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DE60303328D1 - Ringförmige Lichtquelle - Google Patents

Ringförmige Lichtquelle

Info

Publication number
DE60303328D1
DE60303328D1 DE60303328T DE60303328T DE60303328D1 DE 60303328 D1 DE60303328 D1 DE 60303328D1 DE 60303328 T DE60303328 T DE 60303328T DE 60303328 T DE60303328 T DE 60303328T DE 60303328 D1 DE60303328 D1 DE 60303328D1
Authority
DE
Germany
Prior art keywords
ring
light source
shaped light
shaped
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60303328T
Other languages
English (en)
Other versions
DE60303328T2 (de
Inventor
Seiji Shimokawa
Tatsuya Nagahama
Kuniaki Obata
Hirotaka Matsubara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE60303328D1 publication Critical patent/DE60303328D1/de
Application granted granted Critical
Publication of DE60303328T2 publication Critical patent/DE60303328T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G02B21/084—Condensers for incident illumination only having annular illumination around the objective
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/0008—Reflectors for light sources providing for indirect lighting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G01N2201/0627—Use of several LED's for spectral resolution
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S362/00—Illumination
    • Y10S362/80—Light emitting diode

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Stroboscope Apparatuses (AREA)
DE60303328T 2002-05-17 2003-05-13 Ringförmige Lichtquelle Expired - Lifetime DE60303328T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002143462A JP3889992B2 (ja) 2002-05-17 2002-05-17 リング照明装置
JP2002143462 2002-05-17

Publications (2)

Publication Number Publication Date
DE60303328D1 true DE60303328D1 (de) 2006-04-13
DE60303328T2 DE60303328T2 (de) 2006-07-27

Family

ID=29267844

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60303328T Expired - Lifetime DE60303328T2 (de) 2002-05-17 2003-05-13 Ringförmige Lichtquelle

Country Status (5)

Country Link
US (1) US6857762B2 (de)
EP (1) EP1363153B1 (de)
JP (1) JP3889992B2 (de)
CN (1) CN100501493C (de)
DE (1) DE60303328T2 (de)

Families Citing this family (72)

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JP2003269919A (ja) * 2002-03-11 2003-09-25 Mitsutoyo Corp 画像処理型測定機の照明装置
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JP4526256B2 (ja) * 2003-10-17 2010-08-18 スタンレー電気株式会社 光源モジュールおよび該光源モジュールを具備する灯具
WO2005098515A1 (en) * 2004-03-16 2005-10-20 Till I.D. Gmbh Light beam merging and guiding device
DE102004014541B3 (de) * 2004-03-23 2005-05-04 Koenig & Bauer Ag Optisches System zur Erzeugung eines Beleuchtungsstreifens
JP2005331623A (ja) * 2004-05-18 2005-12-02 Ccs Inc 顕微鏡用照明装置
JP4123189B2 (ja) * 2004-05-19 2008-07-23 ソニー株式会社 バックライト装置、及び液晶表示装置
JP2006047290A (ja) * 2004-06-30 2006-02-16 Omron Corp 基板検査用の画像生成方法、基板検査装置、および基板検査用の照明装置
EP1612569A3 (de) 2004-06-30 2006-02-08 Omron Corporation Verfahren und Vorrichtung zur Substrat-Oberflächeninspektion mittels eines vielfarbigen Lichtdemissionssystems
DE102004056698B3 (de) * 2004-11-24 2006-08-17 Stratus Vision Gmbh Inspektionsvorrichtung für ein Substrat, das mindestens eine aufgedruckte Schicht aufweist
JP4536501B2 (ja) * 2004-12-06 2010-09-01 野村マイクロ・サイエンス株式会社 オゾン水中のオゾン濃度の測定方法及び測定装置
US8591073B2 (en) * 2005-03-03 2013-11-26 Dialight Corporation Beacon light with reflector and light emitting diodes
JP2006251571A (ja) * 2005-03-11 2006-09-21 Fuji Photo Film Co Ltd アライメント用光源ユニット、アライメント装置、露光装置、デジタル露光装置、アライメント方法、露光方法及び照明装置の条件を設定する方法
US7292263B2 (en) * 2005-03-16 2007-11-06 The Regents Of The University Of California Robotic CCD microscope for enhanced crystal recognition
DE102005029119A1 (de) * 2005-06-23 2006-12-28 Carl Zeiss Jena Gmbh Beleuchtungsvorrichtung, insbesondere für Mikroskope
JP2007057296A (ja) * 2005-08-23 2007-03-08 Denso Wave Inc 光学読取装置
US7506985B2 (en) * 2005-10-26 2009-03-24 Hewlett-Packard Development Company, L.P. Projection light source having multiple light emitting diodes
US7433026B2 (en) * 2005-12-20 2008-10-07 Cytyc Corporation Microscope with LED illumination source
KR100714638B1 (ko) * 2006-02-16 2007-05-07 삼성전기주식회사 단면 발광형 ｌｅｄ 및 그 제조방법
FI20060331A0 (fi) * 2006-04-05 2006-04-05 Kari Seppaelae Menetelmä ja laitteisto muodon mittauksen/tunnistukseen
DE102006018410A1 (de) * 2006-04-20 2007-10-25 Carl Zeiss Microimaging Gmbh Einrichtung zur Kontraststeigerung für Ringlichtbeleuchtungen
US8540393B2 (en) * 2006-08-09 2013-09-24 Olympus Medical Systems Corp. First and second light-emitting elements having identical peak emission intensities
DE102007006584B3 (de) * 2007-02-09 2008-06-19 Leica Microsystems (Schweiz) Ag Beleuchtungseinrichtung für ein Mikroskop
JP2008203093A (ja) * 2007-02-20 2008-09-04 Mitsutoyo Corp 照明装置、画像測定装置
TWI345053B (en) * 2007-03-16 2011-07-11 Ind Tech Res Inst Image-acquiring system with high-spectrum resolution and method for the same
DE102007035198A1 (de) * 2007-07-25 2009-01-29 Datarius Technologies Gmbh Vorrichtung zur Inspektion von optischen Datenträgern
WO2009047726A1 (en) * 2007-10-12 2009-04-16 Koninklijke Philips Electronics N.V. Method, device, and computer program product for segmenting an image of an area
JP5108490B2 (ja) * 2007-12-19 2012-12-26 オリンパス株式会社 細胞解析装置用照明装置
JP2009168478A (ja) * 2008-01-11 2009-07-30 Hitachi High-Technologies Corp 光度計
DE102008030425A1 (de) * 2008-06-26 2010-01-21 Siemens Aktiengesellschaft LED-Beleuchtungssystem für ein elektrisches Prüfsystem
US7744248B2 (en) * 2008-07-08 2010-06-29 Stanley Electric Co., Ltd. Lighting fixture
CH699100B1 (de) * 2008-07-09 2011-06-15 Daniel F Awengen Am Kopf tragbare, beleuchtete Vorrichtung mit optischer Vergrösserungsvorrichtung.
JP5225799B2 (ja) * 2008-10-03 2013-07-03 株式会社ミツトヨ 照明装置
DE102008055595A1 (de) 2008-12-30 2010-07-01 Werth Messtechnik Gmbh Verfahren und Anordnung zum Messen eines Objekts
JP5234987B2 (ja) * 2009-04-08 2013-07-10 株式会社ミツトヨ 光学式測定機
JP5394805B2 (ja) * 2009-04-17 2014-01-22 株式会社ミツトヨ リング照明装置
US7782513B1 (en) 2009-07-30 2010-08-24 Mitutoyo Corporation Fast variable angle of incidence illumination for a machine vision inspection system
JP5359705B2 (ja) * 2009-09-07 2013-12-04 セイコーエプソン株式会社 ミラーユニットおよびこれを備えた孔内検査装置
JP5421711B2 (ja) * 2009-09-30 2014-02-19 イーデーエム株式会社 照明装置
KR101300314B1 (ko) * 2009-12-11 2013-08-30 울산대학교 산학협력단 복수의 발광 다이오드를 이용한 세포 특성 탐지 시스템
US8851707B2 (en) 2010-06-15 2014-10-07 Dialight Corporation Highly collimating reflector lens optic and light emitting diodes
JP2012063269A (ja) * 2010-09-16 2012-03-29 Sony Corp 測定装置及び測定方法
US8403530B2 (en) * 2010-09-21 2013-03-26 Honeywell International Inc. LED spotlight including elliptical and parabolic reflectors
JP5506634B2 (ja) * 2010-11-05 2014-05-28 株式会社アドテックエンジニアリング 位置合わせ用照明装置及び該照明装置を備えた露光装置
JP5110177B2 (ja) * 2010-11-15 2012-12-26 オムロン株式会社 照明装置
KR101748622B1 (ko) * 2012-03-21 2017-06-20 한화테크윈 주식회사 칩마운터의 사이드 조명 장치 및 이를 이용한 칩마운터의 조명 장치
JP5774551B2 (ja) * 2012-07-06 2015-09-09 武藤工業株式会社 測光装置
CN102748638B (zh) * 2012-07-25 2014-04-02 电子科技大学 实现圆柱体表面受光均匀的led照明装置及其安装方法
DE102013006995A1 (de) 2013-04-19 2014-10-23 Carl Zeiss Microscopy Gmbh Ringbeleuchtungsvorrichtung für ein Mikroskopobjektiv und Mikroskopobjektiv
JP6290651B2 (ja) * 2014-02-27 2018-03-07 株式会社キーエンス 画像測定器
EP3943915A3 (de) 2014-05-12 2022-05-25 Cellomics, Inc Automatisierte bildgebung von chromophormarkierten proben
JP2016071010A (ja) * 2014-09-29 2016-05-09 株式会社ミツトヨ オートフォーカス装置、オートフォーカス方法、及びプログラム
ES2599056B2 (es) * 2015-07-31 2017-07-07 Pablo ALBERTOS SÁNCHEZ Dispositivo para ensayar una muestra de células
WO2017068460A1 (en) * 2015-10-23 2017-04-27 Scrona Ag A microscope module, assembly, and method for analysing samples
JP2017203759A (ja) * 2016-05-13 2017-11-16 株式会社キーエンス 画像処理センサ
CN106645202B (zh) * 2016-12-21 2023-09-19 颀中科技（苏州）有限公司 检测装置
US10474006B2 (en) * 2017-04-20 2019-11-12 Lifetouch Inc. Outdoor photography system
CN107193107B (zh) * 2017-05-22 2019-10-29 李卫青 一种聚光器调试用弧形反光板卡接旋调装置
JP7097168B2 (ja) * 2017-10-17 2022-07-07 株式会社キーエンス 拡大観察装置
CN109973858B (zh) * 2017-12-28 2022-03-08 中国科学院深圳先进技术研究院 一种用于水下暗场成像的照明器
JP6522181B2 (ja) * 2018-02-09 2019-05-29 株式会社キーエンス 画像測定器
DE102018103544B3 (de) * 2018-02-16 2018-10-18 Sick Ag Kamera und Verfahren zur Erfassung von Bilddaten
DE102019208858A1 (de) * 2019-06-18 2020-12-24 Carl Zeiss Microscopy Gmbh Beleuchtungseinheit für Mikroskope
DE102019214865B4 (de) 2019-09-27 2024-12-05 Carl Zeiss Industrielle Messtechnik Gmbh Beleuchtungssystem, optisches Messgerät und Verfahren zur metrologischen Vermessung von Werkstücken
CN113946043A (zh) * 2020-07-16 2022-01-18 香港科技大学 一种激发光源和包括该激发光源的荧光显微镜
KR102360140B1 (ko) * 2021-06-17 2022-02-08 박성수 부품검사용 비전 검사 장치
CN116088260B (zh) * 2023-02-08 2023-10-20 广州长步道光学科技有限公司 一种360°环视内外壁检测镜头结构
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CN117073580B (zh) * 2023-08-24 2024-07-02 安徽大学 一种基于光路优化的显微动态三维测量系统及校准方法
WO2025095453A1 (ko) * 2023-10-30 2025-05-08 주식회사 스몰머신즈 반사형 푸리에 타이코그래픽 현미경 장치
TWI898376B (zh) * 2023-12-29 2025-09-21 台亞半導體股份有限公司 半導體元件檢測裝置及其檢測方法
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Also Published As

Publication number Publication date
EP1363153B1 (de) 2006-01-25
US20030231494A1 (en) 2003-12-18
DE60303328T2 (de) 2006-07-27
CN1458543A (zh) 2003-11-26
US6857762B2 (en) 2005-02-22
CN100501493C (zh) 2009-06-17
EP1363153A1 (de) 2003-11-19
JP3889992B2 (ja) 2007-03-07
JP2003337365A (ja) 2003-11-28

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Legal Events

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