ES405371A1 - Procedimiento para la produccion de disenos, especialmente de disenos conductores de circuitos impresos de acuerdo con el procedimiento de acumulacion. - Google Patents
Procedimiento para la produccion de disenos, especialmente de disenos conductores de circuitos impresos de acuerdo con el procedimiento de acumulacion.Info
- Publication number
- ES405371A1 ES405371A1 ES405371A ES405371A ES405371A1 ES 405371 A1 ES405371 A1 ES 405371A1 ES 405371 A ES405371 A ES 405371A ES 405371 A ES405371 A ES 405371A ES 405371 A1 ES405371 A1 ES 405371A1
- Authority
- ES
- Spain
- Prior art keywords
- metal
- radiation
- subjected
- desired design
- reduced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000002184 metal Substances 0.000 abstract 5
- 230000005855 radiation Effects 0.000 abstract 5
- 238000000151 deposition Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- 150000003839 salts Chemical group 0.000 abstract 2
- 238000009825 accumulation Methods 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
- H05K3/426—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in substrates without metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1653—Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/64—Compositions containing iron compounds as photosensitive substances
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/695—Compositions containing azides as the photosensitive substances
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/72—Photosensitive compositions not covered by the groups G03C1/005 - G03C1/705
- G03C1/73—Photosensitive compositions not covered by the groups G03C1/005 - G03C1/705 containing organic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
- G03C5/58—Processes for obtaining metallic images by vapour deposition or physical development
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/04—Chromates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/185—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method by making a catalytic pattern by photo-imaging
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Chemically Coating (AREA)
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ES439321A ES439321A2 (es) | 1972-07-29 | 1975-07-11 | Sobre procedimiento para la produccion de disenos, especial-mente de disenos conductores de circuitos impresos de acuer-do con el procedimiento de acumulacion. |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16743571A | 1971-07-29 | 1971-07-29 | |
| US05/225,645 US3930963A (en) | 1971-07-29 | 1972-02-11 | Method for the production of radiant energy imaged printed circuit boards |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES405371A1 true ES405371A1 (es) | 1976-03-01 |
Family
ID=26863169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES405371A Expired ES405371A1 (es) | 1971-07-29 | 1972-07-29 | Procedimiento para la produccion de disenos, especialmente de disenos conductores de circuitos impresos de acuerdo con el procedimiento de acumulacion. |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3930963A (es) |
| JP (1) | JPS5631915B1 (es) |
| CA (1) | CA954980A (es) |
| CH (1) | CH569089A5 (es) |
| DE (1) | DE2238002C3 (es) |
| DK (1) | DK146780C (es) |
| ES (1) | ES405371A1 (es) |
| FR (1) | FR2149170A5 (es) |
| GB (1) | GB1394869A (es) |
| IT (1) | IT961767B (es) |
| NL (1) | NL176902C (es) |
Families Citing this family (112)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU8113275A (en) * | 1974-07-11 | 1976-11-18 | Kollmorgen Corp | Processes and products of sensitizing substrates |
| US4039698A (en) * | 1976-01-23 | 1977-08-02 | Bell Telephone Laboratories, Incorporated | Method for making patterned platinum metallization |
| US4072768A (en) * | 1976-01-23 | 1978-02-07 | Bell Telephone Laboratories, Incorporated | Method for making patterned gold metallization |
| US4098922A (en) * | 1976-06-07 | 1978-07-04 | Western Electric Company, Inc. | Method for depositing a metal on a surface |
| US4084023A (en) * | 1976-08-16 | 1978-04-11 | Western Electric Company, Inc. | Method for depositing a metal on a surface |
