DE102009030145A1 - Table i.e. vacuum clamping table, for fitting plate shaped-article on surface, has stroke elements moving upward during raising of elements from slots such that plate-shaped article lying on table surface is supported by elements - Google Patents

Abstract

The table (1) has slots (2a-2d) opened at a table surface and extending at a distance to each other along direction through the table. A set of stroke elements i.e. bars (7a-7d), is provided in a lowered position below a level defined by the surface. The elements in the lowered position are arranged in one of the slots. A stroke device is designed to bring the elements from the lowered position into a raised position. The elements move upward during total or partial raising of the elements from the slots such that a plate-shaped article lying on the table surface is supported by the elements. An independent claim is also included for a method for managing a plate-shaped article on a table.

Description

The The invention relates to a table, in particular a vacuum clamping table, for laying on plate-shaped objects on a surface formed by the table (hereinafter: Table surface). The invention further relates to a method for Operate such a table.

Thin glass plates are widely used for the production of LCD (Liquid Crystal Display), TFT (Thin Film Transistor), OLED (Organic Light Emitting Diode), PDB (Plasma Display Panel) or other displays. Frequently, a layer of indium tin oxide (ITO) is applied to the plate to obtain an electrically conductive layer. Methods for applying the ITO layer are z. B. off US 2002/0016075 A1 known.

The ITO layer or another applied to the plate-shaped object layer is z. B. can be structured in a certain predetermined manner. For this purpose, it is customary to use laser radiation, z. B. from an ELA process (Excimer Laser Annealing). The laser radiation converts the amorphous layer into a crystalline layer. The conversion, however, takes place only in accordance with the desired structure in subregions of the layer. Subsequently, the remaining amorphous layer material can be removed by etching, for example. Details of this procedure are also the US 2002/0016075 A1 removable.

Like for example also in the US 2002/0016075 A1 or in the summary of JP 2006140230 is described, the glass plate is held by a vacuum chuck (ie sucked onto the surface of the vacuum chuck table), while the laser radiation is irradiated to the opposite side of the glass plate or on the surface layer arranged there. In order to position the glass plate in a suitable manner, the vacuum clamping table is movable.

Become very thin plate-shaped objects, like the mentioned glass plates for screens, placed on a table surface (eg at - as at a preferred embodiment of the invention - the mentioned layer on the glass plate, or to structure the layer), or again from the table surface removed, the objects must be full surface or at least at a variety of places on its underside get supported. Otherwise, it will deform and in the case of stronger deformations, even to break the plate-shaped one Object. In particular, the optionally applied Layer very sensitive to strong deformation and contact.

Under a plate-shaped object is in particular a Understood object that is in the mechanically relaxed state (which is taken when no external forces and weight forces on the object or if act all these forces are compensated) in one plane, d. H. where both the plate surface on the one Side (eg the underside) as well as the parallel plate surface on the other side (eg the top) in the relaxed state each lie in a plane. Although z. Glass plates, the screen surfaces form, later curved be. However, when manufacturing the plate, it is common to treat them in a relaxed state. However, the invention is which will be described below, not on table surfaces limited, which extend in a plane. Much more could z. As for screen surfaces in the final state desired curved shape in the same Way, d. H. at the same curvature, at the table surface to be available.

The Placing the plate-shaped object leads depending on the design of the table (eg as a vacuum clamping table) in many cases cause the plate-shaped object rests on the table surface while doing the object the material that forms the table surface touches. For vacuum clamping tables and other tables in which the plate-shaped Object touches the table surface, the Subject by its own weight and / or by the vacuum in the Forced form defined by the table surface is. However, there are also known tables, the z. B. by from the Table surface escaping compressed air a gas cushion form so that the laid on the table surface plate-shaped object the material that the table surface forms, not touched. Rather, it is then between the table surface and the placed plate-shaped Subject the gas cushion. Also for such tables is the Invention suitable.

In particular, the table may be a part of an assembly for treating the plate-shaped objects placed on the table, the treatment being performed from the top of the respective plate-shaped article. Examples of such treatment have already been mentioned. The treatment creates a delicate structure on the upwardly facing surface of the plate-shaped article, which structure may alternatively or additionally be disposed on the upper surface, but may extend into the material of the plate-shaped article. Under such a structure is also understood (but not required) that z. B. by vapor deposition in vacuum additional material on the upper surface of the plate-shaped article of being applied.

