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EP1021654A1 - Screw vacuum pump provided with rotors - Google Patents

Screw vacuum pump provided with rotors

Info

Publication number
EP1021654A1
EP1021654A1 EP98937515A EP98937515A EP1021654A1 EP 1021654 A1 EP1021654 A1 EP 1021654A1 EP 98937515 A EP98937515 A EP 98937515A EP 98937515 A EP98937515 A EP 98937515A EP 1021654 A1 EP1021654 A1 EP 1021654A1
Authority
EP
European Patent Office
Prior art keywords
rotor
pump according
pump
housing
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98937515A
Other languages
German (de)
French (fr)
Other versions
EP1021654B1 (en
Inventor
Rudolf Bahnen
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1021654A1 publication Critical patent/EP1021654A1/en
Application granted granted Critical
Publication of EP1021654B1 publication Critical patent/EP1021654B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum

Definitions

  • the invention relates to a screw vacuum pump with rotors.
  • each of the rotors is formed in one piece and has two sections with different rotor profiles.
  • Dead spaces of this type not only affect the properties of the pump; they also stand in the way of building pumps that are as compact as possible.
  • each of the rotors of the screw vacuum pump consists of at least two separately manufactured rotor sections which are joined together in a positive or non-positive manner.
  • the main advantage associated with the invention is that the rotor sections can be made of different materials and / or with different accuracies in order to be able to adapt them to physical requirements in the affected area (heat conduction, thermal expansion, corrosion resistance, weight, mass distribution, etc.) .
  • the section of the rotor on the suction side that is less thermally stressed can be made of aluminum, and the section on the pressure side that is thermally stressed more can be made of steel.
  • the accuracy requirements of the screw profile of the two sections can be adapted to the required sealing effects.
  • the screw profile located in this area can therefore be manufactured with much larger tolerances, that is, cheaper.
  • Higher accuracy requirements are only required in the pressure side area.
  • Rotor sections with different profiles can be joined together in such a way that the different screw profiles merge directly into one another. There are no longer any harmful dead spaces. A shorter overall length or height can be realized.
  • a selection of cheaper materials for the components of the pump is also possible if the pump is equipped with a cooling system that also ensures uniform temperature control. This makes it easier to master thermal expansion problems.
  • the invention makes it possible to apply the modular principle to a screw vacuum pump in order to be able to adapt it to the specific application.
  • the pumping speed or the final pressure can be influenced via the volume, the slope and / or the length of the profiles on the suction side. With a small gradation, a higher fluid compatibility, with a larger gradation a lower power consumption or a higher pumping speed with a relatively low power consumption can be achieved.
  • FIG. 1 shows a section through a screw vacuum pump 1 according to the invention, namely at the level of that of the two rotating systems which is equipped with the drive motor 2.
  • the two rotating systems are synchronized with the aid of gear wheels 3.
  • the rotating systems which are accommodated in the housing 4, each comprise the rotor 5 and the shaft 6.
  • Each rotor 5 is overhung, that is to say is supported on one side.
  • the shaft 6 is supported on the bearings 7 and 8 and the bearing bracket 11 and 12 in the housing 4.
  • housing covers 13, 14 are provided, of which the rotor-side cover 13 is equipped with an inlet connector 15.
  • the bearing bracket 12 is part of the gearbox-side cover 14.
  • the rotor 5 consists of two positively connected rotor sections 17, 18 with different Chen profiles 19, 20.
  • the suction-side rotor section 17 has a large-volume profile 19 to achieve high volume flows in the helical scoop.
  • the pressure-side section 18 of the rotor 5 has both a reduced profile volume and a smaller diameter. As a result, the cross section of the helical scoop spaces decreases. An internal compression is achieved, the work of compression is reduced.
  • the inner wall of the housing 4 is adapted to the rotor gradation (gradation 21).
  • a dash-dotted line 22 indicates that the housing can be designed to be divisible at the level of the gradation 21. This makes it possible to replace the suction-side rotor section 17 and the suction-side part 4 'of the housing 4 by rotor sections with different profiles, lengths and / or diameters, as well as housing sections 4' adapted to them, in order to be able to adapt the pump to different applications.
  • the outlet of the pump 1 adjoining the pressure-side end of the threads is designated by 24. It is led out to the side.
  • a housing bore 25 opens into the outlet, which connects the pumping chamber to the outlet at the height at which its cross-section decreases - be it through gradation and / or by changing the thread profile.
  • a check valve 26 which opens when there is overpressure in the scoop chamber and short-circuits the suction-side thread of the rotor section 17 with the outlet 24.
  • shaft seals 27 are provided, which are located between the bearing 7 and the rotor section 18.
  • the cooling system of the illustrated embodiment comprises an internal rotor cooling and a casing jacket cooling.
  • the rotor 5 is equipped with a cavity 31 which is open towards its bearing side and which can extend almost through the entire rotor 5.
  • the pressure-side section 18 is expediently hollow.
  • the suction-side section 17 closes the suction-side end of the cavity 31.
  • the shaft 6, which is expediently formed in one piece with the rotor 5 or with the pressure-side section 18 of the rotor 5, is also hollow (cavity 32).
  • the cooling tube 33 and the annular space formed by the cooling tube 33 and the hollow shaft 6 are available for the supply or discharge of a coolant.
  • the bearing-side opening 34 of the cooling tube 3 is connected via the line 35 to the outlet of a coolant pump 36.
  • a coolant sump 37 which is connected to the inlet of the coolant pump 36 via the line system 38.
  • the sump 37 and the line system 38 are designed such that the pump 1 shown can be operated in any position between vertical and horizontal. Coolant levels that occur when the pump 1 is horizontal and vertical are shown.
  • the coolant pump 36 is located outside (as shown) or inside (for example on the second, not visible shaft of the pump 1 at the level of the drive motor 2) of the housing 4 the opening 34 of the cooling tube 33 outside or inside the housing 4.
  • coolant is conveyed from the coolant pump 36 out of the coolant sump 37 via the cooling pipe 33 into the cavity 31 in the rotor 5. From there it flows back into the sump 37 via the annular space between the cooling pipe 33 and the shaft 6.
  • the cavity 31 is located at the level of the pressure-side area of the threads of the pump 1, so that this area is effectively cooled.
  • the coolant flowing back outside the cooling pipe 33 tempered, among other things. the hollow shaft 6, the bearings 7 and 8, the drive motor 2 (armature side) and the gears 3, so that thermal expansion problems are reduced.
  • the cross section of the annular space between cooling pipe 33 and shaft 6 expediently decreases in the area of its pressure-side end, e.g. in that the cooling tube 33 has a larger outer diameter in this area. This creates a narrow passage 39. This constriction ensures that the coolant-carrying spaces are completely filled.
  • the housing jacket cooling shown comprises cavities or channels in the housing 4. Cooling channels provided in the area of the rotor 5 are 41, in the area of the motor
  • the cooling channels 41 located in the area of the rotor 5 have the task, on the one hand, of dissipating the heat which arises in particular in the pressure-side area of the rotor 5. On the other hand, they should temper the housing 4 as evenly as possible at the level of the entire rotor. After all, they should give off the heat they have absorbed.
  • the cavities 41 through which the coolant flows therefore extend over the full length of the rotor 5.
  • the housing cover 13 serves as an end on the suction side of the cavities 41. The housing 4 is also effectively cooled on the outlet side.
  • the cooling channels 42 located at the level of the drive motor 2 also have the tasks described. They bring about a temperature control of the drive motor (on the winding side) and of the bearing bracket 7. Finally, they considerably increase the heat dissipation via external surfaces of the pump 1. It is expediently equipped with ribs 44 at least at the level of the cooling channels 41 and 42.
  • the coolant channels 41, 42 are also supplied with coolant with the aid of the coolant pump 36, specifically via the lines 45 and 46, if they are to be flowed through in parallel. Depending on the thermal requirements, it is also possible to supply them with coolant one after the other. One of the lines 45 or 46 could then be omitted. The coolant returns from the cavities 41, 42 into the sump 37 via holes not shown in detail.
  • the coolant located in the sump takes on the temperature control of the bearing support 12 projecting into the sump 37.
  • the housing 4 and the rotor 5 are - as already mentioned - divisible at the level of the line 22.
  • the pump 1 can be adapted to different applications by mounting rotor sections 17 with different profiles 19, different lengths, different pitches and / or different diameters, in each case together with an adapted housing section. Profiles of different sizes on the suction side to achieve high pumping speeds, profiles of different lengths on the suction side to achieve low ultimate pressures and / or different volume gradations to achieve e.g.
  • the coolant flowing through the screw vacuum pump 1 can be water, oil (mineral oil, PTFE oil or the like) or another liquid. It is expedient to use oil so that the bearings 7, 8 and the gears 3 can also be lubricated. Separate routing of coolant and lubricant as well as appropriate seals can be omitted. It is only necessary to ensure a metered supply of oil to the bearings 7, 8.
  • the solutions described allow an advantageous choice of materials.
  • the rotors 5 and the housing 4 can be made of relatively inexpensive aluminum materials.
  • the proposed cooling and, above all, uniform temperature control of the pump 1 have the effect that, even at different operating temperatures and relatively small gaps, there is no local depletion of the game, which results in rotor-to-rotor and / or rotor-to-housing startup.
  • a further reduction in the gap is possible if materials are used for the inner, thermally more highly stressed components (rotors, bearings, bearing brackets, gears) of the pump 1, which have a lower coefficient of thermal expansion than the material for the less thermally stressed housing 4.
  • a Uniformity of the expansion of all components of the pump 1 is thereby achieved.
  • An example of such a selection of materials is steel (eg CrNi steel) for the inner components and aluminum for the housing. Bronze, brass or nickel silver can also be used as materials for the internal components.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention concerns a screw vacuum pump (1) provided with rotors (5). In order to produce such a screw vacuum pump (1) economically, it is proposed that each of its rotors is made up of separately produced rotor sections (17, 18) and assembled by form-closure, thereby enabling to produce the different rotor sections from materials and/or with tolerances sufficient for installing them in the suction chamber.

Description

Schraubenvakuumpumpe mit RotorenScrew vacuum pump with rotors

Die Erfindung bezieht sich auf eine Schraubenvakuumpumpe mit Rotoren.The invention relates to a screw vacuum pump with rotors.

Die Herstellung von Schraubenvakuumpumpen ist zum einen wegen der besonderen Form der Rotoren und auch des Gehäuses relativ teuer; zum anderen müssen Gehäuse und Rotoren relativ genau hergestellt werden, um unerwünscht große Abstände zwischen den Rotoren selbst und zwischen den Rotoren und dem Gehäuse zu vermeiden. Zu große Spalte verschlechtern wegen der in den Spalten auftretenden Rückströmungen die Pumpeigenschaften.The production of screw vacuum pumps is, on the one hand, relatively expensive because of the special shape of the rotors and the housing; on the other hand, the housing and rotors have to be manufactured relatively precisely in order to avoid undesirably large distances between the rotors themselves and between the rotors and the housing. Gaps that are too large deteriorate the pump properties due to the backflow occurring in the gaps.

Bei einer bereits vorgeschlagenen Schraubenvakuumpumpe der eingangs erwähnten Art ist jeder der Rotoren einstückig ausgebildet und weist zwei Abschnitte mit unterschiedlichen Rotorprofilen auf. Bei der üblichen spanabhebenden Herstellung von Schraubenrotoren dieser Art ist es notwendig, zwischen den Abschnitten mit un- terschiedllichen Profilen jeweils einen relativ großvo- lumigen Werkzeugauslauf vorzusehen. Toträume dieser Art beeinträchtigen nicht nur die Eigenschaften der Pumpe; sie stehen auch dem Ziel entgegen, möglichst kompakte Pumpen zu bauen. Bei bestimmten Applikationen kann es zwar zweckmäßig sein, in Höhe eines Wechsels des Gewindeprofils eine umlaufende Nut zum Zwecke einer Druckentlastung vorzusehen; diese Nut muss aber in al- ler Regel nicht die Größe eines großvolumigen Werkzeugauslaufs haben.In a screw vacuum pump of the type mentioned at the beginning, each of the rotors is formed in one piece and has two sections with different rotor profiles. In the usual machining of screw rotors of this type, it is necessary to provide a relatively large-volume tool outlet between the sections with different profiles. Dead spaces of this type not only affect the properties of the pump; they also stand in the way of building pumps that are as compact as possible. In certain applications, it may be expedient to provide a circumferential groove at the level of a change in the thread profile for the purpose of pressure relief; however, this groove must generally do not have the size of a large-volume tool outlet.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Schraubenvakuumpumpe der eingangs erwähnten Art kostengünstiger als bisher herstellen zu können. Zur Lösung dieser Aufgabe wird vorgeschlagen, dass jeder der Rotoren der Schraubenvakuumpumpe aus mindestens zwei separat hergestellten, form- oder kraftschlüssig zusammengefügten Rotorabschnitten besteht. Der wesentliche mit der Erfindung verbundene Vorteil liegt darin, dass die Rotorabschnitte aus unterschiedlichen Werkstoffen und/oder mit unterschiedlichen Genauigkeiten hergestellt werden können, um sie an physikalische Notwendigkeiten im betroffenen Schöpfraumbereich (Wärmeleitung, Wärmeausdehnung, Korrosionsbeständigkeit, Gewicht, Massenverteilung usw.) anpassen zu können. Beispielsweise kann der saugseitige, thermisch weniger beanspruchte Abschnitt des Rotors aus Aluminium, der druckseitige, thermisch höher beanspruchte Abschnitt aus Stahl hergestellt sein. Insbesondere können die Genauigkeitsanforderungen des Schraubenprofils der beiden Abschnitte den erforderlichen Dichtwirkungen an- gepasst werden. Im saugseitigen Bereich haben Rückströmungen nur wenig Einfluss auf das effektive Saugvermögen der Pumpe. Das in diesem Bereich befindliche Schraubenprofil kann deshalb mit wesentlich größeren Toleranzen, das heisst preiswerter, hergestellt werden. Nur im druckseitigen Bereich sind höhere Genauigkeitsanforderungen erforderlich. Rotorabschnitte mit unterschiedlichen Profilen können derart zusammengefügt werden, dass die unterschiedlichen Schraubenprofile unmittelbar ineinander übergehen. Schädliche Toträume sind nicht mehr vorhanden. Eine geringere Baulänge bzw. - höhe kann realisiert werden. Eine Auswahl preiswerterer Werkstoffe für die Bauteile der Pumpe ist auch dann möglich, wenn die Pumpe mit einer Kühlung ausgerüstet ist, die gleichzeitig eine gleichmäßige Temperierung bewirkt. Wärmedehnungsprobleme können dadurch einfacher beherrscht werden. Schließlich ermöglicht es die Erfindung, bei einer Schraubenvakuumpumpe das Baukastenprinzip anzuwenden, um sie applikationsspezifisch anpassen zu können. Über das Volumen, die Steigung und/oder die Länge der Profile auf der Saugseite kann auf das Saugvermögen bzw. auf den Enddruck Einfluss genommen werden. Mit einer kleinen Abstufung kann eine höhere Fluidverträglich- keit, mit einer größeren Stufung eine geringere Leistungsaufnahme bzw. ein höheres Saugvermögen bei relativ geringer Leistungsaufnahme erreicht werden.The present invention has for its object to be able to manufacture a screw vacuum pump of the type mentioned at a lower cost than previously. To achieve this object, it is proposed that each of the rotors of the screw vacuum pump consists of at least two separately manufactured rotor sections which are joined together in a positive or non-positive manner. The main advantage associated with the invention is that the rotor sections can be made of different materials and / or with different accuracies in order to be able to adapt them to physical requirements in the affected area (heat conduction, thermal expansion, corrosion resistance, weight, mass distribution, etc.) . For example, the section of the rotor on the suction side that is less thermally stressed can be made of aluminum, and the section on the pressure side that is thermally stressed more can be made of steel. In particular, the accuracy requirements of the screw profile of the two sections can be adapted to the required sealing effects. In the suction side area, backflows have little influence on the effective pumping speed of the pump. The screw profile located in this area can therefore be manufactured with much larger tolerances, that is, cheaper. Higher accuracy requirements are only required in the pressure side area. Rotor sections with different profiles can be joined together in such a way that the different screw profiles merge directly into one another. There are no longer any harmful dead spaces. A shorter overall length or height can be realized. A selection of cheaper materials for the components of the pump is also possible if the pump is equipped with a cooling system that also ensures uniform temperature control. This makes it easier to master thermal expansion problems. Finally, the invention makes it possible to apply the modular principle to a screw vacuum pump in order to be able to adapt it to the specific application. The pumping speed or the final pressure can be influenced via the volume, the slope and / or the length of the profiles on the suction side. With a small gradation, a higher fluid compatibility, with a larger gradation a lower power consumption or a higher pumping speed with a relatively low power consumption can be achieved.

Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand eines in der Figur dargestellten Ausführungsbeispieles erläutert werden. Sie zeigt einen Schnitt durch eine Schraubenvakuumpumpe 1 nach der Erfindung, und zwar in Höhe desjenigen der beiden rotierenden Systeme, das mit dem Antriebsmotor 2 ausgerüstet ist. Die Synchronisation der beiden rotierenden Systeme erfolgt mit Hilfe von Zahnrädern 3.Further advantages and details of the invention will be explained with reference to an embodiment shown in the figure. It shows a section through a screw vacuum pump 1 according to the invention, namely at the level of that of the two rotating systems which is equipped with the drive motor 2. The two rotating systems are synchronized with the aid of gear wheels 3.

Die rotierenden Systeme, die im Gehäuse 4 untergebracht sind, umfassen jeweils den Rotor 5 und die Welle 6. Jeder Rotor 5 ist fliegend, das heisst, einseitig gelagert. Die Welle 6 stützt sich über die Lager 7 und 8 sowie die Lagerträger 11 und 12 im Gehäuse 4 ab. Stirnseitig sind Gehäusedeckel 13, 14 vorgesehen, von denen der rotorseitige Deckel 13 mit einem Einlassstutzen 15 ausgerüstet ist. Bestandteil des getriebeseitigen Deckels 14 ist der Lagerträger 12.The rotating systems, which are accommodated in the housing 4, each comprise the rotor 5 and the shaft 6. Each rotor 5 is overhung, that is to say is supported on one side. The shaft 6 is supported on the bearings 7 and 8 and the bearing bracket 11 and 12 in the housing 4. On the face side, housing covers 13, 14 are provided, of which the rotor-side cover 13 is equipped with an inlet connector 15. The bearing bracket 12 is part of the gearbox-side cover 14.

Der Rotor 5 besteht aus zwei formschlüssig miteinander verbundenen Rotorabschnitten 17, 18 mit unterschiedli- chen Profilen 19, 20. Der saugseitige Rotorabschnitt 17 weist ein großvolumiges Profil 19 zur Erzielung hoher Volumenströme im wendeiförmigen Schöpfräum auf. Der druckseitige Abschnitt 18 des Rotors 5 hat sowohl ein reduziertes Profilvolumen als auch einen geringeren Durchmesser. Dadurch nimmt der Querschnitt der wendeiförmigen Schöpfräume ab. Eine innere Kompression wird erreicht, die Verdichtungsarbeit reduziert.The rotor 5 consists of two positively connected rotor sections 17, 18 with different Chen profiles 19, 20. The suction-side rotor section 17 has a large-volume profile 19 to achieve high volume flows in the helical scoop. The pressure-side section 18 of the rotor 5 has both a reduced profile volume and a smaller diameter. As a result, the cross section of the helical scoop spaces decreases. An internal compression is achieved, the work of compression is reduced.

Die Innenwandung des Gehäuses 4 ist der Rotorabstufung angepasst (Abstufung 21). Durch eine strichpunktierte Linie 22 ist angedeutet, dass das Gehäuse in Höhe der Abstufung 21 teilbar ausgebildet sein kann. Dadurch ist es möglich, den saugseitigen Rotorabschnitt 17 und den saugseitigen Teil 4 ' des Gehäuses 4 durch Rotorabschnitte mit anderen Profilen, Längen und/oder Durchmessern sowie daran angepasste Gehäuseabschnitte 4 ' zu ersetzen, um die Pumpe an unterschiedliche Applikationen anpassen zu können.The inner wall of the housing 4 is adapted to the rotor gradation (gradation 21). A dash-dotted line 22 indicates that the housing can be designed to be divisible at the level of the gradation 21. This makes it possible to replace the suction-side rotor section 17 and the suction-side part 4 'of the housing 4 by rotor sections with different profiles, lengths and / or diameters, as well as housing sections 4' adapted to them, in order to be able to adapt the pump to different applications.

Der sich an das druckseitige Ende der Gewindegänge anschließende Auslass der Pumpe 1 ist mit 24 bezeichnet. Er ist seitlich herausgeführt. In den Auslass mündet außerdem eine Gehäusebohrung 25, die den Schöpfräum in der Höhe, in der sein Querschnitt - sei es durch Stufung und/oder durch Wechsel des Gewindeprofiles - abnimmt, mit dem Auslass verbindet. In der Gehäusebohrung 25 befindet sich ein Rückschlagventil 26, das bei Überdrücken im Schöpfraum öffnet und den saugseitigen Gewindegang des Rotorabschnittes 17 mit dem Auslass 24 kurzschließt. Zur Abdichtung der wendeiförmigen Schöpfräume von der Lagerung sind Wellendichtungen 27 vorgesehen, die sich zwischen dem Lager 7 und dem Rotorabschnitt 18 befinden. Das Kühlsystem der dargestellten Ausführungsform um- fasst eine Rotorinnenkühlung und eine Gehäusemantelkühlung.The outlet of the pump 1 adjoining the pressure-side end of the threads is designated by 24. It is led out to the side. In addition, a housing bore 25 opens into the outlet, which connects the pumping chamber to the outlet at the height at which its cross-section decreases - be it through gradation and / or by changing the thread profile. In the housing bore 25 there is a check valve 26, which opens when there is overpressure in the scoop chamber and short-circuits the suction-side thread of the rotor section 17 with the outlet 24. To seal the helical scoops from the bearing, shaft seals 27 are provided, which are located between the bearing 7 and the rotor section 18. The cooling system of the illustrated embodiment comprises an internal rotor cooling and a casing jacket cooling.

Zur Verwirklichung der Rotorinnenkühlung ist der Rotor 5 mit einem zu seiner Lagerseite hin offenen Hohlraum 31 ausgerüstet, der sich nahezu durch den gesamten Rotor 5 erstrecken kann. Bei einem aus zwei Abschnitten 17 und 18 bestehenden Rotor 5 ist zweckmäßig der druckseitige Abschnitt 18 hohl ausgebildet. Der saugseitige Abschnitt 17 verschließt das saugseitige Ende des Hohlraumes 31. Die Welle 6, die zweckmäßig mit dem Rotor 5 bzw. mit dem druckseitigen Abschnitt 18 des Rotors 5 einstückig ausgebildet ist, ist ebenfalls hohl (Hohlraum 32) . In den Hohlräumen 31, 32 befindet sich ein zentrales Kühlrohr 33, das lagerseitig aus der Welle 6 herausgeführt ist und rotorseitig kurz vor dem saugseitigen Ende des Hohlraumes 31 mündet. Das Kühlrohr 33 und der vom Kühlrohr 33 und der Hohlwelle 6 gebildete Ringraum stehen für die Zu- bzw. Abführung eines Kühlmittels zur Verfügung.In order to achieve the internal cooling of the rotor, the rotor 5 is equipped with a cavity 31 which is open towards its bearing side and which can extend almost through the entire rotor 5. In the case of a rotor 5 consisting of two sections 17 and 18, the pressure-side section 18 is expediently hollow. The suction-side section 17 closes the suction-side end of the cavity 31. The shaft 6, which is expediently formed in one piece with the rotor 5 or with the pressure-side section 18 of the rotor 5, is also hollow (cavity 32). In the cavities 31, 32 there is a central cooling tube 33, which is led out of the shaft 6 on the bearing side and opens on the rotor side just before the suction-side end of the cavity 31. The cooling tube 33 and the annular space formed by the cooling tube 33 and the hollow shaft 6 are available for the supply or discharge of a coolant.

Beim dargestellten Ausführungsbeispiel steht die lager- seitige Öffnung 34 des Kühlrohres 3 über die Leitung 35 mit dem Auslass einer Kühlmittelpumpe 36 in Verbindung. Außerdem befindet sich im Bereich des Gehäusedeckels 14 ein Kühlmittelsumpf 37, der über das Leitungssystem 38 mit dem Einlass der Kühlmittelpumpe 36 verbunden ist. Der Sumpf 37 und das Leitungssystem 38 sind derart ausgebildet, dass die dargestellte Pumpe 1 in jeder Lage zwischen vertikal und horizontal betrieben werden kann. Kühlmittelstände, die sich bei horizontaler und bei vertikaler Lage der Pumpe 1 einstellen, sind dargestellt. Je nach dem, ob sich die Kühlmittelpumpe 36 außerhalb (wie dargestellt) oder innerhalb (z.B. auf der zweiten, nicht sichtbaren Welle der Pumpe 1 in Höhe des Antriebsmotors 2) des Gehäuses 4 befindet, liegt die Öffnung 34 des Kühlrohres 33 außerhalb oder innerhalb des Gehäuses 4.In the exemplary embodiment shown, the bearing-side opening 34 of the cooling tube 3 is connected via the line 35 to the outlet of a coolant pump 36. In addition, in the area of the housing cover 14 there is a coolant sump 37 which is connected to the inlet of the coolant pump 36 via the line system 38. The sump 37 and the line system 38 are designed such that the pump 1 shown can be operated in any position between vertical and horizontal. Coolant levels that occur when the pump 1 is horizontal and vertical are shown. Depending on whether the coolant pump 36 is located outside (as shown) or inside (for example on the second, not visible shaft of the pump 1 at the level of the drive motor 2) of the housing 4 the opening 34 of the cooling tube 33 outside or inside the housing 4.

Zum Betrieb der Innenkühlung des Rotors 5 wird Kühlmittel von der Kühlmittelpumpe 36 aus dem Kühlmittelsumpf 37 über das Kühlrohr 33 in den Hohlraum 31 im Rotor 5 gefördert. Von dort aus strömt es über den Ringraum zwischen Kühlrohr 33 und Welle 6 zurück in den Sumpf 37. Der Hohlraum 31 befindet sich in Höhe des druckseitigen Bereichs der Gewindegänge der Pumpe 1, so dass gerade dieser Bereich wirksam gekühlt wird. Das außerhalb des Kühlrohres 33 zurückströmende Kühlmittel temperiert u.a. die Hohlwelle 6, die Lager 7 und 8, den Antriebsmotor 2 (ankerseitig) und die Zahnräder 3, so dass Wärmedehnungsprobleme reduziert sind.To operate the internal cooling of the rotor 5, coolant is conveyed from the coolant pump 36 out of the coolant sump 37 via the cooling pipe 33 into the cavity 31 in the rotor 5. From there it flows back into the sump 37 via the annular space between the cooling pipe 33 and the shaft 6. The cavity 31 is located at the level of the pressure-side area of the threads of the pump 1, so that this area is effectively cooled. The coolant flowing back outside the cooling pipe 33 tempered, among other things. the hollow shaft 6, the bearings 7 and 8, the drive motor 2 (armature side) and the gears 3, so that thermal expansion problems are reduced.

Zweckmäßig verringert sich der Querschnitt des Ringraumes zwischen Kühlrohr 33 und Welle 6 im Bereich seines druckseitigen Endes z.B. dadurch, dass das Kühlrohr 33 in diesem Bereich einen größeren Außendurchmesser hat. Dadurch entsteht ein verengter Durchlass 39. Diese Engstelle sichert eine vollständige Füllung der das Kühlmittel führenden Räume.The cross section of the annular space between cooling pipe 33 and shaft 6 expediently decreases in the area of its pressure-side end, e.g. in that the cooling tube 33 has a larger outer diameter in this area. This creates a narrow passage 39. This constriction ensures that the coolant-carrying spaces are completely filled.

Es kann zweckmäßig sein, als Werkstoff für das Kühlrohr 3 ein schlecht wärmeleitendes Material (z.B. Kunststoff/Edelstahl o. dgl . ) auszuwählen. Dadurch werden eine wirksamere Kühlung des Rotors 5 und eine gleichmäßige Temperierung der wellennahen Bauteile der PumpeIt may be expedient to select a poorly heat-conducting material (e.g. plastic / stainless steel or the like) as the material for the cooling tube 3. This results in a more effective cooling of the rotor 5 and a uniform temperature control of the pump components near the shaft

1 erreicht.1 reached.

