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EP0107791B1 - Méthode de fabrication des dérivations de guides d'ondes lumineuses et des multi-démultiplexeurs à l'aide du principe de séparation des rayons lumineux - Google Patents

Méthode de fabrication des dérivations de guides d'ondes lumineuses et des multi-démultiplexeurs à l'aide du principe de séparation des rayons lumineux Download PDF

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Publication number
EP0107791B1
EP0107791B1 EP83109570A EP83109570A EP0107791B1 EP 0107791 B1 EP0107791 B1 EP 0107791B1 EP 83109570 A EP83109570 A EP 83109570A EP 83109570 A EP83109570 A EP 83109570A EP 0107791 B1 EP0107791 B1 EP 0107791B1
Authority
EP
European Patent Office
Prior art keywords
component
light waveguides
filtering
reflective coating
assembled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP83109570A
Other languages
German (de)
English (en)
Other versions
EP0107791A1 (fr
Inventor
Herbert Michel
Walter Rauscher
Armin Dipl.-Phys. Reichelt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0107791A1 publication Critical patent/EP0107791A1/fr
Application granted granted Critical
Publication of EP0107791B1 publication Critical patent/EP0107791B1/fr
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
    • G02B6/29368—Light guide comprising the filter, e.g. filter deposited on a fibre end
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49799—Providing transitory integral holding or handling portion

Definitions

  • the present invention relates to a method for the production of optical waveguides and multi / demultiplexers according to the beam splitter principle according to the preamble of claim 1.
  • a method of the type mentioned is known from EP-A1-026 379.
  • the optical waveguides are arranged on one side surface of one body in parallel grooves and fixed therein by means of adhesive.
  • the invention aims at a good and accurate fixation of the optical waveguide on one body and the other body on the composite body with a filter or mirror layer.
  • the method according to the invention has the advantage that the optical waveguides are fastened on one body not only by an adhesive but also by a fixed cover body and that when the cover body is removed, which is carried out by grinding, a very precise, flat contact surface for the further body can be created.
  • the cover body removal is preferably carried out according to claim 2 on the composite body with filter or mirror layer.
  • optical waveguides are arranged in grooves.
  • the wavelength-selective filter layer or the partially transparent mirror layer is usually applied by vapor deposition. Difficulties arise in the manufacture of branches and multi or demultiplexers with fiber tails because the fiber tails interfere with the recipient. To avoid these difficulties, the procedure can be as set out in claim 8. Due to the double or multiple cutting, a fiber-tail-free separating part with a polished separating surface to be steamed can be obtained, which can be steamed without interference in the recipient. Additional coupling losses have to be accepted with this method, but these are low.
  • Figures 1 and 2 show in a side or fragmentary end view the one body used in the manufacture of the branch or multi / demultiplexer with 45 'mirror or filter.
  • This has a base body, which consists of a support body 1, for example made of quartz glass, to which a silicon plate 2 is glued.
  • a plurality of equidistant, V-shaped grooves 21 have been produced in the silicon wafer 2 by anisotropic etching, which run parallel to FIGS. 1 to 5 and are arranged in the flat side surface 20 of the silicon wafer facing away from the support body 1.
  • Optical waveguides 4 in the form of glass fibers, in particular core-cladding glass fibers, are cemented into these grooves 21 with the aid of a glass cover plate 3.
  • the body according to FIGS. 1 and 2 is vertical along the section line I - I drawn in FIG. 1 and enclosing an angle of 45 ° with the fiber axes
  • the plane of the drawing is severed and the dividing surfaces 51 and 61 are ground and optically polished on the dividing parts that are created and shown in FIG. 3.
  • the cut can expediently also be made at an angle of, for example, 70 ° to the fiber axes.
  • a partially transparent mirror layer or filter layer is evaporated onto one of the two separating surfaces 51 and 61, for example the separating surface 51, which must be wavelength-selective in the case of multi / demultiplexers.
  • This layer is designated by 7 in FIG.
  • the cover plate 3 is ground off from the body with filter or mirror shown in FIG. To reduce reflection losses, part of the fiber cladding of the fibers 4 can also be ground off if necessary.
  • the further body can basically be constructed in the same way as the one body according to FIGS. 1 and 2. It can consist of a base body, for example a support body 1 'onto which a silicon plate 2' is glued, in the free surface of which several equidistant V-shaped grooves 21 'have been produced by anisotropic etching, into the optical waveguides 4' with the aid of a cover body 3 'are cemented.
  • a base body for example a support body 1 'onto which a silicon plate 2' is glued, in the free surface of which several equidistant V-shaped grooves 21 'have been produced by anisotropic etching, into the optical waveguides 4' with the aid of a cover body 3 'are cemented.
  • the optical fibers 4 'end in a side surface 81 of the further body 8 i.e. this surface 81 has fiber end faces. This surface 81 is ground and polished together with the fiber end faces.
  • the further body 8 is placed with its end face 81 on the ground surface 82 of the body with the filter or mirror 7 and then the two bodies are adjusted to one another so that the light coupled out of a fiber 4 on the filter or mirror 7 into the its associated fiber 4 'of the further body 8 is coupled.
  • the two bodies are cemented to one another, so that the branch or multi- / demultiplexer shown in FIG. 5 has arisen.
  • the assembled body according to FIG. 5 can be sawn into individual branches or multi / demultiplexers parallel to a plane spanned by a fiber 4 and the fiber 4 ′ assigned to it.
  • glass bodies or other plastically deformable bodies can also be used as the base body, into which V-shaped grooves are scored, sawn, pressed or embossed.
  • FIG. 6 shows, in the same side view as in FIG. 7, the one body used in this production, which is identical to the carrier body according to FIGS. 1 and 2 except for the fiber tails projecting beyond the body on both sides.
  • the fibers projecting beyond a body are designated 9 and 9 'in FIGS. 6 to 9.
  • the body according to FIG. 1 is severed vertically to the plane of the drawing along the line of intersection II-11, which forms an angle of 70 ° with the fiber axes, so that the two separating parts 5 ′, 6 ′ shown in FIG. 7 with the separating surfaces 51 ′ and ⁇ 61 ′ arise.
  • a frequency-selective filter layer 7 ' is evaporated onto one of the two ground and polished separating surfaces, for example the separating surface 51', and then the two separating parts 5 'and 6' are reassembled and connected to one another in such a way that a body identical to that of FIG Filter layer is created.
  • the one body can first be cut along the section line A - A or B - B at an angle of 70 ° or 45 ° before cutting. After vapor deposition, all three or four parts of the body have to be adjusted to each other again. If the body is cut both along the section line A - A and the section line B - B, the structure of the taps or multi- / demultiplexers can be carried out as in the method according to FIGS. 1 to 5, by initially only using the one between the Section lines A - A and B - B lying middle section of the body is worked. Only when a composite body corresponding to FIG.
  • the cover plate 3 of the body formed in both cases with a filter or mirror and at least one additional construction joint is ground down to put on the further body 8.
  • a complete grinding of the cover plate 3 must be avoided here because of the risk of breaking the protruding fibers.
  • the cover plate 3 is therefore only removed in a central section of the body in which the further body is to be placed. In end sections of one Body remains of the cover plate remain, so that the body shown in Figure 8 is formed. In the central section, a part of the jacket of the fibers can also be removed if necessary.
  • the removal of the cover plate 3 and possibly the fiber sheaths in some areas can be accomplished, for example, with a fine-grained diamond disc.
  • Figure 9 shows the finished end product after the body joining step.
  • the fibers 9 'of the further body 8 of the end product branch in accordance with the law of reflection and the 70 ° angle between the fibers 9 and the filter 7; at an angle of 40 ° to the fibers 9.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)

Claims (9)

1. Procédé pour fabriquer des dispositifs de dérivation et des multiplexeurs-démultiplexeurs de guides d'ondes optiques conformément au principe des diviseurs de faisceaux, et selon lequel on subdivise un corps (1), sur une surface latérale (20) duquel se trouvent disposés et fixés des guides d'ondes optiques (4;9) parallèles, obliquement par rapport à la direction longitudinale des guides d'ondes optiques (4;9) de manière à obtenir deux parties séparées (5, 6; 5', 6'), dont chacune comporte des guides d'ondes optiques séparés et parallèles, qui se terminent au niveau des surfaces de séparation (51, 61; 51', 61'), produites lors de la subdivision et présentes sur les deux parties séparées (5, 6; 5', 6'), et selon lequel on recouvre au moins l'une (51; 51') de ces surfaces de séparation (51, 61; 51', 61') avec une couche (7; 7') formant filtre ou miroir, et selon lequel on fixe ensuite à nouveau l'une contre l'autre les deux parties séparées (5, 6; 5', 6'), au niveau de leurs surfaces de séparation (51,61; 51 61') se faisant face, de manière que les guides d'ondes optiques parallèles et séparés par la couche formant filtre ou miroir (7; 7') soient à nouveau alignés, et selon lequel on fixe sur les surfaces latérales (82), qui portent les guides d'ondes optiques séparés et alignés, du corps assemblé obtenu et contenant la couche (7; 7') formant filtre ou miroir, un corps supplémentaire (8), sur lequel sont fixés des guides d'ondes optiques (4'; 9') parallèles, qui se terminent au niveau d'une surface latérale (81) de ce corps (8), de telle sorte que ces deux surfaces latérales (81, 82) sont disposées mutuellement en vis-à-vis et les guides d'ondes optiques séparés et alignés et les guides d'ondes optiques (4'; 9') du corps supplémentaire (8) sont associés entre eux, caractérisé par le fait que les guides d'ondes optiques (4, 9), disposés sur une surface latérale (20) du premier corps (1), sont fixés à l'aide d'un corps de recouvrement (3) disposé au-dessus de ces guides d'ondes et qu'on réalise une élimination du corps de recouvrement avant la mise en place du corps supplémentaire (8) sur le corps assemblé et contenant la couche (7; 7') formant filtre ou miroir.
2. Procédé selon la revendication 1, caractérisé par le fait que l'on exécute l'enlèvement du corps de recouvrement sur le corps assemblé comportant la couche (7, 7') formant filtre ou miroir.
3. Procédé suivant la revendication 1 ou 2, caractérisé par le fait que l'on retient une partie de la gaine des guides d'ondes optiques (4;9), qui sont constitués par une fibre de verre comportant un coeur et une gaine ou bien de guides d'ondes optiques subdivisés.
4. Procédé suivant l'une des revendications précédentes, caractérisé par le fait qu'on élimine le corps de recouvrement (3) uniquement dans une section médiane de sorte que les sections terminales du corps de recouvrement (3) subsistent sur le corps assemblé et contenant la couche (7;7') formant filtre ou miroir (figure 8).
5. Procédé suivant l'une des revendications précédentes caractérisé par le fait qu'une face latérale (20) d'un corps (1) comporte des rainures parallèles (21), dans lesquelles sont disposés les guides d'ondes optiques (4; 9).
6. Procédé suivant la revendication 5, caractérisé par le fait qu'un corps (1) est constitué par du verre ou un matériau déformable plastiquement et dans lequel les rainures (21) sont formées par rainurage, sciage, matriçage ou gaufrage.
7. Procédé suivant la revendication 5, caractérisé par le fait que les rainures (21) sont ménagées au moyen d'une corrosion correspondante dans une plaquette (2) située sur le corps (1) est constituée en un matériau pouvant être corrodé d'une manière anisotrope, et possèdent un profil en V.
8. Procédé suivant l'une des revendications précédente, notamment la revendication 4, caractérisé par le fait qu'on réalise dans le corps (1) muni des guides d'ondes optiques (4; 9), au moins deux subdivisions de sorte que l'on obtient plus de deux parties séparées, que l'on réunit à nouveau moyennant l'interposition d'une couche formant filtre ou miroir de telle manière que les guides d'ondes optiques séparés sont à nouveau alignés.
9. Procédé suivant l'une des revendications précédentes, caractérisé par le fait que le corps assemblé, contenant la couche (7; 7') formant filtre ou miroir et le corps supplémentaire (8) possèdent des surfaces de référence qui peuvent être appliquées contre une surface de butée et sont parallèles aux plans définis par les guides d'ondes optiques séparés et alignés, associés par couples, du corps assemblé et des guides d'ondes optiques (4'; 9') du corps supplémentaire (3).
EP83109570A 1982-09-29 1983-09-26 Méthode de fabrication des dérivations de guides d'ondes lumineuses et des multi-démultiplexeurs à l'aide du principe de séparation des rayons lumineux Expired EP0107791B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3236149 1982-09-29
DE19823236149 DE3236149A1 (de) 1982-09-29 1982-09-29 Verfahren zur herstellung von lichtwellenleiter-abzweigern und -multi-/demultiplexern nach dem strahlteilerprinzip

Publications (2)

Publication Number Publication Date
EP0107791A1 EP0107791A1 (fr) 1984-05-09
EP0107791B1 true EP0107791B1 (fr) 1987-12-16

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EP83109570A Expired EP0107791B1 (fr) 1982-09-29 1983-09-26 Méthode de fabrication des dérivations de guides d'ondes lumineuses et des multi-démultiplexeurs à l'aide du principe de séparation des rayons lumineux

Country Status (4)

Country Link
US (1) US4541159A (fr)
EP (1) EP0107791B1 (fr)
JP (1) JPS5983109A (fr)
DE (2) DE3236149A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0204980A1 (fr) * 1985-06-03 1986-12-17 Siemens Aktiengesellschaft Méthode de fabrication d'un connecteur pour des guides d'ondes optiques comportant trois portes ou plus utilisant le principe de division du faisceau
EP0234280A1 (fr) * 1986-01-31 1987-09-02 Siemens Aktiengesellschaft Commutateur de lumière pour un système de communication avec trois raccordements de lumière
FR2608785B1 (fr) * 1986-12-19 1989-08-04 Thomson Csf Dispositif de connexion de fibres optiques a un circuit optique integre et procede de realisation
US4900118A (en) * 1987-05-22 1990-02-13 Furukawa Electric Co., Ltd. Multiple-fiber optical component and method for manufacturing of the same
JPH0284601A (ja) * 1988-06-29 1990-03-26 Furukawa Electric Co Ltd:The 光部品とその製造方法
JPH0321905A (ja) * 1989-06-19 1991-01-30 Fujitsu Ltd 偏波カプラ
GB9203128D0 (en) * 1992-02-14 1992-04-01 Lucas Ind Plc Alignment device for optical fibre
JPH07104148A (ja) * 1993-10-01 1995-04-21 Nippon Hoso Kyokai <Nhk> 光部品
US5562657A (en) * 1994-09-19 1996-10-08 Griffin; Stephen E. Side fire laser catheter method and apparatus
US6819871B1 (en) 2001-03-16 2004-11-16 4 Wave, Inc. Multi-channel optical filter and multiplexer formed from stacks of thin-film layers
WO2013176135A1 (fr) * 2012-05-22 2013-11-28 日本電気株式会社 Convertisseur de chemin optique et procédé de fabrication dudit convertisseur

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3820396A (en) * 1971-04-22 1974-06-28 A Gamer Fluid signal indicator
DE2851679C2 (de) * 1978-11-29 1983-02-17 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung eines Verzweigerelements nach dem Strahlteilerprinzip
DE2851667A1 (de) * 1978-11-29 1980-07-10 Siemens Ag Abzweigelement fuer monomode-lichtwellenleiter und verfahren zu seiner herstellung
DE2920957C2 (de) * 1979-05-23 1984-08-23 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung eines Verzweigerelements
DE2938810A1 (de) * 1979-09-25 1981-04-09 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum einkoppeln von strahlung in einen optischen wellenleiter
DE3008106A1 (de) * 1980-03-03 1981-09-10 Siemens AG, 1000 Berlin und 8000 München Vielfach-verzweigerelement
DE3008029A1 (de) * 1980-03-03 1981-09-10 Siemens AG, 1000 Berlin und 8000 München Optischer baustein fuer multiplexer/demultiplexer
DE3012184A1 (de) * 1980-03-28 1981-10-08 Siemens AG, 1000 Berlin und 8000 München Lichtwellenleiterverzweigung
GB2072876B (en) * 1980-04-02 1983-11-09 Int Standard Electric Corp Bidirectional coupler for communication over a single fibre
US4336047A (en) * 1981-01-02 1982-06-22 The United States Of America As Represented By The Secretary Of The Navy Method for fabricating single-mode and multimode fiber optic access couplers
DE3112801A1 (de) * 1981-03-31 1982-10-14 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung von faserverzweigern nach dem strahlteilerprinzip

Also Published As

Publication number Publication date
JPS5983109A (ja) 1984-05-14
DE3236149A1 (de) 1984-03-29
US4541159A (en) 1985-09-17
EP0107791A1 (fr) 1984-05-09
DE3374963D1 (en) 1988-01-28

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