Around the plate-shaped object from the table surface to remove, for. B. to further treat it in a further manufacturing step, is It is known to the Applicant, in the table a variety of pen-shaped To integrate elements, with the pin-shaped elements each individually, driven by a lifting device, from a lower end position can be raised to an upper end position. In the lower end position is the upper end of the pin-shaped Elements below the level of the table surface. in the raised state, d. H. in the upper end position, is located the upper end of the pin-shaped element clearly above the level of the table surface. Now, for example. B. a fork-shaped Carrying device between the table surface and the of the pin-shaped elements raised and carried plate-shaped object can be brought and the Carrying the plate-shaped object of the lift off pin-shaped elements and to the desired transport new place.

adversely on the pin-shaped elements is the fact that the From them executed lifting movement of the strokes the other pins are controlled independently. Joins the controller an error, z. B. one or z. B. several the pin-shaped elements not simultaneously with the others pin-shaped elements or not in the same way (eg in particular not with the same stroke) raised. Depending on Sensitivity of the plate-shaped article can this or the structure on its top already in case of malfunction irreversibly deformed by a single pin-shaped element, damaged or destroyed.

It there is a need for larger screen areas as previously. It is also expected that in Future even larger screen areas be realized, as it is the case today. For example, should in the near future plate-shaped glass substrates with a Area of 2.3 m × 2.7 m for screen production be used. At the same time, the ratio of plate area decreases and thickness of the plate continues to increase, whereby the handling of the plate is further deteriorated. In particular, it can be even easier too irreversible deformation or breakage of the plate. When solving with pin-shaped elements even more such elements needed to the plate without Wear damage.

It It is an object of the present invention to provide a table of the foregoing mentioned type and a method for operating such a table indicate the lifting of the plate-shaped object or a plurality of plate-shaped objects allow on the table surface, with the Disadvantages of the described arrangement with a variety of pin-shaped Elements should be avoided.

According to one Basic ideas of the present invention are in the table surface at least two slots and is in the slots at least each arranged an elongated lifting element, which is located in a lowered state not above the level (i.e. level or at the level) of the table surface and that raised above the level of the table surface can be so that it rests on the table surface carrying plate-shaped object. At tables, on the table surface of the object rests and the Table and the object touch, the lifting elements lift the Subject above the level of the table surface at. For other tables, z. As the above-mentioned tables with gas cushion, the lifting elements can first be lifted so that they carry the object or at least partially wear, and then the gas cushion can be turned off. In In this case, the lifting elements do not have the function, the object to raise.

• – eine Mehrzahl von Schlitzen, die an der Tischoberfläche offen sind und die sich in einem Abstand zueinander entlang einer ersten Richtung durch den Tisch erstrecken,
• – eine Mehrzahl von Hubelementen, die sich in einer abgesenkten Stellung unterhalb einer durch die Tischoberfläche definierten Ebene befinden, wobei die Hubelemente in der abgesenkten Stellung jeweils in einem der Schlitze angeordnet sind,
• – eine Hubvorrichtung, die ausgestaltet ist, die Mehrzahl von Hubelementen aus der abgesenkten Stellung in eine angehobene Stellung zu bringen, wobei sich die Hubelemente beim Anheben ganz oder teilweise aus den Schlitzen nach oben bewegen, sodass ein gegebenenfalls auf der Tischoberfläche aufliegender plattenförmiger Gegenstand von den Hubelementen getragen (und ggf. angehoben) wird.

In particular, the following is proposed:
A table, in particular vacuum clamping table, with a table surface for laying on at least one plate-shaped object, the table comprising:

• A plurality of slots which are open at the table surface and which extend through the table at a distance from each other along a first direction,
• A plurality of lifting elements located in a lowered position below a plane defined by the table surface, wherein the lifting elements are arranged in the lowered position in each case in one of the slots,
• A lifting device configured to bring the plurality of lifting elements from the lowered position to a raised position, the lifting elements, when lifting, moving wholly or partly upwards out of the slots, so that a plate-like object resting on the table surface, if any, moves from the slots Lifting elements worn (and possibly raised) is.

Slots extending through the table along a direction are preferably understood to be slits in the rectilinear direction. However, the scope of the invention also includes slots that do not extend straight through the table, but z. B. zigzag shaped and / or curved.

at the slots (or in other words: recesses) can these are areas of the table where material is removed has been. However, it is also possible, as is still the case with a preferred one Embodiment will be described in more detail, that the slots through spaces of material areas (eg, tiles) of the table.

Preferably For example, the plurality of elongate lifting elements are mechanically interconnected coupled, so that the lifting elements by operating the same Lifting be raised simultaneously in a defined manner can.

Z. B., the slots from a lateral edge of the Table along the first direction extend through the table, taking the lifting elements on the side edge of the table over a coupling (eg a single bar or a frame profile a frame that extends around the table) mechanically coupled together, so that the lifting device in the position is to raise the lifting elements on the coupling at the same time.

Especially The slots and the lifting elements can move from the side Edge of the table to an opposite edge of the table extend, wherein the lifting elements to the opposite lateral edges of the table over one Coupling (eg in each case a single bar or in each case a frame profile the same frame) are mechanically coupled together.

One Frame has the advantage that it is designed as a stable construction can be, which ensures that the frame profiles stable on opposite sides of the table are coupled. When the frame is raised, the lifting elements become raised in the same way, ensuring that lying on the opposite sides of the table Ends of the lifting elements are raised in the same way. Eg The frame may be in several places and / or on the opposite Pages of a guide (eg a shaft with each other opposite walls, between which the respective frame profile is arranged), which leads the lifting movement of the frame, so a tilting of the frame is excluded.

preferred dimensions is the coupling or is at least one of the couplings in the raised position below the upper ends of the lifting elements, the bearing surfaces for carrying the plate-shaped object form, arranged so that an object from the side edge of the table where the coupling is located, between the table surface and the plate-shaped object and between at least two of the lifting elements can be introduced and the plate-shaped Object can be lifted by the object of the lifting elements.

Already a single elongated lifting element has opposite one Variety of pin-shaped elements (i.e. a plurality of individual support elements) has the advantage that the Reliability when lifting the plate-shaped Object is significantly improved. The elongated lifting element is preferably designed so that the plate-shaped carried by him Subject over the entire longitudinal extent or at least one extending in the longitudinal direction longer section of the longitudinal extension at the top End of the lifting element rests. This helps the lifting element the plate-shaped object at least in the longitudinal direction of the lifting element. Since at least two of the lifting elements are present, can be a plate-shaped by the majority of the lifting elements Item so worn and raised that it is not irreversible deformed or damaged.

At least one of the lifting elements can or all lifting elements can on its / its upper side, however, be designed so that the plate-shaped object in the longitudinal direction not continuously rests on the lifting element, if he from the lifting element will be carried. These lifting elements are preferably dimensionally stable, d. H. do not need to be clamped at opposite ends. For example, in strut-like lifting elements, the upper surface Although the lifting element extend in a horizontal plane, however, have interruptions or become the bearing surface formed by a large number of individual surveys. Especially The interruptions or elevations can be shaped equally be, have the same dimensions and / or in the longitudinal direction in be arranged at regular intervals from each other.

The lifting elements extend with their longitudinal axes or longitudinal directions z. B. parallel to each other. However, the longitudinal directions of the lifting elements do not have to be parallel to one another. Rather, the longitudinal directions z. B. also diverge slightly. Also, the elongate lifting elements need not extend straight in their longitudinal direction. Rather, the course along their longitudinal direction also z. B. be zigzag. In all these cases, it is possible, as already described in the case of the arrangement with a plurality of pin-shaped elements described above, a support device, for. B. a fork-shaped support device, in the vertical direction between the table surface and the plate-shaped object and to introduce in the horizontal direction between the individual lifting elements, so that the support device can lift the plate-shaped object from the lifting elements and can spend at a desired new location.

If, as in the preferred embodiment, the majority of elongated lifting elements mechanically coupled together, the reliability of the lifting function is further improved. It is excluded in this case that individual lifting elements different when lifting the plate-shaped object behave as intended.

at According to a preferred embodiment, the table is a vacuum clamping table, which has a plurality of tiles that the table surface form, wherein the slots at least partially by distances between the tiles are formed.

Of the Vacuum clamping table may have a base, but not the Clamping surface forms. On the surface of the base rather, the plurality of tiles is arranged in common form the clamping surface. The tiles can each have at least one channel for generating the negative pressure, with an object is sucked to the clamping surface can. Optionally, at least one of the slots may extend into the Extend material of the base into it. This allows the height the lifting elements are greater than the thickness of the Tiles.

Especially The tiles can each have a thickness, the smaller is as their latitude and longitude. If the tiles on the Base surface are placed, lies the clamping surface therefore, at a distance to the base surface, the same the thickness of the tile is. It is not absolutely necessary that the thickness of all tiles is the same, even if such an embodiment is preferred. If the thickness of a tile is mentioned, that means Nor is that the tile at any point the same thickness having. Rather, especially at the bottom (which faces the base surface) of the tile recesses or openings are on the z. B. the channels in the tile during operation of the vacuum clamping table to a vacuum system are connected.

One The advantage of a vacuum clamping table with tiles is that the base can be made of a different material and the Basic surface produced in other manufacturing processes can be as the tiles. Thus it is possible to have one to produce very large base surface, the nevertheless is even and only very small tolerances compared to the perfect plane. For example, the base may be made of granite and by sawing, grinding and polishing a nearly perfect level base surface are produced. The base can but also consist of a cast material, preferably also is reworked by grinding and polishing. Also a base made of ceramic is possible.

In With respect to the present invention has a vacuum clamping table with Tiling the particular advantage that the lifting elements that are raised can, in a simple way in the slots between the Arrange tiles.

Preferably the edges are at least one of the slots, at the top Beveled (i.e., chamfered) at the end of the slot so that the width of the slot at its lying in the plane of the table surface opening is larger than in a pine area of the slot. This facilitates the return of the assigned one Lifting element in the slot in cases where the lifting element completely lifted out of the slot. Especially can the tiles described above at their edges, which form the slot, be chamfered.

Under the lifting of the lifting elements is in particular also understood that from one below the lifting elements and / or laterally of the lifting elements arranged lifting device on an upward force the lifting elements is exercised. "Lifting" is therefore not limited to that the lifting force the lifting elements "pulls" upwards. Rather, it will even preferred that exerted by the lifting device Lifting force the lifting elements and / or associated parts (such. B. a coupling of the lifting elements) pushes up.

at a preferred embodiment, with respect to the height of the lifting elements a long stroke allows, projects from at least one of the lifting elements at least a downward projection. The at least one projection is located at least partially in the raised position in the slot. Therefore, a return of the lifting element, which has the projection when lowering the lifting element in the Secured slot. If the height of the slot is insufficient is to the lifting element and the projection in its entire height in the lowered position, can in the table material be provided below the slot a recess which the Projection in the lowered position at least partially absorbs.

Generally, independently of the previously described embodiments of the lifting device, this can be carried out in different ways. Not only in the case when a lever mechanism is present, but also in other cases, the drive z. B. via hydraulic and / or pneumatic cylinders by means of electric motors having a rotating rotor, via an Elek tro linear motor or otherwise done. The force and / or torque transmission from the actual drive to the lifting elements can, for. B. on Primenscheiben, priming, chains, gears or rotating waves.

In special design of the lifting elements can, for. B. at least one the lifting elements as an elongated, non-dimensionally stable element be designed - z. B. as a rope, wire or braid made of ropes or wires. When Material for such in itself non-dimensionally stable lifting elements is Metal, in particular stainless steel, preferred. Other materials are also possible, for. B. plastics, as in the production of strings for sports equipment (eg tennis rackets) be processed into elongated elements. These are not in dimensionally stable lifting elements are in the nature of strings in musical instruments Fixed at opposite ends, so they under Train, d. H. are curious. Each of these lifting elements is preferably at least one tensioning device is assigned at one end, wherein the tensioning device preferably with respect to that of her generated tensile stress is adjustable. On more features will yet received on the basis of an embodiment.

The Lifting device may comprise a lever mechanism, in which a drive element, which drives the lifting movement, via a lever mechanism with at least one of the lifting elements is connected. It is preferred the drive element is an element rotating about a rotation axis comprising, wherein the rotating member for generating the lifting movement and for lowering the at least one lifting element in the same direction of rotation rotated around the axis of rotation. In this embodiment can the drive can be easily generated by a motor, which always rotates in the same direction. A changeover of the direction of rotation, a shiftable transmission or a clutch are not required.

According to the inventive method for handling plate-shaped objects on a table, in particular a vacuum clamping table, at least one plate-shaped Object that rests on a table surface of the table, raised or at least in a raised position, above worn the table surface. To remove the at least a plate-shaped object from the table surface becomes a plurality of in a direction along the table surface extending, elongated lifting elements, each in a correspondingly elongated slot of the table in a lowered Position below a defined by the table surface Level, raised by a lifting device, so that the lifting elements when lifting all or part of the slots Move up and resting on the table surface plate-shaped object carried by the lifting elements becomes.

In terms of further embodiments and embodiments of the method will be attached to the description of the table and the attached Claims referenced.

one alternative embodiment of a lifting device for a Table, in particular a vacuum clamping table, the above Kind and for the above purpose, the thought lies on the basis that the surface formed by the table as possible should be large and / or interruptions as small as possible should have for elements of the lifting device. Across from the above-described embodiment with a plurality of slots, in which lifting elements are arranged, this has the advantage that by bends of the resting on the table surface plate-shaped object at the points where, where appropriate Parts of the lifting device are located, can be reduced or even completely avoided.

This basic idea is included in the following variants:
The lifting device may comprise a plurality of pins or pin-shaped elements (which may also be referred to as plungers). In a lowered position, the pins are with their upper end at the height level of the table surface or below and therefore do not lift the possibly resting on the table surface plate-shaped object on the table surface on. In a raised position, however, the pins carry the weight of the plate-shaped article and the upper ends of the pins are above the table surface.

Above was already in the introduction an embodiment with pin-shaped Elements described. The disadvantage of this is the risk that at Uneven height level of the upper ends of the pins of the plate-shaped Object can be deformed. According to one however, in a particular embodiment, the pins become uniform raised, so at least not due to different Height levels of the upper ends of the pins a deflection the plate-shaped object can occur. Raise under "even" is therefore understood in particular that the upper ends of the Pins lifting the plate-shaped object, during the process of lifting or at least in the raised position at the same height level or at least (if the table surface slightly off the horizontal is inclined) at the same distance to the table surface.

In particular, a drive may be provided which is part of the lifting device and which raises the pins simultaneously and preferably with the same course of movement of each of the pins. Such a drive is therefore also referred to as a synchronous drive. Can be realized such a drive z. B. by a mechanical coupling of the pins and / or parts of the drive device. Specifically, z. B. may be provided an eccentric shaft. When the eccentric shaft is rotated about an axis of rotation, portions on the outer circumference of the shaft or portions mechanically coupled to the shaft actuate the pins. In this case, at least areas of the surface of the shaft are formed eccentrically to the axis of rotation, so that during the rotational movement about the axes of rotation due to the eccentrically formed areas, a lifting movement is formed or when lowering the pins whose lowering is possible. In particular, the lifting device may comprise a plurality of eccentric shafts, which in turn via a transmission, for. B. arranged laterally on the table, are driven synchronously. An alternative to the at least one eccentric shaft is a wedge-shaped actuator which is movable in its longitudinal axis direction, wherein a plurality of the pins are raised or lowered synchronously during movement. By "raised" is also meant that the pins are pushed upwards. Another alternative to the at least one eccentric shaft and the wedge-shaped device is that a lifting body, for. B. a plate, is arranged below the lower ends of the pins and the pins in synchronism over the lower ends pushes up or forces a lowering or allows. Such a lifting body can, for. B. on piston / cylinder units, preferably three such units, are moved to raise and lower the pins. With three such units, which engage at different positions in the horizontal plane on the lifting body, a very stable lifting device can be realized, which also due to the majority of units can also apply high forces for the operation of the lifting operation.

If in this description of the horizontal or a horizontal Plane in relation to the table surface or one parallel to it Level is mentioned, this also includes the case one that the table surface and / or the upper ends of the Pins or the other lifting elements while synchronously raised and be lowered, but not in an exactly horizontal plane lie. Rather, they can lie in one plane, however, this plane may be slightly inclined from the horizontal, z. B. at an inclination angle in the range of 1 ° to 5 °. If necessary, the table surface can be exactly horizontal be aligned, but not the upper ends of the lifting elements in the raised position. This allows the raised plate either automatically or simplified at the upper ends the lifting elements can slide along to away from the device to become. Due to the inclination is a preferred direction for formed the removal of the plate-shaped object. In particular, as described in more detail is, rolls and / or air cushion or gas cushion at the top of the Be provided lifting elements or generated to the relative movement between the upper ends and the plate-shaped object to facilitate it.

The Lifting elements, in particular the pins, can in recesses on the table surface, z. B. holes or pockets arranged be. In this case, the lifting elements in regular Be spaced apart. Instead of the lifting body, which may be provided to the lower ends of the plurality of Pushing up lifting elements can also be a frame can be used, wherein in the enclosed by the frame circumferentially Area can be provided a support of the table.

The Majority of the lifting elements can against a spring force of the lowered into the raised position. Once the power, which forces the lifting elements in the raised position, decreases or canceled, the lifting elements therefore move due to the spring force back into the lowered position. Such a spring force is preferred because in the case that from above no load on the lifting elements acts, it can come to that the lifting elements are not automatically return to the lowered position. For example, the lifting elements could be in a guide jam. The weight of the lifting elements alone would therefore may not be sufficient.

alternative to the spring force or the springs, the lifting device can be configured be that the lifting elements both on pressure and on train with the drive device of the lifting device are coupled. At pressure the lifting movement is carried upwards, at train becomes the lowering movement is carried out downwards. For example, can the drive device comprises a crank with which the lifting movement or lowering movement is actuated.

at the lifting elements, in particular the pins, it can be in each case individual parts act. However, it is also possible that the lifting elements in one piece, d. H. monolithic, with each other are connected, z. B. via a rod, the above-mentioned Lifting body or the frame mentioned above. The Rod, the lifting body or the frame are driven, to effect the movement of the lifting elements.