Die dargestellte Gehäusemantelkühlung umfasst Hohlräume bzw. Kanäle im Gehäuse- 4. Im Bereich des Rotors 5 vorgesehene Kühlkanäle sind mit 41, im Bereich des MotorsThe housing jacket cooling shown comprises cavities or channels in the housing 4. Cooling channels provided in the area of the rotor 5 are 41, in the area of the motor

2 befindliche Kühlkanäle mit 42 bezeichnet. Die im Bereich des Rotors 5 befindlichen Kühlkanäle 41 haben zum einen die Aufgabe, die insbesondere im druckseitigen Bereich des Rotors 5 entstehende Wärme abzuführen. Zum anderen sollen sie das Gehäuse 4 in Höhe des gesamten Rotors möglichst gleichmäßig temperieren. Schließlich sollen sie die aufgenommene Wärme nach außen abgeben. Die vom Kühlmittel durchströmten Hohlräume 41 erstrecken sich deshalb über die volle Länge des Rotors 5. Der Gehäusedeckel 13 dient als saugseiti- ger Abschluss der Hohlräume 41. Auch auslassseitig ist das Gehäuse 4 wirksam gekühlt.2 located cooling channels designated 42. The cooling channels 41 located in the area of the rotor 5 have the task, on the one hand, of dissipating the heat which arises in particular in the pressure-side area of the rotor 5. On the other hand, they should temper the housing 4 as evenly as possible at the level of the entire rotor. After all, they should give off the heat they have absorbed. The cavities 41 through which the coolant flows therefore extend over the full length of the rotor 5. The housing cover 13 serves as an end on the suction side of the cavities 41. The housing 4 is also effectively cooled on the outlet side.

Die in Höhe des Antriebsmotors 2 befindlichen Kühlkanäle 42 haben ebenfalls die geschilderten Aufgaben. Sie bewirken eine Temperierung des Antriebsmotors (wicklungsseitig) sowie des Lagerträgers 7. Schließlich vergrößern sie im erheblichen Maße die Wärmeabgabe über äußere Oberflächen der Pumpe 1. Zweckmäßig ist diese zumindest in Höhe der Kühlkanäle 41 und 42 mit Rippen 44 ausgerüstet.The cooling channels 42 located at the level of the drive motor 2 also have the tasks described. They bring about a temperature control of the drive motor (on the winding side) and of the bearing bracket 7. Finally, they considerably increase the heat dissipation via external surfaces of the pump 1. It is expediently equipped with ribs 44 at least at the level of the cooling channels 41 and 42.

Die Versorgung der Kühlkanäle 41, 42 mit Kühlmittel erfolgt ebenfalls mit Hilfe der Kühlmittelpumpe 36, und zwar über die Leitungen 45 und 46, wenn sie parallel durchströmt sein sollen. Je nach den thermischen Anforderungen besteht auch die Möglichkeit, sie nacheinander mit Kühlmittel zu versorgen. Eine der Leitungen 45 oder 46 könnte dann entfallen. Über im einzelnen nicht dargestellte Bohrungen gelangt das Kühlmittel aus den Hohlräumen 41, 42 in den Sumpf 37 zurück.The coolant channels 41, 42 are also supplied with coolant with the aid of the coolant pump 36, specifically via the lines 45 and 46, if they are to be flowed through in parallel. Depending on the thermal requirements, it is also possible to supply them with coolant one after the other. One of the lines 45 or 46 could then be omitted. The coolant returns from the cavities 41, 42 into the sump 37 via holes not shown in detail.

Bei vertikaler Anordnung der Welle 6 übernimmt das im Sumpf befindliche Kühlmittel die Temperierung des in den Sumpf 37 hineinragenden Lagerträgers 12. Bei horizontaler Anordnung ist es zweckmäßig, das zurückströmende Kühlmittel über die Innenseite des Deckels 14 strömen zu lassen, um sowohl den Lagersitz 12 zu tempe- rieren als auch die Wärmeabgabe nach außen zu verbessern.In the case of a vertical arrangement of the shaft 6, the coolant located in the sump takes on the temperature control of the bearing support 12 projecting into the sump 37. In the case of a horizontal arrangement, it is expedient to let the returning coolant flow over the inside of the cover 14 in order to both heat the bearing seat 12 - as well as to improve the heat emission to the outside.

Beim dargestellten Ausführungsbeispiel nach Figur 1 sind - wie bereits erwähnt - das Gehäuse 4 und der Rotor 5 in Höhe der Linie 22 teilbar ausgebildet. Dadurch besteht die Möglichkeit, die saugseitigen Abschnitte von Rotor 5 (Abschnitt 17) und Gehäuse 4 (Abschnitt 4') durch andere Bauteile zu ersetzen. Die Pumpe 1 kann an verschiedene Applikationen angepasst werden, indem Rotorabschnitte 17 mit unterschiedlichen Profilen 19, unterschiedlicher Länge, unterschiedlicher Steigung und/oder unterschiedllichem Durchmesser, jeweils zusammen mit einem angepassten Gehäuseabschnitt, montiert werden. Es können verschieden große Profile auf der Saugseite zur Erreichung hoher Saugvermögen, verschieden lange Profile auf der Saugseite zur Erreichung niedriger Enddrücke und/oder verschiedene Volumenabstufungen zur Erreichung z.B. bei geringerer Abstufung eine höhere Fluidverträglichkeit oder bei höherer Stufung ein hohes Saugvermögen bei relativ kleiner Leistungsaufnahme ausgewählt werden. Schließlich besteht die Möglichkeit, in Höhe einer Reduzierung des Durchmessers des Rotors 5 eine Umfangsnut vorzusehen, um bei bestimmten Applikationen in diesem Bereich eine Druckentlastung zu erzielen.In the exemplary embodiment shown in FIG. 1, the housing 4 and the rotor 5 are - as already mentioned - divisible at the level of the line 22. This makes it possible to replace the suction-side sections of rotor 5 (section 17) and housing 4 (section 4 ') with other components. The pump 1 can be adapted to different applications by mounting rotor sections 17 with different profiles 19, different lengths, different pitches and / or different diameters, in each case together with an adapted housing section. Profiles of different sizes on the suction side to achieve high pumping speeds, profiles of different lengths on the suction side to achieve low ultimate pressures and / or different volume gradations to achieve e.g. with a lower gradation a higher fluid compatibility or with a higher gradation a high pumping speed with a relatively low power consumption can be selected. Finally, there is the possibility of providing a circumferential groove in the amount of a reduction in the diameter of the rotor 5 in order to achieve pressure relief in certain applications in this area.

Das die Schraubenvakuumpumpe 1 durchströmende Kühlmittel kann Wasser, Öl (Mineralöl, PTFE-Öl oder dergleichen) oder eine andere Flüssigkeit sein. Zweckmäßig ist die Verwendung von Öl, um damit auch die Lager 7, 8 und die Zahnräder 3 schmieren zu können. Eine separate Führung von Kühlmittel und Schmiermittel sowie entsprechende Abdichtungen können dadurch entfallen. Es muss lediglich für eine dosierte Zuführung von Öl zu den Lagern 7, 8 gesorgt werden. Die beschriebenen Lösungen erlauben eine vorteilhafte Werkstoffauswahl . Beispielsweise können die Rotoren 5 und das Gehäuse 4 aus relativ preiswerten Aluminiumwerkstoffen bestehen. Die vorgeschlagene Kühlung und vor allem gleichmäßige Temperierung der Pumpe 1 bewirken, dass es selbst bei unterschiedlichen Betriebstemperaturen und relativ kleinen Spalten nicht zu lokalen Spielaufzehrungen kommt, die ein Anlaufen Rotor an Rotor und/oder Rotor an Gehäuse zur Folge haben. Eine weitere Reduzierung der Spalte ist möglich, wenn für die inneren, thermisch höher belasteten Bauteile (Rotoren, Lager, Lagerträger, Zahnräder) der Pumpe 1 Werkstoffe eingesetzt werden, die einen kleineren Wärmeausdehnungskoeffizienten haben als der Werkstoff für das weniger thermisch belastete Gehäuse 4. Eine Vergleichsmäßigung der Dehnung aller Bauteile der Pumpe 1 wird dadurch erreicht. Ein Beispiel für eine solche Werkstoffauswahl ist Stahl (z.B. CrNi-Stahl) für die inneren Bauteile und Aluminium für das Gehäuse. Als Werkstoffe für die inneren Bauteile können auch Bronze, Messing oder Neusilber dienen. The coolant flowing through the screw vacuum pump 1 can be water, oil (mineral oil, PTFE oil or the like) or another liquid. It is expedient to use oil so that the bearings 7, 8 and the gears 3 can also be lubricated. Separate routing of coolant and lubricant as well as appropriate seals can be omitted. It is only necessary to ensure a metered supply of oil to the bearings 7, 8. The solutions described allow an advantageous choice of materials. For example, the rotors 5 and the housing 4 can be made of relatively inexpensive aluminum materials. The proposed cooling and, above all, uniform temperature control of the pump 1 have the effect that, even at different operating temperatures and relatively small gaps, there is no local depletion of the game, which results in rotor-to-rotor and / or rotor-to-housing startup. A further reduction in the gap is possible if materials are used for the inner, thermally more highly stressed components (rotors, bearings, bearing brackets, gears) of the pump 1, which have a lower coefficient of thermal expansion than the material for the less thermally stressed housing 4. A Uniformity of the expansion of all components of the pump 1 is thereby achieved. An example of such a selection of materials is steel (eg CrNi steel) for the inner components and aluminum for the housing. Bronze, brass or nickel silver can also be used as materials for the internal components.

Claims

Schraubenvakuumpumpe mit RotorenPATENTANSPRÜCHE Screw vacuum pump with rotors 1. Schraubenvakuumpumpe (1) mit Rotoren (5), dadurch gekennzeichnet, dass jeder der Rotoren der Schraubenvakuumpumpe (1) aus separat hergestellten, form oder kraftschlüssig zusammengefügten Rotorabschnitten (17, 18) besteht.1. Screw vacuum pump (1) with rotors (5), characterized in that each of the rotors of the screw vacuum pump (1) consists of separately manufactured, positively or non-positively joined rotor sections (17, 18). 2. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass jeder der Rotoren (5) mindestens zwei Abschnitte (17, 18) mit unterschiedlichen Rotorprofilen (19, 20) aufweist.2. Pump according to claim 1, characterized in that each of the rotors (5) has at least two sections (17, 18) with different rotor profiles (19, 20). 3. Pumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der saugseitige Abschnitt (17) einen größeren Durchmesser hat als der druckseitige Abschnitt (18) .3. Pump according to claim 1 or 2, characterized in that the suction-side section (17) has a larger diameter than the pressure-side section (18). 4. Pumpe nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, dass die Rotorabschnitte (17, 18) aus verschiedenen Werkstoffen bestehen.4. Pump according to claim 1, 2 or 3, characterized in that the rotor sections (17, 18) consist of different materials. 5. Pumpe nach Anspruch 4, dadurch gekennzeichnet, dass der saugseitige Abschnitt (17) des Rotors (5) aus Aluminium, der druckseitige Abschnitt (18) aus Stahl besteht.5. Pump according to claim 4, characterized in that the suction-side section (17) of the rotor (5) made of aluminum, the pressure-side section (18) made of steel. 6. Pumpe nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass der saugseitige Rotorabschnitt (17) mit einer größeren Toleranz herge- stellt ist als der druckseitige Rotorabschnitt (18) .6. Pump according to one of claims 1 to 5, characterized in that the suction-side rotor section (17) produced with a greater tolerance. is as the pressure-side rotor section (18). 7. Pumpe nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass auch das Gehäuse (4) teilbar ausgebildet ist.7. Pump according to one of claims 1 to 6, characterized in that the housing (4) is also divisible. 8. Pumpe nach Anspruch 7, dadurch gekennzeichnet, dass die Trennebene zwischen den beiden Gehäuseteilen mit der Trennebene (22) zwischen den beiden Rotorabschnitten (17, 18) identisch ist.8. Pump according to claim 7, characterized in that the parting plane between the two housing parts with the parting plane (22) between the two rotor sections (17, 18) is identical. 9. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass eine Gehäusebohrung9. Pump according to one of the preceding claims, characterized in that a housing bore (26) vorgesehen ist, die die wendeiförmigen Schöpfräume in der Höhe, in der ihr Querschnitt - sei es durch Stufung und/oder durch Wechsel des Gewindeprofils - abnimmt, mit dem Auslass (27) verbindet und in der sich ein bei Überdruck öffnendes Rückschlagventil befindet.(26) is provided which connects the helical scooping spaces to the outlet (27) at the height at which their cross-section decreases - be it by gradation and / or by changing the thread profile - and in which there is a check valve that opens when overpressure occurs . 10. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie mit einer Kühlung/Temperierung ausgerüstet ist.10. Pump according to one of the preceding claims, characterized in that it is equipped with a cooling / temperature control. 11. Pumpe nach Anspruch 10, dadurch gekennzeichnet, dass sie mit einer Rotorinnenkühlung ausgerüstet ist .11. Pump according to claim 10, characterized in that it is equipped with an internal rotor cooling. 12. Pumpe nach Anspruch 11, dadurch gekennzeichnet, dass sich die Rotorinnenkühlung in einem lagersei- tig offenen Hohlraum (31) im Rotor (5) befindet.12. Pump according to claim 11, characterized in that the rotor internal cooling is located in a cavity on the bearing side (31) in the rotor (5). 13. Pumpe nach Anspruch 12, dadurch gekennzeichnet, dass ein feststehendes, die hohl ausgebildete Welle (6) durchsetzendes Kühlrohr (33) im Hohlraum13. Pump according to claim 12, characterized in that a fixed, the hollow shaft (6) penetrating the cooling tube (33) in the cavity (31) mündet. (31) opens. 14. Pumpe nach Anspruch 12, dadurch gekennzeichnet, dass die Welle (6) den Hohlraum (31) durchsetzt und dass in den Ringraum zwischen Welle (6) und Rotor (5) bzw. Rotorabschnitt (18) eine sich auf dem Gehäuse (4) abstützende Kühlbuchse (51) hineinragt .14. Pump according to claim 12, characterized in that the shaft (6) passes through the cavity (31) and that in the annular space between the shaft (6) and the rotor (5) or rotor section (18) one on the housing (4th ) supporting cooling bush (51) protrudes. 15. Pumpe nach einem der Ansprüche 11, 12 oder 13, dadurch gekennzeichnet, dass in der Wandung des Gehäuses (4) der Pumpe (1), und zwar in Höhe des Rotors (5), von einem Kühlmittel durchströmte Kanäle (41) vorgesehen sind.15. Pump according to one of claims 11, 12 or 13, characterized in that in the wall of the housing (4) of the pump (1), namely at the level of the rotor (5), through which a coolant flows (41) is provided are. 16. Pumpe nach Anspruch 15, dadurch gekennzeichnet, dass auch im lagerseitigen Bereich des Gehäuses16. Pump according to claim 15, characterized in that also in the bearing-side area of the housing (4) vom Kühlmittel durchströmte Kanäle (42) vorgesehen sind.(4) channels (42) through which the coolant flows are provided. 17. Pumpe nach einem der Ansprüche 10 bis 16, dadurch gekennzeichnet, dass das die Pumpe (1) durchströmende Kühlmittel mit dem Schmiermittel für die Lager (7, 8) identisch ist.17. Pump according to one of claims 10 to 16, characterized in that the coolant flowing through the pump (1) is identical to the lubricant for the bearings (7, 8). 18. Verfahren zur Herstellung einer Pumpe mit den Merkmalen eines oder mehrerer der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die für die saugseitige Anordnung bestimmten Rotorabschnitte (17) mit einer größeren Toleranz gefertigt werden als die für druckseitige Anordnung bestimmten Rotorabschnitte (18). 18. A method for producing a pump with the features of one or more of the preceding claims, characterized in that the rotor sections (17) intended for the suction-side arrangement are manufactured with a greater tolerance than the rotor sections (18) intended for the pressure-side arrangement.
EP98937515A 1997-10-10 1998-06-19 Screw vacuum pump provided with rotors Expired - Lifetime EP1021654B1 (en)

Applications Claiming Priority (3)

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DE19745615A DE19745615A1 (en) 1997-10-10 1997-10-10 Screw vacuum pump with rotors
DE19745615 1997-10-10
PCT/EP1998/003757 WO1999019631A1 (en) 1997-10-10 1998-06-19 Screw vacuum pump provided with rotors

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EP1021654A1 true EP1021654A1 (en) 2000-07-26
EP1021654B1 EP1021654B1 (en) 2004-10-06

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US (1) US6382930B1 (en)
EP (1) EP1021654B1 (en)
JP (1) JP4146081B2 (en)
KR (1) KR20010030995A (en)
DE (2) DE19745615A1 (en)
TW (1) TW452631B (en)
WO (1) WO1999019631A1 (en)

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US6382930B1 (en) 2002-05-07
JP4146081B2 (en) 2008-09-03
TW452631B (en) 2001-09-01
DE19745615A1 (en) 1999-04-15
KR20010030995A (en) 2001-04-16
EP1021654B1 (en) 2004-10-06
WO1999019631A1 (en) 1999-04-22
JP2001520353A (en) 2001-10-30
DE59812093D1 (en) 2004-11-11

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