DE69023025D1 - Kapazitiver Beschleunigungsmesser mit unabhängig einstellbarer Dämpfung und Empfindlichkeit. - Google Patents

Kapazitiver Beschleunigungsmesser mit unabhängig einstellbarer Dämpfung und Empfindlichkeit.

Info

Publication number: DE69023025D1
Authority: DE; Germany
Prior art keywords: sensitivity; independently adjustable; adjustable damping; capacitive accelerometer; accelerometer
Prior art date: 1989-02-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69023025T

Other languages

English (en)

Other versions

DE69023025T2 (de

Inventor

Walter J Wiegand

James L Swindal

Richard E Swarts

Robert H Bullis

Mario T Lopiccolo

Daniel H Grantham

Arthur G Foyt

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Breed Automotive Technology Inc

Original Assignee

United Technologies Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-02-28

Filing date

1990-02-02

Publication date

1995-11-23

1990-02-02 Application filed by United Technologies Corp filed Critical United Technologies Corp

1995-11-23 Publication of DE69023025D1 publication Critical patent/DE69023025D1/de

1996-03-21 Application granted granted Critical

1996-03-21 Publication of DE69023025T2 publication Critical patent/DE69023025T2/de

2010-02-03 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/003—Details of instruments used for damping
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Pressure Sensors (AREA)

DE69023025T 1989-02-28 1990-02-02 Kapazitiver Beschleunigungsmesser mit unabhängig einstellbarer Dämpfung und Empfindlichkeit. Expired - Fee Related DE69023025T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/317,240 US4930042A (en)	1989-02-28	1989-02-28	Capacitive accelerometer with separable damping and sensitivity

Publications (2)

Publication Number	Publication Date
DE69023025D1 true DE69023025D1 (de)	1995-11-23
DE69023025T2 DE69023025T2 (de)	1996-03-21

Family

ID=23232758

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69023025T Expired - Fee Related DE69023025T2 (de)	1989-02-28	1990-02-02	Kapazitiver Beschleunigungsmesser mit unabhängig einstellbarer Dämpfung und Empfindlichkeit.

Country Status (7)

Country	Link
US (1)	US4930042A (de)
EP (1)	EP0387518B1 (de)
JP (1)	JPH0348168A (de)
BR (1)	BR9000844A (de)
CA (1)	CA2009489A1 (de)
DE (1)	DE69023025T2 (de)
IL (1)	IL93551A (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5620931A (en) *	1990-08-17	1997-04-15	Analog Devices, Inc.	Methods for fabricating monolithic device containing circuitry and suspended microstructure
US5314572A (en) *	1990-08-17	1994-05-24	Analog Devices, Inc.	Method for fabricating microstructures
US5326726A (en) *	1990-08-17	1994-07-05	Analog Devices, Inc.	Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5417111A (en)	1990-08-17	1995-05-23	Analog Devices, Inc.	Monolithic chip containing integrated circuitry and suspended microstructure
WO1992003740A1 (en) *	1990-08-17	1992-03-05	Analog Devices, Inc.	Monolithic accelerometer
US5069071A (en) *	1990-08-27	1991-12-03	United Technologies Corporation	Vibration monitoring in the frequency domain with a capacitive accelerometer
US5101664A (en) *	1990-10-15	1992-04-07	United Technologies Corporation	Optical pressure transducer
US5221400A (en) *	1990-12-11	1993-06-22	Delco Electronics Corporation	Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
JP2804196B2 (ja) *	1991-10-18	1998-09-24	株式会社日立製作所	マイクロセンサ及びそれを用いた制御システム
US5291066A (en) *	1991-11-14	1994-03-01	General Electric Company	Moisture-proof electrical circuit high density interconnect module and method for making same
DE4201578A1 (de) *	1992-01-22	1993-11-04	Bosch Gmbh Robert	Kapazitiver sensor
FR2687778B1 (fr) *	1992-02-20	1994-05-20	Sextant Avionique	Micro-capteur capacitif a capacite parasite reduite et procede de fabrication.
US5333504A (en) *	1992-09-01	1994-08-02	Rosemount Inc.	High overpressure low range pressure sensor
FR2698447B1 (fr) *	1992-11-23	1995-02-03	Suisse Electronique Microtech	Cellule de mesure micro-usinée.
US5780742A (en) *	1993-04-15	1998-07-14	Honeywell Inc.	Mechanical resonance, silicon accelerometer
US5814727A (en) *	1993-11-08	1998-09-29	Motorola, Inc.	Semiconductor accelerometer having reduced sensor plate flexure
JP2825664B2 (ja) *	1994-03-28	1998-11-18	アイ／オー、センサーズ、インコーポレーテッド	Ｌ字形状のばね脚部を有するセンサー構造
US5777226A (en) *	1994-03-28	1998-07-07	I/O Sensors, Inc.	Sensor structure with L-shaped spring legs
US6026690A (en) *	1994-06-20	2000-02-22	Sony Corporation	Vibration sensor using the capacitance between a substrate and a flexible diaphragm
US5798460A (en) *	1994-06-20	1998-08-25	Sony Corporation	Vibration sensor employing a flexible diaphragm and an electret film
US5901031A (en) *	1995-02-01	1999-05-04	Murata Manufacturing Co., Ltd.	Variable capacitor
WO1997007405A1 (en) *	1995-08-15	1997-02-27	Alliedsignal Inc.	Star-patterned accelerometer reed
US20040112135A1 (en) *	1995-08-15	2004-06-17	Letrondo Norberto P.	Star patterned accelerometer reed
US6041655A (en) *	1997-04-22	2000-03-28	Alliedsignal, Inc.	Active cover accelerometer
US6000287A (en) *	1998-08-28	1999-12-14	Ford Motor Company	Capacitor center of area sensitivity in angular motion micro-electromechanical systems
JP2000206142A (ja) *	1998-11-13	2000-07-28	Denso Corp	半導体力学量センサおよびその製造方法
US20020104379A1 (en) *	2000-05-30	2002-08-08	Input/Output, Inc.	Accelerometer with re-entrant grooves
US20070163346A1 (en) *	2006-01-18	2007-07-19	Honeywell International Inc.	Frequency shifting of rotational harmonics in mems devices
US8776337B2 (en)	2010-07-30	2014-07-15	Hewlett-Packard Development Company, L.P.	Methods of forming capacitive sensors
WO2012109266A2 (en) *	2011-02-07	2012-08-16	Ion Geophysical Corporation	Method and apparatus for sensing underwater signals
US20160084870A1 (en) *	2013-04-26	2016-03-24	Panasonic Intellectual Property Management Co., Ltd.	Sensor
CN106908624A (zh) *	2017-03-24	2017-06-30	京东方科技集团股份有限公司	一种加速度敏感器及加速度计
CN120334571B (zh) *	2025-06-19	2025-09-12	四川知微传感技术有限公司	一种z轴mems闭环加速度计组件和加速度计

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2130373B (en) *	1982-11-17	1986-12-31	Stc Plc	Accelerometer device
GB2130372A (en) *	1982-11-17	1984-05-31	Stc Plc	Accelerometer device
US4699006A (en) *	1984-03-19	1987-10-13	The Charles Stark Draper Laboratory, Inc.	Vibratory digital integrating accelerometer
US4574327A (en) *	1984-05-18	1986-03-04	Becton, Dickinson And Company	Capacitive transducer
US4609968A (en) *	1984-05-18	1986-09-02	Becton, Dickinson And Company	Glass inlays for use in bonding semiconductor wafers
US4679434A (en) *	1985-07-25	1987-07-14	Litton Systems, Inc.	Integrated force balanced accelerometer
DE3625411A1 (de) *	1986-07-26	1988-02-04	Messerschmitt Boelkow Blohm	Kapazitiver beschleunigungssensor

1989
- 1989-02-28 US US07/317,240 patent/US4930042A/en not_active Expired - Fee Related
1990
- 1990-02-02 DE DE69023025T patent/DE69023025T2/de not_active Expired - Fee Related
- 1990-02-02 EP EP90102090A patent/EP0387518B1/de not_active Expired - Lifetime
- 1990-02-07 CA CA002009489A patent/CA2009489A1/en not_active Abandoned
- 1990-02-22 BR BR909000844A patent/BR9000844A/pt not_active Application Discontinuation
- 1990-02-27 IL IL93551A patent/IL93551A/xx not_active IP Right Cessation
- 1990-02-28 JP JP2049164A patent/JPH0348168A/ja active Pending

Also Published As

Publication number	Publication date
BR9000844A (pt)	1991-02-05
IL93551A0 (en)	1990-11-29
DE69023025T2 (de)	1996-03-21
EP0387518B1 (de)	1995-10-18
EP0387518A3 (de)	1992-03-18
JPH0348168A (ja)	1991-03-01
US4930042A (en)	1990-05-29
EP0387518A2 (de)	1990-09-19
CA2009489A1 (en)	1990-08-31
IL93551A (en)	1993-02-21

Publication	Publication Date	Title
DE69023025D1 (de)	1995-11-23	Kapazitiver Beschleunigungsmesser mit unabhängig einstellbarer Dämpfung und Empfindlichkeit.
DE69015766D1 (de)	1995-02-16	Kapazitiver Beschleunigungsmesser.
DE69310260D1 (de)	1997-06-05	Integrierter Winkelbeschleunigungsmesser mit kapazitiven Gebern
DE68916144D1 (de)	1994-07-21	Kapazitätsmessanordnung.
DE69109086D1 (de)	1995-05-24	Kapazitieve sonde.
IT1228198B (it)	1991-06-05	Ammortizzatore regolabile.
DE69019937D1 (de)	1995-07-13	Näherungsdetektionsgerät.
ATA55388A (de)	1990-12-15	Kapazitiver naeherungsgeber
KR900020797U (ko)	1990-12-14	가속도 센서
DE68920425D1 (de)	1995-02-16	Dämpfervorrichtung.
DE69019867D1 (de)	1995-07-13	Abfühlverstärker.
DE3879662D1 (de)	1993-04-29	Schwingungsfuehler.
DE69017292D1 (de)	1995-04-06	Dynamischer Dämpfer.
DE69016707D1 (de)	1995-03-23	Dynamischer Dämpfer.
DE68913938D1 (de)	1994-04-21	Hydrophon und ähnlicher Sensor.
NL191952C (nl)	1996-11-04	Dempende steunconstructie.
DE59103409D1 (de)	1994-12-08	Reflexionslichtschranke.
DE59006845D1 (de)	1994-09-22	Kapazitiver Sensor.
DE69004730D1 (de)	1994-01-05	Rollschwingungsaufnehmer.
DE69108715D1 (de)	1995-05-11	Kapazitiver kraftsensor.
FI915053A0 (fi)	1991-10-25	Vaexelstroemsmotor med stor diameter och fogar i statorn.
DE68901465D1 (de)	1992-06-17	Differentialvorrichtung.
DE68908229D1 (de)	1993-09-16	Kapazitiver gewichtssensor.
FI901655A0 (fi)	1990-04-02	Kapacitiv fuktsensor.
DE69005685D1 (de)	1994-02-17	Mikromagnetometer mit kapazitiver Detektion.

Legal Events

Date	Code	Title	Description
1996-11-14	8364	No opposition during term of opposition
1998-02-12	8339	Ceased/non-payment of the annual fee
1999-08-26	8327	Change in the person/name/address of the patent owner	Owner name: BREED AUTOMOTIVE TECHNOLOGY, INC., LAKELAND, FLA.,
1999-08-26	8328	Change in the person/name/address of the agent	Free format text: HENKEL, FEILER & HAENZEL, 81675 MUENCHEN