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FI20041708A0 - Värähtelevä mikromekaaninen kulmanopeutusanturi - Google Patents

Värähtelevä mikromekaaninen kulmanopeutusanturi

Info

Publication number
FI20041708A0
FI20041708A0 FI20041708A FI20041708A FI20041708A0 FI 20041708 A0 FI20041708 A0 FI 20041708A0 FI 20041708 A FI20041708 A FI 20041708A FI 20041708 A FI20041708 A FI 20041708A FI 20041708 A0 FI20041708 A0 FI 20041708A0
Authority
FI
Finland
Prior art keywords
acceleration sensor
angle acceleration
vibrating micromechanical
micromechanical angle
vibrating
Prior art date
Application number
FI20041708A
Other languages
English (en)
Swedish (sv)
Other versions
FI116543B (fi
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20041708A priority Critical patent/FI116543B/fi
Publication of FI20041708A0 publication Critical patent/FI20041708A0/fi
Application granted granted Critical
Publication of FI116543B publication Critical patent/FI116543B/fi
Priority to US11/318,897 priority patent/US7454971B2/en
Priority to KR1020077016091A priority patent/KR100936638B1/ko
Priority to PCT/FI2005/000557 priority patent/WO2006070059A1/en
Priority to CN2005800448799A priority patent/CN101120232B/zh
Priority to ES12171952.0T priority patent/ES2477570T3/es
Priority to EP12171952.0A priority patent/EP2527789B1/en
Priority to CA2586707A priority patent/CA2586707C/en
Priority to JP2007548849A priority patent/JP5006208B2/ja
Priority to EP05823273A priority patent/EP1831643B1/en
Priority to IL183573A priority patent/IL183573A/en
Priority to NO20073688A priority patent/NO339420B1/no
Priority to JP2011015625A priority patent/JP5514384B2/ja
Priority to JP2011015626A priority patent/JP2011137826A/ja
Priority to JP2011015627A priority patent/JP2011145298A/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
FI20041708A 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi FI116543B (fi)

Priority Applications (15)

Application Number Priority Date Filing Date Title
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi
US11/318,897 US7454971B2 (en) 2004-12-31 2005-12-28 Oscillating micro-mechanical sensor of angular velocity
EP05823273A EP1831643B1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
JP2007548849A JP5006208B2 (ja) 2004-12-31 2005-12-30 角速度についての振動マイクロ−メカニカルセンサー
CN2005800448799A CN101120232B (zh) 2004-12-31 2005-12-30 振荡微机械角速度传感器
PCT/FI2005/000557 WO2006070059A1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
KR1020077016091A KR100936638B1 (ko) 2004-12-31 2005-12-30 발진 마이크로-기계 각속도 센서
ES12171952.0T ES2477570T3 (es) 2004-12-31 2005-12-30 Sensor micromecánico oscilante de velocidad angular
EP12171952.0A EP2527789B1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
CA2586707A CA2586707C (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
IL183573A IL183573A (en) 2004-12-31 2007-05-31 Oscillating micro-mechanical sensor of angular velocity
NO20073688A NO339420B1 (no) 2004-12-31 2007-07-17 Oscillerende mikromekanisk vinkelhastighetssensor
JP2011015625A JP5514384B2 (ja) 2004-12-31 2011-01-27 角速度についての振動マイクロ−メカニカルセンサー
JP2011015626A JP2011137826A (ja) 2004-12-31 2011-01-27 角速度についての振動マイクロ−メカニカルセンサー
JP2011015627A JP2011145298A (ja) 2004-12-31 2011-01-27 角速度についての振動マイクロ−メカニカルセンサー

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041708 2004-12-31
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi

Publications (2)

Publication Number Publication Date
FI20041708A0 true FI20041708A0 (fi) 2004-12-31
FI116543B FI116543B (fi) 2005-12-15

Family

ID=33548065

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi

Country Status (11)

Country Link
US (1) US7454971B2 (fi)
EP (2) EP2527789B1 (fi)
JP (4) JP5006208B2 (fi)
KR (1) KR100936638B1 (fi)
CN (1) CN101120232B (fi)
CA (1) CA2586707C (fi)
ES (1) ES2477570T3 (fi)
FI (1) FI116543B (fi)
IL (1) IL183573A (fi)
NO (1) NO339420B1 (fi)
WO (1) WO2006070059A1 (fi)

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US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US8141424B2 (en) 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
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DE102014215038B4 (de) * 2014-07-31 2026-01-22 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
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JP6610706B2 (ja) 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6627911B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6627912B2 (ja) * 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体
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CN112378575B (zh) * 2020-06-23 2022-02-08 襄阳达安汽车检测中心有限公司 一种汽车碰撞试验用假人多轴力传感器轴间串扰校准方法
US11634320B2 (en) * 2021-02-22 2023-04-25 Taiwan Semiconductor Manufacturing Company Limited Micro-electromechanical system device including a precision proof mass element and methods for forming the same
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Also Published As

Publication number Publication date
CN101120232B (zh) 2011-07-06
CN101120232A (zh) 2008-02-06
ES2477570T3 (es) 2014-07-17
JP2011149944A (ja) 2011-08-04
FI116543B (fi) 2005-12-15
KR20070094920A (ko) 2007-09-27
KR100936638B1 (ko) 2010-01-14
IL183573A (en) 2011-03-31
NO339420B1 (no) 2016-12-12
EP1831643B1 (en) 2012-08-01
EP2527789B1 (en) 2014-04-09
CA2586707A1 (en) 2006-07-06
US20060156814A1 (en) 2006-07-20
JP2008527318A (ja) 2008-07-24
JP2011137826A (ja) 2011-07-14
NO20073688L (no) 2007-10-01
EP1831643A4 (en) 2010-09-01
JP5006208B2 (ja) 2012-08-22
CA2586707C (en) 2011-02-08
IL183573A0 (en) 2007-09-20
JP2011145298A (ja) 2011-07-28
EP1831643A1 (en) 2007-09-12
JP5514384B2 (ja) 2014-06-04
US7454971B2 (en) 2008-11-25
EP2527789A1 (en) 2012-11-28
WO2006070059A1 (en) 2006-07-06

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