DE2651864C3 - Photopolymerisierbares Aufzeichnungsmaterial - Google Patents
Photopolymerisierbares AufzeichnungsmaterialInfo
- Publication number
- DE2651864C3 DE2651864C3 DE2651864A DE2651864A DE2651864C3 DE 2651864 C3 DE2651864 C3 DE 2651864C3 DE 2651864 A DE2651864 A DE 2651864A DE 2651864 A DE2651864 A DE 2651864A DE 2651864 C3 DE2651864 C3 DE 2651864C3
- Authority
- DE
- Germany
- Prior art keywords
- layer
- photopolymerizable
- solvent
- image
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
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- 239000011230 binding agent Substances 0.000 claims description 44
- 239000000178 monomer Substances 0.000 claims description 29
- 230000005855 radiation Effects 0.000 claims description 28
- 229910052709 silver Inorganic materials 0.000 claims description 26
- 239000004332 silver Substances 0.000 claims description 26
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- 238000004519 manufacturing process Methods 0.000 claims description 7
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
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- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 11
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 9
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- QPQKUYVSJWQSDY-UHFFFAOYSA-N 4-phenyldiazenylaniline Chemical compound C1=CC(N)=CC=C1N=NC1=CC=CC=C1 QPQKUYVSJWQSDY-UHFFFAOYSA-N 0.000 description 8
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 8
- 239000004615 ingredient Substances 0.000 description 8
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical class OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 7
- 239000008199 coating composition Substances 0.000 description 7
- 239000012153 distilled water Substances 0.000 description 7
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
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- 229920001897 terpolymer Polymers 0.000 description 6
- 108010010803 Gelatin Proteins 0.000 description 5
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 5
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- 230000008859 change Effects 0.000 description 5
- 239000003086 colorant Substances 0.000 description 5
- 239000000539 dimer Substances 0.000 description 5
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- 235000019441 ethanol Nutrition 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
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- 235000011852 gelatine desserts Nutrition 0.000 description 5
- 238000007654 immersion Methods 0.000 description 5
- 239000003999 initiator Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 230000036961 partial effect Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
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- 238000012360 testing method Methods 0.000 description 5
- 239000000080 wetting agent Substances 0.000 description 5
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 4
- 206010034972 Photosensitivity reaction Diseases 0.000 description 4
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 4
- 239000006096 absorbing agent Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000036211 photosensitivity Effects 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 229910052724 xenon Inorganic materials 0.000 description 4
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 4
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 3
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- 125000005250 alkyl acrylate group Chemical group 0.000 description 3
- 235000019241 carbon black Nutrition 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
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- 230000005764 inhibitory process Effects 0.000 description 3
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- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
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- 238000012545 processing Methods 0.000 description 3
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- 150000003839 salts Chemical class 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 description 3
- 229940001593 sodium carbonate Drugs 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229920001169 thermoplastic Polymers 0.000 description 3
- 239000004416 thermosoftening plastic Substances 0.000 description 3
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 2
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- 150000001253 acrylic acids Chemical class 0.000 description 2
- 238000012644 addition polymerization Methods 0.000 description 2
- 150000008365 aromatic ketones Chemical class 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 2
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- 239000012876 carrier material Substances 0.000 description 2
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- MRQIXHXHHPWVIL-UHFFFAOYSA-N chembl1397023 Chemical compound OC1=CC=C2C=CC=CC2=C1N=NC1=CC=CC=C1 MRQIXHXHHPWVIL-UHFFFAOYSA-N 0.000 description 2
- 229940075614 colloidal silicon dioxide Drugs 0.000 description 2
- 208000010247 contact dermatitis Diseases 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
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- 238000000227 grinding Methods 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 239000000976 ink Substances 0.000 description 2
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000123 paper Substances 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
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- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
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- 239000000377 silicon dioxide Substances 0.000 description 2
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- 229910052708 sodium Inorganic materials 0.000 description 2
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- 230000004580 weight loss Effects 0.000 description 2
- 238000004876 x-ray fluorescence Methods 0.000 description 2
- KJSLIEVOUOCULE-UHFFFAOYSA-N (2,4-dihydroxyphenyl)-phenylmethanone 4-phenyl-2H-benzotriazol-5-ol Chemical compound Oc1ccc(C(=O)c2ccccc2)c(O)c1.Oc1ccc2n[nH]nc2c1-c1ccccc1 KJSLIEVOUOCULE-UHFFFAOYSA-N 0.000 description 1
- FWCOVYMDXJZFLW-UHFFFAOYSA-N (4-dodecoxy-2-hydroxyphenyl)-phenylmethanone;(2-hydroxy-4-methoxyphenyl)-(2-hydroxyphenyl)methanone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1O.OC1=CC(OCCCCCCCCCCCC)=CC=C1C(=O)C1=CC=CC=C1 FWCOVYMDXJZFLW-UHFFFAOYSA-N 0.000 description 1
- SWFHGTMLYIBPPA-UHFFFAOYSA-N (4-methoxyphenyl)-phenylmethanone Chemical compound C1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1 SWFHGTMLYIBPPA-UHFFFAOYSA-N 0.000 description 1
- LUMLZKVIXLWTCI-NSCUHMNNSA-N (e)-2,3-dichloro-4-oxobut-2-enoic acid Chemical compound OC(=O)C(\Cl)=C(/Cl)C=O LUMLZKVIXLWTCI-NSCUHMNNSA-N 0.000 description 1
- LMGYOBQJBQAZKC-UHFFFAOYSA-N 1-(2-ethylphenyl)-2-hydroxy-2-phenylethanone Chemical compound CCC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 LMGYOBQJBQAZKC-UHFFFAOYSA-N 0.000 description 1
- MDKSQNHUHMMKPP-UHFFFAOYSA-N 2,5-bis(4-methoxyphenyl)-4-phenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC(OC)=CC=2)N1 MDKSQNHUHMMKPP-UHFFFAOYSA-N 0.000 description 1
- CTWRMVAKUSJNBK-UHFFFAOYSA-N 2-(2,4-dimethoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class COC1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 CTWRMVAKUSJNBK-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- GBOJZXLCJZDBKO-UHFFFAOYSA-N 2-(2-chlorophenyl)-2-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 GBOJZXLCJZDBKO-UHFFFAOYSA-N 0.000 description 1
- UIHRWPYOTGCOJP-UHFFFAOYSA-N 2-(2-fluorophenyl)-4,5-diphenyl-1h-imidazole Chemical class FC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 UIHRWPYOTGCOJP-UHFFFAOYSA-N 0.000 description 1
- XIOGJAPOAUEYJO-UHFFFAOYSA-N 2-(2-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class COC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 XIOGJAPOAUEYJO-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- SNFCQJAJPFWBDJ-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 SNFCQJAJPFWBDJ-UHFFFAOYSA-N 0.000 description 1
- GZYZPHPDKCTFFH-UHFFFAOYSA-N 2-(4-methylsulfanylphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(SC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 GZYZPHPDKCTFFH-UHFFFAOYSA-N 0.000 description 1
- OVOUKWFJRHALDD-UHFFFAOYSA-N 2-[2-(2-acetyloxyethoxy)ethoxy]ethyl acetate Chemical compound CC(=O)OCCOCCOCCOC(C)=O OVOUKWFJRHALDD-UHFFFAOYSA-N 0.000 description 1
- WPMUZECMAFLDQO-UHFFFAOYSA-N 2-[2-(2-hexanoyloxyethoxy)ethoxy]ethyl hexanoate Chemical compound CCCCCC(=O)OCCOCCOCCOC(=O)CCCCC WPMUZECMAFLDQO-UHFFFAOYSA-N 0.000 description 1
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 1
- HWSSEYVMGDIFMH-UHFFFAOYSA-N 2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOC(=O)C(C)=C HWSSEYVMGDIFMH-UHFFFAOYSA-N 0.000 description 1
- SKIIKRJAQOSWFT-UHFFFAOYSA-N 2-[3-[1-(2,2-difluoroethyl)piperidin-4-yl]oxy-4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound FC(CN1CCC(CC1)OC1=NN(C=C1C=1C=NC(=NC=1)NC1CC2=CC=CC=C2C1)CC(=O)N1CC2=C(CC1)NN=N2)F SKIIKRJAQOSWFT-UHFFFAOYSA-N 0.000 description 1
- WWSJZGAPAVMETJ-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-ethoxypyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C(=NN(C=1)CC(=O)N1CC2=C(CC1)NN=N2)OCC WWSJZGAPAVMETJ-UHFFFAOYSA-N 0.000 description 1
- ZCGVPUAAMCMLTM-UHFFFAOYSA-N 2-amino-5-chlorobenzenesulfonic acid Chemical compound NC1=CC=C(Cl)C=C1S(O)(=O)=O ZCGVPUAAMCMLTM-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
- NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical compound OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 description 1
- FWWOWPGPERBCNJ-UHFFFAOYSA-N 2-hydroxy-4-(2-hydroxyethoxy)-4-oxobutanoic acid Chemical compound OCCOC(=O)CC(O)C(O)=O FWWOWPGPERBCNJ-UHFFFAOYSA-N 0.000 description 1
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical compound C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 1
- YCMLQMDWSXFTIF-UHFFFAOYSA-N 2-methylbenzenesulfonimidic acid Chemical compound CC1=CC=CC=C1S(N)(=O)=O YCMLQMDWSXFTIF-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- IICCLYANAQEHCI-UHFFFAOYSA-N 4,5,6,7-tetrachloro-3',6'-dihydroxy-2',4',5',7'-tetraiodospiro[2-benzofuran-3,9'-xanthene]-1-one Chemical compound O1C(=O)C(C(=C(Cl)C(Cl)=C2Cl)Cl)=C2C21C1=CC(I)=C(O)C(I)=C1OC1=C(I)C(O)=C(I)C=C21 IICCLYANAQEHCI-UHFFFAOYSA-N 0.000 description 1
- OKJSFKIUVDXFMS-UHFFFAOYSA-N 4-[bis[4-(diethylamino)-2-methylphenyl]methyl]-n,n-diethyl-3-methylaniline Chemical compound CC1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)N(CC)CC)C)C1=CC=C(N(CC)CC)C=C1C OKJSFKIUVDXFMS-UHFFFAOYSA-N 0.000 description 1
- ZVNPWFOVUDMGRP-UHFFFAOYSA-N 4-methylaminophenol sulfate Chemical compound OS(O)(=O)=O.CNC1=CC=C(O)C=C1.CNC1=CC=C(O)C=C1 ZVNPWFOVUDMGRP-UHFFFAOYSA-N 0.000 description 1
- NMZURKQNORVXSV-UHFFFAOYSA-N 6-methyl-2-phenylquinoline Chemical compound C1=CC2=CC(C)=CC=C2N=C1C1=CC=CC=C1 NMZURKQNORVXSV-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XBPCUCUWBYBCDP-UHFFFAOYSA-N Dicyclohexylamine Chemical class C1CCCCC1NC1CCCCC1 XBPCUCUWBYBCDP-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 1
- HLNMYBZPLZNJPZ-UHFFFAOYSA-N N-cyclohexylcyclohexanamine 7-hydroxy-8-[(4-phenyldiazenylphenyl)diazenyl]naphthalene-1,3-disulfonic acid Chemical compound C1CCC(CC1)NC1CCCCC1.Oc1ccc2cc(cc(c2c1N=Nc1ccc(cc1)N=Nc1ccccc1)S(O)(=O)=O)S(O)(=O)=O HLNMYBZPLZNJPZ-UHFFFAOYSA-N 0.000 description 1
- 229920000305 Nylon 6,10 Polymers 0.000 description 1
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- SJEYSFABYSGQBG-UHFFFAOYSA-M Patent blue Chemical class [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](CC)CC)C=C1 SJEYSFABYSGQBG-UHFFFAOYSA-M 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 244000181025 Rosa gallica Species 0.000 description 1
- 241000872198 Serjania polyphylla Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- ARNIZPSLPHFDED-UHFFFAOYSA-N [4-(dimethylamino)phenyl]-(4-methoxyphenyl)methanone Chemical compound C1=CC(OC)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 ARNIZPSLPHFDED-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- IYKJEILNJZQJPU-UHFFFAOYSA-N acetic acid;butanedioic acid Chemical compound CC(O)=O.OC(=O)CCC(O)=O IYKJEILNJZQJPU-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- SODJJEXAWOSSON-UHFFFAOYSA-N bis(2-hydroxy-4-methoxyphenyl)methanone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=C(OC)C=C1O SODJJEXAWOSSON-UHFFFAOYSA-N 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000001045 blue dye Substances 0.000 description 1
- 239000001055 blue pigment Substances 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- UQMRAFJOBWOFNS-UHFFFAOYSA-N butyl 2-(2,4-dichlorophenoxy)acetate Chemical compound CCCCOC(=O)COC1=CC=C(Cl)C=C1Cl UQMRAFJOBWOFNS-UHFFFAOYSA-N 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 229920006217 cellulose acetate butyrate Polymers 0.000 description 1
- 229920003086 cellulose ether Polymers 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- WBLIXGSTEMXDSM-UHFFFAOYSA-N chloromethane Chemical compound Cl[CH2] WBLIXGSTEMXDSM-UHFFFAOYSA-N 0.000 description 1
- 229920001688 coating polymer Polymers 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000000549 coloured material Substances 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 239000011928 denatured alcohol Substances 0.000 description 1
- 238000006193 diazotization reaction Methods 0.000 description 1
- CETPXUSIUICASQ-UHFFFAOYSA-N dichloromethane;2-ethoxyethanol Chemical compound ClCCl.CCOCCO CETPXUSIUICASQ-UHFFFAOYSA-N 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- MQRJBSHKWOFOGF-UHFFFAOYSA-L disodium;carbonate;hydrate Chemical compound O.[Na+].[Na+].[O-]C([O-])=O MQRJBSHKWOFOGF-UHFFFAOYSA-L 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- SEACYXSIPDVVMV-UHFFFAOYSA-L eosin Y Chemical compound [Na+].[Na+].[O-]C(=O)C1=CC=CC=C1C1=C2C=C(Br)C(=O)C(Br)=C2OC2=C(Br)C([O-])=C(Br)C=C21 SEACYXSIPDVVMV-UHFFFAOYSA-L 0.000 description 1
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- IAJNXBNRYMEYAZ-UHFFFAOYSA-N ethyl 2-cyano-3,3-diphenylprop-2-enoate Chemical compound C=1C=CC=CC=1C(=C(C#N)C(=O)OCC)C1=CC=CC=C1 IAJNXBNRYMEYAZ-UHFFFAOYSA-N 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- XLYMOEINVGRTEX-UHFFFAOYSA-N fumaric acid monoethyl ester Natural products CCOC(=O)C=CC(O)=O XLYMOEINVGRTEX-UHFFFAOYSA-N 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Substances C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- ZAKLKBFCSHJIRI-UHFFFAOYSA-N mucochloric acid Natural products OC1OC(=O)C(Cl)=C1Cl ZAKLKBFCSHJIRI-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- FMJSMJQBSVNSBF-UHFFFAOYSA-N octocrylene Chemical compound C=1C=CC=CC=1C(=C(C#N)C(=O)OCC(CC)CCCC)C1=CC=CC=C1 FMJSMJQBSVNSBF-UHFFFAOYSA-N 0.000 description 1
- UYDLBVPAAFVANX-UHFFFAOYSA-N octylphenoxy polyethoxyethanol Chemical compound CC(C)(C)CC(C)(C)C1=CC=C(OCCOCCOCCOCCO)C=C1 UYDLBVPAAFVANX-UHFFFAOYSA-N 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000001048 orange dye Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical class OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 239000003348 petrochemical agent Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920001281 polyalkylene Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- JEXVQSWXXUJEMA-UHFFFAOYSA-N pyrazol-3-one Chemical compound O=C1C=CN=N1 JEXVQSWXXUJEMA-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 229940081623 rose bengal Drugs 0.000 description 1
- 229930187593 rose bengal Natural products 0.000 description 1
- STRXNPAVPKGJQR-UHFFFAOYSA-N rose bengal A Natural products O1C(=O)C(C(=CC=C2Cl)Cl)=C2C21C1=CC(I)=C(O)C(I)=C1OC1=C(I)C(O)=C(I)C=C21 STRXNPAVPKGJQR-UHFFFAOYSA-N 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229940076133 sodium carbonate monohydrate Drugs 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Chemical group 0.000 description 1
- CXVGEDCSTKKODG-UHFFFAOYSA-N sulisobenzone Chemical compound C1=C(S(O)(=O)=O)C(OC)=CC(O)=C1C(=O)C1=CC=CC=C1 CXVGEDCSTKKODG-UHFFFAOYSA-N 0.000 description 1
- UJMBCXLDXJUMFB-GLCFPVLVSA-K tartrazine Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)C1=NN(C=2C=CC(=CC=2)S([O-])(=O)=O)C(=O)C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 UJMBCXLDXJUMFB-GLCFPVLVSA-K 0.000 description 1
- 229960000943 tartrazine Drugs 0.000 description 1
- 239000004149 tartrazine Substances 0.000 description 1
- 235000012756 tartrazine Nutrition 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 1
- 229920001959 vinylidene polymer Polymers 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F5/00—Screening processes; Screens therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Polymerisation Methods In General (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Materials For Photolithography (AREA)
Description
Die photopolymerisierbaren Materialien gemäß der Erfindung sind insofern sehr vielseitig, als sie als Lithomasken und als »Photomasken« verwendet werden können. Eine Maske, die sich zum Kontaktkopieren in der Lithographie eignet, läßt sich mit diesen Materialien leicht herstellen, indem beispielsweise das Material mit
4,4'-Bis(diäthylamino)benzophenon,
4-Methoxy-4'-dimethylaminobenzophenon,
2-Äthylanthrachinon, Phenanthrachinon und
andere aromatische Ketone, Benzoin,
Benzoinäther, z. B. Benzoinmethyläther,
Benzoinäthyläther und Benzoinphenyläther,
Methylbenzoin, Äthylbenzoin und ander Benzoine v.nd 2,4,5-Triarylimidazoldimere, z. B. das
2-(o-Clorophenyl)-4,5-diphenylimidazoldimere,
2-(o-Chlorphenyl)-4.5-(m-methoxyphenyl)-imidazoldimere,
2-(o-Methoxyphenyl)-4,5-diphenylimidazoldimere, 2-(p-Methoxyphenyl)-4.5-diphenylimidazoldimere.
und
4-Dodecyloxy-2-hydroxybenzophenon
Hydroxyphenylbenzotriazol
2(2'-Hydroxy-5'-methoxyphenyl)benzotriazo!
Resorcin-monobenzoat
2-Hydroxy-4-methoxybenzophenon
2-Hydroxy-4-methoxy-benzophenon-5-sulfonsäure
Äthyl-2-cyan-3,3-diphenylacrylat
Orange Color Index Nr. 24 (Solvent Orange)
Orange Color Index Nr. 20 (Solvent Orange)
Orange Color Index Nr. 21 (Solvent Orange)
Orange Color Index Nr. 12055
Orange Color Index Nr. 12055
Gelb Color Index Nr. 47 (Solvent Yellow)
Gelb Color Index Nr. 39 (Solvent Yellow)
Gelb Color Index Nr. 40 (Solvent Yellow)
Gelb Color Index Nr. 30 (Solvent Yellow)
Blau Color Index Nr. 37 (Solvent Blue)
Schwarz Color Index Nr. 17 (Solvent Black)
Gelb Color Index Nr. 77603 (Pigment)
Gelb Color Index Nr. 77600 (Pigment)
Dispergiertes Mangandioxyd
Gelb Color Index Nr. 71680 (Pigment)
Gelb Color Index Nr. 11741 (Pigment)
Gelb Color Index Nr. 12775 (Pigment)
Gelb Color Index Pigment Yellow Nr. 61
Kolloidaler Kohlenstoff wird als Pigment besonders bevorzugt.
als Lösungsmittel
methacrylat (90 Mol-%) und
Methacrylsäure (10 Mol-%),
Molekulargewichtsbereich
g
hohes Molekulargewicht,
Inherent Viscosity 0,9
5,5 '-tetraphenylbiimidazol
(Michlers Keton)
und Diacrylat,
Brechungsindex 1,4460 bei
25°C
* In der Schichtmasse
| 8,2 | 6,60 |
| 3,2 | 2,58 |
| 1,8 | 1,42 |
| 33,3 | 26,97 |
| 1,2 | 0,96 |
| 23,7 | 19,19 |
| 55 (Tauchzeit + Liegezeit) | (Punkt-Äquivalenz) |
| Sekunden | |
| 0 - S 80 120 |
92 84 73 63 54 |
90 45
| Element | Öffnung | Punkt |
| Geätzte Punktgröße | 60 | 10 |
| Atzdauer, Sekunden | 100 | 60 |
| Verminderung der Dichte | 6% | 20% |
| des Materials |
| Silberhalogenid-Vorlage | Reproduktion |
| mit harten Funkten, | auf Phötöpoiyrneren, |
| Punktgröße in % * | Punktgröße in % |
| 5 | 5 |
| 10 | 9 |
| 23 | 21 |
| 34 | 33 |
| 43 | 41 |
| 54 | 55 |
| 65 | 65 |
| 77 | 76 |
| 83 | 84 |
| 93 | 95 |
(Sekunden)
Punktgröße
| 5 | 6 | 29 | 41 | 91 |
| 10 | 9 | 34 | 48] | 94 |
| 20 | 9 | 35 | 50 \ A | 96 |
| 40 | 9 | 39 | 54J | 97 |
| 89 | 9 | 39 | 68 | 98 |
(Sekunden)
Punktgröße
20
| (obere Dichte | gering) | bei dieser | Belichtung |
| zu | 33 | ||
| 7 | 34 | 53] | 93 |
| 7 | 37 | 54 [ B | 94 |
| 7 | At\ HU |
~9) | 96 |
| -7 | 44 | 63 | 97 |
| 9 | 72 | 99+ |
| Bestandteile (von Beispiel 1) | Gewichtsprozent | Schichtträger in einer | 30 | aj |
| geschichtet, wobei eine | c) | |||
| Bindemittel (c) | 38,20 | getrocknete photopolymerisierbare Schicht mit einer | ||
| Photoinitiator (e) | 5,92 | Dicke von 10 &mgr;&pgr;&igr; und einer optischen Dichte von mehr | ||
| Photoinitiator (f) | 2,34 | als 3.0 erhalten wurde. | ||
| Weichmacher (g) | 1,30 | 35 | ||
| Monomeres (h) | 24,50 | |||
| Kettenüberträger (i) | 0,87 | d) | ||
| Orangefarbstoff (j) | 13,10 | |||
| (C.I-Solvent Black 17) | 13,8 | 40 | ||
| Diese Materialien wurden in | einem Methylenchlorid- | |||
| 2-Äthoxyäthanol-Gemisch (Volumenverhältnis 7 : 3) in | ||||
| einer solchen Menge gelöst, daß eine Beschichtungslö- | e) | |||
| sung mit 20% Feststoffen erhalten wurde. Diese Lösung | 0 | |||
| wurde auf einem polymeren | 45 | g) | ||
| Menge von 95 bis 100 mg/dm2 | ||||
| h) | ||||
| i) | ||||
| j) |
Lösungsmittel (b) von Beispiel 1 80 g
56% Äthylacrylat,
37% Methylmethacrylat und
7% Acrylsäure,
Säurezahl 76 bis 85 15,2 g
und Maieinsäureanhydrid,
mit Isopropylalkohol
teilweise verestert,
Molekulargewicht etwa 1700,
Säurezahl etwa 270 25,1 g
(CI. 42595) 4,0 g
Flourkohlenstoff, 10% ige Lösung in
CH2Cl, 0,3 g
| a) | Methylenchlond | 1 000 g |
| b) | ?-Athoxyäthanol | 100 g |
| c) | Polymethylmethacrylat, | |
| Molekulargewicht etwa 30 000 | 70 g | |
| d) | Polymethylmethacrylat, | |
| Molekulargewicht etwa 100 000 | 40 g | |
| e) | Photoinitiator (e) von Beispiel 1 | 15.6 g |
| f) | Photoinitiator (f) von Beispiel 1 | 6.3 g |
| g) | Triäthylenglykoldiacetat | 17 g |
| h) | Monomeres (h) von Beispiel 1 | 70 g |
| i) | Farbstoff (j) von Beispiel 1 | 37.2 g |
| j) | Tris(4-dia'thylamino-o-tolyl)- | |
| methan | 3,1 g | |
| k) | 4,4' ,4"-Methyliden-tris- | |
| (N,N-climethylanilin) | 0,63 g |
methacrylat und Gamma-Methacryloxypropyltrimethoxy-
silan (siehe US-PS 3 758 306)
| 363,0 | 17,96 |
| 41.4 | 29,69 |
| 15,8 | 6,21 |
| 26,2 | 2,46 |
| 5,5 | 0,94 |
| 2,2 | 14,30 |
| 0,83 | 28,36 |
| 12,6 | 0,08 |
| 25,0 | |
| 0,7 | |
Lösungsmittel (b)
Bindemittel (c)
Bindemittel (d)
Photoinitiator (e)
Photoinitiator (f)
Kettenüberträger (g)
Monomeres (h)
Farbstoff (i)
Oberflächenaktive Verbindung
(k)
Beispiel 8
| A | B | C | D | |
| CH1Q2 | 363 | 340,8 | 318 | 279,3 |
| CH3OH | 41 | 37,9 | 35,3 | 31 |
| Michlers Keton | 2,2 | 1.65 | 1.1 | 0,55 |
| Farbstoff | 25,0 | 20,0 | 15,0 | 6,25 |
| Optische Dichte | 4 | 3 | 2 | 1 |
| 300 bis 500 nm |
(Sekunden)
A B
| 40 | 118 | 120 | 117 | 120 |
| 45 | 114 | 119 | 118 | 120 |
| 50 | 112 | 114 | 112 | 120 |
| 55 | 109 | _ | 117 | 120 |
| 60 | 108 | 112 | 120 |
Teil A
h) Kolloidaler Kohlenstoff
Gew.-%
16,4
30.3
2\2
16,4
ursprünglichen Maske
55,4%
11 %
von Beispiel 4
von Beispiel 4
von Beispiel 4
von Beispiel 4
von Beispiel 4
von Beispiel 1
| Menge | in Gramm | 1.0 | 12 | 1.0 |
| Beispie 10 |
1 11 |
2,0 | 10.8 | 2.0 |
| 20.0 | 10.8 | 19 | ||
| 38,7 | 19 | - | ||
| 11,4 | - | - | ||
| 2.8 | - | |||
| 0,5 | ||||
| 2,3 |
10 11
| g) | Kolloidaler Kohlenstoff | 16,4 | 7,2 | - | 7,2 | 1,5 |
| h) | Monomeres (h) | 22,1 | 9,8 | 9,8 | ||
| von Beispiel 4 | ||||||
| i) | Phenanthrenchinon | - | 1,5 | - | ||
| j) | Benzoinmethyläther | - |
von Beispiel 4
von Beispiel 4
von Beispiel 4
von Beispiel 4
Methylmethacrylat und
etwa 50 000
25% Butylacrylat,
30% Acrylnitril und
15% Methacrylsäure
Nr.
Ätzen Ätzen
| 13 | 3,5 | 3,5 | 0,27 | 0,21 |
| 14 | 3,0 | 3,0 | 0,30 | 0,18 |
| Bestandteile von Beispiel 4 | Menge in | Gramm |
| Beispiel | ||
| 15 | 16 | |
| Lösungsmittel (a) | 81 | 81 |
| Lösungsmittel (b) | 9 | 9 |
| Bindemittel (c) | 1,58 | 1,58 |
| Bindemittel (d) | 2,62 | 2,62 |
| Photoinitiator (e) | 0,55 | 0,55 |
| Photoinitiator (f) | 0,22 | 0,22 |
| Kettenüberträger (g) | 0,08 | 0,08 |
| Monomeres (h) | 1,26 | 1,26 |
| Netzmittel (k) | 0,07 | 0,07 |
| Farbstoff A * | 0,9 | 0,9 |
| Farbstoff B * | 0,5 | _ |
| Farbstoff C * | 1,75 | 1,75 |
| Farbstoff D * | — | 0,5 |
| Wasser | 124 g |
| Polyvinylalkohol (zu 98 bis 99% | 200 g |
| verseift, niedrige Viskosität) | |
| Copolymerisat von | 24,4 g |
| Vinylpyrrolidon und Vinylacetat | 24,6 |
| (60 : 40, mittleres Molekulargewicht) | 24.6 |
| Äthylcellosolve | 24.6 g |
der Formel
Elektronenstrahl (SEM)
75 g Methylmethacrylat (66%)/Äthylacrylat
600 ml Mucochlorsäure, 2%ige wäßrige Lösung
1,4393
Gewicht nach der Verarbeitung
1 2
1,4339 1,4386
Drei Beschichtungslösungen, die jeweils die folgenden Bestandteile enthielten, wurden hergestellt:
| Komponenten von Beispiel 4 | Menge in Gramm |
| Lösungsmittel (a) | 81 |
| Lösungsmittel (b) | 4 |
| Photoinitiator (e) | 1,0 |
| Photoinitiator (f) | 0,1 |
| Bindemittel (c) | 4,1 |
| Bindemittel (d) | 6.6 |
| Monomeres (h) | 3,2 |
| Netzmittel (k) | 0,04 |
| UV-Absorber (2,2'-Dihydroxy- | 1,0 |
| 4-methoxybenzophenon) |
eines der folgenden Farbstoffe gegeben:
(CI Solvent Yellow 91)
(CI Solvent Blue 48)
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/037,947 US4229517A (en) | 1976-11-13 | 1979-05-10 | Dot-etchable photopolymerizable elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US63272675A | 1975-11-17 | 1975-11-17 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2651864A1 DE2651864A1 (de) | 1977-05-18 |
| DE2651864B2 DE2651864B2 (de) | 1980-02-07 |
| DE2651864C3 true DE2651864C3 (de) | 1987-09-10 |
Family
ID=24536688
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2660921A Expired DE2660921C3 (de) | 1975-11-17 | 1976-11-13 | Verfahren zur Herstellung von punktgeätzten Masken |
| DE2651864A Expired DE2651864C3 (de) | 1975-11-17 | 1976-11-13 | Photopolymerisierbares Aufzeichnungsmaterial |
| DE2660103A Expired DE2660103C3 (de) | 1975-11-17 | 1976-11-13 | Farbkorrektursystem für die Mehrfarbenbildreproduktion |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2660921A Expired DE2660921C3 (de) | 1975-11-17 | 1976-11-13 | Verfahren zur Herstellung von punktgeätzten Masken |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2660103A Expired DE2660103C3 (de) | 1975-11-17 | 1976-11-13 | Farbkorrektursystem für die Mehrfarbenbildreproduktion |
Country Status (8)
| Country | Link |
|---|---|
| JP (4) | JPS5262427A (de) |
| AU (1) | AU506292B2 (de) |
| BE (1) | BE848409A (de) |
| BR (1) | BR7607672A (de) |
| CA (1) | CA1079565A (de) |
| DE (3) | DE2660921C3 (de) |
| FR (1) | FR2331813A1 (de) |
| GB (1) | GB1548439A (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2660921C3 (de) * | 1975-11-17 | 1987-07-30 | E.I. Du Pont De Nemours And Co., Wilmington, Del. | Verfahren zur Herstellung von punktgeätzten Masken |
| US4311784A (en) | 1978-05-09 | 1982-01-19 | E. I. Du Pont De Nemours And Company | Multilayer photosensitive solvent-processable litho element |
| JPS55114370A (en) * | 1979-02-28 | 1980-09-03 | Fuji Photo Film Co Ltd | Treatment of plate |
| JPS5630129A (en) * | 1979-08-21 | 1981-03-26 | Agency Of Ind Science & Technol | Manufacture of photomask |
| DE3150637C2 (de) * | 1981-12-21 | 1983-11-10 | Du Pont de Nemours (Deutschland) GmbH, 4000 Düsseldorf | Ätzlösung zum Ätzen von Photopolymerfilmen und Verfahren zum Punktätzen |
| US4515877A (en) * | 1982-11-27 | 1985-05-07 | Basf Aktiengesellschaft | Image-recording materials and image-recording carried out using these to produce an optical mask |
| JPS59154442A (ja) * | 1983-02-22 | 1984-09-03 | Oji Paper Co Ltd | 画像形成用感光性フイルム |
| JPS62231245A (ja) * | 1986-03-31 | 1987-10-09 | Nippon Zeon Co Ltd | 感光性フレキソ版 |
| JPH01282543A (ja) * | 1988-05-09 | 1989-11-14 | Fuji Photo Film Co Ltd | 画像形成材料 |
| US5372437A (en) * | 1992-04-24 | 1994-12-13 | Citizen Watch Co., Ltd. | Print head of wire-dot printer and production method thereof |
| JP2003107697A (ja) * | 2001-09-28 | 2003-04-09 | Fuji Photo Film Co Ltd | 感光性転写材料、フォトマスク材料、フォトマスクおよびフォトマスクの製造方法 |
| JP5203575B2 (ja) * | 2005-05-04 | 2013-06-05 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | コーティング組成物 |
| JP4820640B2 (ja) * | 2005-12-20 | 2011-11-24 | 富士フイルム株式会社 | 平版印刷版の作製方法 |
| JP4979368B2 (ja) * | 2005-12-27 | 2012-07-18 | 関西ペイント株式会社 | 活性エネルギー線硬化型樹脂組成物及びレジストパターン形成方法 |
| TWI763186B (zh) * | 2015-03-30 | 2022-05-01 | 日商富士軟片股份有限公司 | 著色感光性組成物、硬化膜、圖案形成方法、帶遮光膜的紅外線截止濾光片、固體攝像元件、圖像顯示裝置及紅外感測器 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE525225A (de) * | 1951-08-20 | |||
| US3149975A (en) * | 1962-07-06 | 1964-09-22 | Du Pont | Photopolymerizable compositions and elements |
| US3380831A (en) * | 1964-05-26 | 1968-04-30 | Du Pont | Photopolymerizable compositions and elements |
| US3353955A (en) * | 1964-06-16 | 1967-11-21 | Du Pont | Stratum transfer process based on adhesive properties of photopolymerizable layer |
| US3469982A (en) * | 1968-09-11 | 1969-09-30 | Jack Richard Celeste | Process for making photoresists |
| US3698904A (en) * | 1969-07-23 | 1972-10-17 | Asahi Chemical Ind | Composition for developing photopolymerizable lithographic plate elements comprising a developer base agent,an ink-receptivity-affording agent and a desensitizer |
| BE759041A (fr) * | 1969-11-18 | 1971-05-17 | Du Pont | Compositions photopolymerisables contenant des aminophenylcetones et des adjuvants |
| CA993709A (en) * | 1971-01-21 | 1976-07-27 | Leo Roos | Composite, mask-forming photohardenable elements |
| BE787932A (fr) * | 1971-09-13 | 1973-02-26 | Bristol Myers Co | Produits tels que des tampons, pour nettoyage ou d'autres usages et compositions liquides pour preparer ces produits |
| JPS4877438A (de) * | 1972-01-19 | 1973-10-18 | ||
| JPS4893337A (de) * | 1972-03-11 | 1973-12-03 | ||
| BE788560A (fr) * | 1972-06-09 | 1973-03-08 | Du Pont | Protection contre le halo dans la formation d'images dans des photopolymeres en couches multiples |
| JPS51139041A (en) * | 1975-05-23 | 1976-12-01 | Kayaba Industry Co Ltd | Disk brake for eccentric retention suspension mechanism |
| DE2660921C3 (de) * | 1975-11-17 | 1987-07-30 | E.I. Du Pont De Nemours And Co., Wilmington, Del. | Verfahren zur Herstellung von punktgeätzten Masken |
-
1976
- 1976-11-13 DE DE2660921A patent/DE2660921C3/de not_active Expired
- 1976-11-13 DE DE2651864A patent/DE2651864C3/de not_active Expired
- 1976-11-13 DE DE2660103A patent/DE2660103C3/de not_active Expired
- 1976-11-16 AU AU19666/76A patent/AU506292B2/en not_active Expired
- 1976-11-17 JP JP51139041A patent/JPS5262427A/ja active Granted
- 1976-11-17 FR FR7634572A patent/FR2331813A1/fr active Granted
- 1976-11-17 BR BR7607672A patent/BR7607672A/pt unknown
- 1976-11-17 GB GB47954/76A patent/GB1548439A/en not_active Expired
- 1976-11-17 CA CA265,899A patent/CA1079565A/en not_active Expired
- 1976-11-17 BE BE172416A patent/BE848409A/xx not_active IP Right Cessation
-
1980
- 1980-06-06 JP JP7653980A patent/JPS5638046A/ja active Pending
- 1980-06-06 JP JP7653880A patent/JPS5638047A/ja active Pending
-
1981
- 1981-07-10 JP JP56108067A patent/JPS5762048A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2651864A1 (de) | 1977-05-18 |
| JPS6132661B2 (de) | 1986-07-28 |
| AU506292B2 (en) | 1979-12-20 |
| DE2651864B2 (de) | 1980-02-07 |
| DE2660921A1 (de) | 1984-07-19 |
| JPS5638046A (en) | 1981-04-13 |
| AU1966676A (en) | 1978-05-25 |
| FR2331813A1 (fr) | 1977-06-10 |
| FR2331813B1 (de) | 1981-10-02 |
| DE2660921C3 (de) | 1987-07-30 |
| DE2660103C3 (de) | 1987-10-22 |
| JPS5638047A (en) | 1981-04-13 |
| GB1548439A (en) | 1979-07-18 |
| JPS5262427A (en) | 1977-05-23 |
| JPS5722372B2 (de) | 1982-05-12 |
| CA1079565A (en) | 1980-06-17 |
| BR7607672A (pt) | 1977-09-27 |
| BE848409A (fr) | 1977-05-17 |
| DE2660103B1 (de) | 1981-02-12 |
| JPS5762048A (en) | 1982-04-14 |
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