[go: up one dir, main page]

DE60127473D1 - Abscheidung von Gamma-Al2O3 mittels CVD - Google Patents

Abscheidung von Gamma-Al2O3 mittels CVD

Info

Publication number
DE60127473D1
DE60127473D1 DE60127473T DE60127473T DE60127473D1 DE 60127473 D1 DE60127473 D1 DE 60127473D1 DE 60127473 T DE60127473 T DE 60127473T DE 60127473 T DE60127473 T DE 60127473T DE 60127473 D1 DE60127473 D1 DE 60127473D1
Authority
DE
Germany
Prior art keywords
al2o3
cvd
gamma
separation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60127473T
Other languages
English (en)
Other versions
DE60127473T2 (de
Inventor
Sakari Ruppi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seco Tools AB
Original Assignee
Seco Tools AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seco Tools AB filed Critical Seco Tools AB
Application granted granted Critical
Publication of DE60127473D1 publication Critical patent/DE60127473D1/de
Publication of DE60127473T2 publication Critical patent/DE60127473T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
DE60127473T 2000-02-04 2001-01-30 Abscheidung von Gamma-Al2O3 mittels CVD Expired - Lifetime DE60127473T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US498344 1990-03-23
US09/498,344 US6572991B1 (en) 2000-02-04 2000-02-04 Deposition of γ-Al2O3 by means of CVD

Publications (2)

Publication Number Publication Date
DE60127473D1 true DE60127473D1 (de) 2007-05-10
DE60127473T2 DE60127473T2 (de) 2007-12-06

Family

ID=23980683

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60127473T Expired - Lifetime DE60127473T2 (de) 2000-02-04 2001-01-30 Abscheidung von Gamma-Al2O3 mittels CVD

Country Status (6)

Country Link
US (1) US6572991B1 (de)
EP (1) EP1122334B1 (de)
JP (1) JP2001254177A (de)
KR (1) KR100767094B1 (de)
CN (1) CN1179067C (de)
DE (1) DE60127473T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6689450B2 (en) * 2001-03-27 2004-02-10 Seco Tools Ab Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
EP1323847A3 (de) * 2001-12-28 2005-09-14 Seco Tools Ab Beschichteter Hartmetallkörper und Verfahren zu seiner Herstellung
US20060003100A1 (en) * 2002-12-12 2006-01-05 Sarin Vinod K CVD process to deposit aluminum oxide coatings
SE526526C3 (sv) 2003-04-01 2005-10-26 Sandvik Intellectual Property Sätt att belägga skär med A1203 samt ett med A1203 belagt skärverktyg
US7455918B2 (en) 2004-03-12 2008-11-25 Kennametal Inc. Alumina coating, coated product and method of making the same
SE528432C2 (sv) 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod för att framställa detta
SE528430C2 (sv) * 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta
SE528431C2 (sv) * 2004-11-05 2006-11-14 Seco Tools Ab Med aluminiumoxid belagt skärverktygsskär samt metod att framställa detta
JP4438609B2 (ja) * 2004-11-16 2010-03-24 アイシン精機株式会社 ピストン
JP2007067366A (ja) * 2005-08-05 2007-03-15 Elpida Memory Inc 半導体記憶装置の製造方法
DE102008013965A1 (de) * 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter Körper
DE102008013966A1 (de) * 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter Körper
EP2216311B1 (de) 2009-01-30 2013-01-16 Silicalia S.L. Verstärktes natürliches oder verfestigtes steinplattenartiges Element und mehrschichtige Schutzbeschichtung dafür
DE102009028577B4 (de) * 2009-08-17 2012-02-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtete Körper aus Metall, Hartmetall, Cermet, Keramik oder Halbleiterwerkstoff sowie Verfahren zur Beschichtung derartiger Körper
CN101927586B (zh) * 2009-12-04 2012-10-10 华中科技大学 一种金属基体表面复合涂层及其制备方法
EP2446988A1 (de) 2010-10-29 2012-05-02 Seco Tools AB Schneidwerkzeugeinsatz mit einer Alpha-Aluminid-Schicht enthaltend eine mit mehreren Komponenten Textur
US9103036B2 (en) 2013-03-15 2015-08-11 Kennametal Inc. Hard coatings comprising cubic phase forming compositions
DE102013104254A1 (de) 2013-04-26 2014-10-30 Walter Ag Werkzeug mit CVD-Beschichtung
US9168664B2 (en) 2013-08-16 2015-10-27 Kennametal Inc. Low stress hard coatings and applications thereof
US9896767B2 (en) 2013-08-16 2018-02-20 Kennametal Inc Low stress hard coatings and applications thereof
US10894907B2 (en) 2016-05-17 2021-01-19 National University Corporation Hokkaido University Latent-heat storage body microcapsules and process for producing latent-heat storage body microcapsules
CN109112500B (zh) 2017-06-22 2022-01-28 肯纳金属公司 Cvd复合材料耐火涂层及其应用
EP3848484A3 (de) 2020-01-10 2021-09-15 Sakari Ruppi Bei niedriger temperatur abgeschiedene geprägte aluminiumoxidschicht
US12077646B2 (en) 2020-01-21 2024-09-03 Quantum MicroMaterials, Inc. Coating substrate by polymerization of amine compound and apparatus having polymer coated substrate
EP3872222B1 (de) * 2020-02-28 2022-12-28 AB Sandvik Coromant Beschichtetes schneidwerkzeug
EP4139257A1 (de) * 2020-04-23 2023-03-01 Pilkington Group Limited Verfahren zur herstellung eines beschichteten glasartikels

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408535B1 (de) 1989-07-13 1994-04-06 Seco Tools Ab Mit mehreren Oxiden beschichteter Karbidkörper und Verfahren zu seiner Herstellung
SE9101953D0 (sv) 1991-06-25 1991-06-25 Sandvik Ab A1203 coated sintered body
DE4209975A1 (de) 1992-03-27 1993-09-30 Krupp Widia Gmbh Verbundkörper und dessen Verwendung
JP2746036B2 (ja) 1992-12-22 1998-04-28 三菱マテリアル株式会社 表面被覆切削工具
EP0727509B1 (de) 1995-02-17 2001-12-12 Seco Tools Ab Sinterkarbidsubstrat mit Mehrschichten aus Aluminien
US5879823A (en) 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
JPH1068076A (ja) 1996-08-26 1998-03-10 Mitsubishi Materials Corp 耐チッピング性のすぐれた表面被覆超硬合金製切削工具の製造法
SE520802C2 (sv) * 1997-11-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
SE517046C2 (sv) 1997-11-26 2002-04-09 Sandvik Ab Plasmaaktiverad CVD-metod för beläggning av skärverktyg med finkornig aluminiumoxid
JP3031907B2 (ja) * 1998-03-16 2000-04-10 日立ツール株式会社 多層膜被覆部材
JPH11335870A (ja) * 1998-05-25 1999-12-07 Hitachi Metals Ltd 炭窒化チタン・酸化アルミニウム被覆工具

Also Published As

Publication number Publication date
KR20010078265A (ko) 2001-08-20
DE60127473T2 (de) 2007-12-06
EP1122334A1 (de) 2001-08-08
CN1316545A (zh) 2001-10-10
US6572991B1 (en) 2003-06-03
KR100767094B1 (ko) 2007-10-15
EP1122334B1 (de) 2007-03-28
JP2001254177A (ja) 2001-09-18
CN1179067C (zh) 2004-12-08

Similar Documents

Publication Publication Date Title
DE60127473D1 (de) Abscheidung von Gamma-Al2O3 mittels CVD
NO20034925L (no) Cykliske N-aroylaminer
AR028567A1 (es) Nuevos derivados de fenil-propargileter
DE60236733D1 (de) Isoliertes schwingungsgyroskop
AR028253A1 (es) Inhibidores de la glucogeno fosforilasa
DE60112276D1 (de) Elektrophoretische trennung von verbindungen
AR028596A1 (es) Nuevos derivados de fenilglicina
FI20011412L (fi) Värähtelykaiuttimen kaksoismagneettirakenne
ID30187A (id) Dongkrak jenis pantagraf
DE60126814D1 (de) Inhalation von stickoxid
FR2809740B1 (fr) Melanges de stabilisants
ITMI20021038A0 (it) Disposizione di elettrodi
EP1438664A4 (de) Subnetz-pooling
FR2809738B1 (fr) Melanges de stabilisants
DE60031450D1 (de) Polymorph v von torasemid
DE60007360D1 (de) Amorphe modifikation von torasemid
NO20041066L (no) Hydroksyeikosensyre-analoger
DE50202621D1 (de) Zentrifuge
DK1283319T3 (da) Skillevæg
DE60331820D1 (de) Beseitigung von verstopfungen von rohrleitungen
DE50307920D1 (de) Wasser-in-Öl-Cremes von Organo-Siliciumverbindungen
DE60227914D1 (de) Extraktive aufreinigung von lipopeptidantibiotika
DE10196936T1 (de) Wartung von Benutzerschnittstellen
UA4579S (uk) Дозиметр-радіометр гамма-бета-випромінювань
SE0000713D0 (sv) Methods of synthesis

Legal Events

Date Code Title Description
8364 No opposition during term of opposition