DE19736017A1 - Vacuum pump or compressor for compacting gases - Google Patents

Abstract

The vacuum pump includes at least one oil circuit installed with a pressure-producing pump. The oil circulation amounts to a multiple of the amount which would be necessary for pure lubrication purposes. The oil flow is divided into a small stream (2) for lubrication and a large stream (4) for cooling. The one or two oil circuits are driven by one or two oil pumps with one circuit operated at high pressure and lower volume flow and the other at low pressure and higher volume flow for undertaking different tasks.

Description

The invention relates to a screw pump used for compressing gases to be used.

Screw pumps have been preferred in the past as Liquid pumps used. They have two parallel cylindrical ones Rotors with helical grooves (depressions) on the Cylinder surface. The rotors mesh with each other, so that between them and of the surrounding housing wall form closed work spaces. At counter-rotation of the rotors move these working spaces from the suction side to the print page.

Such a pump is described as prior art in patent application EP 0 472 933 A2 ( FIG. 1). The standing arrangement and the flying bearing arrangement of the rotors are particularly advantageous for the use described here as a gas-producing vacuum pump. The suction takes place in the upper part of the pump, i.e. on the upper edge of the rotors, the discharge on the lower part of the rotors and the outlet can be arranged at the lowest point of the working area. This design allows impurities and accumulating liquids (e.g. condensate) to be pumped through from top to bottom and to be expelled without any problems, so that the pump is already inherently insensitive to contamination, provided that the error is not made as described here. to arrange the bearings below the rotors.

Another advantage is that the gearbox with storage, Synchronization toothing and drive below, that is arranged on the outlet side. Due to the flying storage, the gearbox can only be in with the outlet side Connect and there is atmospheric pressure or outlet pressure in it. in the In contrast to rotary vane vacuum pumps and roots blowers, this is here Foaming and evaporation of oil practically in the suction-side work rooms Completely excluded, due to the strict separation due to the design between the gas being pumped and the lubricant. Based on these Such a pump is extremely versatile, because on the one hand it is it is predestined for high-purity vacuum applications, but on the other hand also excellently suited for the conveyance of highly aggressive gases, e.g. B. with rotary vane pumps would attack the lubricant in a very short time. Even in applications with a high dust content, where the oil has been quick so far dirty or muddy, it has a significant superiority.

Despite these advantages, the machine from EP 0 472 933 A2 is not particularly elegant, because it has a voluminous and complex drive with five Gears and a heavy asynchronous motor. The oil reservoir in the gearbox obviously serves primarily gear lubrication. On the lubrication of the Ball bearings are not discussed in detail in the drawing or in the text, so that at least with the upper ball bearings one can assume that it is grease-lubricated bearings.  

A further and significantly more compact variant of this machine type is presented in 08-100 779 ( Fig. 2). Here, each shaft is driven by its own motor and the lack of an oil-lubricated synchronization toothing suggests that this machine is electronically synchronized. Another improvement is that the upper bearings have been moved to the recessed rotor. They are now geodetically far above the exhaust level and the long and narrow gap between the bearing base and the rotor rotation enables the bearings to be shielded so well that a contacting shaft seal can be dispensed with, thus eliminating a critical problem area.

Also striking are the hollow bores, the ends of which dip into the oil reservoir ( Fig. 3) and in which the oil can rise up to the bearings under the action of centrifugal force.

Although this machine is very much thanks to the frequency converter technology builds more compact than the first described, it is still relatively complex, because it requires two motors, two frequency converters and the measurement and control technology for electronic synchronization. Another disadvantage is that, as is known the energy consumption for electronic synchronization is up to 20% higher than with mechanical.

This oil flow principle can only be used at very high speeds and certain minimum diameters of the shaft bore work and even then the achievable delivery head and quantity is limited because the oil is only a thin film climbs on the inner wall. This is due to lubrication for plain bearings insufficient oil supply unsuitable when starting.

The aim of the present invention is over that here described prior art again significant improvements enable, which is mainly in an increase in power density (i.e. Pumping speed or volume flow in relation to the machine size), in which Reduction of the specific manufacturing costs, in simplified installation and Impact improvement in application characteristics.

