensor
DE102009028488A1 (de) 2009-08-12 2011-02-17 Endress + Hauser Gmbh + Co. Kg Relativdrucksensor
US8235592B2 (en) 2009-10-07 2012-08-07 Wika Alexander Wiegand Se & Co. Kg Gauge on a pipe section
EP2315013B1 (de) 2009-10-21 2014-06-18 Micronas GmbH Feuchtesensor
EP2494343A2 (de) 2009-10-30 2012-09-05 Peter Hagl Sensorvorrichtung
US8082797B2 (en) 2009-11-11 2011-12-27 Honeywell International Inc. Pressure sensor assembly
US8186226B2 (en) 2009-12-09 2012-05-29 Honeywell International Inc. Pressure sensor with on-board compensation
DE102009054689A1 (de) * 2009-12-15 2011-06-16 Robert Bosch Gmbh Verfahren zum Herstellen einer Drucksensoranordnung sowie Drucksensoranordnung
US8371160B2 (en) 2009-12-16 2013-02-12 Meggitt (San Juan Capistrano), Inc. Weatherized direct-mount absolute pressure sensor
WO2011076124A1 (en) 2009-12-22 2011-06-30 Nano And Advanced Materials Institute Limited Rapid response relative humidity sensor using anodic aluminum oxide film
DE102010002157A1 (de) 2010-02-19 2011-08-25 Endress + Hauser GmbH + Co. KG, 79689 Druckmessaufnehmer und Differenzdruckmessaufnehmer
US8393222B2 (en) 2010-02-27 2013-03-12 Codman Neuro Sciences Sárl Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time
DE102010002463A1 (de) 2010-03-01 2011-09-01 Robert Bosch Gmbh Mikromechanisches Drucksensorelement und Verfahren zu dessen Herstellung
US8763466B2 (en) 2010-04-08 2014-07-01 Endress + Hauser Gmbh + Co. Kg Gauge pressure sensor
US8256300B2 (en) 2010-05-27 2012-09-04 Sensata Technologies, Inc. Pressure sensor
EP2395336B1 (en) 2010-06-08 2018-08-01 Sensata Technologies, Inc. Hermetically sealed pressure sensing device
US8813562B2 (en) 2010-06-25 2014-08-26 Guy Prud'Homme Relative humidity sensor apparatus
US8618620B2 (en) 2010-07-13 2013-12-31 Infineon Technologies Ag Pressure sensor package systems and methods
US8264074B2 (en) 2010-09-10 2012-09-11 General Electric Company Device for use as dual-sided sensor package
US9007050B2 (en) 2010-09-17 2015-04-14 The Toro Company Soil moisture sensor with improved enclosure
JP5547296B2 (ja) 2010-10-04 2014-07-09 アルプス電気株式会社 湿度検出センサ及びその製造方法
EP2444786B1 (en) 2010-10-20 2013-07-17 Sensata Technologies, Inc. A pressure measuring glow plug for a combustion engine
DE102010050340A1 (de) 2010-11-05 2012-05-10 Wika Alexander Wiegand Se & Co. Kg Messgerät mit Zusatzanzeigeeinrichtung für Überlasterreichung
US8616065B2 (en) 2010-11-24 2013-12-31 Honeywell International Inc. Pressure sensor
GB201021033D0 (en) 2010-12-13 2011-01-26 Verdirrigation Ltd An irrigation apparatus and a sensor therefor
US7998777B1 (en) 2010-12-15 2011-08-16 General Electric Company Method for fabricating a sensor
US8191425B1 (en) 2010-12-17 2012-06-05 Kulite Semiconductor Products, Inc. Gage pressure transducer and method for making the same
US9291514B2 (en) 2010-12-27 2016-03-22 Epcos Ag Pressure sensor having a compressible element
DE102011004577B4 (de) 2011-02-23 2023-07-27 Robert Bosch Gmbh Bauelementträger, Verfahren zur Herstellung eines solchen Bauelementträgers sowie Bauteil mit einem MEMS-Bauelement auf einem solchen Bauelementträger
DE102011004722A1 (de) 2011-02-25 2012-08-30 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle
FR2972261B1 (fr) 2011-03-03 2013-04-12 Commissariat Energie Atomique Capteur d'humidite comprenant comme couche absorbante d'humidite une couche polymerique comprenant un melange de polyamides
US8662200B2 (en) * 2011-03-24 2014-03-04 Merlin Technology Inc. Sonde with integral pressure sensor and method
US8590387B2 (en) 2011-03-31 2013-11-26 DePuy Synthes Products, LLC Absolute capacitive micro pressure sensor
KR101322354B1 (ko) 2011-04-07 2013-10-25 한국과학기술원 습도 센서, 습도 센싱 방법 및 이를 위한 트랜지스터
EP2508874B1 (en) 2011-04-08 2019-06-05 ams international AG Capacitive sensor, integrated circuit, electronic device and method
JP5516505B2 (ja) 2011-05-25 2014-06-11 株式会社デンソー 容量式湿度センサ及びその製造方法
JP5488534B2 (ja) 2011-06-06 2014-05-14 株式会社デンソー 湿度センサ及びその製造方法
JP5908069B2 (ja) 2011-06-08 2016-04-26 スリーエム イノベイティブ プロパティズ カンパニー 湿度センサ及びそのためのセンサ素子
US8365607B2 (en) 2011-06-30 2013-02-05 Sensata Technologies, Inc. Anti-slip grooves in a crimped pressure sensor assembly
DE102011078557A1 (de) 2011-07-01 2013-01-03 Endress + Hauser Gmbh + Co. Kg Verfahren zum Betreiben eines Absolut- oder Relativdrucksensors mit einem kapazitiven Wandler
FR2977319B1 (fr) 2011-07-01 2014-03-14 Commissariat Energie Atomique Dispositif de mesure de pression a sensiblite optimisee
EP2554968B1 (en) 2011-08-01 2019-01-16 Sensata Technologies, Inc. Sensor system for differential pressure measurement
US8528409B2 (en) 2011-08-09 2013-09-10 Honeywell International Inc. High temperature gage pressure sensor
US8935961B2 (en) 2011-08-18 2015-01-20 Sensata Technologies, Inc. Combination pressure/temperature in a compact sensor assembly
US8770034B2 (en) 2011-09-06 2014-07-08 Honeywell International Inc. Packaged sensor with multiple sensors elements
JP2013057616A (ja) 2011-09-09 2013-03-28 Azbil Corp 環境センサ
WO2013043148A1 (en) 2011-09-19 2013-03-28 Hewlett-Packard Development Company, L.P. Sensing water vapour
US9027400B2 (en) 2011-12-02 2015-05-12 Stmicroelectronics Pte Ltd. Tunable humidity sensor with integrated heater
US8739623B2 (en) 2012-03-09 2014-06-03 The University Of Kentucky Research Foundation Moisture sensors on conductive substrates
EP2657691B1 (de) 2012-04-25 2018-08-29 E+E Elektronik Ges.m.b.H. Feuchtesensor-Anordnung
KR101477341B1 (ko) 2012-05-11 2015-01-06 포항공과대학교 산학협력단 발색 습도 센서
US9116060B2 (en) 2012-05-23 2015-08-25 Hach Company Auto-zeroing absolute pressure sensor
CN104487831B (zh) 2012-05-29 2016-09-07 3M创新有限公司 湿度传感器和传感器元件
FR2991456B1 (fr) 2012-06-04 2023-02-10 Commissariat Energie Atomique Capteur d'humidite capacitif a electrode de graphene
DE102012210752A1 (de) 2012-06-25 2014-01-23 Robert Bosch Gmbh Druckerfassungsmodul sowie Drucksensorvorrichtung mit einem solchen Druckerfassungsmodul
US8820170B2 (en) 2012-09-14 2014-09-02 Sensata Technologies, Inc. Pressure sensor
US9027410B2 (en) 2012-09-14 2015-05-12 Sensata Technologies, Inc. Hermetically glass sealed pressure sensor
EP2730904A1 (en) 2012-11-12 2014-05-14 Sensata Technologies, Inc. A pressure-measuring plug for a combustion engine
EP2730905B1 (en) 2012-11-12 2019-01-02 Sensata Technologies, Inc. A pressure-measuring plug for a combustion engine
DE102012111001A1 (de) 2012-11-15 2014-05-15 Endress + Hauser Gmbh + Co. Kg Dichtring und Druckmessaufnehmer mit mindestens einem solchen Dichtring
US9310269B2 (en) 2012-11-30 2016-04-12 Sensata Technologies, Inc. Analog front-end compensation
US9709461B2 (en) 2012-11-30 2017-07-18 Sensata Technologies, Inc. Method of integrating a temperature sensing element
DE102013208537A1 (de) * 2012-12-27 2014-07-03 Robert Bosch Gmbh Drucksensoranordnung sowie Verfahren zum Montieren einer Drucksensoranordnung
US9304098B2 (en) 2013-02-04 2016-04-05 Veris Industries, Llc Capacitive humidity sensor with hysteresis compensation
US9746438B2 (en) 2013-02-06 2017-08-29 Veris Industries, Llc Humidity sensor with temperature compensation
DE102013202090A1 (de) 2013-02-08 2014-08-14 Wika Alexander Wiegand Se & Co. Kg Druckmessgerät
DE212014000016U1 (de) 2013-02-18 2015-08-11 Illinois Tool Works Inc. Motorkrümmer-Sensoranordnung
US8878316B2 (en) 2013-02-22 2014-11-04 Continental Automotive Systems, Inc. Cap side bonding structure for backside absolute pressure sensors
DE102013101936A1 (de) 2013-02-27 2014-08-28 Endress + Hauser Gmbh + Co. Kg Drucksensor
US9146164B2 (en) 2013-03-07 2015-09-29 Sensata Technologies, Inc. Pressure transducer substrate with self alignment feature
US10175188B2 (en) 2013-03-15 2019-01-08 Robert Bosch Gmbh Trench based capacitive humidity sensor
EP2781903B1 (en) 2013-03-20 2016-05-25 Sensata Technologies, Inc. A measuring plug and method for assembling a measuring plug
JP5991246B2 (ja) 2013-03-25 2016-09-14 ブラザー工業株式会社 センサ装置、同センサ装置を備えた画像形成装置、及び湿度検出方法
US9234859B2 (en) 2013-03-28 2016-01-12 Stmicroelectronics S.R.L. Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology
US9310266B2 (en) 2013-05-08 2016-04-12 Sensata Technologies, Inc. Strain gauge pressure sensor
DE102013209248B4 (de) 2013-05-17 2021-02-11 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
EP2808665B1 (en) 2013-05-28 2019-02-20 Sensata Technologies, Inc. A measuring plug
WO2014191619A1 (en) 2013-05-30 2014-12-04 Vaisala Oyj A dual gas sensor structure and measurement method
US9285334B2 (en) 2013-06-06 2016-03-15 Zhi David Chen Hybrid dielectric moisture sensors
DE102013211378B4 (de) 2013-06-18 2021-05-20 Robert Bosch Gmbh Mikromechanische Feuchtesensorvorrichtung und entsprechendes Herstellungsverfahren sowie mikromechanische Sensoranordnung
US10739213B2 (en) 2013-07-10 2020-08-11 Hitachi Automotive Systems, Ltd. Temperature and humidity sensor
EP2824438A1 (en) 2013-07-12 2015-01-14 Siemens Aktiengesellschaft Pressure sensor
US9546922B2 (en) 2013-08-09 2017-01-17 Continental Automotive Systems, Inc. Absolute pressure sensor with improved cap bonding boundary
CN105452853B (zh) 2013-08-13 2018-01-30 株式会社村田制作所 温湿度传感器
US9671359B2 (en) 2013-08-27 2017-06-06 Council Of Scientific & Industrial Research Resistive type humidity sensor based on porous magnesium ferrite pellet
DE102013217349B4 (de) 2013-08-30 2024-06-13 Robert Bosch Gmbh Mikromechanische Sensoranordnung und entsprechendes Herstellungsverfahren
CN105556295A (zh) 2013-08-30 2016-05-04 株式会社村田制作所 气体传感器、气体传感器的制造方法、以及气体浓度的检测方法
US9562796B2 (en) 2013-09-06 2017-02-07 Illinois Tool Works Inc. Absolute and differential pressure transducer
KR20150028929A (ko) 2013-09-06 2015-03-17 매그나칩 반도체 유한회사 정전용량형 습도센서
US9470593B2 (en) 2013-09-12 2016-10-18 Honeywell International Inc. Media isolated pressure sensor
KR101521346B1 (ko) 2013-10-10 2015-05-18 박세용 보드 걸이용 밸트
US9423315B2 (en) 2013-10-15 2016-08-23 Rosemount Aerospace Inc. Duplex pressure transducers
FR3012604B1 (fr) 2013-10-25 2017-03-03 Auxitrol Sa Capteur de pression comprenant une structure de controle d'une couche d'adhesif resistante aux variations de temperatures
US9568384B1 (en) 2013-10-30 2017-02-14 Remote Industrial Sensor Company LLC Variable volume enclosure to terminate vented pressure transducers
US9557237B2 (en) 2013-11-18 2017-01-31 Sensata Technologies, Inc. MEMS pressure sensor field shield layout for surface charge immunity in oil filled packaging
US9401601B2 (en) 2013-12-03 2016-07-26 Sensata Technologies, Inc. Circuit designs for induced transient immunity
DE102013114608A1 (de) 2013-12-20 2015-07-09 Endress + Hauser Gmbh + Co. Kg Relativdrucksensor
USD724981S1 (en) 2013-12-20 2015-03-24 Wika Alexander Wiegand Se & Co. Kg Electronic pressure transducer with output display
US9383283B2 (en) 2014-01-16 2016-07-05 Sensata Technologies, Inc. Pressure transducer with capacitively coupled source electrode
US9470594B2 (en) 2014-01-17 2016-10-18 Sensata Technologies, Inc. Differential pressure sensor with dual output using a double-sided capacitive sensing element
DE102014204348A1 (de) 2014-03-10 2015-09-10 Wika Alexander Wiegand Se & Co. Kg Messelement aus stahl mit gehärteter randzone
US9494477B2 (en) 2014-03-31 2016-11-15 Infineon Technologies Ag Dynamic pressure sensor
EP3128318B1 (en) 2014-04-04 2022-11-09 Hitachi Astemo, Ltd. Humidity detection device
US9494538B2 (en) 2014-04-04 2016-11-15 Deere & Company Agricultural moisture sensor with co-planar electrodes
US9574961B2 (en) 2014-04-09 2017-02-21 Continental Automotive Systems, Inc. Humidity resistant sensors and methods of making same
DE102014119108A1 (de) 2014-04-23 2015-10-29 Endress + Hauser Gmbh + Co. Kg Drucksensor mit einem keramischen Grundkörper
US10359415B2 (en) 2014-05-02 2019-07-23 Rosemount Inc. Single-use bioreactor sensor architecture
US9804113B2 (en) 2014-05-19 2017-10-31 Fiskars Oyj Abp Soil moisture sensor
CN103957498B (zh) 2014-05-21 2017-11-03 苏州敏芯微电子技术股份有限公司 侧面进声的硅麦克风封装结构
DE102014107251A1 (de) 2014-05-22 2015-11-26 Endress + Hauser Gmbh + Co. Kg Druckausgleichselement
US9752999B2 (en) 2014-05-29 2017-09-05 Apple Inc. Moisture ingress sensors
KR102237710B1 (ko) 2014-06-18 2021-04-09 주식회사 해치텍 커패시터형 습도센서
DE102014108780A1 (de) 2014-06-24 2015-12-24 Endress + Hauser Gmbh + Co. Kg Trockenmodul für einen Relativdruckmessaufnehmer
US11111135B2 (en) 2014-07-02 2021-09-07 My01 Ip Holdings Inc. Methods and devices for microelectromechanical pressure sensors
KR102187614B1 (ko) 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
US9557238B2 (en) 2014-07-25 2017-01-31 Ams International Ag Pressure sensor with geter embedded in membrane
US9568388B2 (en) 2014-08-05 2017-02-14 Sensata Technologies, Inc. Small form factor pressure sensor
EP2988122B1 (en) 2014-08-20 2019-04-24 ams international AG Capacitive sensor
US9513242B2 (en) 2014-09-12 2016-12-06 Honeywell International Inc. Humidity sensor
US10054511B2 (en) 2014-10-01 2018-08-21 Sensata Technologies, Inc. Pressure sensor with correction of offset drift in cyclic signal
US9828848B2 (en) 2014-10-09 2017-11-28 Baker Hughes, A Ge Company, Llc Wireless passive pressure sensor for downhole annulus monitoring
DE102014221067A1 (de) 2014-10-16 2016-04-21 Robert Bosch Gmbh Drucksensor zur Erfassung eines Drucks eines fluiden Mediums
US9915577B2 (en) 2014-12-02 2018-03-13 Sensata Technologies, Inc. Case isolated oil filled MEMS pressure sensor
GB2533084A (en) 2014-12-02 2016-06-15 Melexis Tech N V Relative and absolute pressure sensor combined on chip
DE102014118541A1 (de) 2014-12-12 2016-06-16 Endress + Hauser Gmbh + Co. Kg Druckausgleichselement für ein Feldgerät der Automatisierungstechnik
FR3030738B1 (fr) 2014-12-19 2020-03-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur de pression adapte aux mesures de pression en milieu agressif
DE102014119396A1 (de) 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Druckmesseinrichtung
US10161895B2 (en) 2014-12-23 2018-12-25 3M Innovative Properties Company Electronic moisture sensor
EP3241019B1 (en) 2014-12-29 2019-08-07 Robert Bosch GmbH Fabrication method for a nanostructured lanthanum oxide humidity sensor and corresponding sensor device
US20160207762A1 (en) 2015-01-20 2016-07-21 Sigurd Microelectronics Corp. Sensor package structure and method
US9746390B2 (en) 2015-02-26 2017-08-29 Sensata Technologies, Inc. Microfused silicon strain gauge (MSG) pressure sensor package
JP6535185B2 (ja) 2015-03-04 2019-06-26 エイブリック株式会社 湿度センサ
US9903777B2 (en) 2015-03-12 2018-02-27 Sensata Technologies, Inc. Pressure transducer
US9714876B2 (en) 2015-03-26 2017-07-25 Sensata Technologies, Inc. Semiconductor strain gauge
US20160298575A1 (en) 2015-04-02 2016-10-13 Sensata Technologies, Inc. Combined temperature, absolute and differential pressure sensor assembly
GB2539630A (en) 2015-04-09 2016-12-28 Continental automotive systems inc 3D stacked piezoresistive pressure sensor
EP3078964B1 (en) 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US9952111B2 (en) 2015-04-15 2018-04-24 Infineon Technologies Ag System and method for a packaged MEMS device
US9702740B2 (en) 2015-04-17 2017-07-11 Wika Alexander Wiegand Se & Co. Kg Measuring instrument with connecting coupling
US10126260B2 (en) 2015-05-07 2018-11-13 International Business Machines Corporation Moisture detection and ingression monitoring systems and methods of manufacture
CN106197792B (zh) 2015-05-26 2021-01-01 威卡亚力山大维甘德欧洲两合公司 具有监控功能的板簧式压力计
US20160348618A1 (en) 2015-05-26 2016-12-01 Amphenol Thermometrics, Inc. Intake Air Sensor and Sensing Method for Determining Air Filter Performance, Barometric Pressure, and Manifold Pressure of a Combustion Engine
DE102015008098B4 (de) 2015-06-25 2023-03-30 Wika Alexander Wiegand Se & Co. Kg Messgerät mit gespreizter Messwertausgabe
US9766145B2 (en) 2015-07-03 2017-09-19 WIKA Alexander Weigand SE & Co. KG Active diaphragm seal assembly for pressure measurement
US9780554B2 (en) 2015-07-31 2017-10-03 Apple Inc. Moisture sensors
EP2960754A3 (en) 2015-08-06 2016-03-09 Sensirion AG Sensing device
EP3128305B1 (en) 2015-08-07 2019-07-31 Sensata Technologies, Inc. A hermetic pressure sensor
DE102016006771A1 (de) 2015-08-24 2017-03-02 Wika Alexander Wiegand Se & Co. Kg Temperaturkompensiertes Manometer mit Schaltausgang
CN105236343B (zh) 2015-09-07 2017-07-07 苏州敏芯微电子技术有限公司 介质隔离式压力传感器封装结构
US10101230B2 (en) 2015-09-16 2018-10-16 Sensata Technologies, Inc. Reduction of non-linearity errors in automotive pressure sensors
US10459537B2 (en) 2015-09-30 2019-10-29 Stmicroelectronics, Inc. Encapsulated pressure sensor
EP3150999B1 (en) 2015-10-01 2017-12-13 Honeywell International Inc. Relative humidity sensor and method of forming relative humidity sensor
US9909947B2 (en) 2015-11-13 2018-03-06 Sensata Technologies, Inc. Pressure sensor comprising a tip secured to a port
DE102016012173A1 (de) 2015-11-17 2017-05-18 Wika Alexander Wiegand Se & Co. Kg Druckmesssystem mit selbstschliessender Drossel
EP3173760A1 (de) 2015-11-30 2017-05-31 VEGA Grieshaber KG Relativdrucksensor
US10171893B2 (en) 2015-12-18 2019-01-01 Archimedes Controls Corp. Battery-powered wireless long life temperature and humidity sensor module
US10060820B2 (en) 2015-12-22 2018-08-28 Continental Automotive Systems, Inc. Stress-isolated absolute pressure sensor
US10215655B2 (en) * 2015-12-31 2019-02-26 Honeywell International Inc. Pressure sensor assembly
US9804048B2 (en) 2016-01-20 2017-10-31 Rosemount Aerospace Inc. Pseudo differential pressure sensing bridge configuration
US9638559B1 (en) 2016-02-10 2017-05-02 Sensata Technologies Inc. System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements
US10101234B2 (en) 2016-02-11 2018-10-16 Rosemount Aerospace, Inc. Open diaphragm harsh environment pressure sensor
US10336606B2 (en) 2016-02-25 2019-07-02 Nxp Usa, Inc. Integrated capacitive humidity sensor
EP3211408B1 (en) 2016-02-29 2019-04-10 Honeywell International Inc. Relative humidity sensor and method
US10247687B2 (en) 2016-03-02 2019-04-02 International Business Machines Corporation Soil moisture probing at variable depth
