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DE60123804D1 - Herstellungsverfahren für pyroelektrische sensoren mit einer elektrische polung benötigenden pyroelektrischen dünnschicht - Google Patents

Herstellungsverfahren für pyroelektrische sensoren mit einer elektrische polung benötigenden pyroelektrischen dünnschicht

Info

Publication number
DE60123804D1
DE60123804D1 DE60123804T DE60123804T DE60123804D1 DE 60123804 D1 DE60123804 D1 DE 60123804D1 DE 60123804 T DE60123804 T DE 60123804T DE 60123804 T DE60123804 T DE 60123804T DE 60123804 D1 DE60123804 D1 DE 60123804D1
Authority
DE
Germany
Prior art keywords
electrodes
resistances
sensors
pixels
pyroelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60123804T
Other languages
English (en)
Other versions
DE60123804T2 (de
Inventor
Bert Willing
Paul Muralt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ECOLE POLYTECH
Ecole Polytechnique Federale de Lausanne EPFL
Original Assignee
ECOLE POLYTECH
Ecole Polytechnique Federale de Lausanne EPFL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ECOLE POLYTECH, Ecole Polytechnique Federale de Lausanne EPFL filed Critical ECOLE POLYTECH
Application granted granted Critical
Publication of DE60123804D1 publication Critical patent/DE60123804D1/de
Publication of DE60123804T2 publication Critical patent/DE60123804T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DE60123804T 2000-08-04 2001-07-06 Herstellungsverfahren für pyroelektrische sensoren mit einer elektrische polung benötigenden pyroelektrischen dünnschicht Expired - Fee Related DE60123804T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00116868A EP1178545A1 (de) 2000-08-04 2000-08-04 Herstellung eines pyroelektrischen Sensors mit einer pyroelektrischen Dünnschicht die polarisiert werden muss
EP00116868 2000-08-04
PCT/EP2001/007836 WO2002013283A1 (fr) 2000-08-04 2001-07-06 Fabrication de capteurs pyroelectriques comprenant une couche pyroelectrique mice necessitant une polarisation electrique

Publications (2)

Publication Number Publication Date
DE60123804D1 true DE60123804D1 (de) 2006-11-23
DE60123804T2 DE60123804T2 (de) 2007-10-11

Family

ID=8169454

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60123804T Expired - Fee Related DE60123804T2 (de) 2000-08-04 2001-07-06 Herstellungsverfahren für pyroelektrische sensoren mit einer elektrische polung benötigenden pyroelektrischen dünnschicht

Country Status (8)

Country Link
US (1) US6727113B2 (de)
EP (2) EP1178545A1 (de)
JP (1) JP2004506332A (de)
CN (1) CN1446381A (de)
AT (1) ATE342585T1 (de)
AU (1) AU2001287587A1 (de)
DE (1) DE60123804T2 (de)
WO (1) WO2002013283A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405001B2 (en) 2005-03-24 2008-07-29 3M Innovative Properties Company Surface modified nanoparticle and method of preparing same
US20110193066A1 (en) * 2009-08-13 2011-08-11 E. I. Du Pont De Nemours And Company Current limiting element for pixels in electronic devices
US20140318278A1 (en) * 2013-04-24 2014-10-30 Honeywell International Inc. Particle imaging utilizing a filter
FR3090209B1 (fr) * 2018-12-18 2021-01-15 Commissariat Energie Atomique Procede de fabrication d’un dispositif comprenant un materiau acquerant une propriete electrique apres avoir ete soumis a une polarisation electrique
US20230268244A1 (en) * 2022-02-21 2023-08-24 Taiwan Semiconductor Manufacturing Company, Ltd. Thermal dissipation in power ic using pyroelectric materials

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2670325B1 (fr) * 1990-12-11 1993-01-22 Thomson Composants Militaires Detecteur infrarouge monolithique a materiau pyroelectrique.
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
JP2987476B2 (ja) 1992-03-30 1999-12-06 株式会社堀場製作所 焦電素子の製造方法
US5413667A (en) * 1992-11-04 1995-05-09 Matsushita Electric Industrial Co., Ltd. Pyroelectric infrared detector fabricating method
US5602043A (en) * 1995-01-03 1997-02-11 Texas Instruments Incorporated Monolithic thermal detector with pyroelectric film and method
US5627082A (en) * 1995-03-29 1997-05-06 Texas Instruments Incorporated High thermal resistance backfill material for hybrid UFPA's
US6020216A (en) * 1996-08-30 2000-02-01 Texas Instruments Incorporated Thermal detector with stress-aligned thermally sensitive element and method

Also Published As

Publication number Publication date
EP1178545A1 (de) 2002-02-06
US6727113B2 (en) 2004-04-27
JP2004506332A (ja) 2004-02-26
ATE342585T1 (de) 2006-11-15
AU2001287587A1 (en) 2002-02-18
CN1446381A (zh) 2003-10-01
US20030176004A1 (en) 2003-09-18
DE60123804T2 (de) 2007-10-11
WO2002013283A1 (fr) 2002-02-14
EP1307929B1 (de) 2006-10-11
EP1307929A1 (de) 2003-05-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee