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DE60326033D1 - Massenflusssteuerung - Google Patents

Massenflusssteuerung

Info

Publication number
DE60326033D1
DE60326033D1 DE60326033T DE60326033T DE60326033D1 DE 60326033 D1 DE60326033 D1 DE 60326033D1 DE 60326033 T DE60326033 T DE 60326033T DE 60326033 T DE60326033 T DE 60326033T DE 60326033 D1 DE60326033 D1 DE 60326033D1
Authority
DE
Germany
Prior art keywords
flow control
mass flow
mass
control
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60326033T
Other languages
English (en)
Inventor
Masami Nishikawa
Masao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stec KK
Original Assignee
Stec KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stec KK filed Critical Stec KK
Application granted granted Critical
Publication of DE60326033D1 publication Critical patent/DE60326033D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
DE60326033T 2002-03-25 2003-03-20 Massenflusssteuerung Expired - Fee Related DE60326033D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002082297A JP2003280745A (ja) 2002-03-25 2002-03-25 マスフローコントローラ
PCT/JP2003/003387 WO2003081361A1 (en) 2002-03-25 2003-03-20 Mass flow controller

Publications (1)

Publication Number Publication Date
DE60326033D1 true DE60326033D1 (de) 2009-03-19

Family

ID=28449140

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60326033T Expired - Fee Related DE60326033D1 (de) 2002-03-25 2003-03-20 Massenflusssteuerung

Country Status (7)

Country Link
US (1) US20060037644A1 (de)
EP (1) EP1489477B1 (de)
JP (1) JP2003280745A (de)
KR (2) KR20070070259A (de)
CN (1) CN100422896C (de)
DE (1) DE60326033D1 (de)
WO (1) WO2003081361A1 (de)

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JP4658200B2 (ja) * 2006-10-03 2011-03-23 株式会社堀場エステック マスフローコントローラ
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JP2010169657A (ja) * 2008-12-25 2010-08-05 Horiba Stec Co Ltd 質量流量計及びマスフローコントローラ
SG174951A1 (en) 2009-05-04 2011-11-28 Cameron Int Corp System and method of providing high pressure fluid injection with metering using low pressure supply lines
NO339428B1 (no) * 2009-05-25 2016-12-12 Roxar Flow Measurement As Ventil
JP5058358B2 (ja) * 2010-09-30 2012-10-24 株式会社堀場エステック 診断機構
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP5831192B2 (ja) * 2011-12-13 2015-12-09 株式会社島津製作所 流量制御機構及びその流量制御機構を備えたガスクロマトグラフ
WO2013143116A1 (en) * 2012-03-30 2013-10-03 Acm Research (Shanghai) Inc. Flow control system and method thereof
JP5947659B2 (ja) 2012-08-06 2016-07-06 株式会社堀場エステック 流量制御装置
WO2014040002A2 (en) * 2012-09-10 2014-03-13 Mudd Daniel T Pressure based mass flow controller
GB201303913D0 (en) * 2013-03-05 2013-04-17 Touchlight Genetics Ltd Synthesis apparatus and method
TWI587115B (zh) * 2013-08-27 2017-06-11 盛美半導體設備（上海）有限公司 Cleaning fluid flow control system and control method
US9335768B2 (en) * 2013-09-12 2016-05-10 Lam Research Corporation Cluster mass flow devices and multi-line mass flow devices incorporating the same
US9739755B2 (en) 2014-05-27 2017-08-22 Shimadzu Corporation Flow rate control mechanism and gas chromatograph including flow rate control mechanism
US10509422B2 (en) 2014-09-01 2019-12-17 Hitachi Metals, Ltd. Mass flow controller
CN104281163A (zh) * 2014-10-29 2015-01-14 北京堀场汇博隆精密仪器有限公司 一种流量控制器
CN104329495B (zh) * 2014-10-29 2017-01-18 北京堀场汇博隆精密仪器有限公司 一种压力流量控制器
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US9785154B2 (en) * 2017-02-13 2017-10-10 Robert M. McMillan Reconfigurable modular fluid flow control system for liquids or gases
US20200139340A1 (en) 2017-06-21 2020-05-07 Janssen Pharmaceutica Nv Device for generating ultra pure 1-methylcyclopropene
CN108255216B (zh) * 2017-12-14 2020-04-07 中国航空规划设计研究总院有限公司 一种风洞螺旋桨滑流气源系统控制方法
CN111971636B (zh) * 2018-04-19 2023-12-12 株式会社堀场Stec 流量控制装置、诊断方法和存储介质
JP2020021176A (ja) * 2018-07-30 2020-02-06 株式会社堀場エステック 流量制御装置
EP3848579B1 (de) * 2020-01-13 2023-08-02 Promix Solutions AG System und verfahren zur dosierung eines flüssigen oder gasförmigen mediums
CN111324153B (zh) * 2020-02-28 2023-05-26 老肯医疗科技股份有限公司 一种流量监控装置及流量监控方法
JP2021093182A (ja) * 2021-02-17 2021-06-17 株式会社堀場エステック 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
US11899477B2 (en) 2021-03-03 2024-02-13 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
JP2024511619A (ja) 2021-03-22 2024-03-14 アイコール・システムズ・インク ガイド付きフローバルブアセンブリおよびそれを組み込んだシステム
CN113311881B (zh) 2021-05-28 2022-12-13 北京七星华创流量计有限公司 一种质量流量控制器和流量控制方法
CN115931086A (zh) * 2021-08-02 2023-04-07 北京七星华创流量计有限公司 一种质量流量计的标定系统及标定方法
US20250130600A1 (en) * 2023-10-20 2025-04-24 Illinois Took Works Inc. Valve assembly and system used to control flow rate of a fluid
CN117853097B (zh) * 2024-03-08 2024-05-28 安徽壹月科技有限公司 一种全自动特气供应柜触摸控制系统及方法

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US5762086A (en) * 1995-12-19 1998-06-09 Veriflo Corporation Apparatus for delivering process gas for making semiconductors and method of using same
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WO2000031462A1 (en) * 1998-11-20 2000-06-02 Mykrolis Corporation System and method for integrating gas components
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WO2002068713A1 (en) * 2001-02-28 2002-09-06 Porter Instrument Company, Inc. Vaporizer

Also Published As

Publication number Publication date
KR20040102040A (ko) 2004-12-03
KR20070070259A (ko) 2007-07-03
EP1489477A4 (de) 2005-11-09
CN1643466A (zh) 2005-07-20
US20060037644A1 (en) 2006-02-23
EP1489477A1 (de) 2004-12-22
EP1489477B1 (de) 2009-01-28
CN100422896C (zh) 2008-10-01
WO2003081361A1 (en) 2003-10-02
JP2003280745A (ja) 2003-10-02

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee