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DE602007008355D1 - Verfahren zur Herstellung von mikrofluidischen Vorrichtungen - Google Patents

Verfahren zur Herstellung von mikrofluidischen Vorrichtungen

Info

Publication number
DE602007008355D1
DE602007008355D1 DE602007008355T DE602007008355T DE602007008355D1 DE 602007008355 D1 DE602007008355 D1 DE 602007008355D1 DE 602007008355 T DE602007008355 T DE 602007008355T DE 602007008355 T DE602007008355 T DE 602007008355T DE 602007008355 D1 DE602007008355 D1 DE 602007008355D1
Authority
DE
Germany
Prior art keywords
microfluidic devices
production
glass
methods
containing materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007008355T
Other languages
English (en)
Inventor
Thierry Dannoux
Paulo Marques
Robert Morena
Cameron Tanner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of DE602007008355D1 publication Critical patent/DE602007008355D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/20—Uniting glass pieces by fusing without substantial reshaping
    • C03B23/203—Uniting glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0085—Manufacture of substrate-free structures using moulds and master templates, e.g. for hot-embossing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/051—Micromixers, microreactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/036—Hot embossing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/40—Product characteristics
    • C03B2215/41—Profiled surfaces
    • C03B2215/412—Profiled surfaces fine structured, e.g. fresnel lenses, prismatic reflectors, other sharp-edged surface profiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Glass Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
DE602007008355T 2007-02-28 2007-02-28 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen Active DE602007008355D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07300835A EP1964817B1 (de) 2007-02-28 2007-02-28 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen

Publications (1)

Publication Number Publication Date
DE602007008355D1 true DE602007008355D1 (de) 2010-09-23

Family

ID=38002124

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007008355T Active DE602007008355D1 (de) 2007-02-28 2007-02-28 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen

Country Status (16)

Country Link
US (1) US8156762B2 (de)
EP (2) EP1964817B1 (de)
JP (1) JP2010527293A (de)
KR (1) KR101502182B1 (de)
CN (1) CN101668711A (de)
AT (1) ATE477220T1 (de)
AU (1) AU2008219616A1 (de)
BR (1) BRPI0808414A2 (de)
CA (1) CA2679443A1 (de)
DE (1) DE602007008355D1 (de)
ES (1) ES2350653T3 (de)
MX (1) MX2009009285A (de)
RU (1) RU2009135805A (de)
TW (1) TWI358390B (de)
WO (1) WO2008106160A1 (de)
ZA (1) ZA200905976B (de)

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US20100126222A1 (en) * 2008-11-25 2010-05-27 Thierry Luc Alain Dannoux Method and apparatus for forming and cutting a shaped article from a sheet of material
US20100127420A1 (en) * 2008-11-25 2010-05-27 Thierry Luc Alain Dannoux Method of forming a shaped article from a sheet of material
ATE549085T1 (de) 2008-11-26 2012-03-15 Corning Inc Wärmetauscher für mikrostrukturen
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FR2955508B1 (fr) 2010-01-25 2012-03-30 Corning Inc Microreacteurs avec dispositif microfluidique plan et systeme d'application d'ultrasons ; mise en oeuvre de reactions chimiques en leur sein
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Also Published As

Publication number Publication date
KR20100014611A (ko) 2010-02-10
EP2132148B1 (de) 2019-06-19
TW200906707A (en) 2009-02-16
MX2009009285A (es) 2009-10-30
CN101668711A (zh) 2010-03-10
US20080230951A1 (en) 2008-09-25
AU2008219616A1 (en) 2008-09-04
ATE477220T1 (de) 2010-08-15
BRPI0808414A2 (pt) 2014-07-22
US8156762B2 (en) 2012-04-17
EP2132148A1 (de) 2009-12-16
ES2350653T3 (es) 2011-01-25
CA2679443A1 (en) 2008-09-04
TWI358390B (en) 2012-02-21
ZA200905976B (en) 2010-06-30
EP1964817B1 (de) 2010-08-11
RU2009135805A (ru) 2011-04-10
WO2008106160A1 (en) 2008-09-04
KR101502182B1 (ko) 2015-03-12
EP1964817A1 (de) 2008-09-03
JP2010527293A (ja) 2010-08-12

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