DE69920356D1 - Vakuumpumpe mit magnetlagersystem - Google Patents

Vakuumpumpe mit magnetlagersystem

Info

Publication number: DE69920356D1
Authority: DE; Germany
Prior art keywords: vacuum pump; magnetic bearing; bearing system; magnetic; vacuum
Prior art date: 1998-03-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69920356T

Other languages

English (en)

Other versions

DE69920356T2 (de

Inventor

Fausto Casaro

Crawford Meeks

Alain Laager

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Varian Inc

Original Assignee

Varian Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-03-10

Filing date

1999-03-09

Publication date

2004-10-28

1999-03-09 Application filed by Varian Inc filed Critical Varian Inc

2004-10-28 Application granted granted Critical

2004-10-28 Publication of DE69920356D1 publication Critical patent/DE69920356D1/de

2005-11-10 Publication of DE69920356T2 publication Critical patent/DE69920356T2/de

2019-03-10 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
- F16C39/02—Relieving load on bearings using mechanical means
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Physics & Mathematics (AREA)
Electromagnetism (AREA)
Magnetic Bearings And Hydrostatic Bearings (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

DE69920356T 1998-03-10 1999-03-09 Vakuumpumpe mit magnetlagersystem Expired - Lifetime DE69920356T2 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US258673		1988-10-17
US09/258,673 US6078120A (en)	1998-03-10	1999-02-26	Vacuum pump with magnetic bearing system, backup bearings and sensors
PCT/US1999/005047 WO1999046508A2 (en)	1998-03-10	1999-03-09	A vacuum pump with magnetic bearing system, backup bearings and sensors

Publications (2)

Publication Number	Publication Date
DE69920356D1 true DE69920356D1 (de)	2004-10-28
DE69920356T2 DE69920356T2 (de)	2005-11-10

Family

ID=22981630

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69920356T Expired - Lifetime DE69920356T2 (de)	1998-03-10	1999-03-09	Vakuumpumpe mit magnetlagersystem

Country Status (5)

Country	Link
US (1)	US6078120A (de)
EP (1)	EP0981694B1 (de)
JP (1)	JP3811769B2 (de)
DE (1)	DE69920356T2 (de)
WO (1)	WO1999046508A2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2000291655A (ja) *	1999-04-09	2000-10-20	Nsk Ltd	磁気軸受の保護用転がり軸受
FR2804476B1 (fr) *	2000-01-31	2002-04-12	Cit Alcatel	Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique
DE10054369B4 (de) *	2000-10-30	2007-06-28	Siemens Ag	Anordnung zum Erfassen messtechnischer Daten eines Rotors einer rotierenden Maschine
US7023118B1 (en) *	2002-03-14	2006-04-04	The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration	System for controlling a magnetically levitated rotor
DE102004013919A1 (de) *	2004-03-22	2005-10-20	Siemens Ag	Elektromotor
US7736062B2 (en) *	2007-09-14	2010-06-15	Hamilton Sundstrand Corporation	Auxiliary rotary bearing system
US8385505B2 (en) *	2009-06-19	2013-02-26	Varian Medical Systems, Inc.	X-ray tube bearing assembly
WO2011044430A2 (en) *	2009-10-09	2011-04-14	Dresser-Rand Company	Auxiliary bearing system with oil reservoir for magnetically supported rotor system
WO2011044423A2 (en) *	2009-10-09	2011-04-14	Dresser-Rand Company	Auxiliary bearing system with oil ring for magnetically supported rotor system
EP2486293B1 (de) *	2009-10-09	2018-02-21	Dresser-Rand Company	Hilfslagersystem mit mehreren schwungringen für magnetgelagertes rotorsystem
NO2486292T3 (de) *	2009-10-09	2018-01-06
WO2011088004A2 (en)	2010-01-15	2011-07-21	Dresser-Rand Company	Bearing assembly support and adjustment system
EP2357374B1 (de) *	2010-01-29	2016-02-17	Levitronix GmbH	Magnetische Lagervorrichtung
US8994237B2 (en)	2010-12-30	2015-03-31	Dresser-Rand Company	Method for on-line detection of liquid and potential for the occurrence of resistance to ground faults in active magnetic bearing systems
EP2659277B8 (de)	2010-12-30	2018-05-23	Dresser-Rand Company	Verfahren zur online-erkennung von bodenwiderstandsfehlern in aktiven magnetlagersystemen
US9551349B2 (en)	2011-04-08	2017-01-24	Dresser-Rand Company	Circulating dielectric oil cooling system for canned bearings and canned electronics
US8876389B2 (en)	2011-05-27	2014-11-04	Dresser-Rand Company	Segmented coast-down bearing for magnetic bearing systems
US8851756B2 (en)	2011-06-29	2014-10-07	Dresser-Rand Company	Whirl inhibiting coast-down bearing for magnetic bearing systems
JP2016178801A (ja) *	2015-03-20	2016-10-06	株式会社Ihi	スイッチトリラクタンス回転機、及び回転装置
JP6727444B2 (ja) *	2017-08-01	2020-07-22	三菱電機株式会社	回転駆動装置、回転駆動装置の組付方法、軸流送風器、軸流送風器の組付方法及びレーザ発振装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR445691A (fr) *	1912-06-08	1912-11-16	Ernest Gass	Moteur à combustion sans soupape
DE2349033C3 (de) *	1973-09-29	1984-08-30	Leybold-Heraeus Gmbh, 5000 Koeln	Turbomolekularpumpe
DE3239328C2 (de) *	1982-10-23	1993-12-23	Pfeiffer Vakuumtechnik	Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPH0646036B2 (ja) *	1982-11-19	1994-06-15	セイコー電子工業株式会社	軸流分子ポンプ
US4652820A (en) *	1983-03-23	1987-03-24	North American Philips Corporation	Combined position sensor and magnetic motor or bearing
JPS60164013A (ja) *	1984-02-03	1985-08-27	Toshiba Corp	磁気軸受
US4683111A (en) *	1986-01-23	1987-07-28	Proto-Power Corporation	Gas circulator for a nuclear reactor and a method for use thereof
JP2556320B2 (ja) *	1987-03-18	1996-11-20	セイコ−精機株式会社	真空ポンプ
FR2659396B1 (fr) *	1990-03-07	1992-05-15	Cit Alcatel	Pompe a vide pour vide moleculaire propre.
FR2659395B1 (fr) *	1990-03-07	1992-05-15	Cit Alcatel	Pompe a vide a suspension magnetique.
US5238362A (en)	1990-03-09	1993-08-24	Varian Associates, Inc.	Turbomolecular pump
NL9001908A (nl) *	1990-08-30	1992-03-16	Philips Nv	Elektromagnetische ondersteuning met positie-onafhankelijke eigenschappen.
US5469007A (en) *	1993-12-07	1995-11-21	Mitsubishi Jukogyo Kabushiki Kaisha	Magnetic bearing arrangement
JP3425475B2 (ja) *	1994-07-12	2003-07-14	セイコーインスツルメンツ株式会社	磁気軸受装置

1999
- 1999-02-26 US US09/258,673 patent/US6078120A/en not_active Expired - Lifetime
- 1999-03-09 DE DE69920356T patent/DE69920356T2/de not_active Expired - Lifetime
- 1999-03-09 EP EP99911202A patent/EP0981694B1/de not_active Expired - Lifetime
- 1999-03-09 JP JP54595499A patent/JP3811769B2/ja not_active Expired - Fee Related
- 1999-03-09 WO PCT/US1999/005047 patent/WO1999046508A2/en not_active Ceased

Also Published As

Publication number	Publication date
EP0981694A2 (de)	2000-03-01
JP2002513456A (ja)	2002-05-08
EP0981694B1 (de)	2004-09-22
WO1999046508A3 (en)	1999-11-11
DE69920356T2 (de)	2005-11-10
US6078120A (en)	2000-06-20
WO1999046508A2 (en)	1999-09-16
JP3811769B2 (ja)	2006-08-23

Publication	Publication Date	Title
DE69920356D1 (de)	2004-10-28	Vakuumpumpe mit magnetlagersystem
DE60022715D1 (de)	2006-02-02	Magnetlager und vakuumpumpe
DE69821453D1 (de)	2004-03-11	Vakuumpumpen
DE69729686D1 (de)	2004-08-05	Vakuumpumpe
IL143362A0 (en)	2002-04-21	Active magnetic bearing system for blood pump
DE69924558D1 (de)	2005-05-12	Vakuumpumpe
DE69727514D1 (de)	2004-03-18	Verdrängungsvakuumpumpe
DE69820547D1 (de)	2004-01-29	Vakuum-Pumpsystem
DE69839927D1 (de)	2008-10-02	Motor mit innerem Permanentmagnetrotor
DE60023216D1 (de)	2006-03-02	Vakuumpumpen mit doppeltem eintritt
BR9808524B1 (pt)	2009-01-13	codificador magnético.
DE59910725D1 (de)	2004-11-11	Magnetische Lagervorrichtung
DE69924556D1 (de)	2005-05-12	Magnetlager
DE69840793D1 (de)	2009-06-10	Synchronmotor mit dauermagneten
DE60024942D1 (de)	2006-01-26	Magnetlager
DE10084652T1 (de)	2002-05-08	Motor mit Dauermagnet
DE59902761D1 (de)	2002-10-24	Vacuumpumpe
DE19981942D2 (de)	2001-10-18	Vakuumpumpe
DE59805694D1 (de)	2002-10-31	Vakuumpumpe
DE10007428B8 (de)	2008-06-26	Magnetlager
DE69943382D1 (de)	2011-06-01	Magnetisches drucklager
DE69921046D1 (de)	2004-11-18	Linearwälzlager
DE60219842D1 (de)	2007-06-14	Vakuumpumpe mit Magnetlager
DE19882987T1 (de)	2001-04-12	Vakuumpumpe
DE60015461D1 (de)	2004-12-09	Magnetlager

Legal Events

Date	Code	Title	Description
2005-10-20	8364	No opposition during term of opposition
2011-11-30	R082	Change of representative	Ref document number: 981694 Country of ref document: EP Representative=s name: KAHLER, KAECK & MOLLEKOPF, 86899 LANDSBERG, DE

Date

Code

Title

Description

2005-10-20

8364

No opposition during term of opposition

2011-11-30

R082

Change of representative

Ref document number: 981694

Country of ref document: EP

Representative=s name: KAHLER, KAECK & MOLLEKOPF, 86899 LANDSBERG, DE