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DE60328798D1 - Verfahren zur Herstellung eines transparenten Elements mit unsichtbaren Elektroden - Google Patents

Verfahren zur Herstellung eines transparenten Elements mit unsichtbaren Elektroden

Info

Publication number
DE60328798D1
DE60328798D1 DE60328798T DE60328798T DE60328798D1 DE 60328798 D1 DE60328798 D1 DE 60328798D1 DE 60328798 T DE60328798 T DE 60328798T DE 60328798 T DE60328798 T DE 60328798T DE 60328798 D1 DE60328798 D1 DE 60328798D1
Authority
DE
Germany
Prior art keywords
transparent
depositing
refractive index
electrodes
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60328798T
Other languages
English (en)
Inventor
Joachim Grupp
Gian-Carlo Poli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asulab AG filed Critical Asulab AG
Application granted granted Critical
Publication of DE60328798D1 publication Critical patent/DE60328798D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3447Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
    • C03C17/3452Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B39/00Watch crystals; Fastening or sealing of crystals; Clock glasses
    • G04B39/002Watch crystals; Fastening or sealing of crystals; Clock glasses made of glass
    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B39/00Watch crystals; Fastening or sealing of crystals; Clock glasses
    • G04B39/004Watch crystals; Fastening or sealing of crystals; Clock glasses from a material other than glass
    • G04B39/006Watch crystals; Fastening or sealing of crystals; Clock glasses from a material other than glass out of wear resistant material, e.g. sapphire
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • C03C2217/73Anti-reflective coatings with specific characteristics
    • C03C2217/734Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/32After-treatment
    • C03C2218/328Partly or completely removing a coating
    • C03C2218/33Partly or completely removing a coating by etching
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/34Masking
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/96Touch switches
    • H03K17/962Capacitive touch switches
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/811Of specified metal oxide composition, e.g. conducting or semiconducting compositions such as ITO, ZnOx

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Surface Treatment Of Glass (AREA)
  • Non-Insulated Conductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Position Input By Displaying (AREA)
  • Laminated Bodies (AREA)
  • Led Devices (AREA)
  • Physical Vapour Deposition (AREA)
DE60328798T 2003-12-16 2003-12-16 Verfahren zur Herstellung eines transparenten Elements mit unsichtbaren Elektroden Expired - Lifetime DE60328798D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03028874A EP1544178B1 (de) 2003-12-16 2003-12-16 Verfahren zur Herstellung eines transparenten Elements mit unsichtbaren Elektroden

Publications (1)

Publication Number Publication Date
DE60328798D1 true DE60328798D1 (de) 2009-09-24

Family

ID=34486214

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60328798T Expired - Lifetime DE60328798D1 (de) 2003-12-16 2003-12-16 Verfahren zur Herstellung eines transparenten Elements mit unsichtbaren Elektroden

Country Status (8)

Country Link
US (1) US7247568B2 (de)
EP (1) EP1544178B1 (de)
JP (1) JP4689259B2 (de)
KR (1) KR101133329B1 (de)
CN (1) CN100478293C (de)
AT (1) ATE439335T1 (de)
DE (1) DE60328798D1 (de)
TW (1) TW200532336A (de)

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ATE416480T1 (de) 2005-06-16 2008-12-15 Asulab Sa Herstellungsverfahren für ein transparentes element mit transparenten elektroden und entsprechendes element
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FR2926747B1 (fr) * 2008-01-25 2011-01-14 Commissariat Energie Atomique Objet comportant un element graphique reporte sur un support et procede de realisation d'un tel objet.
FR2926748B1 (fr) 2008-01-25 2010-04-02 Commissariat Energie Atomique Objet muni d'un element graphique reporte sur un support et procede de realisation d'un tel objet.
DE102008029567A1 (de) * 2008-06-21 2010-01-07 Preh Gmbh Beleuchteter kapazitiver Annäherungssensor
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CH701440A2 (fr) 2009-07-03 2011-01-14 Comme Le Temps Sa Montre-bracelet à écran tactile et procédé d'affichage sur une montre à écran tactile.
EP2273348A1 (de) * 2009-07-10 2011-01-12 EM Microelectronic-Marin SA Herstellungsverfahren eines transparenten Elements mit kapazitiven Tasten für ein elektronisches Gerät und dieses Element umfassendes Gerät
FR2948318B1 (fr) * 2009-07-22 2011-08-19 Commissariat Energie Atomique Procede de realisation d'un dispositif a element graphique
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JP6122253B2 (ja) * 2012-05-22 2017-04-26 株式会社オプトラン 静電容量型タッチパネル基板及びその製造方法並びに製造装置
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Also Published As

Publication number Publication date
EP1544178B1 (de) 2009-08-12
JP4689259B2 (ja) 2011-05-25
HK1076094A1 (zh) 2006-01-06
KR101133329B1 (ko) 2012-04-05
EP1544178A1 (de) 2005-06-22
US7247568B2 (en) 2007-07-24
US20050130400A1 (en) 2005-06-16
KR20050061314A (ko) 2005-06-22
ATE439335T1 (de) 2009-08-15
CN100478293C (zh) 2009-04-15
JP2005183386A (ja) 2005-07-07
CN1636914A (zh) 2005-07-13
TW200532336A (en) 2005-10-01

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