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DE59301174D1 - Ölgedichtete vakuumpumpe - Google Patents

Ölgedichtete vakuumpumpe

Info

Publication number
DE59301174D1
DE59301174D1 DE59301174T DE59301174T DE59301174D1 DE 59301174 D1 DE59301174 D1 DE 59301174D1 DE 59301174 T DE59301174 T DE 59301174T DE 59301174 T DE59301174 T DE 59301174T DE 59301174 D1 DE59301174 D1 DE 59301174D1
Authority
DE
Germany
Prior art keywords
oil
vacuum pump
sealed vacuum
sealed
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59301174T
Other languages
English (en)
Inventor
Thomas Abelen
Josef Hodapp
Winfried Kaiser
Zoltan Szoecs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE59301174T priority Critical patent/DE59301174D1/de
Application granted granted Critical
Publication of DE59301174D1 publication Critical patent/DE59301174D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/021—Control systems for the circulation of the lubricant

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE59301174T 1992-03-14 1993-02-09 Ölgedichtete vakuumpumpe Expired - Fee Related DE59301174D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE59301174T DE59301174D1 (de) 1992-03-14 1993-02-09 Ölgedichtete vakuumpumpe

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4208194A DE4208194A1 (de) 1992-03-14 1992-03-14 Verfahren zum betrieb einer oelgedichteten vakuumpumpe sowie fuer die durchfuehrung dieses verfahrens geeignete vakuumpumpe
DE59301174T DE59301174D1 (de) 1992-03-14 1993-02-09 Ölgedichtete vakuumpumpe
PCT/EP1993/000312 WO1993019298A1 (de) 1992-03-14 1993-02-09 Verfahren zum betrieb einer ölgedichteten vakuumpumpe

Publications (1)

Publication Number Publication Date
DE59301174D1 true DE59301174D1 (de) 1996-01-25

Family

ID=6454066

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4208194A Withdrawn DE4208194A1 (de) 1992-03-14 1992-03-14 Verfahren zum betrieb einer oelgedichteten vakuumpumpe sowie fuer die durchfuehrung dieses verfahrens geeignete vakuumpumpe
DE59301174T Expired - Fee Related DE59301174D1 (de) 1992-03-14 1993-02-09 Ölgedichtete vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4208194A Withdrawn DE4208194A1 (de) 1992-03-14 1992-03-14 Verfahren zum betrieb einer oelgedichteten vakuumpumpe sowie fuer die durchfuehrung dieses verfahrens geeignete vakuumpumpe

Country Status (6)

Country Link
EP (1) EP0630446B1 (de)
JP (1) JPH07504730A (de)
KR (1) KR950701041A (de)
DE (2) DE4208194A1 (de)
ES (1) ES2081705T3 (de)
WO (1) WO1993019298A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004024554B4 (de) * 2004-05-18 2018-01-25 Pfeiffer Vacuum Gmbh Ölgedichtete Drehschiebervakuumpumpe
DE102004034925B3 (de) * 2004-07-09 2006-02-16 Joma-Hydromechanic Gmbh Einflügelvakuumpumpe
GB0607198D0 (en) * 2006-04-10 2006-05-17 Wabco Automotive Uk Ltd Improved vacuum pump
WO2010145634A2 (de) * 2009-06-17 2010-12-23 Ixetic Hückeswagen Gmbh Vakuumpumpe

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1190134B (de) * 1957-02-07 1965-04-01 Edwards High Vacuum Ltd Drehkolben-Vakuumpumpe mit oelueberlagertem Auspuffventil
FR1450639A (fr) * 1965-06-30 1966-06-24 Beaudouin Sa Ets Perfectionnements aux pompes mécaniques à vide à injection d'huile et à injection d'air
GB1241944A (en) * 1967-06-10 1971-08-04 N G N Ltd Improvements in and relating to rotary vacuum pumps
GB1179664A (en) * 1968-03-18 1970-01-28 Donald Richard Angliss Improvements in or relating to Rotary Vacuum Pumps
FR2383335A1 (fr) * 1977-03-08 1978-10-06 Leybold Heraeus Sogev Pompe mecanique a joint d'huile
DE4016015C2 (de) * 1989-06-01 1998-01-29 Barmag Barmer Maschf Flügelzellenvakuumpumpe

Also Published As

Publication number Publication date
EP0630446B1 (de) 1995-12-13
KR950701041A (ko) 1995-02-20
WO1993019298A1 (de) 1993-09-30
JPH07504730A (ja) 1995-05-25
EP0630446A1 (de) 1994-12-28
ES2081705T3 (es) 1996-03-16
DE4208194A1 (de) 1993-09-16

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee