[go: up one dir, main page]

DE602005003020D1 - Messung dünner filmdicken unter verwendung eines mehrkanal-infrarotsensors - Google Patents

Messung dünner filmdicken unter verwendung eines mehrkanal-infrarotsensors

Info

Publication number
DE602005003020D1
DE602005003020D1 DE602005003020T DE602005003020T DE602005003020D1 DE 602005003020 D1 DE602005003020 D1 DE 602005003020D1 DE 602005003020 T DE602005003020 T DE 602005003020T DE 602005003020 T DE602005003020 T DE 602005003020T DE 602005003020 D1 DE602005003020 D1 DE 602005003020D1
Authority
DE
Germany
Prior art keywords
thin film
film thickness
infrared sensor
channel infrared
measure thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602005003020T
Other languages
English (en)
Other versions
DE602005003020T2 (de
Inventor
Igor N Germanenko
Steve Axelrod
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602005003020D1 publication Critical patent/DE602005003020D1/de
Application granted granted Critical
Publication of DE602005003020T2 publication Critical patent/DE602005003020T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE602005003020T 2004-04-24 2005-04-22 Messung dünner filmdicken unter verwendung eines mehrkanal-infrarotsensors Expired - Lifetime DE602005003020T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/831,074 US7088456B2 (en) 2004-04-24 2004-04-24 Thin film thickness measurement using multichannel infrared sensor
US831074 2004-04-24
PCT/US2005/014075 WO2005106387A1 (en) 2004-04-24 2005-04-22 Thin film thickness measurement using multichannel infrared sensor

Publications (2)

Publication Number Publication Date
DE602005003020D1 true DE602005003020D1 (de) 2007-12-06
DE602005003020T2 DE602005003020T2 (de) 2008-08-14

Family

ID=34967273

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005003020T Expired - Lifetime DE602005003020T2 (de) 2004-04-24 2005-04-22 Messung dünner filmdicken unter verwendung eines mehrkanal-infrarotsensors

Country Status (6)

Country Link
US (1) US7088456B2 (de)
EP (1) EP1740904B1 (de)
JP (1) JP4664971B2 (de)
CA (1) CA2563777C (de)
DE (1) DE602005003020T2 (de)
WO (1) WO2005106387A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123687A (ja) * 2005-10-31 2007-05-17 Tokyo Seimitsu Co Ltd 半導体ウェーハ裏面の研削方法及び半導体ウェーハ研削装置
US7382456B2 (en) * 2005-12-29 2008-06-03 Honeywell Asca, Inc. Spectroscopic sensor for measuring sheet properties
FR2904421B1 (fr) * 2006-07-28 2008-10-31 Areva Np Sas Procede de caracterisation non destructif, notammenent pour les particules de combustible nucleaire pour reacteur a haute temperature
ES2419165T3 (es) * 2007-08-13 2013-08-19 Ndc Infrared Engineering Limited Método y aparato para la detección electromagnética para su uso en la fabricación de una lámina fibrosa
US11162893B2 (en) 2009-06-04 2021-11-02 Pietro Fiorentini S.P.A. Device and method for determining the composition of a mixture of fluids
GB0909662D0 (en) 2009-06-04 2009-07-22 Cambridge Consultants Device and method for determining the composition of a mixture of fluids
JP5600538B2 (ja) * 2010-09-24 2014-10-01 富士フイルム株式会社 光学フィルムの膜厚測定方法、及び光学フィルムの製造方法
DE102012019433A1 (de) 2012-10-04 2014-04-24 Krohne Optosens Gmbh Vorrichtung zur Bestimmung einer Kenngröße eines Mediums
US9581433B2 (en) 2013-12-11 2017-02-28 Honeywell Asca Inc. Caliper sensor and method using mid-infrared interferometry
JP2018532122A (ja) * 2015-10-28 2018-11-01 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板上で材料を処理するための装置、処理装置のための冷却構成、及び基板上で処理される材料の特性を測定するための方法
JP6512361B1 (ja) * 2018-11-29 2019-05-15 横河電機株式会社 測定装置、測定方法、および測定プログラム
EP3911493B1 (de) 2019-01-14 2024-12-04 AGR International, Inc. Verfahren und vorrichtung zur inspektion von flüssigkeitsgefüllten transparenten hohlkörpern
US11684253B2 (en) * 2019-04-24 2023-06-27 Topcon Corporation 2D multi-layer thickness measurement with reconstructed spectrum
DE102020003975A1 (de) 2020-07-02 2022-01-05 Cellcentric Gmbh & Co. Kg Verfahren zum Erfassen des Übergangs von zwei miteinander nicht bündig verbundenen Einzelschichten
CN116821634A (zh) * 2023-08-03 2023-09-29 山西航天清华装备有限责任公司 一种工业胶片特性曲线数学模型的优化方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4293224A (en) * 1978-12-04 1981-10-06 International Business Machines Corporation Optical system and technique for unambiguous film thickness monitoring
DE2910673C2 (de) * 1979-03-19 1985-08-08 Paul Lippke Gmbh & Co Kg, 5450 Neuwied Verfahren zum berührungslosen Messen des absoluten Gehaltes eines Stoffes(Beisubstanz) in einer die Form eines dünnen Filmes aufweisenden Mischung(Hauptsubstanz und Beisubstanz) mehrerer Stoffe, insbesondere zum Messen des absoluten Gehaltes von Wasser in Papier
US4928013A (en) * 1987-02-17 1990-05-22 Measurex Corporation Temperature insensitive moisture sensor
JPH04131704A (ja) * 1990-09-25 1992-05-06 Hitachi Electron Eng Co Ltd 磁気ヘッド浮上量の動特性測定方法
DE69233073T2 (de) * 1991-12-09 2004-03-18 Measurex Corp., Cupertino Sensor und Verfahren zur Messung ausgewählter Bestandteile eines Materials
JP2866559B2 (ja) * 1993-09-20 1999-03-08 大日本スクリーン製造株式会社 膜厚測定方法
US5798837A (en) * 1997-07-11 1998-08-25 Therma-Wave, Inc. Thin film optical measurement system and method with calibrating ellipsometer
JP3819187B2 (ja) * 1999-09-28 2006-09-06 富士写真フイルム株式会社 マルチバンド画像の分光反射率のスペクトル推定方法およびスペクトル推定システム
US6459488B1 (en) * 2000-02-10 2002-10-01 The United States Of America As Represented By The Secretary Of The Navy Diffuse reflectance method and apparatus for determining thickness of an infrared translucent layer
US6281678B1 (en) * 2000-02-29 2001-08-28 Gene R Auville Tri-tip probe
US6573999B1 (en) * 2000-07-14 2003-06-03 Nanometrics Incorporated Film thickness measurements using light absorption
US6556306B2 (en) * 2001-01-04 2003-04-29 Rensselaer Polytechnic Institute Differential time domain spectroscopy method for measuring thin film dielectric properties
US6646752B2 (en) * 2002-02-22 2003-11-11 Taiwan Semiconductor Manufacturing Co. Ltd Method and apparatus for measuring thickness of a thin oxide layer

Also Published As

Publication number Publication date
US20050237539A1 (en) 2005-10-27
CA2563777C (en) 2012-03-20
CA2563777A1 (en) 2005-11-10
WO2005106387A1 (en) 2005-11-10
EP1740904B1 (de) 2007-10-24
JP4664971B2 (ja) 2011-04-06
US7088456B2 (en) 2006-08-08
JP2007534945A (ja) 2007-11-29
EP1740904A1 (de) 2007-01-10
DE602005003020T2 (de) 2008-08-14

Similar Documents

Publication Publication Date Title
DE602005003020D1 (de) Messung dünner filmdicken unter verwendung eines mehrkanal-infrarotsensors
IL183718A (en) Method for measuring resistance or sensitivity to docetaxel
EP2008100A4 (de) Antikörperprofilierung zur bestimmung der ansprechempfindlichkeit eines patienten
EP1779418A4 (de) Emitter, detektor und sensor mit photonischem kristall
DE602004020954D1 (de) Schmierfähigkeitsmessung mit einem MEMS-Sensor
AU2007276473A8 (en) Optical distance measuring method and corresponding optical distance measurement device
EP1993706A4 (de) Psa-druckmessung und steuersystem
EP1890114A4 (de) Strömungsgeschwindigkeitsmesser und strömungsgeschwindigkeitssteuersystem damit
TW200801859A (en) Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
DE602004007760D1 (de) Optische Vorrichtung zur Messung des Abstandes zwischen der Vorrichtung und einer Fläche
EP2089692A4 (de) Sensoreinheit für eine spr- (surface plasmon resonance-)einheit
FR2878337B3 (fr) Dispositif de mesure de distance a laser
DE602006000357D1 (de) Sensor zur Verwendung in einer lithografischen Vorrichtung
EP2126556A4 (de) Elektrochemisches biosensormesssystem
DE602005019362D1 (de) Gerät zur Messung der Dicke von Blattgut
FI20085441A0 (fi) Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi
EP2017646A4 (de) Sensor zum detektieren eines beweglichen objekts mit hilfe eines ultrabreitband-schallsignals
GB2432216B (en) Measuring probe, especially for a device for the measurement of the thickness of thin layers
DE502007003402D1 (de) Strömungsmessvorrichtung zur bestimmung einer strömungsrichtung
FR2927700B1 (fr) Procede d'etalonnage d'un capteur de mesure
FR2869109B1 (fr) Detecteur de gaz a sensibilite de mesure accrue
DE602006000455D1 (de) Sensormessfehler
DE502005005579D1 (de) Optoelektronisches Verfahren zur Bestimmung der Position eines Sensors zur Kompensation von Justage-Fehlern
NO20074309L (no) Kjøretøy-styrt kontrollanordning med trimmed nøyaktighet
DE602004010255D1 (de) Optischer Verschiebungssensor, Verschiebungsmesssystem und -verfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition