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DE60127519D1 - Verfahren für die Herstellung eines Tintenstrahldruckkopfes mit halbkugelförmigen Tintenkammern - Google Patents

Verfahren für die Herstellung eines Tintenstrahldruckkopfes mit halbkugelförmigen Tintenkammern

Info

Publication number
DE60127519D1
DE60127519D1 DE60127519T DE60127519T DE60127519D1 DE 60127519 D1 DE60127519 D1 DE 60127519D1 DE 60127519 T DE60127519 T DE 60127519T DE 60127519 T DE60127519 T DE 60127519T DE 60127519 D1 DE60127519 D1 DE 60127519D1
Authority
DE
Germany
Prior art keywords
making
jet printhead
hemispherical
ink
ink jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60127519T
Other languages
English (en)
Other versions
DE60127519T2 (de
Inventor
Sang-Wook Lee
Yong-Soo Oh
Hyeon-Cheol Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE60127519D1 publication Critical patent/DE60127519D1/de
Application granted granted Critical
Publication of DE60127519T2 publication Critical patent/DE60127519T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/22—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material
    • B41J2/23—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material using print wires
    • B41J2/235—Print head assemblies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14137—Resistor surrounding the nozzle opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60127519T 2000-12-18 2001-12-13 Verfahren für die Herstellung eines Tintenstrahldruckkopfes mit halbkugelförmigen Tintenkammern Expired - Lifetime DE60127519T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2000-0077744A KR100506082B1 (ko) 2000-12-18 2000-12-18 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드의 제조 방법
KR2000077744 2000-12-18

Publications (2)

Publication Number Publication Date
DE60127519D1 true DE60127519D1 (de) 2007-05-10
DE60127519T2 DE60127519T2 (de) 2007-12-06

Family

ID=19703192

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60127519T Expired - Lifetime DE60127519T2 (de) 2000-12-18 2001-12-13 Verfahren für die Herstellung eines Tintenstrahldruckkopfes mit halbkugelförmigen Tintenkammern

Country Status (5)

Country Link
US (1) US6676844B2 (de)
EP (1) EP1216837B1 (de)
JP (1) JP3773843B2 (de)
KR (1) KR100506082B1 (de)
DE (1) DE60127519T2 (de)

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US7335552B2 (en) * 2002-05-15 2008-02-26 Raytheon Company Electrode for thin film capacitor devices
US6858464B2 (en) * 2002-06-19 2005-02-22 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing light emitting device
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
KR100446633B1 (ko) * 2002-10-11 2004-09-07 삼성전자주식회사 잉크젯 프린트헤드
KR100499132B1 (ko) 2002-10-24 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
US7328978B2 (en) 2002-11-23 2008-02-12 Silverbrook Research Pty Ltd Printhead heaters with short pulse time
US7152958B2 (en) * 2002-11-23 2006-12-26 Silverbrook Research Pty Ltd Thermal ink jet with chemical vapor deposited nozzle plate
US6736489B1 (en) 2002-11-23 2004-05-18 Silverbrook Research Pty Ltd Thermal ink jet printhead with low heater mass
US7036913B2 (en) 2003-05-27 2006-05-02 Samsung Electronics Co., Ltd. Ink-jet printhead
CN1314542C (zh) * 2003-10-21 2007-05-09 财团法人工业技术研究院 一种喷液头芯片结构及其制造方法
GB2410465A (en) * 2004-01-29 2005-08-03 Hewlett Packard Development Co Method of making an inkjet printhead
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
CN101094770B (zh) 2004-12-30 2010-04-14 富士胶卷迪马蒂克斯股份有限公司 喷墨打印
JP5159069B2 (ja) * 2006-08-29 2013-03-06 キヤノン株式会社 液体吐出方法
JP2008126504A (ja) * 2006-11-20 2008-06-05 Canon Inc インクジェット記録ヘッドの製造方法、およびインクジェット記録ヘッド
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US9355790B2 (en) * 2013-06-27 2016-05-31 Intel Corporation Energy storage devices having enhanced specific energy and associated methods
US9695515B2 (en) * 2013-08-30 2017-07-04 Hewlett-Packard Development Company, L.P. Substrate etch
KR20240017222A (ko) * 2022-07-28 2024-02-07 삼성디스플레이 주식회사 잉크젯 헤드 및 이를 포함하는 잉크젯 프린팅 장치

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931943B2 (ja) 1979-04-02 1984-08-06 キヤノン株式会社 液体噴射記録法
JPS63197652A (ja) * 1987-02-13 1988-08-16 Canon Inc インクジエツト記録ヘツドおよびその製造方法
US4882595A (en) 1987-10-30 1989-11-21 Hewlett-Packard Company Hydraulically tuned channel architecture
EP0317171A3 (de) 1987-11-13 1990-07-18 Hewlett-Packard Company Integrales Dünnschicht-Injektionssystem für einen thermischen Tintenspritzdruckkopf und Arbeitsmethoden
US4847630A (en) 1987-12-17 1989-07-11 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
WO1991017891A1 (de) 1990-05-21 1991-11-28 Mannesmann Ag Tintenschreibkopf für eine nach dem thermalwandlerprinzip arbeitende flüssigkeitsstrahlaufzeichnungsvorrichtung und verfahren zu seiner herstellung
JPH04241955A (ja) * 1991-01-11 1992-08-28 Fuji Xerox Co Ltd インクジェット記録ヘッドの製造方法
AU657720B2 (en) * 1991-01-30 1995-03-23 Canon Kabushiki Kaisha A bubblejet image reproducing apparatus
US5385635A (en) * 1993-11-01 1995-01-31 Xerox Corporation Process for fabricating silicon channel structures with variable cross-sectional areas
US5825385A (en) * 1995-04-12 1998-10-20 Eastman Kodak Company Constructions and manufacturing processes for thermally activated print heads
US5850241A (en) 1995-04-12 1998-12-15 Eastman Kodak Company Monolithic print head structure and a manufacturing process therefor using anisotropic wet etching
US6000787A (en) * 1996-02-07 1999-12-14 Hewlett-Packard Company Solid state ink jet print head
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KR100374788B1 (ko) * 2000-04-26 2003-03-04 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법
KR100397604B1 (ko) * 2000-07-18 2003-09-13 삼성전자주식회사 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
EP1215048B1 (de) * 2000-12-15 2007-06-06 Samsung Electronics Co. Ltd. Mit Bläschen angetriebener Tintenstrahldruckkopf und dazugehöriges Hertsellungsverfahren
KR100668294B1 (ko) * 2001-01-08 2007-01-12 삼성전자주식회사 반구형 잉크 챔버를 가진 잉크 젯 프린트 헤드 및 그제조방법
KR100429844B1 (ko) * 2001-10-25 2004-05-03 삼성전자주식회사 일체형 잉크 젯 프린트헤드 및 그 제조방법
KR100433530B1 (ko) * 2001-12-10 2004-05-31 삼성전자주식회사 일체형 잉크젯 프린트 헤드의 제조 방법
KR100438709B1 (ko) * 2001-12-18 2004-07-05 삼성전자주식회사 잉크 젯 프린트 헤드

Also Published As

Publication number Publication date
EP1216837A1 (de) 2002-06-26
US20020096489A1 (en) 2002-07-25
KR100506082B1 (ko) 2005-08-04
EP1216837B1 (de) 2007-03-28
JP3773843B2 (ja) 2006-05-10
JP2002225292A (ja) 2002-08-14
KR20020048544A (ko) 2002-06-24
US6676844B2 (en) 2004-01-13
DE60127519T2 (de) 2007-12-06

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Legal Events

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8364 No opposition during term of opposition