DE69921627C5 - Vakuum ejektorpumpe - Google Patents
Vakuum ejektorpumpe Download PDFInfo
- Publication number
- DE69921627C5 DE69921627C5 DE69921627A DE69921627A DE69921627C5 DE 69921627 C5 DE69921627 C5 DE 69921627C5 DE 69921627 A DE69921627 A DE 69921627A DE 69921627 A DE69921627 A DE 69921627A DE 69921627 C5 DE69921627 C5 DE 69921627C5
- Authority
- DE
- Germany
- Prior art keywords
- nozzles
- nozzle body
- valve member
- ejector
- flow communication
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010354 integration Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- WURBVZBTWMNKQT-UHFFFAOYSA-N 1-(4-chlorophenoxy)-3,3-dimethyl-1-(1,2,4-triazol-1-yl)butan-2-one Chemical compound C1=NC=NN1C(C(=O)C(C)(C)C)OC1=CC=C(Cl)C=C1 WURBVZBTWMNKQT-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
- F04F5/22—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating of multi-stage type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
- F04F5/46—Arrangements of nozzles
- F04F5/467—Arrangements of nozzles with a plurality of nozzles arranged in series
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
A multistage ejector (1) comprising three or more nozzles (2, 3, 4, 5) assembled in series, wherein the nozzles (2–5) comprise from the inlet end to the outlet end of the multistage ejector (1) an axial throughchannel (6) with gradually increasing cross-sectional opening area, wherein a stream of air fed through the nozzles at high velocity is used to create, in an outer, radially surrounding space (V, V') a negative pressure, the radially surrounding space being in flow communication (10) with at least two slots (7, 8, 9) located between the nozzles, characterized in that the nozzles have means to be coupled together into an integrated, rotationally symmetric nozzle body (1), and that the flow communication is provided by through openings (10) arranged in the wall of the rotationally symmetric nozzle body (1), the ejector having valve members (11) that are embodied as non- return valves and arranged to cover and...
Description
- Tenor
- Betreffend das
europäische Patent 1 064 464 (DE 699 21 627 )
hat der 5. Senat (Nichtigkeitssenat) des Bundespatentgerichts aufgrund der mündlichen Verhandlung vom 20. Januar 2010 für Recht erkannt: - I. Das
europäische Patent 1 064 464 wird mit Wirkung für das Hoheitsgebiet der Bundesrepublik Deutschland dadurch teilweise für nichtig erklärt, dass die Patentansprüche 1 bis 5 folgende Fassung erhalten:
Claims (5)
- A multistage ejector (
1 ) comprising three or more nozzles (2 ,3 ,4 ,5 ) assembled in series, wherein the nozzles (2 –5 ) comprise from the inlet end to the outlet end of the multistage ejector (1 ) an axial throughchannel (6 ) with gradually increasing cross-sectional opening area, wherein a stream of air fed through the nozzles at high velocity is used to create, in an outer, radially surrounding space (V, V') a negative pressure, the radially surrounding space being in flow communication (10 ) with at least two slots (7 ,8 ,9 ) located between the nozzles, characterized in that the nozzles have means to be coupled together into an integrated, rotationally symmetric nozzle body (1 ), and that the flow communication is provided by through openings (10 ) arranged in the wall of the rotationally symmetric nozzle body (1 ), the ejector having valve members (11 ) that are embodied as non- return valves and arranged to cover and to open the through openings (10 ), the valve members embodied as non-return valves being accommodated for integration with the nozzle body (1 ). - An ejector according to claim 1, characterized in that at least one flexible valve member (
11 ) for covering the flow communication (10 ) is arranged integrally in the nozzle body so as to extend concentrically with the stream of air fed through the nozzles. - An ejector according to claim 2, characterized in that the nozzles (
2 ,3 ,4 ,5 ) which are coupled together to form an integrated nozzle body (1 ) with slots (7 ,8 ,9 ) formed between the nozzles, has a substantially cylindrical, flexible valve member (11 ) arranged in connection with each slot, respectively, the valve member (11 ) being axially slotted (12 ) to present one or more semi-circular tongue (13 ) for covering the flow communications (10 ), respectively. - An ejector according to claim 2, characterized in that the three or more nozzles are formed in opposing ends thereof to be assembled into an integrated nozzle body (
1 ) with a through channel (6 ) of gradually increasing, sectional opening area, the nozzle body having at least two slots (7 ,8 ,9 ), which open into the channel and is in flow communication (10 ) with the surrounding space (V, V'), and at least one seat (18 ) for a valve member (11 ) covering the flow communication. - An ejector according to claim 1, characterized by nozzles having a rotationally symmetric outer and inner cross sectional shape, assembled to form an integrated nozzle body (
1 ), wherein one or more cylindrical valve members (11 ) are integrally received in the nozzle body in order to cover, upon a reached pressure difference between atmosphere and an outer space (V, V') surrounding the nozzle body, the flow communication (10 ) between the surrounding outer space and a channel (6 ) through the nozzles in the region of slots (7 ,8 ,9 ) formed between the assembled nozzles (2 ,3 ,4 ,5 ) in the nozzle body, said valve member or valve members sealing against the inner wall of the nozzle body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9800943A SE511716E5 (sv) | 1998-03-20 | 1998-03-20 | Ejektorpump |
| SE9800943 | 1998-03-20 | ||
| PCT/SE1999/000386 WO1999049216A1 (en) | 1998-03-20 | 1999-03-12 | Vacuum ejector pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69921627D1 DE69921627D1 (de) | 2004-12-09 |
| DE69921627C5 true DE69921627C5 (de) | 2010-12-16 |
Family
ID=20410633
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69921627T Expired - Lifetime DE69921627T4 (de) | 1998-03-20 | 1999-03-12 | Vakuum ejektorpumpe |
| DE69921627A Expired - Lifetime DE69921627C5 (de) | 1998-03-20 | 1999-03-12 | Vakuum ejektorpumpe |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69921627T Expired - Lifetime DE69921627T4 (de) | 1998-03-20 | 1999-03-12 | Vakuum ejektorpumpe |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6394760B1 (de) |
| EP (1) | EP1064464B3 (de) |
| JP (1) | JP4146086B2 (de) |
| KR (1) | KR100393434B1 (de) |
| BR (1) | BR9908210A (de) |
| DE (2) | DE69921627T4 (de) |
| ES (1) | ES2233029T7 (de) |
| SE (1) | SE511716E5 (de) |
| WO (1) | WO1999049216A1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202009019074U1 (de) | 2009-11-24 | 2016-05-23 | J. Schmalz Gmbh | Druckluftbetriebener Unterdruckerzeuger |
Families Citing this family (66)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE513991C2 (sv) * | 1999-02-26 | 2000-12-11 | Piab Ab | Filter för en vakuumpump av ejektortyp med ljuddämpare |
| DE19957066A1 (de) * | 1999-11-26 | 2001-05-31 | Mannesmann Vdo Ag | Saugstrahlpumpe |
| GB0100756D0 (en) | 2001-01-11 | 2001-02-21 | Powderject Res Ltd | Needleless syringe |
| SE519647C2 (sv) * | 2002-05-03 | 2003-03-25 | Piab Ab | Vakuumpump och sätt att tillhandahålla undertryck |
| KR20040011571A (ko) * | 2004-01-09 | 2004-02-05 | 한국뉴매틱(주) | 진공 이젝터 장치 |
| KR100578540B1 (ko) * | 2004-07-28 | 2006-05-15 | 한국뉴매틱(주) | 진공 이젝터 펌프 |
| SE0502371L (sv) * | 2005-10-27 | 2006-09-19 | Xerex Ab | Ejektor med monteringshylsa, samt monteringsförfarande |
| KR100629994B1 (ko) * | 2005-12-30 | 2006-10-02 | 한국뉴매틱(주) | 진공 이젝터 펌프 |
| SE530098C2 (sv) * | 2006-07-19 | 2008-03-04 | Xerex Ab | Sätt och anordning varmed alstras och tilll ett ark i en arkmatad tryckpress fördelas ett från atmosfärtryck skilt lufttryck för att verkställa eller påverka arkets transport i tryckpressen |
| KR100730323B1 (ko) * | 2007-03-15 | 2007-06-19 | 한국뉴매틱(주) | 필터 카트리지를 이용한 진공 시스템 |
| US7670964B2 (en) * | 2007-03-22 | 2010-03-02 | Tokyo Electron Limited | Apparatus and methods of forming a gas cluster ion beam using a low-pressure source |
| US9383138B2 (en) * | 2007-03-30 | 2016-07-05 | Tokyo Electron Limited | Methods and heat treatment apparatus for uniformly heating a substrate during a bake process |
| US20080241400A1 (en) * | 2007-03-31 | 2008-10-02 | Tokyo Electron Limited | Vacuum assist method and system for reducing intermixing of lithography layers |
| GB0708758D0 (en) | 2007-05-04 | 2007-06-13 | Powderject Res Ltd | Particle cassettes and process thereof |
| US7914263B2 (en) * | 2007-05-14 | 2011-03-29 | Vladimir Berger | Ejector-type rotary device |
| ITTO20070074U1 (it) | 2007-06-07 | 2008-12-08 | Co Matic S A S Di Cavallari Iv | Dispositivo di presa di articoli impiegante il vuoto |
| US7772110B2 (en) * | 2007-09-28 | 2010-08-10 | Tokyo Electron Limited | Electrical contacts for integrated circuits and methods of forming using gas cluster ion beam processing |
| US9555892B2 (en) * | 2008-07-29 | 2017-01-31 | The Boeing Company | Aircraft galley exhaust system and method of assembling same |
| US8672644B2 (en) * | 2008-09-09 | 2014-03-18 | Dresser-Rand Company | Supersonic ejector package |
| DE102009047083C5 (de) | 2009-11-24 | 2013-09-12 | J. Schmalz Gmbh | Druckluftbetriebener Unterdruckerzeuger oder Unterdruckgreifer |
| DE102009047082A1 (de) * | 2009-11-24 | 2011-05-26 | J. Schmalz Gmbh | Druckluftbetriebener Unterdruckerzeuger |
| EP2409869A3 (de) | 2010-07-20 | 2015-04-01 | Sioen Industries NV | Aufblasbarer Balg zum Anheben des flexiblen Daches eines LKW-Laderaumes |
| EP2409868A2 (de) | 2010-07-23 | 2012-01-25 | Bootsman Holding B.V. | Luftrohr für eine Vorrichtung zum Anheben des flexiblen Dachs des LKW-Laderaums mittels Aufblasen eines Balgs |
| GB2484157A (en) * | 2010-10-01 | 2012-04-04 | Theodoma Ltd | Multiple stage diffused ejector pump and heat pump |
| KR101036797B1 (ko) * | 2011-03-31 | 2011-05-25 | 한국뉴매틱(주) | 진공 그리퍼 장치 |
| CN102852567B (zh) * | 2011-05-16 | 2016-08-10 | 张玉良 | 热力过程采用喷射抽气节能方法 |
| CN102797515B (zh) * | 2011-05-27 | 2017-04-19 | 张玉良 | 热力过程采用喷射抽气节能方法 |
| DE102011107381A1 (de) | 2011-06-29 | 2013-01-03 | Brötje-Automation GmbH | Handhabungswerkzeug |
| DE212013000051U1 (de) | 2012-04-10 | 2014-09-11 | J. Schmalz Gmbh | Pneumatischer Vakuumerzeuger mit Treibdüse und Empfängerdüse |
| US9108607B2 (en) | 2012-11-07 | 2015-08-18 | Ford Global Technologies, Llc | Method and system for vacuum generation |
| US9441557B2 (en) * | 2012-12-13 | 2016-09-13 | Ford Global Technologies, Llc | Method and system for vacuum generation |
| US9435300B2 (en) * | 2012-12-13 | 2016-09-06 | Ford Global Technologies, Llc | Method and system for vacuum generation |
| CN105074228A (zh) * | 2012-12-21 | 2015-11-18 | 谢雷克斯公司 | 具有多管嘴驱动级的真空喷射器 |
| GB2509182A (en) * | 2012-12-21 | 2014-06-25 | Xerex Ab | Vacuum ejector with multi-nozzle drive stage and booster |
| EP2935899B1 (de) | 2012-12-21 | 2021-12-08 | Piab Aktiebolag | Vakuumejektordüse mit divergierendem elliptischem querschnitt |
| GB2509184A (en) * | 2012-12-21 | 2014-06-25 | Xerex Ab | Multi-stage vacuum ejector with moulded nozzle having integral valve elements |
| GB2509183A (en) * | 2012-12-21 | 2014-06-25 | Xerex Ab | Vacuum ejector with tripped diverging exit flow nozzle |
| DE102013107537B4 (de) * | 2013-07-16 | 2015-02-19 | J. Schmalz Gmbh | Mehrstufiger Ejektor |
| US9328702B2 (en) | 2013-10-24 | 2016-05-03 | Ford Global Technologies, Llc | Multiple tap aspirator |
| US9297341B2 (en) * | 2014-01-20 | 2016-03-29 | Ford Global Technologies, Llc | Multiple tap aspirator with leak passage |
| CN103883569B (zh) * | 2014-03-11 | 2016-04-06 | 江苏大学 | 一种用于自吸泵上的射流喷嘴 |
| KR101424959B1 (ko) | 2014-04-08 | 2014-08-01 | 한국뉴매틱(주) | 진공펌프 |
| KR101472503B1 (ko) | 2014-04-24 | 2014-12-12 | 한국뉴매틱(주) | 이젝터 어셈블리 및 진공펌프 |
| DE102014008226A1 (de) * | 2014-06-11 | 2015-12-17 | Bilsing Automation Gmbh | Vakuumerzeuger nach dem Ejektorprinzip |
| WO2016007861A1 (en) | 2014-07-10 | 2016-01-14 | Dayco Ip Holdings, Llc | Dual venturi device |
| KR20160019792A (ko) | 2014-08-12 | 2016-02-22 | 피스코코리아뉴매틱주식회사 | 소음기 연결장치 |
| KR102167821B1 (ko) * | 2014-08-27 | 2020-10-20 | 데이코 아이피 홀딩스 엘엘시 | 조정식 벤튜리 틈을 갖는 저렴한 엔진용 흡출기 |
| GB201418117D0 (en) | 2014-10-13 | 2014-11-26 | Xerex Ab | Handling device for foodstuff |
| KR101677564B1 (ko) | 2014-10-24 | 2016-11-21 | 피스코코리아뉴매틱주식회사 | 노즐조립체 및 이를 포함하는 진공 이젝터 |
| JP6380063B2 (ja) | 2014-12-08 | 2018-08-29 | 株式会社Sumco | エピタキシャルシリコンウェーハの製造方法、および、気相成長装置 |
| US10151283B2 (en) | 2015-02-25 | 2018-12-11 | Dayco Ip Holdings, Llc | Evacuator with motive fin |
| EP3163093B1 (de) | 2015-10-30 | 2020-06-17 | Piab Aktiebolag | Hochvakuumejektor |
| EP3192756B1 (de) | 2016-01-15 | 2021-09-29 | Piab Ab | Steuerung einer vakuumanlage mit einem vakuumerzeuger |
| EP3236083B1 (de) | 2016-04-21 | 2018-12-12 | Piab Ab | Vakuumejektorvorrichtung |
| EP3252317B1 (de) | 2016-06-01 | 2020-01-29 | Piab Ab | Steuerung eines vakuumsystems mit einer vakuumerzeugeranordnung |
| EP3255283B1 (de) | 2016-06-10 | 2019-01-23 | Piab Ab | Ejektorvorrichtung für saugnäpfe |
| JP6960778B2 (ja) | 2016-06-10 | 2021-11-05 | ピアブ アクチエボラグ | 真空発生器を含む真空システムの制御 |
| CN106229287B (zh) * | 2016-09-30 | 2019-04-05 | 厦门市三安光电科技有限公司 | 用于转移微元件的转置头及微元件的转移方法 |
| CN108317108A (zh) * | 2018-04-12 | 2018-07-24 | 微可为(厦门)真空科技有限公司 | 一种超音速真空管 |
| GB201916064D0 (en) * | 2019-11-05 | 2019-12-18 | Transvac Systems Ltd | Ejector device |
| KR102344214B1 (ko) | 2021-05-18 | 2021-12-28 | (주)브이텍 | 진공 이젝터 펌프 |
| FR3124559B1 (fr) | 2021-06-24 | 2025-03-07 | Coval | Générateur de vide multi-étages |
| KR102639841B1 (ko) * | 2022-10-17 | 2024-02-27 | 주식회사 아이백코리아 | 다단 진공 이젝터 |
| EP4400729B1 (de) * | 2022-12-20 | 2026-02-04 | Sel Franco, Luiz Tadeu | Vakuumerzeuger mit mehreren saugdüsen, befestigungsmittel-vakuumerzeuger mit mehreren saugdüsen und vakuumerzeugerpumpe |
| EP4560144A1 (de) | 2023-11-23 | 2025-05-28 | Piab Aktiebolag | Ejektorvakuumpumpe |
| KR102753028B1 (ko) | 2024-04-08 | 2025-01-10 | (주)브이텍 | 진공 이젝터 펌프 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE427955B (sv) * | 1980-05-21 | 1983-05-24 | Piab Ab | Multiejektor |
| DE3025525A1 (de) * | 1980-07-05 | 1982-01-28 | Jürgen 4477 Welver Volkmann | Ejektorvorrichtung |
| US4790054A (en) * | 1985-07-12 | 1988-12-13 | Nichols William O | Multi-stage venturi ejector and method of manufacture thereof |
| US4759691A (en) * | 1987-03-19 | 1988-07-26 | Kroupa Larry G | Compressed air driven vacuum pump assembly |
| US4880358A (en) | 1988-06-20 | 1989-11-14 | Air-Vac Engineering Company, Inc. | Ultra-high vacuum force, low air consumption pumps |
| JPH0448920A (ja) * | 1990-06-18 | 1992-02-18 | Inax Corp | エゼクタ及び浄化装置 |
| US5228839A (en) * | 1991-05-24 | 1993-07-20 | Gast Manufacturing Corporation | Multistage ejector pump |
| US5683227A (en) | 1993-03-31 | 1997-11-04 | Smc Corporation | Multistage ejector assembly |
| DE19812275B4 (de) * | 1998-03-20 | 2004-03-11 | J. Schmalz Gmbh | Transportvorrichtung |
-
1998
- 1998-03-20 SE SE9800943A patent/SE511716E5/xx not_active IP Right Cessation
-
1999
- 1999-03-12 ES ES99912199T patent/ES2233029T7/es active Active
- 1999-03-12 JP JP2000538154A patent/JP4146086B2/ja not_active Expired - Lifetime
- 1999-03-12 US US09/646,603 patent/US6394760B1/en not_active Expired - Lifetime
- 1999-03-12 DE DE69921627T patent/DE69921627T4/de not_active Expired - Lifetime
- 1999-03-12 BR BR9908210-1A patent/BR9908210A/pt not_active IP Right Cessation
- 1999-03-12 EP EP99912199A patent/EP1064464B3/de not_active Expired - Lifetime
- 1999-03-12 DE DE69921627A patent/DE69921627C5/de not_active Expired - Lifetime
- 1999-03-12 WO PCT/SE1999/000386 patent/WO1999049216A1/en not_active Ceased
- 1999-03-12 KR KR10-2000-7008789A patent/KR100393434B1/ko not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202009019074U1 (de) | 2009-11-24 | 2016-05-23 | J. Schmalz Gmbh | Druckluftbetriebener Unterdruckerzeuger |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002507698A (ja) | 2002-03-12 |
| BR9908210A (pt) | 2000-11-28 |
| KR20010040883A (ko) | 2001-05-15 |
| SE9800943D0 (sv) | 1998-03-20 |
| WO1999049216A1 (en) | 1999-09-30 |
| KR100393434B1 (ko) | 2003-08-02 |
| EP1064464B3 (de) | 2008-11-05 |
| US6394760B1 (en) | 2002-05-28 |
| ES2233029T7 (es) | 2009-06-18 |
| SE9800943L (sv) | 1999-09-21 |
| SE511716E5 (sv) | 2009-01-28 |
| JP4146086B2 (ja) | 2008-09-03 |
| DE69921627T4 (de) | 2009-06-10 |
| WO1999049216A8 (en) | 1999-11-11 |
| ES2233029T3 (es) | 2005-06-01 |
| SE511716C2 (sv) | 1999-11-15 |
| EP1064464B1 (de) | 2004-11-03 |
| EP1064464A2 (de) | 2001-01-03 |
| DE69921627T2 (de) | 2005-10-27 |
| DE69921627D1 (de) | 2004-12-09 |
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| SU1055944A1 (ru) | Приточный воздухораспределитель |
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Representative=s name: HOFFMANN & EITLE, 81925 MUENCHEN |
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