DE202007015168U1 - Device for the contamination-free treatment of shock-sensitive glass plates in clean rooms - Google Patents

Abstract

Device for contamination-free, precisely defined, horizontal alignment and subsequent conversion of thin, shock-sensitive crystalline plates, in particular glass plates (11), in a defined vertical position
with the following features:
a) a glass plate (9) is transported via rollers (2) through a lock from a clean room to a clean room, wherein the rollers (2) are driven in groups or individually via bevel gears by a drive source,
b) in a clean dream, the glass plate (9) is conveyed over rollers (2) to an alignment unit,
c) for aligning the glass plate (9) is lifted from below by the space between the rollers (2) a lifting frame (8) with a resting Ausrichtrahmen (5), wherein the Ausrichtrahmen (5) with this rotatably articulated cross braces (4) having support elements which penetrate the free space between the rollers (2), project beyond the support level of the rollers (2) and carry the glass plate (9),
d) the glass plate (9) is powered by two drives that can be controlled individually ...

Description

The Processing of crystalline structures, in particular glass plates, in clean rooms was initially required in semiconductor manufacturing technology. In the course of time, among others, the photovoltaic and the production of TFT screens as significant application areas for this Production technology out.

Customized Enable solar modules the perfect integration into building grid and profiles. semi-transparent Solar cells but also opaque solar cells with transparent areas let photovoltaic glazing appear flooded with light. The Take over solar cells often the desired Effect of sun and glare protection.

The Production of such photovoltaic systems requires working conditions especially in the production of integrated electronic Circuits usual are. These so-called clean room conditions, however, contribute the production of photovoltaic systems in addition the handling of large surface shock sensitive glass plates required.

The Production and further processing shock-sensitive plates is also in the production of flat screens of larger design and in large quantities required. Modern flat screens are increasingly replacing the old tube monitors and are getting cheaper and cheaper.

she based on the TFT / LCD technology. LCD (Liquid Cristal Display = Liquid crystal display) stands for the use of liquid crystals in the individual pixels of the screen and TFT stands here for "Thin Film Transistor". The TFT, s are the smallest transistor elements, which the alignment of the liquid crystals and thus their translucency Taxes.

One Flat screen display consists of numerous pixels. Each pixel in turn consists of 3 LCD cells (sub-pixels), respectively the colors red, green and blue. A 15-inch tall Screen (measured diagonally) contains about 800,000 pixels or about 2.4 million LCD cells.

To understand how it works:
A liquid crystal cell (LCD cell) works much like a Polaroid sunglasses. If you hold two polaroid glasses on top of each other and start to turn them against each other, you will see less and less and then nothing at all. This effect is due to the fact that Polaroid glass is only permeable to light waves that vibrate in a certain plane. If two such glasses are held one above the other and rotated by 90 ° to each other, so some of the light can still pass through the first glass, but not through the second, because this is now transverse to the incoming light waves and filters them out.

A LCD cell works on the same principle. it consists of two against each other rotated by 90 ° Polaroid glasses, by the ones stated above so no light can get through. Located between these two polaroid lenses a layer of liquid crystals, which is the natural one Property has to turn the vibration plane of light. These Liquid crystal layer is straight so thick that the light that passes through the first polaroid glass, turned back 90 ° and thus can get through the second polaroid glass, So for the viewer becomes visible.

Become the liquid crystal molecules now through the application of an electrical voltage from their natural Turned off, less light passes through the cell and the corresponding pixel becomes dark. The corresponding voltage will generated by a TFT element that belongs to each LCD cell. The Light for the LCD display is created in the back of the screen housing small fluorescent tubes, as they are on a larger scale Room lighting can be used.

There every pixel 3 color filters for the colors red, green and blue may have over the control of permeability This filter every pixel a desired color mixture or a desired color accept.

