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DE69907525D1 - Verfahren zur Herstellung eines Tintenstrahldruckkopfes und Tintenstrahldruckkopf - Google Patents

Verfahren zur Herstellung eines Tintenstrahldruckkopfes und Tintenstrahldruckkopf

Info

Publication number
DE69907525D1
DE69907525D1 DE69907525T DE69907525T DE69907525D1 DE 69907525 D1 DE69907525 D1 DE 69907525D1 DE 69907525 T DE69907525 T DE 69907525T DE 69907525 T DE69907525 T DE 69907525T DE 69907525 D1 DE69907525 D1 DE 69907525D1
Authority
DE
Germany
Prior art keywords
ink jet
print head
jet print
manufacturing
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69907525T
Other languages
English (en)
Other versions
DE69907525T2 (de
Inventor
Akihiko Shimomura
Susumu Kadokura
Hiroto Matsuda
Isao Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69907525D1 publication Critical patent/DE69907525D1/de
Application granted granted Critical
Publication of DE69907525T2 publication Critical patent/DE69907525T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69907525T 1998-01-26 1999-01-26 Verfahren zur Herstellung eines Tintenstrahldruckkopfes und Tintenstrahldruckkopf Expired - Lifetime DE69907525T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1286198 1998-01-26

Publications (2)

Publication Number Publication Date
DE69907525D1 true DE69907525D1 (de) 2003-06-12
DE69907525T2 DE69907525T2 (de) 2003-12-11

Family

ID=11817206

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69907525T Expired - Lifetime DE69907525T2 (de) 1998-01-26 1999-01-26 Verfahren zur Herstellung eines Tintenstrahldruckkopfes und Tintenstrahldruckkopf

Country Status (3)

Country Link
US (1) US6409931B1 (de)
EP (1) EP0931656B1 (de)
DE (1) DE69907525T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6586495B1 (en) * 1999-09-20 2003-07-01 Canon Kabushiki Kaisha Alkylsiloxane-containing epoxy resin composition, surface modifying method using the same, ink-jet recording head and liquid-jet recording apparatus
JP3679668B2 (ja) * 1999-12-20 2005-08-03 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6992117B2 (en) * 2002-01-17 2006-01-31 Canon Kabushiki Kaisha Epoxy resin composition, surface treatment method, liquid-jet recording head and liquid-jet recording apparatus
US6846520B2 (en) * 2002-01-17 2005-01-25 Canon Kabushiki Kaisha Epoxy resin composition, surface treatment method, liquid-jet recording head and liquid-jet recording apparatus
TW589253B (en) * 2002-02-01 2004-06-01 Nanodynamics Inc Method for producing nozzle plate of ink-jet print head by photolithography
JP3937152B2 (ja) 2002-05-28 2007-06-27 ブラザー工業株式会社 インクジェットプリンタヘッドの製造方法
KR100561864B1 (ko) 2004-02-27 2006-03-17 삼성전자주식회사 잉크젯 프린트헤드의 노즐 플레이트 표면에 소수성코팅막을 형성하는 방법
TWI265095B (en) * 2005-08-16 2006-11-01 Ind Tech Res Inst Nozzle plate
EP1801142B1 (de) * 2005-12-16 2016-02-24 Canon Kabushiki Kaisha Harzzusammensetzung, gehärtetes Harzprodukt und Flüssigkeitsausstosskopf
JP5173273B2 (ja) * 2007-06-19 2013-04-03 キヤノン株式会社 インクジェットヘッド用封止剤、インクジェットヘッドおよびインクジェット記録装置
JP2010274627A (ja) * 2009-06-01 2010-12-09 Canon Inc インクジェットプリンター用インク接液熱可塑性エラストマー組成物
JP5591011B2 (ja) * 2010-07-30 2014-09-17 キヤノン株式会社 液体吐出ヘッドの製造方法。
JP5539169B2 (ja) 2010-11-22 2014-07-02 キヤノン株式会社 インクジェット用弾性部材
JP5858813B2 (ja) 2012-02-06 2016-02-10 キヤノン株式会社 液体吐出ヘッド及びその製造方法
US9599893B2 (en) * 2014-09-25 2017-03-21 Canon Kabushiki Kaisha Production process for optically shaped product and production process for liquid discharge head

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4438191A (en) * 1982-11-23 1984-03-20 Hewlett-Packard Company Monolithic ink jet print head
JPH0645242B2 (ja) 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPH0643132B2 (ja) 1985-06-19 1994-06-08 株式会社リコー インクジエツトヘツドの帯電防止処理方法
JPH0698755B2 (ja) 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPH0410941A (ja) 1990-04-27 1992-01-16 Canon Inc 液滴噴射方法及び該方法を用いた記録装置
JP2783647B2 (ja) 1990-04-27 1998-08-06 キヤノン株式会社 液体噴射方法および該方法を用いた記録装置
JPH0410942A (ja) 1990-04-27 1992-01-16 Canon Inc 液体噴射方法および該方法を用いた記録装置
JP2975190B2 (ja) 1991-10-29 1999-11-10 キヤノン株式会社 インクジェット記録ヘッド
ATE162469T1 (de) * 1991-10-31 1998-02-15 Canon Kk Tintenstrahlkopf und sein herstellungsverfahren
US5208606A (en) 1991-11-21 1993-05-04 Xerox Corporation Directionality of thermal ink jet transducers by front face metalization
JPH05330060A (ja) 1992-06-02 1993-12-14 Seiko Epson Corp インクジェット記録用ヘッド及びその製造方法
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3169037B2 (ja) 1993-10-29 2001-05-21 セイコーエプソン株式会社 インクジェット記録ヘッドのノズルプレートの製造方法
JPH07138763A (ja) 1993-11-10 1995-05-30 Canon Inc インクジェット記録ヘッドの表面処理方法
US5598193A (en) 1995-03-24 1997-01-28 Hewlett-Packard Company Treatment of an orifice plate with self-assembled monolayers
JPH09132657A (ja) 1995-09-04 1997-05-20 Canon Inc 基材の表面処理方法及び該方法を用いたインクジェット記録ヘッドの製造方法
JPH0976515A (ja) 1995-09-12 1997-03-25 Canon Inc インクジェット記録ヘッドの製造方法及びこの方法により製造されたインクジェット記録ヘッド、並びにインクジェット記録装置
TW426613B (en) * 1996-01-23 2001-03-21 Seiko Epson Corp Ink jet printer head, its manufacturing method and ink

Also Published As

Publication number Publication date
EP0931656B1 (de) 2003-05-07
US6409931B1 (en) 2002-06-25
EP0931656A1 (de) 1999-07-28
DE69907525T2 (de) 2003-12-11

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Legal Events

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8364 No opposition during term of opposition