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DE502005007003D1 - Apparatus and method for producing microstructures - Google Patents

Apparatus and method for producing microstructures

Info

Publication number
DE502005007003D1
DE502005007003D1 DE502005007003T DE502005007003T DE502005007003D1 DE 502005007003 D1 DE502005007003 D1 DE 502005007003D1 DE 502005007003 T DE502005007003 T DE 502005007003T DE 502005007003 T DE502005007003 T DE 502005007003T DE 502005007003 D1 DE502005007003 D1 DE 502005007003D1
Authority
DE
Germany
Prior art keywords
drive
tool
workpiece
producing microstructures
fast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE502005007003T
Other languages
German (de)
Inventor
Heinrich Ostendarp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott AG filed Critical Schott AG
Publication of DE502005007003D1 publication Critical patent/DE502005007003D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/32—Feeding working-spindles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Turning (AREA)
  • Machine Tool Units (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Disintegrating Or Milling (AREA)
  • Saccharide Compounds (AREA)

Abstract

The device for producing microstructures has a rotating driven spindle (12) and a holder for clamping a workpiece (16). A fast drive is coupled to a tool (32) over a guidance arrangement, which permits adjustment of the tool in an axial direction of the fast drive against a return force. The drive has high rigidity in the plane perpendicular to the drive direction. An independent claim is made for an actuator (30) for moving the tool of a turning machine (10) to produce a micro-structured surface in a workpiece, especially using a piezoelectric drive.
DE502005007003T 2004-04-23 2005-04-13 Apparatus and method for producing microstructures Expired - Lifetime DE502005007003D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004020990A DE102004020990B4 (en) 2004-04-23 2004-04-23 Apparatus and method for producing microstructures
DE202004011815U DE202004011815U1 (en) 2004-04-23 2004-07-28 Device for producing microstructures

Publications (1)

Publication Number Publication Date
DE502005007003D1 true DE502005007003D1 (en) 2009-05-14

Family

ID=34223637

Family Applications (6)

Application Number Title Priority Date Filing Date
DE102004020990A Expired - Fee Related DE102004020990B4 (en) 2004-04-23 2004-04-23 Apparatus and method for producing microstructures
DE202004011815U Expired - Lifetime DE202004011815U1 (en) 2004-04-23 2004-07-28 Device for producing microstructures
DE502005004658T Expired - Lifetime DE502005004658D1 (en) 2004-04-23 2005-04-13 Apparatus and method for producing microstructures
DE502005005644T Expired - Lifetime DE502005005644D1 (en) 2004-04-23 2005-04-13 Device for producing microstructures
DE502005007003T Expired - Lifetime DE502005007003D1 (en) 2004-04-23 2005-04-13 Apparatus and method for producing microstructures
DE502005006144T Expired - Lifetime DE502005006144D1 (en) 2004-04-23 2005-04-13 DEVICE FOR GENERATING MICROSTRUCTURES

Family Applications Before (4)

Application Number Title Priority Date Filing Date
DE102004020990A Expired - Fee Related DE102004020990B4 (en) 2004-04-23 2004-04-23 Apparatus and method for producing microstructures
DE202004011815U Expired - Lifetime DE202004011815U1 (en) 2004-04-23 2004-07-28 Device for producing microstructures
DE502005004658T Expired - Lifetime DE502005004658D1 (en) 2004-04-23 2005-04-13 Apparatus and method for producing microstructures
DE502005005644T Expired - Lifetime DE502005005644D1 (en) 2004-04-23 2005-04-13 Device for producing microstructures

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE502005006144T Expired - Lifetime DE502005006144D1 (en) 2004-04-23 2005-04-13 DEVICE FOR GENERATING MICROSTRUCTURES

Country Status (4)

