BR9000844A - Acelerometro em estado solido - Google Patents

Acelerometro em estado solido

Info

Publication number: BR9000844A
Authority: BR; Brazil
Prior art keywords: solid state; state accelerometer; accelerometer; solid; state
Prior art date: 1989-02-28

Application number

BR909000844A

Other languages

English (en)

Inventor

Walter J Wiegand

James L Swindal

Richard E Swarts

Robert H Bullis

Mario T Lopiccolo

Daniel H Grantham

Arthur G Foyt

Original Assignee

United Technologies Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-02-28

Filing date

1990-02-22

Publication date

1991-02-05

1990-02-22 Application filed by United Technologies Corp filed Critical United Technologies Corp

1991-02-05 Publication of BR9000844A publication Critical patent/BR9000844A/pt

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/003—Details of instruments used for damping
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Pressure Sensors (AREA)

BR909000844A 1989-02-28 1990-02-22 Acelerometro em estado solido BR9000844A (pt)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/317,240 US4930042A (en)	1989-02-28	1989-02-28	Capacitive accelerometer with separable damping and sensitivity

Publications (1)

Publication Number	Publication Date
BR9000844A true BR9000844A (pt)	1991-02-05

Family

ID=23232758

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BR909000844A BR9000844A (pt)	1989-02-28	1990-02-22	Acelerometro em estado solido

Country Status (7)

Country	Link
US (1)	US4930042A (pt)
EP (1)	EP0387518B1 (pt)
JP (1)	JPH0348168A (pt)
BR (1)	BR9000844A (pt)
CA (1)	CA2009489A1 (pt)
DE (1)	DE69023025T2 (pt)
IL (1)	IL93551A (pt)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5417111A (en)	1990-08-17	1995-05-23	Analog Devices, Inc.	Monolithic chip containing integrated circuitry and suspended microstructure
US5326726A (en) *	1990-08-17	1994-07-05	Analog Devices, Inc.	Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
JPH0644008B2 (ja) *	1990-08-17	1994-06-08	アナログ・ディバイセス・インコーポレーテッド	モノリシック加速度計
US5620931A (en) *	1990-08-17	1997-04-15	Analog Devices, Inc.	Methods for fabricating monolithic device containing circuitry and suspended microstructure
US5314572A (en) *	1990-08-17	1994-05-24	Analog Devices, Inc.	Method for fabricating microstructures
US5069071A (en) *	1990-08-27	1991-12-03	United Technologies Corporation	Vibration monitoring in the frequency domain with a capacitive accelerometer
US5101664A (en) *	1990-10-15	1992-04-07	United Technologies Corporation	Optical pressure transducer
US5221400A (en) *	1990-12-11	1993-06-22	Delco Electronics Corporation	Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection
JP2804196B2 (ja) *	1991-10-18	1998-09-24	株式会社日立製作所	マイクロセンサ及びそれを用いた制御システム
US5291066A (en) *	1991-11-14	1994-03-01	General Electric Company	Moisture-proof electrical circuit high density interconnect module and method for making same
DE4201578A1 (de) *	1992-01-22	1993-11-04	Bosch Gmbh Robert	Kapazitiver sensor
FR2687778B1 (fr) *	1992-02-20	1994-05-20	Sextant Avionique	Micro-capteur capacitif a capacite parasite reduite et procede de fabrication.
US5333504A (en) *	1992-09-01	1994-08-02	Rosemount Inc.	High overpressure low range pressure sensor
FR2698447B1 (fr) *	1992-11-23	1995-02-03	Suisse Electronique Microtech	Cellule de mesure micro-usinée.
US5780742A (en) *	1993-04-15	1998-07-14	Honeywell Inc.	Mechanical resonance, silicon accelerometer
US5814727A (en) *	1993-11-08	1998-09-29	Motorola, Inc.	Semiconductor accelerometer having reduced sensor plate flexure
WO1995026509A1 (en) *	1994-03-28	1995-10-05	I/O Sensors, Inc.	Sensor structure with l-shaped spring legs
US5777226A (en) *	1994-03-28	1998-07-07	I/O Sensors, Inc.	Sensor structure with L-shaped spring legs
WO1995035485A1 (en) *	1994-06-20	1995-12-28	Sony Corporation	Vibration sensor and navigation apparatus
US5798460A (en) *	1994-06-20	1998-08-25	Sony Corporation	Vibration sensor employing a flexible diaphragm and an electret film
US5901031A (en) *	1995-02-01	1999-05-04	Murata Manufacturing Co., Ltd.	Variable capacitor
EP0845105B1 (en) *	1995-08-15	2002-12-04	AlliedSignal Inc.	Star-patterned accelerometer reed
US20040112135A1 (en) *	1995-08-15	2004-06-17	Letrondo Norberto P.	Star patterned accelerometer reed
US6041655A (en) *	1997-04-22	2000-03-28	Alliedsignal, Inc.	Active cover accelerometer
US6000287A (en) *	1998-08-28	1999-12-14	Ford Motor Company	Capacitor center of area sensitivity in angular motion micro-electromechanical systems
JP2000206142A (ja) *	1998-11-13	2000-07-28	Denso Corp	半導体力学量センサおよびその製造方法
US20020104379A1 (en) *	2000-05-30	2002-08-08	Input/Output, Inc.	Accelerometer with re-entrant grooves
US20070163346A1 (en) *	2006-01-18	2007-07-19	Honeywell International Inc.	Frequency shifting of rotational harmonics in mems devices
US8776337B2 (en)	2010-07-30	2014-07-15	Hewlett-Packard Development Company, L.P.	Methods of forming capacitive sensors
CA2826558C (en)	2011-02-07	2021-01-26	Ion Geophysical Corporation	Method and apparatus for sensing underwater signals
WO2014174812A1 (ja) *	2013-04-26	2014-10-30	パナソニックＩｐマネジメント株式会社	センサ
CN106908624A (zh)	2017-03-24	2017-06-30	京东方科技集团股份有限公司	一种加速度敏感器及加速度计
CN120334571B (zh) *	2025-06-19	2025-09-12	四川知微传感技术有限公司	一种z轴mems闭环加速度计组件和加速度计

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2130372A (en) *	1982-11-17	1984-05-31	Stc Plc	Accelerometer device
GB2130373B (en) *	1982-11-17	1986-12-31	Stc Plc	Accelerometer device
US4699006A (en) *	1984-03-19	1987-10-13	The Charles Stark Draper Laboratory, Inc.	Vibratory digital integrating accelerometer
US4574327A (en) *	1984-05-18	1986-03-04	Becton, Dickinson And Company	Capacitive transducer
US4609968A (en) *	1984-05-18	1986-09-02	Becton, Dickinson And Company	Glass inlays for use in bonding semiconductor wafers
US4679434A (en) *	1985-07-25	1987-07-14	Litton Systems, Inc.	Integrated force balanced accelerometer
DE3625411A1 (de) *	1986-07-26	1988-02-04	Messerschmitt Boelkow Blohm	Kapazitiver beschleunigungssensor

1989
- 1989-02-28 US US07/317,240 patent/US4930042A/en not_active Expired - Fee Related
1990
- 1990-02-02 DE DE69023025T patent/DE69023025T2/de not_active Expired - Fee Related
- 1990-02-02 EP EP90102090A patent/EP0387518B1/en not_active Expired - Lifetime
- 1990-02-07 CA CA002009489A patent/CA2009489A1/en not_active Abandoned
- 1990-02-22 BR BR909000844A patent/BR9000844A/pt not_active Application Discontinuation
- 1990-02-27 IL IL93551A patent/IL93551A/xx not_active IP Right Cessation
- 1990-02-28 JP JP2049164A patent/JPH0348168A/ja active Pending

Also Published As

Publication number	Publication date
JPH0348168A (ja)	1991-03-01
IL93551A (en)	1993-02-21
IL93551A0 (en)	1990-11-29
EP0387518B1 (en)	1995-10-18
US4930042A (en)	1990-05-29
EP0387518A2 (en)	1990-09-19
DE69023025D1 (de)	1995-11-23
DE69023025T2 (de)	1996-03-21
EP0387518A3 (en)	1992-03-18
CA2009489A1 (en)	1990-08-31

Publication	Publication Date	Title
BR9000845A (pt)	1991-02-05	Acelerometro em estado solido
BR9000849A (pt)	1991-02-05	Acelerometro em estado solido
BR9000844A (pt)	1991-02-05	Acelerometro em estado solido
DE68907981D1 (de)	1993-09-09	Beschleunigungsmesser.
DE69012429D1 (de)	1994-10-20	Beschleunigungsmessaufnehmer.
NO891105D0 (no)	1989-03-14	Akselerometer.
DK326089A (da)	1990-01-02	Accelerometer
DE68905913D1 (de)	1993-05-13	Beschleunigungsmessaufnehmer.
NO891106D0 (no)	1989-03-14	Akselerometer.
FR2637689B1 (fr)	1993-06-25	Accelerometre
DE68904148D1 (de)	1993-02-11	Beschleunigungsmessaufnehmer.
BR9000539A (pt)	1991-01-15	Estrutura de anodo
ATA149789A (de)	1992-04-15	Schienenrad
KR910005516U (ko)	1991-04-22	완력기
KR900002570U (ko)	1990-02-06	완력기
KR890022580U (ko)	1989-12-01	완력기
SE8901859D0 (sv)	1989-05-19	Speciell kondom
BR6900132U (pt)	1989-06-13	Estojo multi-acondicionador
KR900015195U (ko)	1990-09-01	해태 초제기
NO914390D0 (no)	1991-11-11	Selvlysende kondom
BR6901455U (pt)	1991-06-25	Multiplo-carimbador funcional
KR910008653U (ko)	1991-06-27	방향구
BR6902208U (pt)	1991-07-16	Set-light
BR6901807U (pt)	1991-07-09	Fulao
BR6900207U (pt)	1990-11-20	Presilha-abracadeira

Legal Events

Date	Code	Title	Description
1997-03-04	FB19	Grant procedure suspended (art. 19)
1997-03-04	HO	Change of classification	Free format text: INT.CL.6 G01P 15/08,15/125
1998-06-02	FA8	Dismissal: dismissal - article 36, par. 1 of industrial property law