DE69921627D1 - Vakuum ejektorpumpe - Google Patents

Vakuum ejektorpumpe

Info

Publication number: DE69921627D1
Authority: DE; Germany
Prior art keywords: ejector pump; vacuum ejector; vacuum; pump; ejector
Prior art date: 1998-03-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69921627A

Other languages

English (en)

Other versions

DE69921627C5 (de

DE69921627T4 (de

DE69921627T2 (de

Inventor

Peter Tell

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Xerex AB

Original Assignee

Xerex AB

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-03-20

Filing date

1999-03-12

Publication date

2004-12-09

Family has litigation

First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=20410633&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69921627(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

1999-03-12 Application filed by Xerex AB filed Critical Xerex AB

2004-12-09 Application granted granted Critical

2004-12-09 Publication of DE69921627D1 publication Critical patent/DE69921627D1/de

2010-12-16 Publication of DE69921627C5 publication Critical patent/DE69921627C5/de

2019-03-13 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
- F04F5/22—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating of multi-stage type
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
- F04F5/46—Arrangements of nozzles
- F04F5/467—Arrangements of nozzles with a plurality of nozzles arranged in series

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Jet Pumps And Other Pumps (AREA)

DE69921627A 1998-03-20 1999-03-12 Vakuum ejektorpumpe Expired - Lifetime DE69921627C5 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
SE9800943A SE511716E5 (sv)	1998-03-20	1998-03-20	Ejektorpump
SE9800943		1998-03-20
PCT/SE1999/000386 WO1999049216A1 (en)	1998-03-20	1999-03-12	Vacuum ejector pump

Publications (2)

Publication Number	Publication Date
DE69921627D1 true DE69921627D1 (de)	2004-12-09
DE69921627C5 DE69921627C5 (de)	2010-12-16

Family

ID=20410633

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
DE69921627T Expired - Lifetime DE69921627T4 (de)	1998-03-20	1999-03-12	Vakuum ejektorpumpe
DE69921627A Expired - Lifetime DE69921627C5 (de)	1998-03-20	1999-03-12	Vakuum ejektorpumpe

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
DE69921627T Expired - Lifetime DE69921627T4 (de)	1998-03-20	1999-03-12	Vakuum ejektorpumpe

Country Status (9)

Country	Link
US (1)	US6394760B1 (de)
EP (1)	EP1064464B3 (de)
JP (1)	JP4146086B2 (de)
KR (1)	KR100393434B1 (de)
BR (1)	BR9908210A (de)
DE (2)	DE69921627T4 (de)
ES (1)	ES2233029T7 (de)
SE (1)	SE511716E5 (de)
WO (1)	WO1999049216A1 (de)

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE513991C2 (sv) *	1999-02-26	2000-12-11	Piab Ab	Filter för en vakuumpump av ejektortyp med ljuddämpare
DE19957066A1 (de) *	1999-11-26	2001-05-31	Mannesmann Vdo Ag	Saugstrahlpumpe
GB0100756D0 (en)	2001-01-11	2001-02-21	Powderject Res Ltd	Needleless syringe
SE519647C2 (sv) *	2002-05-03	2003-03-25	Piab Ab	Vakuumpump och sätt att tillhandahålla undertryck
KR20040011571A (ko) *	2004-01-09	2004-02-05	한국뉴매틱(주)	진공 이젝터 장치
KR100578540B1 (ko) *	2004-07-28	2006-05-15	한국뉴매틱(주)	진공 이젝터 펌프
SE0502371L (sv) *	2005-10-27	2006-09-19	Xerex Ab	Ejektor med monteringshylsa, samt monteringsförfarande
KR100629994B1 (ko) *	2005-12-30	2006-10-02	한국뉴매틱(주)	진공 이젝터 펌프
SE530098C2 (sv) *	2006-07-19	2008-03-04	Xerex Ab	Sätt och anordning varmed alstras och tilll ett ark i en arkmatad tryckpress fördelas ett från atmosfärtryck skilt lufttryck för att verkställa eller påverka arkets transport i tryckpressen
KR100730323B1 (ko) *	2007-03-15	2007-06-19	한국뉴매틱(주)	필터 카트리지를 이용한 진공 시스템
US7670964B2 (en) *	2007-03-22	2010-03-02	Tokyo Electron Limited	Apparatus and methods of forming a gas cluster ion beam using a low-pressure source
US9383138B2 (en) *	2007-03-30	2016-07-05	Tokyo Electron Limited	Methods and heat treatment apparatus for uniformly heating a substrate during a bake process
US20080241400A1 (en) *	2007-03-31	2008-10-02	Tokyo Electron Limited	Vacuum assist method and system for reducing intermixing of lithography layers
GB0708758D0 (en)	2007-05-04	2007-06-13	Powderject Res Ltd	Particle cassettes and process thereof
US7914263B2 (en) *	2007-05-14	2011-03-29	Vladimir Berger	Ejector-type rotary device
ITTO20070074U1 (it)	2007-06-07	2008-12-08	Co Matic S A S Di Cavallari Iv	Dispositivo di presa di articoli impiegante il vuoto
US7772110B2 (en) *	2007-09-28	2010-08-10	Tokyo Electron Limited	Electrical contacts for integrated circuits and methods of forming using gas cluster ion beam processing
US9555892B2 (en) *	2008-07-29	2017-01-31	The Boeing Company	Aircraft galley exhaust system and method of assembling same
US8672644B2 (en) *	2008-09-09	2014-03-18	Dresser-Rand Company	Supersonic ejector package
DE102009047083C5 (de)	2009-11-24	2013-09-12	J. Schmalz Gmbh	Druckluftbetriebener Unterdruckerzeuger oder Unterdruckgreifer
DE102009047085A1 (de)	2009-11-24	2011-06-01	J. Schmalz Gmbh	Druckluftbetriebener Unterdruckerzeuger
DE102009047082A1 (de) *	2009-11-24	2011-05-26	J. Schmalz Gmbh	Druckluftbetriebener Unterdruckerzeuger
EP2409869A3 (de)	2010-07-20	2015-04-01	Sioen Industries NV	Aufblasbarer Balg zum Anheben des flexiblen Daches eines LKW-Laderaumes
EP2409868A2 (de)	2010-07-23	2012-01-25	Bootsman Holding B.V.	Luftrohr für eine Vorrichtung zum Anheben des flexiblen Dachs des LKW-Laderaums mittels Aufblasen eines Balgs
GB2484157A (en) *	2010-10-01	2012-04-04	Theodoma Ltd	Multiple stage diffused ejector pump and heat pump
KR101036797B1 (ko) *	2011-03-31	2011-05-25	한국뉴매틱(주)	진공 그리퍼 장치
CN102852567B (zh) *	2011-05-16	2016-08-10	张玉良	热力过程采用喷射抽气节能方法
CN102797515B (zh) *	2011-05-27	2017-04-19	张玉良	热力过程采用喷射抽气节能方法
DE102011107381A1 (de)	2011-06-29	2013-01-03	Brötje-Automation GmbH	Handhabungswerkzeug
DE212013000051U1 (de)	2012-04-10	2014-09-11	J. Schmalz Gmbh	Pneumatischer Vakuumerzeuger mit Treibdüse und Empfängerdüse
US9108607B2 (en)	2012-11-07	2015-08-18	Ford Global Technologies, Llc	Method and system for vacuum generation
US9441557B2 (en) *	2012-12-13	2016-09-13	Ford Global Technologies, Llc	Method and system for vacuum generation
US9435300B2 (en) *	2012-12-13	2016-09-06	Ford Global Technologies, Llc	Method and system for vacuum generation
CN105074228A (zh) *	2012-12-21	2015-11-18	谢雷克斯公司	具有多管嘴驱动级的真空喷射器
GB2509182A (en) *	2012-12-21	2014-06-25	Xerex Ab	Vacuum ejector with multi-nozzle drive stage and booster
EP2935899B1 (de)	2012-12-21	2021-12-08	Piab Aktiebolag	Vakuumejektordüse mit divergierendem elliptischem querschnitt
GB2509184A (en) *	2012-12-21	2014-06-25	Xerex Ab	Multi-stage vacuum ejector with moulded nozzle having integral valve elements
GB2509183A (en) *	2012-12-21	2014-06-25	Xerex Ab	Vacuum ejector with tripped diverging exit flow nozzle
DE102013107537B4 (de) *	2013-07-16	2015-02-19	J. Schmalz Gmbh	Mehrstufiger Ejektor
US9328702B2 (en)	2013-10-24	2016-05-03	Ford Global Technologies, Llc	Multiple tap aspirator
US9297341B2 (en) *	2014-01-20	2016-03-29	Ford Global Technologies, Llc	Multiple tap aspirator with leak passage
CN103883569B (zh) *	2014-03-11	2016-04-06	江苏大学	一种用于自吸泵上的射流喷嘴
KR101424959B1 (ko)	2014-04-08	2014-08-01	한국뉴매틱(주)	진공펌프
KR101472503B1 (ko)	2014-04-24	2014-12-12	한국뉴매틱(주)	이젝터 어셈블리 및 진공펌프
DE102014008226A1 (de) *	2014-06-11	2015-12-17	Bilsing Automation Gmbh	Vakuumerzeuger nach dem Ejektorprinzip
WO2016007861A1 (en)	2014-07-10	2016-01-14	Dayco Ip Holdings, Llc	Dual venturi device
KR20160019792A (ko)	2014-08-12	2016-02-22	피스코코리아뉴매틱주식회사	소음기 연결장치
KR102167821B1 (ko) *	2014-08-27	2020-10-20	데이코 아이피 홀딩스 엘엘시	조정식 벤튜리 틈을 갖는 저렴한 엔진용 흡출기
GB201418117D0 (en)	2014-10-13	2014-11-26	Xerex Ab	Handling device for foodstuff
KR101677564B1 (ko)	2014-10-24	2016-11-21	피스코코리아뉴매틱주식회사	노즐조립체 및 이를 포함하는 진공 이젝터
JP6380063B2 (ja)	2014-12-08	2018-08-29	株式会社Sumco	エピタキシャルシリコンウェーハの製造方法、および、気相成長装置
US10151283B2 (en)	2015-02-25	2018-12-11	Dayco Ip Holdings, Llc	Evacuator with motive fin
EP3163093B1 (de)	2015-10-30	2020-06-17	Piab Aktiebolag	Hochvakuumejektor
EP3192756B1 (de)	2016-01-15	2021-09-29	Piab Ab	Steuerung einer vakuumanlage mit einem vakuumerzeuger
EP3236083B1 (de)	2016-04-21	2018-12-12	Piab Ab	Vakuumejektorvorrichtung
EP3252317B1 (de)	2016-06-01	2020-01-29	Piab Ab	Steuerung eines vakuumsystems mit einer vakuumerzeugeranordnung
EP3255283B1 (de)	2016-06-10	2019-01-23	Piab Ab	Ejektorvorrichtung für saugnäpfe
JP6960778B2 (ja)	2016-06-10	2021-11-05	ピアブアクチエボラグ	真空発生器を含む真空システムの制御
CN106229287B (zh) *	2016-09-30	2019-04-05	厦门市三安光电科技有限公司	用于转移微元件的转置头及微元件的转移方法
CN108317108A (zh) *	2018-04-12	2018-07-24	微可为（厦门）真空科技有限公司	一种超音速真空管
GB201916064D0 (en) *	2019-11-05	2019-12-18	Transvac Systems Ltd	Ejector device
KR102344214B1 (ko)	2021-05-18	2021-12-28	(주)브이텍	진공 이젝터 펌프
FR3124559B1 (fr)	2021-06-24	2025-03-07	Coval	Générateur de vide multi-étages
KR102639841B1 (ko) *	2022-10-17	2024-02-27	주식회사 아이백코리아	다단 진공 이젝터
EP4400729B1 (de) *	2022-12-20	2026-02-04	Sel Franco, Luiz Tadeu	Vakuumerzeuger mit mehreren saugdüsen, befestigungsmittel-vakuumerzeuger mit mehreren saugdüsen und vakuumerzeugerpumpe
EP4560144A1 (de)	2023-11-23	2025-05-28	Piab Aktiebolag	Ejektorvakuumpumpe
KR102753028B1 (ko)	2024-04-08	2025-01-10	(주)브이텍	진공 이젝터 펌프

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE427955B (sv) *	1980-05-21	1983-05-24	Piab Ab	Multiejektor
DE3025525A1 (de) *	1980-07-05	1982-01-28	Jürgen 4477 Welver Volkmann	Ejektorvorrichtung
US4790054A (en) *	1985-07-12	1988-12-13	Nichols William O	Multi-stage venturi ejector and method of manufacture thereof
US4759691A (en) *	1987-03-19	1988-07-26	Kroupa Larry G	Compressed air driven vacuum pump assembly
US4880358A (en)	1988-06-20	1989-11-14	Air-Vac Engineering Company, Inc.	Ultra-high vacuum force, low air consumption pumps
JPH0448920A (ja) *	1990-06-18	1992-02-18	Inax Corp	エゼクタ及び浄化装置
US5228839A (en) *	1991-05-24	1993-07-20	Gast Manufacturing Corporation	Multistage ejector pump
US5683227A (en)	1993-03-31	1997-11-04	Smc Corporation	Multistage ejector assembly
DE19812275B4 (de) *	1998-03-20	2004-03-11	J. Schmalz Gmbh	Transportvorrichtung

1998
- 1998-03-20 SE SE9800943A patent/SE511716E5/xx not_active IP Right Cessation
1999
- 1999-03-12 ES ES99912199T patent/ES2233029T7/es active Active
- 1999-03-12 JP JP2000538154A patent/JP4146086B2/ja not_active Expired - Lifetime
- 1999-03-12 US US09/646,603 patent/US6394760B1/en not_active Expired - Lifetime
- 1999-03-12 DE DE69921627T patent/DE69921627T4/de not_active Expired - Lifetime
- 1999-03-12 BR BR9908210-1A patent/BR9908210A/pt not_active IP Right Cessation
- 1999-03-12 EP EP99912199A patent/EP1064464B3/de not_active Expired - Lifetime
- 1999-03-12 DE DE69921627A patent/DE69921627C5/de not_active Expired - Lifetime
- 1999-03-12 WO PCT/SE1999/000386 patent/WO1999049216A1/en not_active Ceased
- 1999-03-12 KR KR10-2000-7008789A patent/KR100393434B1/ko not_active Ceased

Also Published As

Publication number	Publication date
JP2002507698A (ja)	2002-03-12
DE69921627C5 (de)	2010-12-16
BR9908210A (pt)	2000-11-28
KR20010040883A (ko)	2001-05-15
SE9800943D0 (sv)	1998-03-20
WO1999049216A1 (en)	1999-09-30
KR100393434B1 (ko)	2003-08-02
EP1064464B3 (de)	2008-11-05
US6394760B1 (en)	2002-05-28
ES2233029T7 (es)	2009-06-18
SE9800943L (sv)	1999-09-21
SE511716E5 (sv)	2009-01-28
JP4146086B2 (ja)	2008-09-03
DE69921627T4 (de)	2009-06-10
WO1999049216A8 (en)	1999-11-11
ES2233029T3 (es)	2005-06-01
SE511716C2 (sv)	1999-11-15
EP1064464B1 (de)	2004-11-03
EP1064464A2 (de)	2001-01-03
DE69921627T2 (de)	2005-10-27

Publication	Publication Date	Title
DE69921627D1 (de)	2004-12-09	Vakuum ejektorpumpe
DE60030833D1 (de)	2006-11-02	Vakuumpumpe
DE69821453D1 (de)	2004-03-11	Vakuumpumpen
DE69924558D1 (de)	2005-05-12	Vakuumpumpe
DE69729686D1 (de)	2004-08-05	Vakuumpumpe
DE69920428D1 (de)	2004-10-28	Ansaugleitung
DE69727514D1 (de)	2004-03-18	Verdrängungsvakuumpumpe
DE19882986T1 (de)	2001-03-29	Trockenvakuumpumpe
DE69717231D1 (de)	2003-01-02	Vakuumpumpgerät
DE69816543D1 (de)	2003-08-28	Hochvakuum-Druckguss
DE19981942D2 (de)	2001-10-18	Vakuumpumpe
DE59902761D1 (de)	2002-10-24	Vacuumpumpe
DE69820547D1 (de)	2004-01-29	Vakuum-Pumpsystem
DE59805694D1 (de)	2002-10-31	Vakuumpumpe
DE50010514D1 (de)	2005-07-14	Mehrstufige ejektorpumpe
EP0985372A4 (de)	2004-06-02	Staubsauger
DE59911747D1 (de)	2005-04-21	Sauganlage
DE59909305D1 (de)	2004-06-03	Sauganlage
DE19882987T1 (de)	2001-04-12	Vakuumpumpe
NO20004623D0 (no)	2000-09-15	Vakuumavløpssystem
DE69820824D1 (de)	2004-02-05	Vakuumpumpen
DE69928172D1 (de)	2005-12-15	Vacuumpumpe
ITMI991726A0 (it)	1999-08-02	Pompa sottovuoto
DE59708643D1 (de)	2002-12-12	Absaugpumpe
DE69909213D1 (de)	2003-08-07	Saugvorrichtung

Legal Events

Date	Code	Title	Description
2005-12-01	8364	No opposition during term of opposition
2009-02-19	8310	Action for declaration of annulment
2009-07-16	8328	Change in the person/name/address of the agent	Representative=s name: HOFFMANN & EITLE, 81925 MUENCHEN
2010-11-25	8312	Partial invalidation
2010-12-16	8394	Patent changed during the nullification procedure (changed patent specification reprinted)
2011-02-17	8310	Action for declaration of annulment