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EP0458140A1 - Radiateur à haute puissance - Google Patents

Radiateur à haute puissance Download PDF

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Publication number
EP0458140A1
EP0458140A1 EP91107572A EP91107572A EP0458140A1 EP 0458140 A1 EP0458140 A1 EP 0458140A1 EP 91107572 A EP91107572 A EP 91107572A EP 91107572 A EP91107572 A EP 91107572A EP 0458140 A1 EP0458140 A1 EP 0458140A1
Authority
EP
European Patent Office
Prior art keywords
power radiator
radiator according
discharge
tubes
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91107572A
Other languages
German (de)
English (en)
Other versions
EP0458140B1 (fr
Inventor
Ulrich Dr. Kogelschatz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excelitas Noblelight GmbH
Original Assignee
ABB Asea Brown Boveri Ltd
Heraeus Noblelight GmbH
Asea Brown Boveri AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB Asea Brown Boveri Ltd, Heraeus Noblelight GmbH, Asea Brown Boveri AB filed Critical ABB Asea Brown Boveri Ltd
Publication of EP0458140A1 publication Critical patent/EP0458140A1/fr
Application granted granted Critical
Publication of EP0458140B1 publication Critical patent/EP0458140B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions, the walls of which are formed by an outer and an inner tubular dielectric, each having an inner and a surface on the surfaces facing away from the discharge space outer electrode are provided, and with an AC power source connected to these electrodes for supplying the discharge.
  • the invention relates to a state of the art, such as results from EP-A 0 254 111, US patent application 07/485544 dated February 27, 1990 or also EP patent application 90103082.5 dated February 17, 1990.
  • UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
  • the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the low-pressure mercury lamps at 185 nm and especially at 254 nm.
  • Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then but distribute their radiation over a larger wavelength range.
  • the new excimer lasers have provided some new wavelengths for basic photochemical experiments, are currently for cost reasons for an industrial process probably only suitable in exceptional cases.
  • the structure of such an excimer radiator largely corresponds to that of a conventional ozone generator, with the essential difference that at least one of the electrodes and / or dielectric layers delimiting the discharge space is transparent to the radiation generated.
  • the high-performance radiators mentioned are characterized by high efficiency, economical structure and enable the creation of large area radiators, with the restriction that large-area flat radiators require a rather large technical effort.
  • the emitters in the EP patent application mentioned at the outset are 90103082.5 the inner dielectric tubes are very small compared to the outer dielectric tubes.
  • the invention has for its object to provide a high-performance radiator, in particular for UV or VUV radiation, which is characterized in particular by high efficiency, is economical to manufacture, enables the construction of very large area radiators and in which the UV radiation can be specifically concentrated on a radiation angle that can be selected within wide limits and the inner electrode can no longer cast a shadow.
  • the outer electrode extends only over a fraction of the outer circumference of the outer dielectric tube, in such a way that discharges form only in a discharge segment which is essentially defined by the outer electrode.
  • the radiation can be coupled out in a defined direction, which is particularly advantageous when irradiating flat or curved surfaces, since the electrical discharges can only form on the surface facing the material to be irradiated.
  • the external electrodes in addition to those already in the relevant Wire networks or wire meshes described in the literature also serve as electrically conductive, UV-transparent coatings, for example made of conductive lacquer or thin metal films.
  • the outer electrode in liquid form by only partially immersing the outer tube in a transparent electrolyte, preferably water. This arrangement is particularly suitable for irradiating temperature-sensitive substances (eg gluing LCD cells, irradiating thin foils) because water very effectively blocks any infrared radiation from the discharge.
  • the electrolyte can be circulated via a thermostat and in this way kept at a constant low temperature.
  • a suitable filtering effect can additionally be achieved by suitable selection of the electrolyte.
  • the angular range of the ignited segment can be changed via the immersion depth of the outer tube in the electrolyte.
  • the inner electrode is preferably of classic design, i.e. consists of a metal coating applied to the inner surface of the inner dielectric tube, e.g. Aluminum vapor deposition. In this way, the inner electrode also acts as a reflector for the UV radiation. If cooling is desired, a flow of coolant (gas or liquid) can be passed through the inner tube.
  • a flow of coolant gas or liquid
  • the outer tubes are advantageously arranged in groove-shaped semi-cylindrical recesses in a support body made of an electrically insulating, but good heat-conducting material.
  • a support body made of an electrically insulating, but good heat-conducting material.
  • Such materials are available on a ceramic basis, for example aluminum nitride (AlN) or beryllium oxide (BeO) as well as on a plastic basis (casting compounds for transformers and electrical circuits). With less extreme requirements more common materials such as aluminum oxide (Al2O3), glass ceramics or heat-resistant plastics such as polytetrafluoroethylene are also suitable.
  • the supporting body and thus the outer pipes for example by providing cooling channels running in the longitudinal direction of the pipe in the supporting body.
  • the reflectivity of the semi-cylindrical recesses in the supporting body can be improved by a metallic mirror coating, for example an aluminum layer with a protective layer of magnesium fluoride (MgF2).
  • MgF2 magnesium fluoride
  • UV treatment in the absence of air is indicated.
  • the first reason is when the radiation is so short-wave that it is absorbed by air and thus weakened (wavelengths ⁇ 190 nm). This radiation leads to oxygen splitting and thus to undesired ozone formation.
  • the second reason is when the intended photochemical effect of UV radiation is hindered by the presence of oxygen (oxygen inhibition). This occurs, for example, in the photo crosslinking (UV polymerization, UV drying) of paints and inks.
  • an inner quartz tube 2 is arranged coaxially in an outer quartz tube 1 with a wall thickness of approximately 0.5 to 1.5 mm and an outer diameter of approximately 20 to 30 mm.
  • the inner surface of the inner quartz tube 2 is provided with an inner electrode 3, which is produced for example by coating with aluminum.
  • An outer electrode 4 in the form of a narrow strip of wire mesh extends only over a small part of the circumference of the outer quartz tube 1.
  • the quartz tubes 1 and 2 are closed at both ends.
  • the space between the two tubes 1 and 2, the discharge space 5, is filled with a gas / gas mixture which emits radiation under discharge conditions.
  • the two electrodes 3, 4 are connected to the two poles of an alternating current source 6.
  • the AC power source basically corresponds to those used to feed ozone generators.
  • the fill gas is e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • the electron energy distribution can be optimally adjusted by the thickness of the dielectrics and their properties, pressure and / or temperature in the discharge space.
  • two narrow outer electrodes 4a and 4b (FIG. 1b) spaced apart from one another or a wider wire mesh that extends approximately over a sixth of the tube circumference (FIG. 1c) can also be used.
  • a perforated metal foil or a UV-transparent, electrically conductive covering can also be used.
  • a transparent electrolyte can also be used.
  • three dielectric tubes 1 with internal dielectric tubes 2 provided with internal electrodes 3 are immersed in a quartz vessel 8 filled with water 4 '.
  • the size of the ignited segment can be varied via the immersion depth t.
  • an additional optical filter effect can be achieved: for example, water very effectively blocks any infrared radiation from the discharge. This is particularly important when irradiating very temperature-sensitive substances.
  • FIG. 3 illustrates the manner in which a plurality of cylinder radiators according to FIG. 1c can be combined to form a surface radiator.
  • the grooves 10 are adapted to the outer quartz tubes 1 and by coating with a UV-reflecting material, for example aluminum, which is provided with a protective layer of MgF2. Additional bores 11, which run in the direction of the tubes 1, serve to cool the individual radiators.
  • single emitters can be combined with different gas fillings and thus different (UV) wavelengths.
  • the support body 9 does not necessarily have to be plate-shaped. It can also have a hollow cylindrical cross section with axially parallel grooves distributed regularly over its inner circumference, into each of which a radiator element according to FIGS. 1a to 1c is inserted analogously to FIG. 7 or FIG. 8 of the patent application ER 90103082.5 mentioned at the beginning.
  • the radiation device according to FIG. 4 basically corresponds to that according to FIG. 3. with additional channels 12 running in the longitudinal direction of the support body 9. These channels are connected to the outer space 13 via a large number of bores or slots 14 in the support body 9.
  • the channels 12 are connected to an inert gas source, not shown, for example nitrogen or argon source.
  • the pressurized inert gas reaches the treatment room 13 from the channels 12 in the manner described.
  • FIG. 4 shows a particularly simple and economical design for the outer electrode.
  • This outer electrode is common to all emitters. It consists of a continuous wire mesh or wire mesh 15 with in Pipe longitudinal direction extending semicircular bulges that nestle against the outer quartz tubes 1.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Lasers (AREA)
EP91107572A 1990-05-22 1991-05-10 Radiateur à haute puissance Expired - Lifetime EP0458140B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1738/90A CH680099A5 (fr) 1990-05-22 1990-05-22
CH1738/90 1990-05-22

Publications (2)

Publication Number Publication Date
EP0458140A1 true EP0458140A1 (fr) 1991-11-27
EP0458140B1 EP0458140B1 (fr) 1995-09-06

Family

ID=4217429

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91107572A Expired - Lifetime EP0458140B1 (fr) 1990-05-22 1991-05-10 Radiateur à haute puissance

Country Status (6)

Country Link
US (1) US5214344A (fr)
EP (1) EP0458140B1 (fr)
JP (1) JPH04229671A (fr)
AT (1) ATE127617T1 (fr)
CH (1) CH680099A5 (fr)
DE (1) DE59106397D1 (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547366A1 (fr) * 1991-12-09 1993-06-23 Heraeus Noblelight GmbH Radiateur à haute puissance
DE4302555A1 (de) * 1992-01-29 1993-09-30 Fusion Systems Corp Excimerlampe mit einer Hochdruckfüllung
EP0703602A1 (fr) * 1994-09-20 1996-03-27 Ushiodenki Kabushiki Kaisha Dispositif source de lumière utilisant une lampe à décharge à barrière diélectrique
US5666026A (en) * 1994-09-20 1997-09-09 Ushiodenki Kabushiki Kaisha Dielectric barrier discharge lamp
EP0831517A3 (fr) * 1996-09-20 1998-08-26 Ushiodenki Kabushiki Kaisha Dispositif à décharge à barrière diélectrique
EP1519407A3 (fr) * 2003-08-06 2007-08-15 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Radiateur UV avec enveloppe tubulaire
DE102012219064A1 (de) 2012-10-19 2014-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern
DE102014207690A1 (de) 2014-04-24 2015-10-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur photochemischen Behandlung oder Reinigung eines flüssigen Mediums
DE102014207688A1 (de) 2014-04-24 2015-10-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur photochemischen Behandlung von verunreinigtem Wasser

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US5645964A (en) 1993-08-05 1997-07-08 Kimberly-Clark Corporation Digital information recording media and method of using same
US6211383B1 (en) 1993-08-05 2001-04-03 Kimberly-Clark Worldwide, Inc. Nohr-McDonald elimination reaction
US5865471A (en) 1993-08-05 1999-02-02 Kimberly-Clark Worldwide, Inc. Photo-erasable data processing forms
US5681380A (en) 1995-06-05 1997-10-28 Kimberly-Clark Worldwide, Inc. Ink for ink jet printers
US6017471A (en) 1993-08-05 2000-01-25 Kimberly-Clark Worldwide, Inc. Colorants and colorant modifiers
US6017661A (en) 1994-11-09 2000-01-25 Kimberly-Clark Corporation Temporary marking using photoerasable colorants
US5733693A (en) 1993-08-05 1998-03-31 Kimberly-Clark Worldwide, Inc. Method for improving the readability of data processing forms
US6242057B1 (en) 1994-06-30 2001-06-05 Kimberly-Clark Worldwide, Inc. Photoreactor composition and applications therefor
US5685754A (en) 1994-06-30 1997-11-11 Kimberly-Clark Corporation Method of generating a reactive species and polymer coating applications therefor
DE4430300C1 (de) * 1994-08-26 1995-12-21 Abb Research Ltd Excimerstrahler und dessen Verwendung
US5786132A (en) 1995-06-05 1998-07-28 Kimberly-Clark Corporation Pre-dyes, mutable dye compositions, and methods of developing a color
BR9608367A (pt) 1995-06-05 1998-08-18 Kimberly Clark Co Pré-corantes novos
CA2221565A1 (fr) 1995-06-28 1997-01-16 Kimberly-Clark Worldwide, Inc. Colorants et modificateurs nouveaux
JPH10513502A (ja) 1995-11-28 1998-12-22 キンバリー クラーク ワールドワイド インコーポレイテッド 改良された着色剤安定剤
US5855655A (en) 1996-03-29 1999-01-05 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5782963A (en) 1996-03-29 1998-07-21 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US6099628A (en) 1996-03-29 2000-08-08 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5891229A (en) 1996-03-29 1999-04-06 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US6524379B2 (en) 1997-08-15 2003-02-25 Kimberly-Clark Worldwide, Inc. Colorants, colorant stabilizers, ink compositions, and improved methods of making the same
US6015759A (en) * 1997-12-08 2000-01-18 Quester Technology, Inc. Surface modification of semiconductors using electromagnetic radiation
US6049086A (en) * 1998-02-12 2000-04-11 Quester Technology, Inc. Large area silent discharge excitation radiator
JP3521731B2 (ja) 1998-02-13 2004-04-19 ウシオ電機株式会社 誘電体バリア放電ランプ光源装置
US5993278A (en) * 1998-02-27 1999-11-30 The Regents Of The University Of California Passivation of quartz for halogen-containing light sources
PL342006A1 (en) 1998-06-03 2001-05-07 Kimberly Clark Co Neonanoplasts and method of obtaining microemulsions for printing inks being applied by spraying
SK1552000A3 (en) 1998-06-03 2000-08-14 Kimberly Clark Co Novel photoinitiators and applications therefor
EP1100852A1 (fr) 1998-07-20 2001-05-23 Kimberly-Clark Worldwide, Inc. Compositions a jet d'encre ameliorees
JP3346291B2 (ja) * 1998-07-31 2002-11-18 ウシオ電機株式会社 誘電体バリア放電ランプ、および照射装置
DE69930948T2 (de) 1998-09-28 2006-09-07 Kimberly-Clark Worldwide, Inc., Neenah Chelate mit chinoiden gruppen als photoinitiatoren
KR100797904B1 (ko) * 1998-12-28 2008-01-24 가부시키가이샤 지에스 유아사 코포레이션 무성방전등 및 그의 사용방법
US6368396B1 (en) 1999-01-19 2002-04-09 Kimberly-Clark Worldwide, Inc. Colorants, colorant stabilizers, ink compositions, and improved methods of making the same
US6331056B1 (en) 1999-02-25 2001-12-18 Kimberly-Clark Worldwide, Inc. Printing apparatus and applications therefor
US6294698B1 (en) 1999-04-16 2001-09-25 Kimberly-Clark Worldwide, Inc. Photoinitiators and applications therefor
US6368395B1 (en) 1999-05-24 2002-04-09 Kimberly-Clark Worldwide, Inc. Subphthalocyanine colorants, ink compositions, and method of making the same
US6567023B1 (en) 1999-09-17 2003-05-20 Kabushiki Kaisha Toshiba Analog to digital to analog converter for multi-valued current data using internal binary voltage
DE10145648B4 (de) * 2001-09-15 2006-08-24 Arccure Technologies Gmbh Bestrahlungsvorrichtung mit veränderlichem Spektrum
US6971939B2 (en) * 2003-05-29 2005-12-06 Ushio America, Inc. Non-oxidizing electrode arrangement for excimer lamps
WO2005104184A1 (fr) * 2004-04-22 2005-11-03 Futaba Technology Corporation Dispositif d’irradiation par rayons ultraviolets
DE102004030803A1 (de) * 2004-06-25 2006-01-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hochreflektiv beschichteter mikromechanischer Spiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung
DE102004048005A1 (de) * 2004-10-01 2006-04-13 Dr. Hönle AG Gasentladungslampe, System und Verfahren zum Härten von durch UV-Licht härtbare Materialien sowie durch UV-Licht gehärtetes Material
US8022377B2 (en) * 2008-04-22 2011-09-20 Applied Materials, Inc. Method and apparatus for excimer curing
DE102010043215A1 (de) * 2010-11-02 2012-05-03 Osram Ag Strahler mit Sockel für die Bestrahlung von Oberflächen
US9722550B2 (en) 2014-04-22 2017-08-01 Hoon Ahn Power amplifying radiator (PAR)
US20170082302A1 (en) * 2015-09-22 2017-03-23 Ribe Jern Holding A/S Radiator with heat insulation plate and radiator arrangement

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038577A (en) * 1969-04-28 1977-07-26 Owens-Illinois, Inc. Gas discharge display device having offset electrodes
EP0324953A1 (fr) * 1988-01-15 1989-07-26 Heraeus Noblelight GmbH Source de radiation à haute puissance
EP0385205A1 (fr) * 1989-02-27 1990-09-05 Heraeus Noblelight GmbH Dispositif de radiation à haute puissance
EP0254111B1 (fr) * 1986-07-22 1992-01-02 BBC Brown Boveri AG Dispositif de rayonnement ultraviolet

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JPS63314753A (ja) * 1987-06-17 1988-12-22 Matsushita Electric Works Ltd 無電極放電灯

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038577A (en) * 1969-04-28 1977-07-26 Owens-Illinois, Inc. Gas discharge display device having offset electrodes
EP0254111B1 (fr) * 1986-07-22 1992-01-02 BBC Brown Boveri AG Dispositif de rayonnement ultraviolet
EP0324953A1 (fr) * 1988-01-15 1989-07-26 Heraeus Noblelight GmbH Source de radiation à haute puissance
EP0385205A1 (fr) * 1989-02-27 1990-09-05 Heraeus Noblelight GmbH Dispositif de radiation à haute puissance

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547366A1 (fr) * 1991-12-09 1993-06-23 Heraeus Noblelight GmbH Radiateur à haute puissance
DE4302555A1 (de) * 1992-01-29 1993-09-30 Fusion Systems Corp Excimerlampe mit einer Hochdruckfüllung
DE4302555C2 (de) * 1992-01-29 1998-07-09 Fusion Uv Sys Inc Elektrodenlose Entladungslampe
EP0703602A1 (fr) * 1994-09-20 1996-03-27 Ushiodenki Kabushiki Kaisha Dispositif source de lumière utilisant une lampe à décharge à barrière diélectrique
US5666026A (en) * 1994-09-20 1997-09-09 Ushiodenki Kabushiki Kaisha Dielectric barrier discharge lamp
US5936358A (en) * 1996-09-20 1999-08-10 Ushiodenki Kabushiki Kaisha Dielectric barrier discharge device
EP0831517A3 (fr) * 1996-09-20 1998-08-26 Ushiodenki Kabushiki Kaisha Dispositif à décharge à barrière diélectrique
EP1519407A3 (fr) * 2003-08-06 2007-08-15 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Radiateur UV avec enveloppe tubulaire
DE102012219064A1 (de) 2012-10-19 2014-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern
US9718705B2 (en) 2012-10-19 2017-08-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. UV light source having combined ionization and formation of excimers
DE102014207690A1 (de) 2014-04-24 2015-10-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur photochemischen Behandlung oder Reinigung eines flüssigen Mediums
DE102014207688A1 (de) 2014-04-24 2015-10-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur photochemischen Behandlung von verunreinigtem Wasser
WO2015162264A1 (fr) 2014-04-24 2015-10-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dispositif de traitement photochimique d'eau contaminée
US10125032B2 (en) 2014-04-24 2018-11-13 Sico Technology Gmbh Device for the photochemical treatment or cleaning of a liquid medium

Also Published As

Publication number Publication date
CH680099A5 (fr) 1992-06-15
EP0458140B1 (fr) 1995-09-06
DE59106397D1 (de) 1995-10-12
ATE127617T1 (de) 1995-09-15
US5214344A (en) 1993-05-25
JPH04229671A (ja) 1992-08-19

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