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DE69505900D1 - Halbleiterlaser mit integrierter Wellenleiterlinse - Google Patents

Halbleiterlaser mit integrierter Wellenleiterlinse

Info

Publication number
DE69505900D1
DE69505900D1 DE69505900T DE69505900T DE69505900D1 DE 69505900 D1 DE69505900 D1 DE 69505900D1 DE 69505900 T DE69505900 T DE 69505900T DE 69505900 T DE69505900 T DE 69505900T DE 69505900 D1 DE69505900 D1 DE 69505900D1
Authority
DE
Germany
Prior art keywords
semiconductor laser
integrated waveguide
waveguide lens
lens
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69505900T
Other languages
English (en)
Other versions
DE69505900T2 (de
Inventor
Kang-Yih Liou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE69505900D1 publication Critical patent/DE69505900D1/de
Publication of DE69505900T2 publication Critical patent/DE69505900T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0267—Integrated focusing lens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1025—Extended cavities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1082—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region with a special facet structure, e.g. structured, non planar, oblique
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/16—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface
    • H01S5/164—Window-type lasers, i.e. with a region of non-absorbing material between the active region and the reflecting surface with window regions comprising semiconductor material with a wider bandgap than the active layer

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Semiconductor Lasers (AREA)
DE69505900T 1994-06-30 1995-06-20 Halbleiterlaser mit integrierter Wellenleiterlinse Expired - Fee Related DE69505900T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/268,896 US5517517A (en) 1994-06-30 1994-06-30 Semiconductor laser having integrated waveguiding lens

Publications (2)

Publication Number Publication Date
DE69505900D1 true DE69505900D1 (de) 1998-12-17
DE69505900T2 DE69505900T2 (de) 1999-05-12

Family

ID=23024978

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505900T Expired - Fee Related DE69505900T2 (de) 1994-06-30 1995-06-20 Halbleiterlaser mit integrierter Wellenleiterlinse

Country Status (5)

Country Link
US (1) US5517517A (de)
EP (1) EP0690533B1 (de)
JP (1) JPH08130348A (de)
CA (1) CA2149156C (de)
DE (1) DE69505900T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5392308A (en) * 1993-01-07 1995-02-21 Sdl, Inc. Semiconductor laser with integral spatial mode filter
GB9425729D0 (en) * 1994-09-14 1995-02-22 British Telecomm Otical device
US6075801A (en) * 1995-01-18 2000-06-13 Nec Corporation Semiconductor laser with wide side of tapered light gain region
US5760939A (en) * 1995-10-23 1998-06-02 Sdl, Inc. Optical transmission link capable of high temperature operation without cooling with an optical receiver module having temperature independent sensitivity performance and optical transmitter module with laser diode source
FR2754400A1 (fr) * 1996-10-07 1998-04-10 Commissariat Energie Atomique Microlaser solide couple dans une fibre et procede de realisation
US6014396A (en) * 1997-09-05 2000-01-11 Sdl, Inc. Flared semiconductor optoelectronic device
US6122299A (en) * 1997-12-31 2000-09-19 Sdl, Inc. Angled distributed reflector optical device with enhanced light confinement
DE60135242D1 (de) * 2000-10-27 2008-09-18 Pirelli & C Spa Hybride planare vergrabene / steg-wellenleiter
US6944192B2 (en) * 2001-03-14 2005-09-13 Corning Incorporated Planar laser
DE10130335C1 (de) * 2001-06-26 2003-02-13 Zf Lemfoerder Metallwaren Ag Ver- und Entriegelungsmechanismus mit Elektromagnet
US20030021314A1 (en) * 2001-07-27 2003-01-30 The Furukawa Electric Co, Ltd. Distributed bragg reflector semiconductor laser suitable for use in an optical amplifier
DE10144826B4 (de) * 2001-09-12 2007-03-08 Forschungsverbund Berlin E.V. Verfahren zur Herstellung von oberflächenemittierenden Halbleiter-Bauelementen und oberflächenemittierendes Halbleiter-Bauelement
US20060139743A1 (en) * 2002-11-20 2006-06-29 Marsh John H Semiconductor optical device with beam focusing
KR100989850B1 (ko) * 2008-07-16 2010-10-29 한국전자통신연구원 도파로 렌즈를 구비하는 반도체 레이저
US9214786B2 (en) 2013-04-09 2015-12-15 Nlight Photonics Corporation Diode laser packages with flared laser oscillator waveguides
US9166369B2 (en) 2013-04-09 2015-10-20 Nlight Photonics Corporation Flared laser oscillator waveguide
US10186836B2 (en) 2014-10-10 2019-01-22 Nlight, Inc. Multiple flared laser oscillator waveguide
US10270224B2 (en) 2015-06-04 2019-04-23 Nlight, Inc. Angled DBR-grating laser/amplifier with one or more mode-hopping regions
WO2021124440A1 (ja) * 2019-12-17 2021-06-24 日本電信電話株式会社 光デバイス
CN114006263B (zh) * 2021-10-28 2023-09-05 中国科学院半导体研究所 硅基集成的外腔窄线宽激光器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4667331A (en) * 1984-01-20 1987-05-19 At&T Company And At&T Bell Laboratories Composite cavity laser utilizing an intra-cavity electrooptic waveguide device
US4794608A (en) * 1984-03-06 1988-12-27 Matsushita Electric Inductrial Co., Ltd. Semiconductor laser device
JP2532449B2 (ja) * 1987-03-27 1996-09-11 株式会社日立製作所 半導体レ−ザ装置
US4815084A (en) * 1987-05-20 1989-03-21 Spectra Diode Laboratories, Inc. Semiconductor laser with integrated optical elements
GB2225482B (en) * 1988-11-23 1992-10-14 Stc Plc Multichannel cavity laser
US4935939A (en) * 1989-05-24 1990-06-19 Liau Zong Long Surface emitting laser with monolithic integrated lens
JPH0376294A (ja) * 1989-08-18 1991-04-02 Nippon Telegr & Teleph Corp <Ntt> 半導体光増幅装置
JPH03119782A (ja) * 1989-10-02 1991-05-22 Fujitsu Ltd 光半導体装置
US5003550A (en) * 1990-03-09 1991-03-26 Spectra Diode Laboratories, Inc. Integrated laser-amplifier with steerable beam
US5228049A (en) * 1991-08-27 1993-07-13 Xerox Corporation Beam control in integrated diode laser and power amplifier
US5260822A (en) * 1992-01-31 1993-11-09 Massachusetts Institute Of Technology Tapered semiconductor laser gain structure with cavity spoiling grooves

Also Published As

Publication number Publication date
JPH08130348A (ja) 1996-05-21
EP0690533A1 (de) 1996-01-03
US5517517A (en) 1996-05-14
DE69505900T2 (de) 1999-05-12
CA2149156C (en) 1999-11-02
EP0690533B1 (de) 1998-11-11
CA2149156A1 (en) 1995-12-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee