DE69125044D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number: DE69125044D1
Authority: DE; Germany
Prior art keywords: vacuum pump; vacuum; pump
Prior art date: 1990-04-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69125044T

Other languages

English (en)

Other versions

DE69125044T2 (de

Inventor

Minoru Taniyama

Masahiro Mase

Kazuaki Nakamori

Takashi Nagaoka

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-04-06

Filing date

1991-04-04

Publication date

1997-04-17

1990-04-06 Priority claimed from JP9034490A external-priority patent/JP2875335B2/ja

1990-04-25 Priority claimed from JP2107596A external-priority patent/JPH048896A/ja

1991-04-04 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1997-04-17 Publication of DE69125044D1 publication Critical patent/DE69125044D1/de

1997-08-07 Application granted granted Critical

1997-08-07 Publication of DE69125044T2 publication Critical patent/DE69125044T2/de

2011-04-05 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/025—Lubrication; Lubricant separation using a lubricant pump
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Thermal Sciences (AREA)
Non-Positive Displacement Air Blowers (AREA)
Applications Or Details Of Rotary Compressors (AREA)

DE69125044T 1990-04-06 1991-04-04 Vakuumpumpe Expired - Fee Related DE69125044T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP9034490A JP2875335B2 (ja)	1990-04-06	1990-04-06	真空ポンプ
JP2107596A JPH048896A (ja)	1990-04-25	1990-04-25	真空ポンプ

Publications (2)

Publication Number	Publication Date
DE69125044D1 true DE69125044D1 (de)	1997-04-17
DE69125044T2 DE69125044T2 (de)	1997-08-07

Family

ID=26431835

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69125044T Expired - Fee Related DE69125044T2 (de)	1990-04-06	1991-04-04	Vakuumpumpe

Country Status (5)

Country	Link
US (1)	US5190438A (de)
EP (1)	EP0451708B1 (de)
KR (1)	KR950007378B1 (de)
CN (1)	CN1019675B (de)
DE (1)	DE69125044T2 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO1994000694A1 (de) *	1992-06-19	1994-01-06	Leybold Aktiengesellschaft	Gasreibungsvakuumpumpe
WO1994007033A1 (en) *	1992-09-23	1994-03-31	United States Of America As Represented By The Secretary Of The Air Force	Turbo-molecular blower
DE19702456B4 (de) *	1997-01-24	2006-01-19	Pfeiffer Vacuum Gmbh	Vakuumpumpe
JPH10318168A (ja) *	1997-05-22	1998-12-02	T D Giken:Kk	容積移送型ポンプ
JP3084622B2 (ja) *	1997-08-13	2000-09-04	セイコー精機株式会社	ターボ分子ポンプ
US6419461B2 (en) *	1997-08-13	2002-07-16	Seiko Instruments Inc.	Turbo molecular pump
JPH11230036A (ja)	1998-02-18	1999-08-24	Ebara Corp	真空排気システム
JP3010529B1 (ja) *	1998-08-28	2000-02-21	セイコー精機株式会社	真空ポンプ、及び真空装置
FR2783883B1 (fr) *	1998-09-10	2000-11-10	Cit Alcatel	Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP2000170680A (ja) *	1998-09-30	2000-06-20	Aisin Seiki Co Ltd	真空ポンプ
FR2810375B1 (fr)	2000-06-15	2002-11-29	Cit Alcatel	Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
JP2002048088A (ja)	2000-07-31	2002-02-15	Seiko Instruments Inc	真空ポンプ
US6793466B2 (en) *	2000-10-03	2004-09-21	Ebara Corporation	Vacuum pump
JP4657463B2 (ja)	2001-02-01	2011-03-23	エドワーズ株式会社	真空ポンプ
DE10107341A1 (de) *	2001-02-16	2002-08-29	Pfeiffer Vacuum Gmbh	Vakuumpumpe
US20040173312A1 (en) *	2001-09-06	2004-09-09	Kouji Shibayama	Vacuum exhaust apparatus and drive method of vacuum apparatus
JP2007126993A (ja) *	2005-11-01	2007-05-24	Toyota Industries Corp	真空ポンプ
JP5782378B2 (ja) *	2009-08-21	2015-09-24	エドワーズ株式会社	真空ポンプ
KR101420033B1 (ko)	2010-03-11	2014-07-15	가부시키가이샤 시마쓰세사쿠쇼	터보 분자 펌프 장치
US8840380B2 (en)	2011-01-21	2014-09-23	Toyota Motor Engineering & Manufacturing North America, Inc.	Temperature control ring for vehicle air pump
EP2559903A1 (de) *	2011-08-17	2013-02-20	Wabco Automotive UK Limited	Verbesserte Vakuumpumpe
US20150300351A1 (en) *	2012-11-01	2015-10-22	Suk Shin In	Pump and gas booster using same
CN102878109B (zh) *	2012-11-06	2014-11-19	中国科学院上海应用物理研究所	高温熔盐泵轴密封装置
CN102937090B (zh) *	2012-12-03	2015-04-08	中国科学院上海应用物理研究所	一种高温介质泵热屏蔽装置
JP6484919B2 (ja) *	2013-09-24	2019-03-20	株式会社島津製作所	ターボ分子ポンプ
JP6287475B2 (ja) *	2014-03-28	2018-03-07	株式会社島津製作所	真空ポンプ
JP6616611B2 (ja) *	2015-07-23	2019-12-04	エドワーズ株式会社	排気システム
JP6391171B2 (ja) *	2015-09-07	2018-09-19	東芝メモリ株式会社	半導体製造システムおよびその運転方法
JP6666696B2 (ja) *	2015-11-16	2020-03-18	エドワーズ株式会社	真空ポンプ
CN107476976A (zh) *	2016-06-07	2017-12-15	艾默生环境优化技术(苏州)有限公司	涡旋压缩机及压缩机系统
WO2018173341A1 (ja) *	2017-03-23	2018-09-27	エドワーズ株式会社	真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード
GB2570349B (en) *	2018-01-23	2021-01-27	Edwards Ltd	Vacuum apparatus casings and methods of manufacturing vacuum apparatus casings
CN110966265B (zh) *	2018-09-28	2022-03-22	党祎贤	集射真空泵
GB2578431B (en) *	2018-10-25	2021-09-22	Edwards Ltd	Oil feed for a vacuum pump
EP3650703B1 (de) *	2019-11-20	2021-09-22	Pfeiffer Vacuum Gmbh	Vakuumpumpe und verfahren zur schmierung einer solchen
GB2596275A (en) *	2020-05-20	2021-12-29	Edwards Ltd	Cooling element
CN111503033B (zh) *	2020-05-26	2024-11-22	烟台东德实业有限公司	一种强制换热式增速空气泵
CN112576510B (zh) *	2020-12-03	2022-08-05	珠海格力节能环保制冷技术研究中心有限公司	吸油结构、压缩机和空调器
CN112483397B (zh) *	2020-12-07	2025-08-19	山东伍玖真空科技有限公司	一种循环冷却自清洗可控油真空泵
JP7672849B2 (ja) *	2021-03-17	2025-05-08	エドワーズ株式会社	真空ポンプ
CN116971993A (zh) *	2021-07-16	2023-10-31	奥利安机械股份有限公司	封装型旋转泵单元
DE102022202089A1 (de)	2022-03-01	2023-09-07	Robert Bosch Gesellschaft mit beschränkter Haftung	Fluidfördervorrichtung und Fahrzeugwärmemanagementsystem

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
BE557563A (de) *
US3324970A (en) *	1964-06-26	1967-06-13	Gen Electric	Self-contained viscous pump lubrication system
US3536418A (en) *	1969-02-13	1970-10-27	Onezime P Breaux	Cryogenic turbo-molecular vacuum pump
DE2757599A1 (de) *	1977-12-23	1979-06-28	Kernforschungsz Karlsruhe	Turbo-molekularpumpe
GB1592218A (en) *	1978-01-24	1981-07-01	Olofsson B O E	Device for cooling and silencing of noise of a compressor or vacuum pump
US4283167A (en) *	1979-04-26	1981-08-11	Varian Associates, Inc.	Cooling structure for an oil sealed rotary vacuum pump
DE3022147A1 (de) *	1980-06-13	1982-01-07	Klöckner-Humboldt-Deutz AG, 5000 Köln	Verdichter
JPS57212395A (en) *	1981-06-24	1982-12-27	Hitachi Ltd	Molecular pump
JPS6125994A (ja) *	1984-07-13	1986-02-05	Ulvac Corp	タ−ボ分子ポンプおよびその運転方法
JPS61171896A (ja) *	1985-01-28	1986-08-02	Hitachi Ltd	高速回転機械の冷却装置
JPS61247893A (ja) *	1985-04-26	1986-11-05	Hitachi Ltd	真空ポンプ
JPS6229796A (ja) *	1985-07-31	1987-02-07	Hitachi Ltd	真空ポンプ
JPS62153597A (ja) *	1985-12-27	1987-07-08	Hitachi Ltd	真空ポンプ
JPS63227989A (ja) *	1987-03-16	1988-09-22	Seiko Instr & Electronics Ltd	タ−ボ分子ポンプ
JPH0610477B2 (ja) *	1987-05-13	1994-02-09	株式会社日立製作所	タ−ボ真空ポンプ
JPS63314397A (ja) *	1987-06-17	1988-12-22	Hitachi Ltd	真空ポンプ
JPS6419198A (en) *	1987-07-15	1989-01-23	Hitachi Ltd	Vacuum pump
JPH0632708B2 (ja) *	1987-08-12	1994-05-02	株式会社セキグチ	人形用頭部体
JPS6446495U (de) *	1987-09-18	1989-03-22
FR2634829B1 (fr) *	1988-07-27	1990-09-14	Cit Alcatel	Pompe a vide

1991
- 1991-04-03 KR KR1019910005355A patent/KR950007378B1/ko not_active Expired - Fee Related
- 1991-04-04 DE DE69125044T patent/DE69125044T2/de not_active Expired - Fee Related
- 1991-04-04 EP EP91105353A patent/EP0451708B1/de not_active Expired - Lifetime
- 1991-04-06 CN CN91102168A patent/CN1019675B/zh not_active Expired
- 1991-04-08 US US07/682,265 patent/US5190438A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US5190438A (en)	1993-03-02
CN1019675B (zh)	1992-12-30
CN1055800A (zh)	1991-10-30
EP0451708B1 (de)	1997-03-12
EP0451708A3 (en)	1992-01-08
EP0451708A2 (de)	1991-10-16
KR910018680A (ko)	1991-11-30
KR950007378B1 (ko)	1995-07-10
DE69125044T2 (de)	1997-08-07

Publication	Publication Date	Title
DE69125044D1 (de)	1997-04-17	Vakuumpumpe
PT99828A (pt)	1994-01-31	Bombas osmoticas
DE69129987D1 (de)	1998-09-17	Feuchtigkeitsfreies sog-verfahren
DE69105005D1 (de)	1994-12-15	Staubsauger.
DE69102304D1 (de)	1994-07-14	Staubsauger.
NO903092D0 (no)	1990-07-11	Stoevsuger.
DE69121142D1 (de)	1996-09-05	Staubsauger
DE69102675D1 (de)	1994-08-04	Staubsauger.
DE69123449D1 (de)	1997-01-16	Pumpvorrichtung
DE69013883D1 (de)	1994-12-08	Pumpenanordnung.
FI894271A7 (fi)	1989-09-11	Turbomolekulaarinen tyhjöpumppu
DE69004566D1 (de)	1993-12-16	Vakuumpumpeneinheit.
DE69112160D1 (de)	1995-09-21	Mehrstufige Vakuumpumpe.
DE68903355D1 (de)	1992-12-10	Vakuumpumpen.
DE59201550D1 (de)	1995-04-06	Trockenlaufende vakuumpumpe.
DE69303447D1 (de)	1996-08-08	Vakuumpumpgerät
DE69109424D1 (de)	1995-06-08	Turbovakuumpumpe.
DE69401600D1 (de)	1997-03-13	Vakuumpumpe
ITMI912050A0 (it)	1991-07-24	Filtro aspirante
DE69104891D1 (de)	1994-12-08	Staubsauger.
DE59305337D1 (de)	1997-03-13	Wälzkolben-Vakuumpumpe
FI894157A7 (fi)	1989-09-04	Molekylityhjöpumppu
DE69105299D1 (de)	1995-01-12	Staubsauger.
DE59301174D1 (de)	1996-01-25	Ölgedichtete vakuumpumpe
DE69008574D1 (de)	1994-06-09	Saugpumpe.

Legal Events

Date	Code	Title	Description
1998-04-09	8364	No opposition during term of opposition
2006-02-09	8339	Ceased/non-payment of the annual fee