| US4167601A (en) * | 1976-11-15 | 1979-09-11 | Western Electric Company, Inc. | Method of depositing a stress-free electroless copper deposit |
| US4181750A (en) * | 1977-09-09 | 1980-01-01 | Western Electric Company, Inc. | Method of depositing a metal on a surface |
| US4133908A (en) * | 1977-11-03 | 1979-01-09 | Western Electric Company, Inc. | Method for depositing a metal on a surface |
| US4192764A (en) * | 1977-11-03 | 1980-03-11 | Western Electric Company, Inc. | Stabilizing composition for a metal deposition process |
| US4171240A (en) * | 1978-04-26 | 1979-10-16 | Western Electric Company, Inc. | Method of removing a cured epoxy from a metal surface |
| US4322451A (en) * | 1978-05-01 | 1982-03-30 | Western Electric Co., Inc. | Method of forming a colloidal wetting sensitizer |
| US4217182A (en) * | 1978-06-07 | 1980-08-12 | Litton Systems, Inc. | Semi-additive process of manufacturing a printed circuit |
| US4234628A (en) * | 1978-11-28 | 1980-11-18 | The Harshaw Chemical Company | Two-step preplate system for polymeric surfaces |
| US4268536A (en) * | 1978-12-07 | 1981-05-19 | Western Electric Company, Inc. | Method for depositing a metal on a surface |
| DE2920940A1 (de) * | 1979-05-21 | 1980-12-04 | Schering Ag | Verfahren zur herstellung von gedruckten schaltungen |
| US4228213A (en) * | 1979-08-13 | 1980-10-14 | Western Electric Company, Inc. | Method of depositing a stress-free electroless copper deposit |
| US4384893A (en) * | 1979-09-14 | 1983-05-24 | Western Electric Co., Inc. | Method of forming a tin-cuprous colloidal wetting sensitizer |
| US4255481A (en) * | 1979-09-26 | 1981-03-10 | Western Electric Company, Inc. | Mask for selectively transmitting therethrough a desired light radiant energy |
| US4282314A (en) * | 1979-09-26 | 1981-08-04 | Western Electric Co., Inc. | Mask for selectively transmitting therethrough a desired light radiant energy |
| DE2948253C2 (de) * | 1979-11-30 | 1981-12-17 | Robert Bosch Gmbh, 7000 Stuttgart | Elektronische Dünnschichtschaltung |
| JPS5831760B2 (ja) * | 1981-01-09 | 1983-07-08 | 株式会社東芝 | プリント配線板の製造方法 |
| US4339303A (en) * | 1981-01-12 | 1982-07-13 | Kollmorgen Technologies Corporation | Radiation stress relieving of sulfone polymer articles |
| US4424095A (en) | 1981-01-12 | 1984-01-03 | Kollmorgen Technologies Corporation | Radiation stress relieving of polymer articles |
| US4440801A (en) * | 1982-07-09 | 1984-04-03 | International Business Machines Corporation | Method for depositing a metal layer on polyesters |
| GB2134931A (en) * | 1982-12-27 | 1984-08-22 | Ibiden Co Ltd | Non-electrolytic copper plating for printed circuit board |
| US4543715A (en) * | 1983-02-28 | 1985-10-01 | Allied Corporation | Method of forming vertical traces on printed circuit board |
| US4604299A (en) * | 1983-06-09 | 1986-08-05 | Kollmorgen Technologies Corporation | Metallization of ceramics |
| US4574094A (en) * | 1983-06-09 | 1986-03-04 | Kollmorgen Technologies Corporation | Metallization of ceramics |
| US4511597A (en) * | 1983-10-12 | 1985-04-16 | Kollmorgen Technologies Corporation | Method for depositing a metal on a surface |
| US4540620A (en) * | 1983-10-19 | 1985-09-10 | Phillips Petroleum Company | Conductive patterns in polymeric films |
| US4552787A (en) * | 1984-02-29 | 1985-11-12 | International Business Machines Corporation | Deposition of a metal from an electroless plating composition |
| US4666744A (en) * | 1984-05-10 | 1987-05-19 | Kollmorgen Technologies Corporation | Process for avoiding blister formation in electroless metallization of ceramic substrates |
| US4701352A (en) * | 1984-05-10 | 1987-10-20 | Kollmorgen Corporation | Surface preparation of ceramic substrates for metallization |
| FR2567155B1 (fr) * | 1984-07-03 | 1986-11-21 | Seregie | Procede de metallisation de particules non conductrices |
| US4837129A (en) * | 1984-09-14 | 1989-06-06 | Kollmorgen Technologies Corp. | Process for producing conductor patterns on three dimensional articles |
| US4594311A (en) * | 1984-10-29 | 1986-06-10 | Kollmorgen Technologies Corporation | Process for the photoselective metallization on non-conductive plastic base materials |
| US5047114A (en) * | 1984-11-02 | 1991-09-10 | Amp-Akzo Corporation | Process for the production of metal clad thermoplastic base materials and printed circuits on thermoplastic base materials |
| US4647477A (en) * | 1984-12-07 | 1987-03-03 | Kollmorgen Technologies Corporation | Surface preparation of ceramic substrates for metallization |
| EP0185967A3 (en) * | 1984-12-10 | 1988-08-03 | Kollmorgen Corporation | Process for avoiding blister formation in electroless metallization of ceramic substrates |
| US4790912A (en) * | 1985-06-06 | 1988-12-13 | Techno-Instruments Investments Ltd. | Selective plating process for the electrolytic coating of circuit boards without an electroless metal coating |
| US4891069A (en) * | 1986-06-06 | 1990-01-02 | Techno Instruments Investments 1983 Ltd. | Composition for the electrolytic coating of circuit boards without an electroless metal coating |
| GB8613960D0 (en) * | 1986-06-09 | 1986-07-16 | Omi International Gb Ltd | Treating laminates |
| JPS6364394A (ja) * | 1986-09-05 | 1988-03-22 | 株式会社日立製作所 | プリント配線板の製造方法 |
| US4814259A (en) * | 1987-11-09 | 1989-03-21 | Rockwell International Corporation | Laser generated electrically conductive pattern |
| US4872844A (en) * | 1988-07-08 | 1989-10-10 | Amp Incorporated | Component-carrying adapter for chip carrier socket |
| US4871319A (en) * | 1988-12-21 | 1989-10-03 | Amp Incorporated | Molded circuit board for ribbon cable connector |
| US5053318A (en) * | 1989-05-18 | 1991-10-01 | Shipley Company Inc. | Plasma processing with metal mask integration |
| US5002493A (en) * | 1989-09-19 | 1991-03-26 | Amp Incorporated | Panel mounted electronic assembly |
| US5013248A (en) * | 1989-09-19 | 1991-05-07 | Amp Incorporated | Multicircuit connector assembly |
| US4992059A (en) * | 1989-12-01 | 1991-02-12 | Westinghouse Electric Corp. | Ultra fine line cable and a method for fabricating the same |
| US5141829A (en) * | 1990-09-10 | 1992-08-25 | General Electric Company | Method of preparing a photo-mask for imaging three-dimensional objects |
| US5281447A (en) * | 1991-10-25 | 1994-01-25 | International Business Machines Corporation | Patterned deposition of metals via photochemical decomposition of metal-oxalate complexes |
| JPH11504073A (ja) * | 1995-04-17 | 1999-04-06 | ザ ボード オブ トラスティーズ オブ ザ ユニバーシティ オブ アーカンソー | 支持体を電気メッキする方法およびそれにより製造された製品 |
| AU5561696A (en) * | 1996-04-18 | 1997-11-07 | International Business Machines Corporation | Organic-metallic composite coating for copper surface protection |
| US5932021A (en) * | 1996-06-26 | 1999-08-03 | Cala; Francis R. | Aqueous cleaning composition for removing flux and method of use |
| US6921467B2 (en) | 1996-07-15 | 2005-07-26 | Semitool, Inc. | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces |
| US6752584B2 (en) * | 1996-07-15 | 2004-06-22 | Semitool, Inc. | Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces |
| US5746903A (en) * | 1996-07-26 | 1998-05-05 | Fujitsu Limited | Wet chemical processing techniques for plating high aspect ratio features |
| US5958144A (en) * | 1997-05-20 | 1999-09-28 | Church & Dwight | Flux-removing aqueous cleaning composition and method of use |
| ES2297895T5 (es) * | 1997-10-10 | 2012-07-03 | Pure Bioscience | Desinfectante y método de preparación |
| US7244677B2 (en) | 1998-02-04 | 2007-07-17 | Semitool. Inc. | Method for filling recessed micro-structures with metallization in the production of a microelectronic device |
| US6632292B1 (en) * | 1998-03-13 | 2003-10-14 | Semitool, Inc. | Selective treatment of microelectronic workpiece surfaces |
| US6565729B2 (en) * | 1998-03-20 | 2003-05-20 | Semitool, Inc. | Method for electrochemically depositing metal on a semiconductor workpiece |
| US6197181B1 (en) * | 1998-03-20 | 2001-03-06 | Semitool, Inc. | Apparatus and method for electrolytically depositing a metal on a microelectronic workpiece |
| TWI223678B (en) * | 1998-03-20 | 2004-11-11 | Semitool Inc | Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper |
| US6517894B1 (en) * | 1998-04-30 | 2003-02-11 | Ebara Corporation | Method for plating a first layer on a substrate and a second layer on the first layer |
| JP3268386B2 (ja) * | 1998-06-29 | 2002-03-25 | 日本航空電子工業株式会社 | 腐食防止膜の形成方法 |
| US6497801B1 (en) * | 1998-07-10 | 2002-12-24 | Semitool Inc | Electroplating apparatus with segmented anode array |
| US7033463B1 (en) | 1998-08-11 | 2006-04-25 | Ebara Corporation | Substrate plating method and apparatus |
| WO2000040779A1 (en) | 1998-12-31 | 2000-07-13 | Semitool, Inc. | Method, chemistry, and apparatus for high deposition rate solder electroplating on a microelectronic workpiece |
| US7264698B2 (en) * | 1999-04-13 | 2007-09-04 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US7351315B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7351314B2 (en) | 2003-12-05 | 2008-04-01 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US7438788B2 (en) * | 1999-04-13 | 2008-10-21 | Semitool, Inc. | Apparatus and methods for electrochemical processing of microelectronic workpieces |
| US7160421B2 (en) * | 1999-04-13 | 2007-01-09 | Semitool, Inc. | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US7585398B2 (en) * | 1999-04-13 | 2009-09-08 | Semitool, Inc. | Chambers, systems, and methods for electrochemically processing microfeature workpieces |
| US6916412B2 (en) * | 1999-04-13 | 2005-07-12 | Semitool, Inc. | Adaptable electrochemical processing chamber |
| US7020537B2 (en) * | 1999-04-13 | 2006-03-28 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| US7189318B2 (en) * | 1999-04-13 | 2007-03-13 | Semitool, Inc. | Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
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Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3152903A (en) * | 1959-04-30 | 1964-10-13 | Minnesota Mining & Mfg | Reproduction system |
| DE1287885B (es) * | 1964-05-27 | |||
| NL157659B (nl) * | 1967-09-22 | 1978-08-15 | Philips Nv | Werkwijze voor het langs fotografische weg vervaardigen van elektrisch geleidende koperpatronen. |
| US3562005A (en) * | 1968-04-09 | 1971-02-09 | Western Electric Co | Method of generating precious metal-reducing patterns |
| US3615732A (en) * | 1968-08-13 | 1971-10-26 | Shipley Co | Electroless copper plating |
| US3627558A (en) * | 1968-11-27 | 1971-12-14 | Technograph Printed Circuits L | Sensitization process for electroless plating |
| US3704208A (en) * | 1970-04-21 | 1972-11-28 | Rca Corp | Process for forming a conductive coating on a substrate |
| US3772056A (en) * | 1971-07-29 | 1973-11-13 | Kollmorgen Photocircuits | Sensitized substrates for chemical metallization |
-
1972
- 1972-02-11 US US05/225,645 patent/US3930963A/en not_active Expired - Lifetime
- 1972-06-29 CA CA146,046A patent/CA954980A/en not_active Expired
- 1972-07-28 GB GB3532272A patent/GB1394869A/en not_active Expired
- 1972-07-28 DK DK375672A patent/DK146780C/da active
- 1972-07-28 DE DE2238002A patent/DE2238002C3/de not_active Expired
- 1972-07-28 CH CH1125772A patent/CH569089A5/xx not_active IP Right Cessation
- 1972-07-29 IT IT51860/72A patent/IT961767B/it active
- 1972-07-29 ES ES405371A patent/ES405371A1/es not_active Expired
- 1972-07-29 JP JP7641272A patent/JPS5631915B1/ja active Pending
- 1972-07-31 NL NLAANVRAGE7210534,A patent/NL176902C/xx not_active IP Right Cessation
- 1972-07-31 FR FR7227534A patent/FR2149170A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2238002B2 (de) | 1978-03-30 |
| NL176902B (nl) | 1985-01-16 |
| DE2238002A1 (de) | 1973-02-08 |
| NL176902C (nl) | 1985-06-17 |
| IT961767B (it) | 1973-12-10 |
| DK146780B (da) | 1984-01-02 |
| DK146780C (da) | 1984-07-30 |
| CH569089A5 (es) | 1975-11-14 |
| US3930963A (en) | 1976-01-06 |
| DE2238002C3 (de) | 1978-11-16 |
| JPS5631915B1 (es) | 1981-07-24 |
| GB1394869A (en) | 1975-05-21 |
| FR2149170A5 (es) | 1973-03-23 |
| NL7210534A (es) | 1973-01-31 |
| CA954980A (en) | 1974-09-17 |
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