[go: up one dir, main page]

FI20040629A0 - Förfarande för framställning av kapasitiv trycksensor, och kapasitiv trycksensor - Google Patents

Förfarande för framställning av kapasitiv trycksensor, och kapasitiv trycksensor

Info

Publication number
FI20040629A0
FI20040629A0 FI20040629A FI20040629A FI20040629A0 FI 20040629 A0 FI20040629 A0 FI 20040629A0 FI 20040629 A FI20040629 A FI 20040629A FI 20040629 A FI20040629 A FI 20040629A FI 20040629 A0 FI20040629 A0 FI 20040629A0
Authority
FI
Finland
Prior art keywords
pressure sensor
capacitive pressure
producing
capacitive
producing capacitive
Prior art date
Application number
FI20040629A
Other languages
English (en)
Finnish (fi)
Other versions
FI115487B (sv
Inventor
Jaakko Ruohio
Riikka Aastroem
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20040629A priority Critical patent/FI115487B/sv
Publication of FI20040629A0 publication Critical patent/FI20040629A0/sv
Priority to US11/114,215 priority patent/US7252007B2/en
Priority to EP05103506.1A priority patent/EP1593949B1/en
Application granted granted Critical
Publication of FI115487B publication Critical patent/FI115487B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
FI20040629A 2004-05-03 2004-05-03 Förfarande för framställning av kapasitiv trycksensor, och kapasitiv trycksensor FI115487B (sv)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FI20040629A FI115487B (sv) 2004-05-03 2004-05-03 Förfarande för framställning av kapasitiv trycksensor, och kapasitiv trycksensor
US11/114,215 US7252007B2 (en) 2004-05-03 2005-04-26 Method for the manufacturing of a capacitive pressure sensor, and a capacitive pressure sensor
EP05103506.1A EP1593949B1 (en) 2004-05-03 2005-04-28 Method of manufacturing a capacitive pressure sensor and a capacitive pressure sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20040629A FI115487B (sv) 2004-05-03 2004-05-03 Förfarande för framställning av kapasitiv trycksensor, och kapasitiv trycksensor
FI20040629 2004-05-03

Publications (2)

Publication Number Publication Date
FI20040629A0 true FI20040629A0 (sv) 2004-05-03
FI115487B FI115487B (sv) 2005-05-13

Family

ID=32338350

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20040629A FI115487B (sv) 2004-05-03 2004-05-03 Förfarande för framställning av kapasitiv trycksensor, och kapasitiv trycksensor

Country Status (3)

Country Link
US (1) US7252007B2 (sv)
EP (1) EP1593949B1 (sv)
FI (1) FI115487B (sv)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080124528A1 (en) * 2006-11-29 2008-05-29 Motorola, Inc. Printed electronic device and methods of determining the electrical value thereof
US8297125B2 (en) * 2008-05-23 2012-10-30 Honeywell International Inc. Media isolated differential pressure sensor with cap
US8230745B2 (en) * 2008-11-19 2012-07-31 Honeywell International Inc. Wet/wet differential pressure sensor based on microelectronic packaging process
RU2465681C2 (ru) * 2009-02-19 2012-10-27 Государственное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) Способ изготовления чувствительного элемента датчика давления жидких и газообразных сред
US8322225B2 (en) * 2009-07-10 2012-12-04 Honeywell International Inc. Sensor package assembly having an unconstrained sense die
US8230743B2 (en) 2010-08-23 2012-07-31 Honeywell International Inc. Pressure sensor
US8754504B2 (en) * 2012-05-23 2014-06-17 United Microelectronics Corporation Thinned wafer and fabricating method thereof
US20200355857A1 (en) * 2017-08-30 2020-11-12 Ecole Polytechnique Federale De Lausanne Single crystalline diamond defractive optical elements and method of fabricating the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE272737C (sv)
US3986200A (en) * 1974-01-02 1976-10-12 Signetics Corporation Semiconductor structure and method
JPS5524423A (en) * 1978-08-10 1980-02-21 Nissan Motor Co Ltd Semiconductor pressure sensor
JPS60138977A (ja) 1983-12-27 1985-07-23 Fuji Electric Co Ltd 半導体形静電容量式圧力センサ
JPH07101743B2 (ja) 1988-04-05 1995-11-01 横河電機株式会社 半導体圧力センサの製造方法
JPH01261872A (ja) 1988-04-12 1989-10-18 Yokogawa Electric Corp 半導体圧力センサの製造方法
JPH06232423A (ja) * 1993-02-04 1994-08-19 Mitsubishi Electric Corp 半導体圧力センサ
JPH11135806A (ja) 1997-10-28 1999-05-21 Denso Corp 半導体圧力センサおよびその製造方法
US6156585A (en) * 1998-02-02 2000-12-05 Motorola, Inc. Semiconductor component and method of manufacture
US6089099A (en) * 1998-09-08 2000-07-18 Smi Corporation Method for forming a bonded silicon-glass pressure sensor with strengthened corners
EP1223420A3 (en) * 2001-01-16 2003-07-09 Fujikura Ltd. Pressure sensor and manufacturing method thereof
DE102004018408A1 (de) * 2004-04-16 2005-11-03 Robert Bosch Gmbh Kapazitiver Drucksensor und Verfahren zur Herstellung

