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DE602005006489D1 - Polycarbosilane and process for its preparation - Google Patents

Polycarbosilane and process for its preparation

Info

Publication number
DE602005006489D1
DE602005006489D1 DE602005006489T DE602005006489T DE602005006489D1 DE 602005006489 D1 DE602005006489 D1 DE 602005006489D1 DE 602005006489 T DE602005006489 T DE 602005006489T DE 602005006489 T DE602005006489 T DE 602005006489T DE 602005006489 D1 DE602005006489 D1 DE 602005006489D1
Authority
DE
Germany
Prior art keywords
polycarbosilane
preparation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602005006489T
Other languages
German (de)
Inventor
Hisashi Nakagawa
Masahiro Akiyama
Takahiko Kurosawa
Atsushi Shiota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Publication of DE602005006489D1 publication Critical patent/DE602005006489D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/12—Polysiloxanes containing silicon bound to hydrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/48—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/50—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms by carbon linkages

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Silicon Polymers (AREA)
DE602005006489T 2004-09-22 2005-09-21 Polycarbosilane and process for its preparation Expired - Lifetime DE602005006489D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004275389 2004-09-22

Publications (1)

Publication Number Publication Date
DE602005006489D1 true DE602005006489D1 (en) 2008-06-19

Family

ID=35445947

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005006489T Expired - Lifetime DE602005006489D1 (en) 2004-09-22 2005-09-21 Polycarbosilane and process for its preparation

Country Status (5)

Country Link
US (1) US7358317B2 (en)
EP (1) EP1640404B1 (en)
KR (1) KR100677781B1 (en)
DE (1) DE602005006489D1 (en)
TW (1) TWI308575B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5110238B2 (en) * 2004-05-11 2012-12-26 Ｊｓｒ株式会社 Insulating film forming composition and method for producing the same, and silica-based insulating film and method for forming the same
WO2005108469A1 (en) * 2004-05-11 2005-11-17 Jsr Corporation Method for forming organic silica film, organic silica film, wiring structure, semiconductor device, and composition for film formation
JP5110239B2 (en) * 2004-05-11 2012-12-26 Ｊｓｒ株式会社 Method for forming organic silica film, composition for film formation
JP5311091B2 (en) * 2005-04-08 2013-10-09 東亞合成株式会社 Polycarbosilane and method for producing the same
KR101334001B1 (en) * 2005-11-11 2013-11-27 제이에스알 가부시끼가이샤 Polycarbosilane, method for producing same, silica composition for coating application, and silica film
WO2009008041A1 (en) * 2007-07-06 2009-01-15 Fujitsu Limited Material for insulating film, multilayered wiring board, method for manufacturing the multilayered wiring board, semiconductor device, and method for manufacturing the semiconductor device thereof
US20090081598A1 (en) 2007-09-24 2009-03-26 International Business Machines Corporation Functionalized carbosilane polymers and photoresist compositions containing the same
US20090081579A1 (en) * 2007-09-24 2009-03-26 International Business Machines Corporation Functionalized carbosilane polymers and photoresist compositions containing the same
US9969756B2 (en) 2014-09-23 2018-05-15 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés George Claude Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof
TWI716333B (en) 2015-03-30 2021-01-11 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 Catalyst dehydrogenative coupling of carbosilanes with ammonia, amnines and amidines
TWI724141B (en) 2016-03-23 2021-04-11 法商液態空氣喬治斯克勞帝方法硏究開發股份有限公司 Si-containing film forming compositions and methods of making and using the same
CN109337078B (en) * 2018-09-28 2021-06-29 中国科学院宁波材料技术与工程研究所 A kind of preparation method of silicon carbide ceramic precursor polycarbosilane

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5750643A (en) * 1993-05-18 1998-05-12 Sri International Dehydrocoupling treatment and hydrosilylation of silicon-containing polymers, and compounds and articles produced thereby
JP3418458B2 (en) * 1993-08-31 2003-06-23 富士通株式会社 Method for manufacturing semiconductor device
US5811564A (en) * 1997-12-17 1998-09-22 Dow Corning Corporation Polycarbosilane hydroxides and methods for their preparation
US6841256B2 (en) * 1999-06-07 2005-01-11 Honeywell International Inc. Low dielectric constant polyorganosilicon materials generated from polycarbosilanes
JP3886779B2 (en) 2001-11-02 2007-02-28 富士通株式会社 Insulating film forming material and insulating film forming method
JP2003273100A (en) 2002-03-18 2003-09-26 Fujitsu Ltd Semiconductor device and manufacturing method thereof

Also Published As

Publication number Publication date
TWI308575B (en) 2009-04-11
US20060063905A1 (en) 2006-03-23
KR100677781B1 (en) 2007-02-02
EP1640404A1 (en) 2006-03-29
EP1640404B1 (en) 2008-05-07
TW200619274A (en) 2006-06-16
US7358317B2 (en) 2008-04-15
KR20060051464A (en) 2006-05-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition