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DE69920354D1 - Vakuumpumpe mit magnetfanglageranordnung und fanglager - Google Patents

Vakuumpumpe mit magnetfanglageranordnung und fanglager

Info

Publication number
DE69920354D1
DE69920354D1 DE69920354T DE69920354T DE69920354D1 DE 69920354 D1 DE69920354 D1 DE 69920354D1 DE 69920354 T DE69920354 T DE 69920354T DE 69920354 T DE69920354 T DE 69920354T DE 69920354 D1 DE69920354 D1 DE 69920354D1
Authority
DE
Germany
Prior art keywords
collar bearing
vacuum pump
magnetic
bearing arrangement
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69920354T
Other languages
English (en)
Other versions
DE69920354T2 (de
Inventor
Fausto Casaro
Alain Laager
Roland Siegwart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Publication of DE69920354D1 publication Critical patent/DE69920354D1/de
Application granted granted Critical
Publication of DE69920354T2 publication Critical patent/DE69920354T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE69920354T 1998-03-10 1999-03-09 Vakuumpumpe mit magnetfanglageranordnung und fanglager Expired - Lifetime DE69920354T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/037,762 US6074165A (en) 1998-03-10 1998-03-10 Vacuum pump with magnetic bearing system and back-up bearings
US37762 1998-03-10
PCT/US1999/005054 WO1999046510A1 (en) 1998-03-10 1999-03-09 Vacuum pump with magnetic bearing system and back-up bearings

Publications (2)

Publication Number Publication Date
DE69920354D1 true DE69920354D1 (de) 2004-10-28
DE69920354T2 DE69920354T2 (de) 2006-02-16

Family

ID=21896186

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69920354T Expired - Lifetime DE69920354T2 (de) 1998-03-10 1999-03-09 Vakuumpumpe mit magnetfanglageranordnung und fanglager

Country Status (5)

Country Link
US (1) US6074165A (de)
EP (1) EP0981690B1 (de)
JP (1) JP3814651B2 (de)
DE (1) DE69920354T2 (de)
WO (1) WO1999046510A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6524005B2 (en) * 2001-06-04 2003-02-25 Honeywell International, Inc. Touchdown bearing assembly with actuator ring assembly
US20060188381A1 (en) * 2005-02-24 2006-08-24 Honeywell International, Inc. Seal assembly for hydraulic pump output shaft
FR2893684B1 (fr) * 2005-11-24 2009-07-03 Mecanique Magnetique Sa Soc D Agencement de paliers de secours pour machine tournante a paliers magnetiques actifs
US7736062B2 (en) * 2007-09-14 2010-06-15 Hamilton Sundstrand Corporation Auxiliary rotary bearing system
DE102011075710A1 (de) * 2011-05-12 2012-11-15 Schaeffler Technologies AG & Co. KG Lageranordnung mit einem Fanglager, insbesondere für eine Lagerung einer schnelldrehenden Welle
GB2507500B (en) * 2012-10-30 2015-06-17 Edwards Ltd Vacuum pump
GB2507501B (en) 2012-10-30 2015-07-15 Edwards Ltd Vacuum pump
EP2808551B1 (de) * 2013-05-30 2020-01-08 Nuovo Pignone S.r.l. Rotationsmaschine mit mindestens einem aktiven Magnetlager und Hilfswälzlagern
US20160076588A1 (en) * 2014-09-17 2016-03-17 Schaeffler Technologies AG & Co. KG Impact resistant high speed bearing
US10311150B2 (en) 2015-04-10 2019-06-04 Commvault Systems, Inc. Using a Unix-based file system to manage and serve clones to windows-based computing clients
JP7220692B2 (ja) 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、スクロールポンプ及びその製造方法
DE102021211080A1 (de) * 2021-10-01 2023-04-06 Robert Bosch Gesellschaft mit beschränkter Haftung Elektrische Antriebseinrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
CH583856A5 (de) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
US4312628A (en) * 1979-05-21 1982-01-26 Cambridge Thermionic Corporation Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
US5747907A (en) * 1995-12-29 1998-05-05 United Technologies Automotive, Inc. Backup bearings for positive re-centering of magnetic bearings
IT1285864B1 (it) * 1996-05-09 1998-06-24 Varian Spa Gruppo girevole di supporto per rotatore di pompa da vuoto.

Also Published As

Publication number Publication date
DE69920354T2 (de) 2006-02-16
JP2001525036A (ja) 2001-12-04
JP3814651B2 (ja) 2006-08-30
EP0981690B1 (de) 2004-09-22
US6074165A (en) 2000-06-13
WO1999046510A1 (en) 1999-09-16
EP0981690A1 (de) 2000-03-01

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