DE69030484D1 - Fotoempfindliche Harzzusammensetzung - Google Patents

Fotoempfindliche Harzzusammensetzung

Info

Publication number: DE69030484D1
Authority: DE; Germany
Prior art keywords: resin composition; photosensitive resin; photosensitive; composition; resin
Prior art date: 1989-11-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69030484T

Other languages

English (en)

Other versions

DE69030484T2 (de

Inventor

Akira Tokoh

Nobuyuki Sashida

Etsu Takeuchi

Takashi Hirano

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Bakelite Co Ltd

Original Assignee

Sumitomo Bakelite Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-11-30

Filing date

1990-11-28

Publication date

1997-05-22

1989-11-30 Priority claimed from JP1309310A external-priority patent/JPH03170547A/ja

1990-04-05 Priority claimed from JP2089167A external-priority patent/JPH03288154A/ja

1990-04-11 Priority claimed from JP2093943A external-priority patent/JPH03293357A/ja

1990-04-17 Priority claimed from JP2099304A external-priority patent/JPH0827536B2/ja

1990-05-02 Priority claimed from JP2115058A external-priority patent/JPH0412358A/ja

1990-07-06 Priority claimed from JP2177375A external-priority patent/JPH0827537B2/ja

1990-07-20 Priority claimed from JP2190609A external-priority patent/JPH0827538B2/ja

1990-11-28 Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd

1997-05-22 Publication of DE69030484D1 publication Critical patent/DE69030484D1/de

1997-08-28 Publication of DE69030484T2 publication Critical patent/DE69030484T2/de

1997-08-28 Application granted granted Critical

2010-11-29 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S522/00—Synthetic resins or natural rubbers -- part of the class 520 series
- Y10S522/906—Preparing shrinkable material

Landscapes

Physics & Mathematics (AREA)
Spectroscopy & Molecular Physics (AREA)
General Physics & Mathematics (AREA)
Macromonomer-Based Addition Polymer (AREA)
Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
Materials For Photolithography (AREA)

DE69030484T 1989-11-30 1990-11-28 Fotoempfindliche Harzzusammensetzung Expired - Fee Related DE69030484T2 (de)

Applications Claiming Priority (7)

Application Number	Priority Date	Filing Date	Title
JP1309310A JPH03170547A (ja)	1989-11-30	1989-11-30	感光性樹脂組成物
JP2089167A JPH03288154A (ja)	1990-04-05	1990-04-05	感光性樹脂組成物
JP2093943A JPH03293357A (ja)	1990-04-11	1990-04-11	感光性樹脂組成物
JP2099304A JPH0827536B2 (ja)	1990-04-17	1990-04-17	感光性樹脂組成物の製造方法
JP2115058A JPH0412358A (ja)	1990-05-02	1990-05-02	感光性樹脂組成物
JP2177375A JPH0827537B2 (ja)	1990-07-06	1990-07-06	感光性樹脂組成物
JP2190609A JPH0827538B2 (ja)	1990-07-20	1990-07-20	感光性樹脂組成物

Publications (2)

Publication Number	Publication Date
DE69030484D1 true DE69030484D1 (de)	1997-05-22
DE69030484T2 DE69030484T2 (de)	1997-08-28

Family

ID=27565469

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69030484T Expired - Fee Related DE69030484T2 (de)	1989-11-30	1990-11-28	Fotoempfindliche Harzzusammensetzung

Country Status (4)

Country	Link
US (1)	US5238784A (de)
EP (1)	EP0430221B1 (de)
KR (1)	KR0147279B1 (de)
DE (1)	DE69030484T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5310862A (en) *	1991-08-20	1994-05-10	Toray Industries, Inc.	Photosensitive polyimide precursor compositions and process for preparing same
DE4217688A1 (de) *	1992-05-29	1993-12-02	Basf Lacke & Farben	Durch Einwirkung von Strahlung vernetzendes Gemisch und dessen Verwendung zur Herstellung hochtemperaturbeständiger Reliefstrukturen
WO1994018607A1 (fr) *	1993-02-03	1994-08-18	Toray Industries, Inc.	Procede de formation d'un motif en polyimide positif
KR0134753B1 (ko) *	1993-02-26	1998-04-18	사토 후미오	폴리아미드산 조성물
JP3687988B2 (ja)	1993-09-03	2005-08-24	日立化成工業株式会社	ｉ線ステッパ用感光性樹脂組成物
US5446074A (en) *	1993-12-17	1995-08-29	International Business Machines Corporation	Photosensitive polyimide precursors
KR100384746B1 (ko) *	1994-09-13	2003-08-25	제온 코포레이션	감광성 폴리이미드 수지 조성물
US6071667A (en)	1995-04-13	2000-06-06	Hitachi Chemical Co., Ltd.	Photosensitive resin composition containing a photosensitive polyamide resin
US5886136A (en) *	1995-09-12	1999-03-23	Nippon Zeon Co., Ltd.	Pattern forming process
US6001517A (en) *	1996-10-31	1999-12-14	Kabushiki Kaisha Toshiba	Positive photosensitive polymer composition, method of forming a pattern and electronic parts
TWI249650B (en) *	1997-05-16	2006-02-21	Toray Industries	Actinic radiation sensitive polymer composition and method of preparing a polyimide precursor composition for an actinic radiation sensitive polymer composition
US6160081A (en) *	1997-10-31	2000-12-12	Nippon Zeon Co., Ltd.	Photosensitive polyimide resin composition
US6403289B1 (en)	1997-10-31	2002-06-11	Nippon Zeon Co., Ltd.	Developer for photosensitive polyimide resin composition
JP3895945B2 (ja) *	2001-04-24	2007-03-22	ソニーケミカル＆インフォメーションデバイス株式会社	樹脂組成物及び樹脂組成物製造方法
JP3485183B1 (ja) *	2002-06-28	2004-01-13	東京応化工業株式会社	パターン微細化用被覆形成剤およびそれを用いた微細パターンの形成方法
JP5217435B2 (ja) *	2005-06-20	2013-06-19	日産化学工業株式会社	ポリアミド酸又はポリイミドを含有する電極パターニング層、及びこれを用いた電子デバイス

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5952822B2 (ja) *	1978-04-14	1984-12-21	東レ株式会社	耐熱性感光材料
GB2092164B (en) *	1980-12-17	1984-12-05	Hitachi Ltd	Loght or radiation-sensitive polymer composition
JPS58223149A (ja) *	1982-06-22	1983-12-24	Toray Ind Inc	感光性ポリイミド用現像液
DE3463576D1 (en) *	1983-03-03	1987-06-11	Toray Industries	Radiation sensitive polymer composition
JPS59160139A (ja) *	1983-03-04	1984-09-10	Hitachi Ltd	感光性重合体組成物
JPS62273260A (ja) *	1986-05-21	1987-11-27	Asahi Chem Ind Co Ltd	新しい感光性組成物
JP2626696B2 (ja) *	1988-04-11	1997-07-02	チッソ株式会社	感光性重合体

1990
- 1990-11-28 DE DE69030484T patent/DE69030484T2/de not_active Expired - Fee Related
- 1990-11-28 EP EP90122781A patent/EP0430221B1/de not_active Expired - Lifetime
- 1990-11-28 US US07/618,794 patent/US5238784A/en not_active Expired - Fee Related
- 1990-11-30 KR KR1019900019634A patent/KR0147279B1/ko not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0430221B1 (de)	1997-04-16
KR910010244A (ko)	1991-06-29
EP0430221A2 (de)	1991-06-05
DE69030484T2 (de)	1997-08-28
US5238784A (en)	1993-08-24
KR0147279B1 (ko)	1998-08-01
EP0430221A3 (en)	1991-08-21

Publication	Publication Date	Title
DE69026066D1 (de)	1996-04-25	Harzzusammensetzungen
DE68926516D1 (de)	1996-06-27	Lichtempfindliche Zusammensetzung
DE68928328D1 (de)	1997-10-23	Harzzusammensetzung
DE69014913D1 (de)	1995-01-26	Lichtempfindliche Zusammensetzung.
DE3888060D1 (de)	1994-04-07	Lichtempfindliche Harzzusammensetzung.
DE69129955D1 (de)	1998-09-17	Photolackzusammensetzung
DE68927140D1 (de)	1996-10-17	Photolackzusammensetzung
DE69027263D1 (de)	1996-07-11	Tonerzusammensetzung
DE69031785D1 (de)	1998-01-22	Lichtempfindliche Zusammensetzung
FI900652A7 (fi)	1990-08-11	Resiinikoostumus
DE69119662D1 (de)	1996-06-27	Epoxydharzzusammensetzung
DE59010008D1 (de)	1996-02-08	Photoempfindliches Gemisch
DE69032715D1 (de)	1998-12-03	Lichtempfindliche Zusammensetzung
DE69408709D1 (de)	1998-04-09	Photoempfindliche Harzzusammensetzung
DE69030484D1 (de)	1997-05-22	Fotoempfindliche Harzzusammensetzung
DE69123873D1 (de)	1997-02-13	Photoresistzusammensetzung
DE69414787D1 (de)	1999-01-07	Photoempfindliche Harzzusammensetzung
KR0146485B1 (en)	1998-08-01	Photosensitive resin composition
DE69229419D1 (de)	1999-07-22	Photoempfindliche Polymerzusammensetzung
KR900011853A (ko)	1990-08-02	수지 조성물
DE69400297D1 (de)	1996-08-22	Fotoempfindliche Harzzusammensetzung
DE68922986D1 (de)	1995-07-13	Harzzusammensetzung.
DE69029222D1 (de)	1997-01-09	Lichtempfindliche Zusammensetzung
KR900006818A (ko)	1990-05-08	감방사선성 수지 조성물
DE69118077D1 (de)	1996-04-25	Harz-Zusammensetzungen

Legal Events

Date	Code	Title	Description
1998-05-14	8364	No opposition during term of opposition
2004-09-23	8339	Ceased/non-payment of the annual fee