The solution according to the invention is achieved in that at least one in the machine Oil circuit is installed with a pressure generating pump, in which the oil circulation is a multiple of the amount that would be necessary for pure lubrication purposes and at which is a listing in a small sub-stream for lubrication purposes and one large partial flow for cooling purposes.

One or even two oil circuits can be installed, which are driven by one or two oil pumps, whereby one circuit (or a partial circuit) can be operated with higher pressure and low volume flow and a second circuit (or the remaining circuit) with low pressure and higher volume flow. Depending on the size of the machine and the degree of complexity, three to five tasks should be performed simultaneously:

• 1. A very small and precisely metered partial oil flow should be led to the bearing points similar to 08-100 779 ( Fig. 2) and help to make optimal use of the life and load capacity of the bearings.
• 2. To cool the upper bearings, which are in the hottest part of the machine, namely located inside the rotor, the oil flow is said to be several times greater heat that normally accumulates there. This partial flow will but not through the bearings (because at the high speeds this Friction was increased unnecessarily), but only in close proximity to the Brought to camp to absorb the heat there.  
• 3. Another small partial flow can be used for the lubrication of a mechanical Synchronization teeth branched and preferably under pressure in the Tooth mesh can be injected.
• 4. A fourth and by far the largest oil flow can be passed through cooling channels which are located in the housing at the level of the lower half of the rotor. The Compression heat generated there should be concentrated by the oil flow be derived. In the case of air-cooled machines, a corresponding Oil flow should be aimed at that the heat of compression (if possible over the entire machine surface) is distributed so far that a complete Heat dissipation by external ribbing is possible.
• 5. The available oil pressure can also be used to Take control and control functions such. B. Operations monitoring through oil pressure control, actuation or control of a suction port valve and possibly the most important option for hydraulic axial thrust compensation larger machines.

Fig. 4 shows such an oil circuit in its simplest form. The essential elements are an oil cooler ( 1 ), or a zone in which heat is extracted from the oil, one or more pressure-generating oil pumps ( 2 ), which promote an amply dimensioned oil flow, and a division of this oil flow into a small partial flow ( 3 ) for lubrication of the friction zones and a main flow ( 4 ) several times larger for cooling.

Compared to the prior art mentioned at the outset, machines equipped in this way ( FIGS. 5 to 8) offer a whole series of advantages and additional options:

• - Due to the massive oil circulation inside the machine, it is even Heat distribution possible and thus results up to a certain size the option of pure air cooling using ambient air. The often cumbersome and unwanted connection of cooling water pipes, which eliminates the installation simplified.
• - The operating temperature of the rotors can be clear thanks to the bearing cooling can be raised without reducing the load capacity and service life of the bearings underneath suffer. To achieve a high power density, however, is a high one Rotor temperature is definitely desirable, because the hotter the rotor, the larger the rotor temperature driving force, resulting heat of compression to the colder housing to deliver. The more heat of compression can be dissipated, the more The machine can be more efficient (per construction volume)
• - Due to the pressure oil supply, the use of plain bearings is possible. Plain bearings require considerably less radial installation space than rolling bearings, which the power density also benefits. The additional space gained can either used to accommodate thicker waves (stiffer wave = higher bending critical speed = higher nominal speed and thus power density) and / or to increase the overlap of the rotors (larger Overlap larger stroke volume per revolution more suction power per Construction volume).
• - In contrast to the oil circulation generated by centrifugal force, which is high Minimum speed just below the nominal speed needed to at all function, the operating speed can be extended for oil pressure lubrication Limits can be freely chosen, whereby the machine in terms of final pressure, Suction power, temperature level and power consumption much more adaptable is.  
• - The oil circuit driven by the pressure of an oil pump opens up the option Filters (e.g. to increase the oil service life) and above all an additional oil cooler to be looped into the oil circuit. This can cause the heat-emitting surface be drastically enlarged, which can either be used to Power density to increase again or the overall temperature level of the Lower the machine. This can be done using a specially provided adapter Retrofitting with an oil cooler can be simplified.
• - An oil supply with several bar overpressure opens up the possibility of using increasing machine size considerably increasing axial thrust with relative almost completely compensate for little effort. This option enables the Construction of almost any size pumps of this type, without having to go into complicated two-flow variants must avoid.
• - The oil throughput is several times greater than that of a pure lubrication function the hollow drilled waves has the effect of making the two waves almost the same Temperature is forced. This fact simplifies the construction of single-engine machines, as the engine's slip performance easily cooled away is and therefore no difficulties with different thermal expansion of the Waves are expected. The single-engine version has the advantage of being smaller Cost (one big motor is cheaper than two small ones), higher efficiency, less space and free choice of center distance.

In Fig. 5, a vacuum pump is shown with the simplest version of an oil circuit of the invention. Only the tasks mentioned under points 1, 2 and 3 "lubrication of the bearings and the synchronization teeth and cooling of the upper bearing" are performed. Since this is a very small machine with a high compression ratio, the housing cooling mentioned under point 4 and the axial thrust compensation described under 5 can be omitted.

The particularly simple and inexpensive design of the oil circuit is worth mentioning:
The oil pumps ( 5 ) consist of the bare shaft ends that protrude into eccentrically arranged bores. Due to the oil viscosity, pressure builds up in the crescent-shaped gap and the oil flow is diverted through a groove ( 6 ) into the space below the shaft. Even at moderate speed, the pressure is sufficient to let the oil rise through the hollow shaft to the upper bearing. The oil can escape from the shaft through a very narrow transverse bore ( 7 ) above the lower and a larger one ( 8 ) above the upper bearing and is thrown out in a disc shape. Drip catchers ( 9 ) protrude into this centrifugal zone and let a small part of the oil thrown away drip into the bearings.

The main stream of the oil thrown away collects at the upper bearing on the inner wall of the bearing base ( 10 ) and can escape downwards via grooves ( 11 ). The oil absorbs the heat emitted by the rotor. The bearing is therefore flushed with an abundant flow of cooled oil from the inside and outside and can therefore be considerably colder than the rotor. The now heated oil flows from the bearing base onto the gearwheels ( 12 ), is again thrown outwards and flows back down into the oil sump on the housing wall, releasing its heat again. Since the gears are heavily wetted with oil, there is no need for additional lubrication measures.

This highly primitive oil circulation causes several birds to fly with one Flap hit: All friction point, d. H. Bearings and gearing are in  adequately and safely lubricated over a wide speed range, the two Shafts are kept at almost the same temperature, the upper bearings cooled and no longer automatically assume the rotor temperature and the The entire lower half of the machine is used for heat emission.

A vacuum pump designed according to this concept can, due to its high internal compression ratio in the final printing operation particularly energy-saving and work quietly, but has the basic disadvantage that because of the Diameter jump in the rotor can be disassembled and cleaned only with great effort.

A variant according to FIG. 6 with a constant rotor diameter should be considerably easier to maintain and therefore more suitable for dirt applications. Since this is a medium-sized machine with a moderate compression ratio, the oil circuit must be expanded by the housing cooling mentioned under point 4. An adapter ( 20 ) is also provided for retrofitting an external oil cooler or filter.

The high degree of penetration of the rotors leaves only little installation space for the upper bearing, so that the use of a plain bearing is inevitable here. To ensure that this machine can start up safely, the oil circuit is divided into a high pressure and a low pressure section. At low speeds, the plain bearing ( 21 ) is given priority and only when the pressure and flow rate have reached a certain level does the pressure relief valve ( 22 ) open and release the low-pressure circuit for cooling the housing, which is only necessary at higher speeds .

This machine also has two identical oil pumps, which are also based on the viscosity principle, but this time they are designed as threaded pumps ( 23 ). The higher machining effort on the shaft is offset by the advantage that only central blind holes have to be made in the oil pan ( 24 ). This variant in particular amazes with its extremely small number of modules.

Since pressure oil can be extracted from the housing of this machine, it is advisable to lubricate the teeth ( 25 ) by direct injection (not shown in the drawing). If the oil mist produced by the toothing is not sufficient to lubricate the lower rolling bearings, the oil thrown out of the toothing can be returned to the rolling zone through oil guide plates (also not shown).

There are two possibilities for bearing cooling in this machine: In Fig. 6, the cooling oil emerges from the smaller lower transverse bore ( 26 ) and runs down the inner wall of the bearing base in a manner known per se. The volume flow can be safely increased without running the risk of oil getting into the exhaust area, but the cooling effect is less, because there is no flow around the bearing. Fig. 7 shows a version with flow around and thus significantly better cooling effect. In the case of extremely viscous oil, however, there is a risk that the inflowing oil can no longer drain quickly enough through the grooves milled into the slide bearing bush and rise above the upper edge of the bearing base and thus get into the exhaust pipe.

Finally, FIG. 8 shows a particularly space-saving possibility for hydraulic axial thrust compensation, which could be of interest for larger machines. The pressure plate ( 30 ) protrudes into the recessed gears ( 31 ), so that only a minimum of additional length ( 32 ) is required. Since the oil pressure receiving area is limited and much smaller than the pressurized area of the rotors, higher oil pressures must be used here. It is therefore a good idea to install two independent oil circuits with different pumping principles on large machines. For high-pressure circuits ( 33 ), volumetric pumps such as pumps are preferred. B. gear pumps ( 34 ) in question, for the low-pressure circuit ( 35 ) for cooling and heat distribution pumps with high throughput and low pressure build-up are better, such as. B. a centrifugal pump ( 36 ).

If necessary, it is even possible with such an arrangement to regulate the oil pressure by means of a pressure regulator ( 37 ) as a function of the suction pressure ( 38 ) so that an almost complete axial thrust compensation takes place in all operating states.

With large machines of this type, it can of course continue it makes sense to install two separate circuits with different media and to provide the housing with separate cooling water channels for this purpose. Nevertheless, a high-pressure oil circuit should also be used for thrust compensation and maintain a lubrication circuit to supply all bearings and gears become.

Further improvements and special features compared to the prior art mentioned at the outset ( FIGS. 1 to 3) relate to the drive, the sound absorption, the vacuum protection, the protection of the bearing and the reduction in energy consumption due to internal compression.

drive

It is proposed to replace the drive motor, which drives the pump in FIG. 1 via an intermediate gearwheel, with one or two motors which are seated directly on the downwardly elongated shaft of the rotors and which are replaced by a frequency converter ( 13 in FIG. 5 and 27 in Fig. 6) are brought to high speeds.

This has the advantage that the engine can be built much smaller and one saves three gears.

You can drive one or both shafts directly, with the teeth in the latter case no longer has to transmit power but only the Synchronization of the two screw rotors is used. In both cases however, it may be sensible and even necessary to adequately mesh the teeth lubricate.

In addition to the fact that the entire machine is made considerably lighter and more compact by using a frequency converter, there are three additional options:

• 1. Modern frequency converters are no longer at fixed mains voltages and -frequencies bound, but they master a considerable range of Voltages and frequencies. This means that the machines can be equipped with There are no special motors for different countries.
• 2. A manual and / or electronically controlled speed adjustment Different processes can be done easily thanks to the frequency converter (e.g. with adjusting knob and analog input). Because the full performance or the full Pumping speed of a vacuum pump in many cases only in the initial phase of the Evacuation of a system (i.e. during outgassing) may be required after reaching the desired system pressure, the speed is reduced so far be that the desired pressure is just maintained. The pump can can be used practically as a pressure regulator and proportional to  Lowering the speed will also drive the motor to a considerable extent saved.
• 3. Because torque surges and increases in an electric motor of equivalent Current changes are accompanied by a frequency converter, which can be a electronic monitoring module is expanded, additional protection and Fulfill monitoring functions.

Sound absorption

Since the pump operates largely without contact except for the bearings and teeth, only a low level of mechanical noise can be expected. The closed working spaces between the rotors, however, are connected to the atmosphere side quite abruptly during operation, which inevitably creates pressure pulsations in the outlet area, which become noticeable as a dominant source of noise. There are four different options for noise reduction:

• 1. Controlled inlet of gas into the still closed work rooms calibrated holes in the housing wall. The pressure level in the Workrooms are raised even before connecting to the outlet is made. Corresponding to the reduced pressure difference, the amplitude decreases of pulsations. If the gas introduced is cold ambient air or is cooled exhaust gas, this measure also has a cooling effect that is also known as "pre-inlet cooling" in other types of machines.
• 2. Gradual enlargement of the radial gap between rotors and housing in the Area of the lower edge of the rotor when it is at operating temperature. Similar to how is under 1 here too the working space is filled up, only that here the inflow over the enlarged column takes place. A simultaneous cooling function is not possible here. Common to both measures is that they are the maximum possible Machine compression ratio deteriorate.
• 3. Integrated or external add-on silencer which is analogous to the oil cooler on the Machine is adjusted. The sound attenuation takes place here through deflections, absorbent linings as well as larger dead volumes and constrictions in the Exhaust route analogous to the exhaust systems of motor vehicles.
• 4. The installation of a weight or spring-loaded should be particularly efficient Check valve in the exhaust gas path, which depending on the operating point only so much Releases cross section as absolutely necessary. The noisy room is in the final pressure mode below the rotors then largely separated from the exhaust, so that a direct sound transmission can be almost completely prevented. This solution has the further advantage that it requires very little installation space and too does not lead to a deterioration in performance.

In practice, the combination of several options will probably prove to be optimal. In the standard version, the machine should have a standard integrated, robust and dirt-resistant sound insulation (e.g. 1, 2, 4) and the extreme noise requirements in laboratory operation or device construction should be met by a specially adapted and optimized add-on silencer. A particularly cost-effective version is presented in FIG. 5: Since this machine should have an overpressure valve ( 14 ) anyway due to the strong gradation, the same valve plate on the lower side ( 15 ) can act as a noise damper.

Vacuum protection

In Figs. 6 and 9, the machine is expanded by a suckback valve. When used as a vacuum pump, it is often undesirable for the pressure in the vacuum system which has been pumped empty to rise after the pump has been switched off. For this purpose, the suction nozzle ( 40 ) in Fig. 9 is sealed with a closure member ( 41 ). The closure member can be moved either by a spring-loaded electromagnet, which is housed in the housing ( 42 ), or by venting a piston, which in this case is also housed in 42 and is controlled by a solenoid valve ( 43 ). In both cases, the suction port valve must close when de-energized.

In Fig. 9, the length of the actuating member (magnet or piston) goes fully into the overall height of the machine. In order to prevent unnecessary enlargement of the machine, the actuating member ( 28 ) is connected to the closing member ( 30 ) in FIG. 6 and arranged next to it by a lever ( 29 ).

A horizontal arrangement of the actuator with 90 ° deflection can also turn out to be practical or relocation in the intake manifold, i.e. over the Obturator.

In any case, the actuator must be designed so that in the de-energized Condition that the inlet valve closes without delay.

Because the machine turns off when it is switched off or in the event of a power failure due to its inertia initially continues to turn, the return flow of the gas is practically complete excluded (switch-off air intake = zero). However, when switching on be ensured that the suction port valve does not open immediately, since the Machine takes a certain amount of time to get to its final speed and one correspondingly low pressure to come. A delayed opening or a speed-dependent control (e.g. if 70-90% of the set final speed) can be useful here. Here, too, the integrated Control and monitoring module on the frequency converter valuable services perform and open the option with optimal control, the switch-on air intake to bring it into a negligible range.

Protection of storage

This problem is solved by placing the upper bearings as high as possible and even moving them into the rotors, which are recessed for this purpose. If the seal fails or disappears completely, the bearing no longer forms the geodetically lowest point of the working area (as in Fig. 1), but the exhaust (see Fig. 5). As long as the exhaust is not completely blocked, liquid and dirt particles can escape from the exhaust unhindered and the bearings are well protected due to their elevated position and the long gap ( 16 in Fig. 5) between the rotor recess and the bearing base. Protection can be further improved by installing non-contact and thus wear-free labyrinth seals ( 17 ). Even the creation of swirling grooves or thread grooves in the gap can have a promoting effect in order to keep dirt and liquids from the bearing and to transport them back to the exhaust.

By additionally blowing sealing gas into the gap, even the contact can of the extracted gas can be completely prevented with storage. This Option is particularly important when pumping highly aggressive gases. As well the diffusion of gear oil into the work area can be achieved by using sealing gas completely prevent, so that the pump also for high-purity vacuum applications suitable is. Non-contact labyrinth seals are not subject to wear, they are usually made of metallic materials and are therefore almost arbitrary  temperature-resistant and since no frictional heat is generated, they can also be used as desired tolerate high speeds.

It can be useful to have the pump with a connection for Equip sealing gas.

Reduction of energy consumption through internal compression:
As can be seen in FIGS. 1 and 2, the helical recesses in the rotors are constant over the entire length and the diameter of the rotors does not change. The result of this design is that the stroke volume per revolution on the suction side is the same as on the pressure side. This is also necessary with the classic liquid-conveying screw pumps because liquids are incompressible. This design is unfavorable for gas-producing pumps, since gases are compressible. If you do without the compression during the conveying process and push the uncompressed gas against the pressure side, you have a so-called isochoric compression, which is energetically less favorable the higher the compression ratio. Especially with vacuum pumps with extremely high compression ratios, this type of compression is extremely energy-wasting and also leads to an undesirably high heating of the machine.

So that the machine can work in an energy-saving manner and with a high specific To achieve suction power, the design of the rotors is changed so that that the outlet-side stroke volume per revolution is smaller than the inlet-side. This is possible by changing the pitch of the spindles at the bottom pressure-side end of the rotors makes smaller than at the suction-side upper end.

Another possibility is that the rotor on the pressure side lower end gives a smaller diameter than at the upper end. As a result, the Rotors at the lower end less deeply one inside the other and the pressure side Workrooms are correspondingly smaller than the suction side.

This solution is particularly advantageous since the surface on which the outlet side Pressure acts, significantly reduced with the reduced diameter. The on the Axial thrust load acting on the bearing can be reduced as a result.

Through these measures, the energy requirement can be adjusted according to the ratio reduce the pressure to suction volume. I.e. if you e.g. B. that Displacement on the pressure side reduced to a third of the suction side, then the The power requirement of this vacuum pump in final pressure operation is also one third. Since vacuum pumps for the most part of their operating time in the range of Operated final pressure, this so-called internal compression leads in the long run to a very considerable energy saving.

FIG. 6 shows a pump whose internal compression is generated by a continuously decreasing gradient. The easy dismantling of the upper housing part for cleaning purposes is advantageous here, the disadvantage is the fact that the maximum possible compression ratio is limited to approx. 3 due to production and strength problems. Such a machine is more suitable for harsh operating conditions with high levels of dirt.

If, on the other hand, it is important to build an energy-saving, low-noise and "cold" pump that is as energy-efficient as possible, a variant according to FIG. 5 with stepped rotors and a high compression ratio is recommended. The diameter gradation of the rotors allows an arbitrarily high and freely selectable compression ratio, but has the disadvantage that the disassembly of the housing is only possible in connection with rotor disassembly or with a divided and thus complex housing. According to these properties, such a machine is more suitable for clean physical applications in which cleaning is not to be expected. In this variant, it may be necessary to install a pressure relief valve (14 in FIG. 5) in the intermediate area between the large and small stroke volumes of the rotors in the housing. At high suction pressures, the excess gas, which is pumped into the pump by the upper rotor part but can no longer be discharged from the lower rotor part, can escape through the pressure relief valve. Overcompression with a correspondingly high engine power requirement is thereby avoided. The pressure relief valve is closed at low suction pressures.

Particularly favorable for optimizing the compression ratio, the Energy consumption and noise emissions is when you add to that Diameter grading a reduction in pitch on the top or even both Performs rotor sections.

During gradual changes in pitch and diameter in terms of production technology are easily manageable, make continuous changes in incline and especially the diameter is a considerable challenge. Although a Machine with conical rotors (continuous diameter decrease) and continuously decreasing gradient would be theoretically optimal, you will be in the Practice concessions on the manufacturability and practical handling of the Have to make a machine and opt for one of the variants described above decide.

It is also worth mentioning that the design of the rotors can influence the construction of the bearing. Since the radial installation space in the machine according to FIG. 6 is very limited, the use of a plain bearing can be advantageous here, while the design with a stepped rotor ( FIG. 5) offers sufficient space for roller bearings.

Claims (20)

1.Vacuum pump or compressor in a standing arrangement, with two vertical parallel axes and overhung, mirror-symmetrical and screw-shaped rotors, which are mechanically synchronized in the ratio 1: 1, with the direction of flow from top to bottom, the rotors on the outlet side having a smaller stroke volume than on the inlet side and in which the upper bearings are accommodated in a base, the upper edge of which lies above the exhaust and whose motor (or two motors) is attached to the downwardly elongated rotor shaft and is fed via a frequency converter, characterized in that at least one oil circuit with a pressure-generating pump is installed, in which the oil circulation is a multiple of the amount that would be necessary for pure lubrication purposes and in which it is set up in a small part flow for lubrication purposes and a large part flow for cooling purposes. 2. Vacuum pump or compressor according to claim 1, characterized in that one or even two oil circuits installed by one or two Oil pumps are driven, with a circuit (or a partial circuit) with higher pressure and low volume flow can be operated and a second Circuit (or the residual circuit) with low pressure and higher volume flow and that through these cycles three to five tasks are performed simultaneously become. 3. Vacuum pump or compressor according to claim 1 or 2, characterized in that the mechanical points of contact, especially bearings and gears Lubricated with a small part flow of lubricant and if necessary with be cooled in a large partial flow. 4. Vacuum pump or compressor according to one of the preceding claims, characterized in that A hydraulic axial thrust compensation is available, which if necessary via a Pressure controller is controlled, which as the input value the pressure difference between Receives suction pressure and outlet pressure. 5. Vacuum pump or compressor according to one of the preceding claims, characterized in that an adapter for retrofitting oil / air or oil / water coolers as well as for filters and ultra-fine filters in main and sidestream operation and that this adapter may have a power connector for driving a Cooling fan is equipped. 6. Vacuum pump or compressor according to one of the preceding claims, characterized in that the pitch and / or the diameter of the rotor on the outlet side is smaller than on the inlet side. 7. Vacuum pump or compressor according to claim 6, characterized in that  the changes in pitch and / or diameter continuously or in steps respectively. 8. Vacuum pump or compressor according to one of the preceding claims characterized in that between the areas of large stroke volume and small stroke volume Pressure relief valve is attached, which at low pressure ratios discharged excess quantity discharged on the suction side. 9. Vacuum pump or compressor according to one of the preceding claims characterized in that the motor or motors are / are fed via frequency converters, which with different voltages and frequencies can be operated and which has a manual and an electrical / electronic speed setting. 10. Vacuum pump or compressor according to one of the preceding claims, characterized in that for noise reduction, a closure member is attached, which only so much Cross-section releases how it is necessary to discharge the amount of gas conveyed. 11. Vacuum pump or compressor according to one of the preceding claims, characterized in that to meet special noise requirements of the outlet nozzle is removable and in its place a specially adapted mounting silencer can be installed. 12. Vacuum pump or compressor according to one of the preceding claims, characterized in that to reduce noise and / or to lower the temperature of cooled gas or air precisely dosed quantity and position in the still closed work rooms is let in (pre-inlet cooling). 13. Vacuum pump or compressor according to one of the preceding claims, characterized in that the radial gap between the housing and the rotors is short when hot increases in front of the outlet side. 14. Vacuum pump according to one of the preceding claims, characterized in that In the suction area, a suction port valve is installed, which when switched off the machine responds immediately and when switched on either with a time delay or is opened depending on the speed. 15. Vacuum pump or compressor according to one of the preceding claims, characterized in that the upper bearing is designed as an oil-lubricated plain bearing. 16. Vacuum pump or compressor according to one of the preceding claims, characterized in that the lower bearing is free of axial play and radial play and for the Absorption of high axial forces is designed.   17. Vacuum pump or compressor according to one of the preceding claims, characterized in that a sealing gas supply in the gap between the rotor rotation and the bearing base is provided. 18. Vacuum pump or compressor according to one of the preceding claims, characterized in that the gear room opposite the work area with non-contact Labyrinth seals is separated. 19. Vacuum pump or compressor according to one of the preceding claims, characterized in that the gap between the rotor rotation and the bearing base is provided with threads is arranged so that rising dirt and liquids return Are encouraged towards the exhaust. 20. Vacuum pump or compressor according to one of the preceding claims, characterized in that the gap between the rotor shaft and the upper edge of the bearing base Is provided threads that are arranged so that rising oil or Oil mist is pumped back down into the gearbox.