EP3217167B1 (en) 2016-03-11 2018-05-16 Honeywell International Inc. Humidity sensors with transistor structures and piezoelectric layer
CN107290099B (zh) 2016-04-11 2021-06-08 森萨塔科技公司 压力传感器、用于压力传感器的插塞件和制造插塞件的方法
EP3236226B1 (en) 2016-04-20 2019-07-24 Sensata Technologies, Inc. Method of manufacturing a pressure sensor
DE102016207260B3 (de) 2016-04-28 2017-01-12 Robert Bosch Gmbh Mikromechanische Feuchtesensorvorrichtung und entsprechendes Herstellungsverfahren
JP6910152B2 (ja) 2016-04-28 2021-07-28 ヴィーカ アレクサンダー ヴィーガント ソシエタス ヨーロピア ウント コンパニー コマンディートゲゼルシャフトＷＩＫＡ Ａｌｅｘａｎｄｅｒ Ｗｉｅｇａｎｄ ＳＥ ＆ Ｃｏ．ＫＧ 測定装置及び設備コンポーネントのための仮想機能モジュール
EP3244201B1 (en) 2016-05-13 2021-10-27 Honeywell International Inc. Fet based humidity sensor with barrier layer protecting gate dielectric
US10801985B2 (en) 2016-06-03 2020-10-13 Texas Instruments Incorporated Sensing capacitor with a permeable electrode
EP3260833B1 (en) 2016-06-21 2021-10-27 Melexis Technologies NV Semiconductor sensor assembly for harsh media application
US10247632B2 (en) 2016-06-23 2019-04-02 Honeywell International Oil filled gage reference side protection
CN205785644U (zh) 2016-06-23 2016-12-07 龙微科技无锡有限公司 Mems微压压力传感器
EP3261200B1 (de) 2016-06-23 2020-06-10 WIKA Alexander Wiegand SE & Co. KG Sensorsystem für schaltanlagen
USD803082S1 (en) 2016-06-27 2017-11-21 Wika Alexander Wiegand Se & Co. Kg Pressure sensor
DE102016211513A1 (de) 2016-06-27 2018-01-04 Infineon Technologies Dresden Gmbh Stressentkoppelter piezoresistiver Relativdrucksensor und Verfahren zur Herstellung desselben
US10288513B2 (en) 2016-09-14 2019-05-14 Sensata Technologies Integrated pressure and temperature sensor
US10144636B2 (en) 2016-09-26 2018-12-04 MEAS Switzerland S.a.r.l. Method of manufacturing a sensor
US10548492B2 (en) * 2016-12-08 2020-02-04 MEAS Switzerland S.a.r.l. Pressure sensor
US20200003635A1 (en) * 2017-03-08 2020-01-02 Tohoku University Pressure sensor device and method for manufacturing pressure sensor device
US10247629B2 (en) 2017-04-27 2019-04-02 Continental Automotive Systems, Inc. Stacked or unstacked MEMS pressure sensor with through-hole cap and plurality of chip capacitors
US10598559B2 (en) * 2017-06-29 2020-03-24 Rosemount Inc. Pressure sensor assembly
DE102017213768A1 (de) * 2017-08-08 2019-02-14 Robert Bosch Gmbh Drucksensor und Verfahren zum Herstellen eines Drucksensors
US10495538B2 (en) 2017-09-18 2019-12-03 Measurement Specialties, Inc Modular sensor package having adhesive-free seal to housing

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JP7314370B2 (ja) 2023-07-25
CN115371856A (zh) 2022-11-22
CN112543864B (zh) 2022-08-16
EP4235133A3 (en) 2023-12-27
JP2022169528A (ja) 2022-11-09
US20200209091A1 (en) 2020-07-02
EP4235133A2 (en) 2023-08-30
EP3755982B1 (en) 2024-01-31
EP3755982A1 (en) 2020-12-30
CN115371856B (zh) 2024-06-28
US11047753B2 (en) 2021-06-29
JP2022516096A (ja) 2022-02-24
JP7114814B2 (ja) 2022-08-08

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