Also Published As

Publication number Publication date
FI115487B (sv) 2005-05-13
EP1593949A1 (en) 2005-11-09
EP1593949B1 (en) 2015-01-21
US7252007B2 (en) 2007-08-07
US20050248905A1 (en) 2005-11-10

Similar Documents

Publication Publication Date Title
FI20041229A0 (sv) Kapacitiv sensor och förfarande för framställning av kapacitiv sensor
PL2031126T3 (pl) Sposób i urządzenie ssące do wytwarzania papieru zabezpieczonego
DE602005021253D1 (de) Kalibrierter drucksensor
FI20055323L (sv) Förfarande för framställning av kapacitiv accelerationssensor och kapacitiv accelerationssensor
FI20050739A0 (sv) Mikromekanisk sensor, sensorgrupp och förfarande
DE112005002196A5 (de) Drehratensensor
DE602006001098D1 (de) Kapazitiver Drucksensor
EP1993322A4 (en) ULTRASOUND SENSOR, AND METHOD OF MANUFACTURING SAME
EP1891414A4 (en) SENSOR, MULTIVOUS SENSOR, DETECTION APPARATUS, AND DETECTION METHOD
DK1794561T3 (da) Optoakustisk tryksensor
FI20055635L (sv) Förfarande för framställning av papper
SE0402296L (sv) Förfarande och anordning för att tillverka cellulosamassa
SI2008072T1 (sl) Keramični tlačni senzorji in postopki njihove izdelave
GB0619288D0 (en) Resonator based transmitters for capacitive sensors
ITRM20030318A1 (it) Trasduttore ultracustico capacitivo microlavorato e
DE602004010255D1 (de) Optischer Verschiebungssensor, Verschiebungsmesssystem und -verfahren
FI20040629A0 (sv) Förfarande för framställning av kapasitiv trycksensor, och kapasitiv trycksensor
FI20055470A0 (sv) Förfarande för framställning av mjölkprodukter, så erhållna produkter och användning av dessa
EP1719994A4 (en) CAPACITIVE SENSOR
DE602004023954D1 (de) Aschine mit glattpresse sowie papierherstellungsverfahren
FI20050707A0 (sv) Halvledarkonstruktion och förfarande för framställning av en halvledarkonstruktion
FI20075354A0 (sv) Arrangemang, anordning och förfarande för bestämning av bladtryck
FI20060498A0 (sv) Förfarande för framställning av en extraktionsbrunn och extraktionsbrunn
DE60313327D1 (de) Druckaufnehmer
DE502004008159D1 (de) Drucksensor-anordnung

Legal Events

Date Code Title Description
FG Patent granted

Ref document number: 115487

Country of ref document: FI

PC Transfer of assignment of patent

Owner name: MURATA ELECTRONICS OY

MM Patent lapsed