For standard office applications Flat screens have an excellent sharpness and have sufficient Color quality. Ergonomically, too, TFTs have a lot to offer: less space required, a power consumption of only one third of a CRT monitor and a much lower radiation emission.

For the production TFT screens are, as is common in microelectronics, so called clean rooms required. This is necessary because of the low Size of the conductive Structures during In the manufacturing process, even small-size particles line breaks can cause. In the case of manufacturing a TFT screen would have such a line break the failure of a pixel result.

A clean room, or a clean dream, is a room in which the concentration of airborne particles is regulated. He is so constructed and will be like that that the number of particles introduced into the room or created and deposited in the room is as small as possible and that other parameters such as temperature, humidity or air pressure are regulated as required.

On the one hand At the moment TFT screens are getting cheaper, on the other hand There is a growing demand for giant screens dimensions from. All the more so as such screens on the one hand very easily at major events can be used and on the other hand by the modern production technology in affordable price ranges.

The Production of large screens However, especially in clean rooms requires special machines for Handling of the required large-area thin glass plates.

usable are for this purpose primarily multi-axis industrial robots.

The Application of various designs of multi-axis industrial robots in the production technology of the most diverse Products are expected to be state of the art.

Such Industrial robots are in large halls mostly used for transporting unwieldy and heavy loads, can but also used profitably in the production of smaller machine parts become. In all cases it depends on the reproducible precision of the movements of the individual entry procedures, Transport movements and settling operations.

Under which circumstances these movements take place here is unimportant in many cases. That's how it works usually no matter what noise causes such a movement, or with such a movement Dust movement or a more or less large exit of lubricant is connected. Also an inevitable abrasion moving and a friction causing machine parts is usually irrelevant.

All different are those natural ones Concomitants when working in contaminated Environment, such as food processing Industry, in the pharmaceutical industry or just in the production of semiconductors in clean rooms.

So is out of the EP 1 541 296 A1 a handling device, such as an industrial robot for use in contaminated environment known with a number of acted upon by a flushing medium rinsing in the field of drive units of the manipulator. In such a device, the problem to be solved is to further develop the device in such a way that a secure usability of the handling device in a contaminated environment in a structurally simple and thus in particular cost-effective manner is possible.

Is solved this task in that a plurality of groups of drive units each a separate sink is assigned (claim 1). The environment in such a Industrial robot is to be used against a normal one Environment more sensitive to contamination and therefore also provides higher Requirements for the structural design, but such special requirements are not to be compared with the conditions as in clean rooms Are regulation.

apart there are big ones thin glass plates, as for the production big TFT screens are used by their crystalline structure and at the same time relatively large Mass extremely sensitive to the slightest impact. An industrial robot is therefore also due to the lack of sensitivity and for such cases, lack of positioning accuracy for handling large thin glass plates in clean rooms not suitable.

Special Attention requires the implementation under clean-room conditions big impact sensitive Glass plates from the horizontal orientation to a vertical orientation.

One another aspect in the maintenance of clean-room conditions, Especially in the production of costly products is the risk of contamination through the human. An unintentional sneeze can this one destroy entire production unit. Likewise, such a system requires increased reliability. Because the cost of purchase and the operation of a suitably designed industrial robot are high, is also the cheap Price of such a facility important.

Just when handling large glass plates by an industrial robot It can be observed that such large areas are affected by the movement Swinging tend. This can be partly due to the only in a few places adhering suction and on the other by the accelerated movements such robot. In such vibrational phenomena is the additional Risk of glass breakage.

The device according to the invention is therefore the object of the implementation large thin glass plates under clean-room conditions to ensure a manufacturing process, or a supply to a specific manufacturing process which is controlled without the access of people, but controlled by people outside the production. The corresponding device must be reliable and inexpensive to manufacture. The movements of the glass plates must exclude unwanted vibrations.

These The object is achieved with a device according to claim 1 or 2.

The inventive device will be closer in the following described.

It show in detail:

1 : the spatial representation of a roller conveyor

2 : the representation of the roller drive

3 : the top view of the roller conveyor and the alignment unit

4 : the spatial representation of the roller conveyor and the conversion unit

5 : the spatial representation of the roller conveyor, the alignment unit and the conversion unit

6 : the spatial representation of the conversion unit and the storage device

For clean rooms, like They are also used in microelectronics, there are several hierarchical areas with corresponding cleanroom class. So surrounds the clean dream (class 10 and better), in which it handles substrates is a separate area with the required equipment for coating and structuring. needed Pumps for the Vacuum technology is usually located in an underlying floor.

Of the Reinstraum access is usually via a Result of various cleanroom areas with falling cleanroom class. Between these areas usually a change of clothes is required. To prevent contamination of objects, those with the floor in touch (e.g., shoe soles) to minimize, there are special ones at the respective entrances sticky floor mats. Access to the cleanroom itself is additionally followed by personnel and material locks, in turn, strong air currents and filter systems upset and suck up existing particles, so that no extra Pollution from outside is registered.

Materials, in cleanrooms must be used over abrasion resistant surfaces feature. Set up plants and devices allowed to the laminar air flow disturb only minimal. A clean room is usually subjected to overpressure (overpressure ventilation).

The glass plates used in the clean room ( 9 ) are cleaned in one of the previous rooms and packed in several protective covers.

These protective covers are then according to the respective processing of the glass plates ( 9 ) and according to the required clean room conditions, or clean room conditions, again removed.

The access of the glass plates ( 9 ) to the space in which the alignment and positioning according to the invention takes place via a lock through which a roller conveyor leads.

Such a roller conveyor consists of a series of parallel rollers ( 2 ) as in the 1 are shown. Every role ( 2 ) via its own bevel gear and a, common to all roles, drive ( 3 ) operated, as from the 1 can be seen. The roller conveyor can be mounted on a base plate ( 1 ) be mounted.

A detailed representation of such a drive is in 2 shown.

Here it can be seen that an elongated drive motor drives a smaller bevel gear on a central shaft with a forward angle gearbox via a large bevel gear. This central shaft is mounted several times and carries in the area of each roll ( 2 ) a smaller bevel gear directly on the respective roller ( 2 ) seated further bevel gear drives. This construction method is inexpensive and enables reliable long-term operation. The use of bevel gear drives ensures a high degree of operational reliability while at the same time producing cost-effectively.

The bearings of these rollers ( 2 ) are designed according to the required clean room conditions.

But such a roller conveyor can also consist of a series of roles, each with its own electric motor drive and a separate control or be provided with bevel gears, which are each driven in groups. Roller conveyors are always used when necessary, one or more glass plates ( 2 ) to the next destination.

If the respective glass plate ( 2 ) then in the area of the alignment unit, as in the 3 its position is detected by sensors and the glass plate ( 2 ) brought to a halt in a provisional position. In the 3 is such a process seen from above, the glass plate is omitted for clarity.

When Sensors can According to the respective requirements for a person skilled in the art, the most diverse Types and arrangements of sensors of various types for Use come.

For the actual alignment of a glass plate ( 2 ) is a lifting frame (below the rollers) ( 8th ) raised an alignment frame ( 5 ), this in turn cross-bracing ( 4 ) carries with support elements which penetrate the existing between the rollers clearance and surmount the support level of the rollers.

Lifting the lifting frame ( 8th ) via its own drive via a lever linkage and the shortening of a threaded rod causes the deflection of lifting elements. However, other possibilities known to those skilled in the art are also applicable which have a lifting effect and are compatible with the conditions in the clean room.

The alignment frame ( 5 ) carries on rotatably mounted cross braces ( 4 ) fixed support elements which have an impression-free surface and the glass plate ( 2 ) at the bottom and carry them in this way.

The alignment frame ( 5 ) is on the one hand on shift pads on individually by drives ( 6 ) slidably mounted controllable sliding elements, whereby the two longitudinal trusses of the alignment frame ( 5 ), which with the rotatably mounted cross braces ( 4 ) are hingedly connected, can be positioned differently.

This ensures that not only the alignment frame ( 5 ) parallel shift and thus fine-tune, but can also be adjusted obliquely like a parallelogram and the alignment frame ( 5 ) lying on the support elements glass plate ( 2 ) into the desired position.

A check of the exact positioning of the glass plate ( 11 ) can be done via line laser or markers whose position is monitored by laser and / or sensors occur.

Thus, a glass plate ( 2 ) with the greatest possible accuracy and feed under clean room conditions for further processing.

This happens because after the process of the exact, monitored by sensors, aligning the glass plate ( 2 ) of the lifting frame ( 8th ) is lowered so far that the glass plate ( 2 ) rests again on the rollers.

The in the 3 shown gaps between the rollers ( 2 ) on the one hand and the cross braces ( 4 ), whose impression elements between the rollers ( 2 ) and can move between them, can each be adjusted according to the expected displacement movements.

In practice, however, slight alignment movements of a glass plate ( 9 ), so that for the orientation of a typically to be aligned glass plate ( 9 ) the corresponding spaces between the rollers ( 2 ) suffice.

In the 4 is a perspective view of a glass plate ( 9 ) is shown on a transfer device according to the invention.

In this 4 can be recognized as the roles ( 2 ) on which the glass plates ( 2 ) are brought horizontally to the transfer device, a glass plate ( 2 ) in the area of the transverse spar ( 13 ) the translator fork and the perpendicularly connected suction head support bars ( 14 ). The suction head support bars ( 14 ) run essentially parallel to the rollers ( 2 ). A check of the exact positioning of the glass plate ( 9 ) can be carried out via line lasers, not shown separately, or via markings whose position is monitored by means of lasers and / or sensors.

Thus, a glass plate ( 9 ) with the greatest possible accuracy and perform under further cleanroom conditions for further processing.

Next is the 4 it can be seen that the transfer device with a mounting plate ( 1 ) is anchored to the ground. The crossbar ( 13 ) of the transfer fork is via a fastener, and an upper deflection gear ( 11 ) And thus, via a, having a certain distance, cross-beam, connected lower deflection gear ( 10 ) on the mounting plate ( 1 ) stored. The upper deflection gear ( 11 ) is from the upper servo drive ( 17 ) and the lower deflection gear ( 10 ) from the lower servo drive ( 16 ).

At the crossbar ( 13 ) of the transfer fork are exemplified four Saugkopfträger-spars ( 14 ) each with five suction cups ( 15 ).

The suction cups ( 15 ) are sucked before the process of transfer to the relevant glass plate ( 9 ) and connect them to the transfer device.

The flexible duct ( 12 ) is encapsulated emission-free and also has its own extraction system.

In the 5 a combination of an alignment device according to the invention and a transfer device according to the invention is shown in a drawing.

In the perspective view of 6 can be recognized as the glass plate ( 9 ), from the suction cups ( 15 ), in a vertical position in the region of the storage device ( 18 ) was pivoted.

About the lower deflection gear ( 10 ) takes place here essentially the actual pivoting process from the horizontal position to the required vertical position. Through the upper deflection gear ( 11 ) can then be a further fine adjustment of a glass plate ( 9 ) in both horizontal and vertical directions.

In the storage device ( 18 ) leaves a glass plate ( 11 ) then to the. Process of coating according to the actual purpose.

In order to adapt to different conditions with respect to the dimensions of the glass plates to be converted and with respect to differently dimensioned depositing devices, it may be provided that the lower deflection gear ( 10 ) and the upper deflection gear ( 11 ) connecting, cross-beam, in such a way that the distance between these two deflection gear ( 10 . 11 ) can be changed by motor. The current positions of the relevant plant components can be detected by control technology on a screen by sensors for checking purposes. Comparative acquisition of positions of plant components and position data of glass plates ( 9 ) enable accurate target-to-actual comparisons and precise positioning results.

The corresponding parts of the system are for the sake of clarity not drawn.

A suction head ( 15 ) consists essentially of a spacer bushing which carries at its lower end a screw connection adapted to the clean-room conditions, with which it can be connected to the suction head carrier beam (FIG. 14 ) connected is. Inside a suction head ( 16 ), a flow sensor is arranged which detects the air flow flowing through a suction element and forwards the measured values determined by it to the control of the conversion device.

One Such aspirator consists essentially of a special High performance material known under the trade name PEEK.

This plastic is also preferred for other parts which are exposed to abrasion, such as the support of the rollers ( 2 ).

The inventive device is not only cheaper to realize as a corresponding system with an industrial robot and guaranteed a high degree of contamination-free, it also meets with regard to operational safety and reliability high requirements.

Just in the treatment of large area and thinner Panels, as they will in the future in the production of large screens and solar systems are used is by the device according to the invention a substantial avoidance of unwanted vibration processes the movements a risk of breakage largely reduced.

A gentle process the delicate glass plates when moving into the storage device ( 12 ) is achieved by the glass plate ( 9 ) first of the storage device ( 12 ) via the deflection gear ( 11 . 12 ), and then. After the decay of any vibration processes, a fine adjustment is carried out by the glass plate is slowly brought into the required end position for further processing.

Likewise, the device according to the invention can be used to the glass plates ( 11 ) after the coating in the vertical position again via a device for transfer from the storage device ( 12 ) in a horizontal position and incorporate on a roller conveyor the further production process.

In this context, it should be noted that the metal storage device ( 12 ) while processing the glass plates ( 11 ) is exposed to significant temperature increases, the distortion of this device and thus a position shift of the glass plate ( 11 ). However, the laws according to which such a shift takes place are physically known and thus mathematically detectable. Therefore, here a measurement of the temperature of the storage device ( 12 ) in so far as remedy the resulting change in the positioning of the glass plate ( 11 ) can be considered as a known quantity in the process of processing.

The interactive control of the movement elements used and sensors requires a special control program.

1

Base plate, mounting plate

2

role

3

drive on the roller conveyor

4

Crossbars, Pick-up elements

5

orienting

6

drive the sliding elements

7

swivel joints of the alignment frame

8th

lifting frame for alignment unit

9

glass plate

 10

lower deflecting

 11

upper deflecting

 12

secure, flexible duct

 13

transverse spar the transfer fork

 14

Suction head-Holm

 15

suction head

 16

lower servo drive

 17

upper servo drive

 18

storage device

Claims (12)

Device for the contamination-free, precisely defined, horizontal alignment and subsequent transfer of thin, shock-sensitive crystalline plates, in particular glass plates ( 11 ), in a defined vertical position with the following features: a) a glass plate ( 9 ) is about roles ( 2 ) transported by a lock from a clean room in a clean dream, the roles ( 2 ) are driven in groups or individually via bevel gears by a drive source, b) in the clean dream, the glass plate ( 9 ) about roles ( 2 ) on an alignment unit, c) for aligning the glass plate ( 9 ) from below through the space between the rollers ( 2 ) a lifting frame ( 8th ) with a resting alignment frame ( 5 ), wherein the alignment frame ( 5 ) with this pivotally articulated cross braces ( 4 ) having support elements that the clearance between the rollers ( 2 ), the overlay level of the rolls ( 2 ) and the glass plate ( 9 ), d) the glass plate ( 9 ) is controlled by two actuators ( 6 ), and in each case in swivel joints ( 7 ) rotating, sliding elements positioned bumpless, e) after the positioning process, the lifting frame ( 8th ) lowered so far that the glass plate ( 9 ) rests again on the rollers. f) the glass plate ( 9 ) is supported by a transverse bar (below) 13 ) a transfer fork with perpendicular to the cross member ( 13 ) attached suction head support bars ( 14 ) and attached thereto suction heads ( 15 ), g) the suction cups ( 15 ) are the bottom of the glass plate ( 9 ) and their intake elements by intake air with the glass plate ( 9 h) the glass plate thus connected to the transfer fork ( 9 ) is pivoted by the transfer fork in a vertical position, i) the glass plate ( 11 ) is adjusted after a fine adjustment in the storage device ( 12 ) j) the suction cups ( 8th ) are removed from the glass plate ( 11 ) solved. Device for the contamination-free, precisely defined, horizontal alignment and subsequent transfer of thin, shock-sensitive crystalline plates, in particular glass plates ( 11 ), in a defined vertical position with the following features: a) a glass plate ( 9 ) is about roles ( 2 ) transported by a lock from a clean room in a clean dream, the roles ( 2 ) are driven in groups or individually via bevel gears by a drive source, b) in the clean dream, the glass plate ( 9 ) about roles ( 2 ) on an alignment unit, c) for aligning the glass plate ( 9 ) from below through the space between the rollers ( 2 ) a lifting frame ( 8th ) with a resting alignment frame ( 5 ), wherein the alignment frame ( 5 ) with this pivotally articulated cross braces ( 4 ) having support elements that the clearance between the rollers ( 2 ), the overlay level of the rolls ( 2 ) and the glass plate ( 9 ), d) the glass plate ( 9 ) is controlled by two actuators ( 6 ), and in each case in swivel joints ( 7 ) rotating, sliding elements positioned bumpless, e) after the positioning process, the lifting frame ( 8th ) lowered so far that the glass plate ( 9 ) rests again on the rollers. f) the glass plate ( 9 ) is about roles ( 2 ) transported to a conversion unit and stopped there, g) the glass plate ( 9 ) is supported by a transverse bar (below) 13 ) a transfer fork with perpendicular to the cross member ( 13 ) attached suction head support bars ( 14 ) and attached thereto suction heads ( 15 ), h) the suction cups ( 15 ) are the bottom of the glass plate ( 9 ) and their intake elements by intake air with the glass plate ( 9 i) the glass plate thus connected to the transfer fork ( 9 ) is pivoted by the transfer fork in a vertical position, j) the glass plate ( 11 ) is adjusted after a fine adjustment in the storage device ( 12 ) k) the suction cups ( 8th ) are removed from the glass plate ( 11 ) solved. Device according to one of claims 1 or 2, characterized that the drives of the roller conveyor are designed as bevel gear drives. Device according to one of claims 1 or 2, characterized in that the rollers ( 2 ) are each provided with its own servo drive. Device according to one of the preceding claims, characterized in that the lifting of the lifting frame ( 8th ) via a drive, which causes the deflection of lifting elements via a lever linkage and the shortening of a threaded rod. Device according to one of the preceding claims, characterized in that the conversion of the transfer fork via two, connected by a cross-member, deflection gear ( 3 . 4 ) he follows. Device according to one of the preceding claims, characterized in that the support elements on the cross braces ( 4 ), as well as the suction of the suction cups ( 15 ) are made of PEEK plastic. Device according to claim 6, characterized in that that the traverse in its length variable is. Device according to one of the preceding claims, characterized characterized in that the mechanically moving parts emission-free encapsulated and made of abrasion resistant material. Device according to one of the preceding claims, characterized in that the monitoring of the positioning of the glass plate ( 11 ) via laser and / or sensors. Device according to one of the preceding claims, characterized in that a flexible duct ( 12 ) has its own extraction system. Apparatus according to claim 8, characterized in that the distance of the two deflection gear ( 3 . 4 ) can be detected by sensors and controlled by a motor can be changed.