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DE60042227D1 - Mikroherstellungsverfahren zur Herstellung von optischen Komponenten - Google Patents

Mikroherstellungsverfahren zur Herstellung von optischen Komponenten

Info

Publication number
DE60042227D1
DE60042227D1 DE60042227T DE60042227T DE60042227D1 DE 60042227 D1 DE60042227 D1 DE 60042227D1 DE 60042227 T DE60042227 T DE 60042227T DE 60042227 T DE60042227 T DE 60042227T DE 60042227 D1 DE60042227 D1 DE 60042227D1
Authority
DE
Germany
Prior art keywords
production
optical components
microfabrication process
microfabrication
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60042227T
Other languages
English (en)
Inventor
Tsuguhiro Korenaga
Makoto Umetani
Hiroyuki Asakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Application granted granted Critical
Publication of DE60042227D1 publication Critical patent/DE60042227D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00769—Producing diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
    • B29K2995/0018—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds having particular optical properties, e.g. fluorescent or phosphorescent
    • B29K2995/0034—Polarising
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0075—Light guides, optical cables

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Optical Integrated Circuits (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
DE60042227T 1999-07-13 2000-07-04 Mikroherstellungsverfahren zur Herstellung von optischen Komponenten Expired - Lifetime DE60042227D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19961699A JP3229871B2 (ja) 1999-07-13 1999-07-13 微細形状転写方法および光学部品の製造方法

Publications (1)

Publication Number Publication Date
DE60042227D1 true DE60042227D1 (de) 2009-07-02

Family

ID=16410827

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60042227T Expired - Lifetime DE60042227D1 (de) 1999-07-13 2000-07-04 Mikroherstellungsverfahren zur Herstellung von optischen Komponenten

Country Status (4)

Country Link
US (2) US6989114B1 (de)
EP (1) EP1068945B1 (de)
JP (1) JP3229871B2 (de)
DE (1) DE60042227D1 (de)

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JP2000214884A (ja) 1999-01-22 2000-08-04 Olympus Optical Co Ltd 音声記録装置
JP4099887B2 (ja) * 1999-01-22 2008-06-11 ソニー株式会社 光学素子の製造方法、並びに光学素子製造用金型
GB2365815B (en) * 1999-01-22 2002-10-30 Sony Corp Manufacture of optical elements
EP1420929B1 (de) 2001-08-30 2011-10-12 Bayer Technology Services GmbH Verfahren zur herstellung von abformkörpern, insbesondere optischen strukturen, und deren verwendung
JP2003172841A (ja) * 2001-09-28 2003-06-20 Omron Corp 光導波路及びその製造方法
EP1331084B1 (de) * 2002-01-25 2004-03-10 Leister Process Technologies Verfahren zum Abformen von Mikro- und Nanostrukturen
US20060266734A1 (en) * 2003-01-15 2006-11-30 Mitsuru Fujii Device, method, and system for pattern forming
US20040209123A1 (en) * 2003-04-17 2004-10-21 Bajorek Christopher H. Method of fabricating a discrete track recording disk using a bilayer resist for metal lift-off
US7790231B2 (en) * 2003-07-10 2010-09-07 Brewer Science Inc. Automated process and apparatus for planarization of topographical surfaces
US7037458B2 (en) * 2003-10-23 2006-05-02 Intel Corporation Progressive stamping apparatus and method
US20050151282A1 (en) * 2004-01-13 2005-07-14 Harper Bruce M. Workpiece handler and alignment assembly
US7329114B2 (en) * 2004-01-20 2008-02-12 Komag, Inc. Isothermal imprint embossing system
US7686606B2 (en) * 2004-01-20 2010-03-30 Wd Media, Inc. Imprint embossing alignment system
JP4923415B2 (ja) * 2004-03-17 2012-04-25 東レ株式会社 易表面賦形性シート、易表面賦形性シート積層体、それを用いた表面賦形方法及び成形品
JP2006015523A (ja) * 2004-06-30 2006-01-19 Konica Minolta Holdings Inc 成形方法及び成形装置
JP3857703B2 (ja) 2004-08-19 2006-12-13 株式会社日本製鋼所 成形体の製造方法および製造装置
CN100395121C (zh) * 2004-11-19 2008-06-18 鸿富锦精密工业（深圳）有限公司 热压印方法
JP2006159673A (ja) * 2004-12-08 2006-06-22 Konica Minolta Holdings Inc 金型の製作方法、素子の製作方法及び素子
JP4585866B2 (ja) * 2005-01-07 2010-11-24 株式会社日立産機システム 型押し成形型及びそれを用いた型押し成形方法
US7648354B2 (en) 2005-04-28 2010-01-19 Toshiba Kikai Kabushiki Kaisha Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus
JP2006315313A (ja) * 2005-05-13 2006-11-24 Japan Steel Works Ltd:The 転写・接合方法および装置
DE102005041505B3 (de) * 2005-09-01 2007-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Abformen von Strukturen
JP4783169B2 (ja) * 2006-02-13 2011-09-28 パナソニック株式会社 ドライエッチング方法、微細構造形成方法、モールド及びその製造方法
WO2008056558A1 (en) * 2006-11-07 2008-05-15 Konica Minolta Holdings, Inc. Method of imprinting
JP2008188953A (ja) * 2007-02-07 2008-08-21 Univ Of Electro-Communications プラスチック製スタンパの製造方法、プラスチック製スタンパ、及び、プラスチック製基板の製造方法
JP4547460B2 (ja) * 2009-08-19 2010-09-22 株式会社フジクラ 光ファイバグレーティング作製方法
US8496466B1 (en) 2009-11-06 2013-07-30 WD Media, LLC Press system with interleaved embossing foil holders for nano-imprinting of recording media
US9330685B1 (en) 2009-11-06 2016-05-03 WD Media, LLC Press system for nano-imprinting of recording media with a two step pressing method
US8402638B1 (en) 2009-11-06 2013-03-26 Wd Media, Inc. Press system with embossing foil free to expand for nano-imprinting of recording media
JP2011161867A (ja) * 2010-02-12 2011-08-25 Planet:Kk ワークのプラスチック部分における光拡散構造の形成方法、転写金型及び同方法で形成した製品
JP5772509B2 (ja) * 2011-10-27 2015-09-02 住友ベークライト株式会社 成形体の製造方法
CA2853603C (en) 2011-10-31 2016-07-12 Jx Nippon Oil & Energy Corporation Method for producing concave-convex substrate using sol-gel method, sol solution used in same, method for producing organic el element using same, and organic el element obtained thereby
EP2783833B1 (de) * 2011-11-25 2017-01-11 Scivax Corporation Prägevorrichtung und prägeverfahren
CN102555196A (zh) * 2011-12-06 2012-07-11 燕山大学 热压模法光子晶体光纤光栅制备装置
US10343312B2 (en) 2012-08-27 2019-07-09 Scivax Corporation Imprint device and imprint method
CN107848073B (zh) * 2015-06-10 2019-04-19 沙特基础工业全球技术有限公司 在固体塑料零件上形成表面结构的方法和包含由该方法形成的固体塑料零件的照明产品
JP6661454B2 (ja) * 2016-04-21 2020-03-11 株式会社東海理化電機製作所 表示装置、表示板の製造方法
CN109384372B (zh) * 2017-08-09 2021-10-22 香港理工大学 一种基于类石墨烯电热膜的光学元件模压方法
EP4005776B1 (de) * 2019-07-31 2025-09-10 Fuji Corporation Verfahren zur bildung von gehärtetem harz
CN112406129B (zh) * 2020-10-29 2021-11-30 清华大学 一种橡胶件的生产方法及生产系统

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DE3719200A1 (de) * 1987-06-09 1988-12-29 Ibm Deutschland Optische speicherplatte und verfahren zu ihrer herstellung
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JPH0227539A (ja) 1988-07-15 1990-01-30 Hitachi Ltd 光ディスク基板およびその製造方法
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JP2981256B2 (ja) 1990-05-09 1999-11-22 株式会社クラレ 光学部品の製造方法
JPH05312971A (ja) 1992-05-07 1993-11-26 Seiko Instr Inc ダイヤル表面模様の製法
FR2722303B1 (fr) 1994-07-07 1996-09-06 Corning Inc Procede et dispositif de fabrication de reseaux de microlentilles optiques
US5631195A (en) * 1994-09-14 1997-05-20 Asahi Glass Company Ltd. Glass composition and substrate for plasma display
JP2855091B2 (ja) 1995-03-23 1999-02-10 東芝機械株式会社 光導波路の製造方法
EP0860720A4 (de) 1995-10-27 2000-11-02 Hoya Corp Befestingungsmittel für optische faser und seine herstellungsmethode
JPH1096808A (ja) 1996-09-24 1998-04-14 Nippon Telegr & Teleph Corp <Ntt> 微細パタン形成法
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Also Published As

Publication number Publication date
US6989114B1 (en) 2006-01-24
EP1068945B1 (de) 2009-05-20
US20060038309A1 (en) 2006-02-23
JP2001026052A (ja) 2001-01-30
JP3229871B2 (ja) 2001-11-19
EP1068945A2 (de) 2001-01-17
EP1068945A3 (de) 2003-01-29

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