Country Link
CN (1) CN100592959C (en)
AT (4) ATE427184T1 (en)
DE (6) DE102004020990B4 (en)
TW (1) TW200534949A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005044087A1 (en) 2005-09-08 2007-03-15 Schott Ag Actuator for moving a tool
US7328638B2 (en) * 2005-12-27 2008-02-12 3M Innovative Properties Company Cutting tool using interrupted cut fast tool servo
JP5031459B2 (en) * 2007-06-27 2012-09-19 株式会社アルバック Coarse / fine movement apparatus and liquid supply apparatus including the same
DE102010029242A1 (en) * 2010-05-21 2011-11-24 Index-Werke Gmbh & Co. Kg Hahn & Tessky Guide device and machine tool with such a guide device
CN102152131B (en) * 2011-02-28 2012-06-13 西安理工大学 Series macro-micro driving and guiding device for piezoelectric actuator of ball screw pair
AT511468B1 (en) * 2011-04-20 2012-12-15 Fill Gmbh DAMPING ROLL
DE102011101935B4 (en) * 2011-05-18 2014-10-09 Wsengineering Gmbh & Co.Kg Tool holder with axial evasion mechanism and method of manufacturing a tool holder with an evasive mechanism
AT511330B1 (en) * 2011-06-03 2012-11-15 Piezocryst Advanced Sensorics SENSOR FOR MEASUREMENT OF PRESSURE AND / OR FORCE
CN103567459B (en) * 2012-07-20 2016-06-08 鸿准精密模具（昆山）有限公司 There is the workpiece of nonvolatile organic acid
DE102013104923B3 (en) * 2013-05-14 2014-09-11 Hochschule Furtwangen Device for vibration-assisted workpiece machining
DE102014005543B3 (en) * 2014-04-16 2015-02-19 Innolite Gmbh Method and device for ultra-precise machining of a curved and ferrous negative surface of a mold insert, mold insert and an optical element produced therewith
TWI579537B (en) * 2015-12-09 2017-04-21 財團法人金屬工業研究發展中心 Method of extracting dynamic vibration frequency
JP7413001B2 (en) * 2019-12-20 2024-01-15 デクセリアルズ株式会社 Roll mold manufacturing method, roll mold manufacturing equipment and program
JP7343384B2 (en) * 2019-12-20 2023-09-12 デクセリアルズ株式会社 Roll mold manufacturing method, roll mold manufacturing equipment and program
CN116079335A (en) * 2023-02-28 2023-05-09 华南理工大学 Processing method of joint bearing surface microstructure and joint bearing
CN116576095B (en) * 2023-05-12 2024-06-07 烟台东德氢能技术有限公司 Centering adjustment method for diaphragm compressor and motor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137542A (en) * 1982-02-10 1983-08-16 Nakamuratome Seimitsu Kogyo Kk Supporting structure for tool rest of combined lathe
GB8912552D0 (en) * 1989-06-01 1989-07-19 Pilkington Plc Machine tool for single point diamond turning
EP0439425B1 (en) * 1990-01-24 1993-04-14 Ciba-Geigy Ag Device for machining an ophthalmic lens with, in particular, aspheric surfaces
JPH04129602A (en) * 1990-09-20 1992-04-30 Toyoda Mach Works Ltd Non-roundness generating device
JP2682260B2 (en) * 1991-05-09 1997-11-26 松下電器産業株式会社 Micro polishing method and micro polishing tool
US5467675A (en) * 1993-11-15 1995-11-21 North Carolina State University Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape
GB2314452A (en) * 1996-06-17 1997-12-24 Rank Taylor Hobson Ltd Electromechanical actuator
DE19952996A1 (en) * 1999-11-04 2001-05-10 Heidelberger Druckmasch Ag Engraving device for electronic engraving machine
JP3659132B2 (en) * 2000-06-16 2005-06-15 株式会社村田製作所 Load control type actuator
DE10126039C2 (en) * 2001-05-21 2003-03-27 Univ Dresden Tech Device for fine delivery of a turning tool
AU2003249653A1 (en) * 2002-05-29 2003-12-19 Massachusetts Institute Of Technology Rotary fast tool servo system and methods
DE10224755A1 (en) * 2002-06-04 2003-12-24 Siemens Ag Control method for an industrial processing machine

Also Published As

Publication number Publication date
DE102004020990B4 (en) 2008-05-21
DE102004020990A1 (en) 2005-11-17
ATE400402T1 (en) 2008-07-15
ATE410261T1 (en) 2008-10-15
DE502005005644D1 (en) 2008-11-20
CN100592959C (en) 2010-03-03
TW200534949A (en) 2005-11-01
ATE416061T1 (en) 2008-12-15
DE202004011815U1 (en) 2005-02-24
DE502005006144D1 (en) 2009-01-15
DE502005004658D1 (en) 2008-08-21
CN1946514A (en) 2007-04-11
ATE427184T1 (en) 2009-04-15

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Legal Events

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