In another variant, a more number of lifting elements as described above are driven and carries in the raised position resting on the upper ends of the lifting elements plate-shaped object. In addition, an air cushion or gas cushion in the raised position is effective or already effective when lifting. For example, the table surface may have a plurality of openings forming the end of channels which guide the gas or air up to the table surface and flow upwardly. With such an air cushion or gas cushion, the number of required lifting elements can be reduced and / or can be reduced by bending the plate-shaped object between the support points. For example, in a vacuum clamping table such a channel system usually already exists. When lifting, only the gas flow direction has to be reversed in order to produce the gas cushion or the air cushion.

at Another variant of the lifting device is instead of the majority of lifting elements or in addition to the lifting elements Frame provided, which extends around the outer circumference of the table extends around. The frame is dimensioned so that the edges of the plate-shaped object to be worked on the table rest on the frame when it is in the raised position located. In contrast, the edges lie in a lowered position either not on the frame or are the top surfaces of the frame exactly at the same height as the level of Table surface. Optionally, at least one slot in be provided the table surface, which is in one Extends longitudinally and in which an elongated Lifting element is located, which is preferably raised synchronously with the frame and lowered. Alternatively or additionally is also a combination of the frame with the air cushion described above or gas cushion and further optional in addition to the majority the lifting elements possible.

That the edges of the plate-shaped object in the raised position rest on the frame, is for the processing of the object on the table surface no disadvantage. Usually, the plate-shaped Object at its edge not or only partially edited while he lies on the table surface.

alternative or in addition to the design of the frame, so that the Edges of the plate-shaped object on it in the raised position, the frame can be on or a plurality of substantially horizontally extending into the interior of the frame Projections, z. B. short webs, which are located in the lowered position in corresponding recesses, z. Slits of the table, and are synchronized in the raised position with the frame up or moving. The upper surfaces of this Protrusions are at a uniform height level. If the edge of the plate-shaped object also on To rest on the frame, there is also the upper surface of the frame at the same height. The projections can lift the plate-shaped object in the Position or lift position, although the areas they carry the plate-shaped object in the lowered position do not stick out over the edge of the table.

Similar as described above for the lifting body, can Piston / cylinder units, in particular three units, used for this purpose be to generate the movement of the frame. The units, if Several are present, attack at different points of the Frame, z. B. in each case in an area of one of the corners of the frame. As with the above-mentioned piston / cylinder units the actuation can be electrical (eg via a Linear motor), pneumatically or hydraulically.

at Another variant of the lifting device, de turn with others Variants of the lifting device can be combined form a plurality of tiles at least part of the table surface. These Tiles are movable tiles and can be used as part of Lifting device from the position in which the plate-shaped Subject can be worked on the table resting in a raised position Position are brought. Besides the moving tiles, it can also give solid tiles, which are not brought into the raised position. In particular, it is characterized by a combination of fixed and movable Tiles possible, the entire table surface too form. The distances of the movable tiles are preferably such that a bending of the plate-shaped object is prevented when lifting and in the raised position or is limited to a predetermined value.

To the Remove the plate-shaped object in the raised Position (this applies both to the variant of the lifting device with the movable tiles as well as for other variants, in particular with the plurality of lifting elements), a fork can be used. The fork is used to remove the item with their forks Spaces between the tiles and / or lifting elements brought and then raised to the plate-shaped To wear and remove the object.

Regardless of whether a fork is used to remove the object, the fixed and movable tiles can angeord so are net, that their distance in the lowered position to each other (ie between fixed and movable tiles) is less than or equal to a very small, predetermined value. For example, the distances may be in the range of 0.01 mm. This prevents bending on the table during processing of the plate-shaped article.

The movable tiles can with the same actuator or moving devices between the lowered and the raised Condition be brought back and forth, as above for others Variants has been described.

Yet a variant of the lifting device has no lifting elements or others fixed objects in the raised position or when lifting in mechanical contact with the plate-shaped Subject matter, d. H. wear this or at least part of the Bear weight. Rather, the lifting movement by generating a electrostatic field causes. Material surfaces, where there are electrical charges to form the field, Surfaces of the objects or parts of the above mentioned variants, z. B. the lifting elements and / or the Tiles, his. This means that the above described and still to be described variants of the lifting device modified accordingly be used to form the electrostatic fields. However, it is also possible, the lifting device, which with electrostatic Forces works, in addition to the mechanical Use lifting devices for the same lifting operation or provided. "Mechanical" here means that objects the lifting device or a part of the entire lifting device when lifting and / or in the raised position in mechanical Contact at the bottom with the plate-shaped object are.

alternative or additionally, the surface of a Device which the plate-shaped object of removed from the table or transported to the table, above the be positioned plate-shaped object and a create attractive electrostatic field. Such a device can pass the plate-shaped object directly to the table surface or take over from her. However, it can also be the plate-shaped Object in the raised position of one of the previously described Handed lifting devices to this or take over from her.

Instead of or in addition to the forked one mentioned above Charging system for removing the plate-shaped object from the area of the table or vice versa for moving the object Rolls or balls can also be placed in the area of the table be used for this purpose. In particular, the roles or balls stored, for. B. each at the upper end of a lifting element, of the above-mentioned frame, the mentioned projections the frame and / or other parts of a lifting device used in the Raising, lowering or in the raised position the plate-shaped Carries the object. The roles and / or Balls when lifting, lowering and / or in the raised position carry the weight of the plate-shaped object, d. H. to be in contact with him. Alternatively or in addition However, you can also store stored rollers and / or balls be provided additional parts. For example, these will Parts with the rollers and / or balls stored by them Lifting the plate-shaped object by a lifting device only then in contact with the underside of the plate-shaped Item brought when it is to be removed. The same applies to the introduction of the plate-shaped Object in the area of the table and the subsequent Lowering to the table surface. In this case finds the transport of the object first with the help of the rollers and / or balls take place and become the parts that make up the rollers and / or Store balls, then from the bottom of the plate-shaped Object removed and then this object lowered by means of a lifting device until it is on the table surface rests.

If in this description of the resting of the object of the table surface the same applies to the case that the table is a table with a gas carrying device acts, d. H. the table creates a gas cushion or air cushion, on the plate-shaped object during resting his processing. In this case, that relies Weight of the object only indirectly via the gas or the air on the table surface.

In order to bring the plate-shaped object into the area of the table or to remove it again from the area, as will be described below, a special loading device or unloading device can be used. When loading, ie bringing the plate-shaped object in the area of the table, in particular directly on or over the table surface, at least one substantially horizontally movable object, for. As a plunger or pin can be used. The horizontally movable object is z. B. moved by a piston / cylinder unit and pushes the plate-shaped object in the desired position in the area of the table. As mentioned, several such horizontally movable objects can be used, the z. B. be moved by separate or a common moving means, for. B. piston / cylinder units. The movement can, however be effected in other ways, for. B., the horizontally movable object may be a driver, which is attached to a further moving object, in particular is attached. This further object can, for. B. a circumferential, laterally of the transport path of the plate-shaped article arranged band or chain.

In the aforementioned cases, the plate-shaped Subject after processing on the table surface be returned in the same direction (especially in horizontal direction) Direction), from which the plate-shaped object was spent on the table surface. To the lead times for the processing of plate-shaped objects can increase on the table, the respective plate-shaped However, the object should also be unloaded in a different direction, d. H. be removed from the area of the table surface, z. B. by continuing the movement, with which he in the field of Table surface was spent.

At the the loading / unloading of the article can this as mentioned Roll on stored rollers and / or balls. As also already mentioned, but can also be an air cushion or gas cushion be generated on the table surface, which is a loading / unloading made possible by essentially horizontal movement.

embodiments The invention will now be described with reference to the attached Drawing described. The individual figures of the drawing show:

1 3 shows a schematic three-dimensional view of a first preferred embodiment of a table, in particular a vacuum clamping table, wherein the lifting elements embodied as dimensionally stable struts are in the lowered position and can be raised by a first embodiment of a lever mechanism,

2 in the 1 illustrated embodiment, but wherein the lifting elements are in the raised position,

3 a further embodiment of a table, wherein the lifting elements are in turn formed by rigid struts, but the drive of the lifting device is effected via a cylinder with a movable piston,

4 a detail of an embodiment of a lifting element, which has a projection on its underside, in order to be able to produce a large stroke at a low overall height of the lifting element,

5 a frame similar to the one in 1 to 3 shown frames which carry the lifting elements, but between opposite sides of the frame several strings are stretched as lifting elements,

6 an embodiment of a tensioning device for tensioning a string on the frame according to 5 .

7 a view on the in 6 in perspective shown jig of the frame outside, ie in the direction in which the string to the opposite jig at the other end of the frame,

8th a schematic side view of a further embodiment of a tensioning element for a string,

9 schematically a longitudinal section through the in 1 and 2 illustrated frame, wherein a lifting element is located in the cutting plane,

10 schematically a vertical section through a table, wherein two pin-shaped lifting elements are in the lowered position,

11 a vertical section through the in 10 However, the pin-shaped lifting elements are in the raised position and carry a plate-shaped object,

12 a vertical section similar to in 11 However, wherein the pin-shaped lifting elements are driven in another way,

13 similar to a vertical section 11 and 12 but wherein the pin-shaped elements are driven in yet another way,

14 a three-dimensional representation of a table for placing a plate-shaped object, wherein for raising and lowering of the object from the table surface or on the table surface, a frame-shaped, the table outside rotating lifting elements is provided,

15 the table of 14 with the frame-shaped lifting element in a raised position,

16 a three-dimensional representation of a table similar 14 However, wherein the frame-shaped lifting element is coupled to an elongated lifting element which extends in the longitudinal direction through the table and in the illustrated lowered position in a slot of the Ti is arranged,

17 the arrangement of 16 but wherein the frame-shaped lifting element and the elongate lifting element are in the raised position,

18 a vertical section through an edge region of a table for laying a plate-shaped object, wherein an embodiment of the frame-shaped lifting element according to 14 and 15 or according to 16 and 17 is shown

19 in plan view, an edge region of a table, projecting from a arranged next to the table surface lifting element several projections in recesses in the edge of the table, wherein the projections are used for raising and / or lowering a plate-shaped object,

20 schematically a table for laying a plate-shaped object, wherein a lifting device is realized by a plurality of movable tiles, which form in the lowered position not shown together with other parts of the table, the table surface,

21 a vertical section through a portion of a table, wherein a pin-shaped lifting element at its upper end supports a ball on which a plate-shaped element rests,

22 a representation like in 21 but instead of the ball a roller is mounted on which the plate-shaped element rests,

23 schematically a vertical section through an arrangement with a table for laying a plate-shaped object, with a device for processing the plate-shaped article when it rests on the table surface, and with means for feeding the plate-shaped object in the area above the table surface, and

24 an arrangement as in 23 However, in plan view, the table surface is shown, while the plate-shaped object is fed from another transport device in an area above the table surface.

The in 1 and 2 illustrated vacuum clamping table 1 has a table base 3 (eg made of granite or of other natural stone or artificial stone). On the upper surface of the base 3 is a variety of tiles 4 applied, which form the table surface. In the embodiment, there are eighty tiles 4 which is based on ten rows of eight tiles each corresponding to a regular 10 × 8 matrix (10 rows and 8 columns) 3 are arranged. The tiles 4 in the first row seen from the right are denoted by the reference numerals 4a - 4h designated. In addition, only the first tile located in the picture above is still there 4i in the second row as seen from the right with a reference numeral.

The matrix of tiles 4 In the longitudinal direction defined by the direction perpendicular to the course of the individual rows, slits are formed by spaces between the tile columns. To the topmost column of tiles in the picture 4 belong the tiles 4a . 4i , To the next column of tiles 4 belongs the tile 4b etc. Four of the slots that 1 with the reference numerals 2a - 2d and between the first and second columns, the third and fourth columns, the fifth and sixth columns and the seventh and eighth columns of the tiles 4 lie, take in the lowered position in each case as a strut 7a - 7d trained lifting element. The lifting elements 7 lie in the lowered position with their upper ends in or preferably slightly below the level of the table surface formed by the top of the tiles.

Not shown in detail 1 and 2 is the design of the table 1 as vacuum clamping table. In particular, not shown are z. B. openings on the tops of the tiles 4 , where air ducts for sucking air and generating a vacuum end, and the corresponding suction devices. The whole in 1 and 2 shown table may consist of high vacuum-compatible materials, ie in particular suitable metals and ceramic materials.

The aspiration 7 are at their longitudinally opposite ends, each with a frame profile 6a (left in 1 ) and 6b (right in 1 ) firmly connected. These frame profiles 6a . 6b form together with the running in the longitudinal direction further frame profiles 6c . 6d one around the base 3 or the tiles 4 around frame 5 , Additionally (not in 1 and 2 shown) can be provided at least at individual points of the frame guides that cause a lifting movement (in the vertical direction) of the frame so that it can not tilt. Such a frame construction can also be provided in other configurations of a table (even at a table without tiles).

Between the columns of the tiles 4 Further slots may be provided, ie in particular between the second and third column, the fourth and fifth column and the sixth and seventh column. However, these columns of tiles can also be flush with each other. For others Embodiments of a table (eg with the frame according to 5 ) may be arranged in such possibly additionally existing slots each have a further lifting element which is connected to the frame. The distances between the lifting elements to each other are dependent on the dimensions of the tiles transversely to the longitudinal direction, ie in the distance direction of the lifting elements, as well as the stability and sensitivity of the load to be supported, for. As a less than 1 mm thick glass plate or other plate to be stored on the table. To remove such a plate, which is mounted on the table support (ie carry) the lifting elements the plate, for. B. in the in 2 shown raised position (the plate is not shown), so that between the tiles and the plate another support device (not shown), for. B. with a fork, can be introduced and the plate can lift off the lifting elements. A to the design of the table in 1 and 2 suitable fork has z. B. three or five prongs, with a first prong between the strut 7a and the strut 7b , a second prong between the strut 7b and the strut 7c and a third prong between the strut 7c and the strut 7d arrange, with the tines on the same side in the longitudinal direction of the table 1 connected to each other.

9 shows a longitudinal section through the frame profiles 6a . 6b and the strut 7c , It can be seen that the strut 7c at their longitudinal, left and right in 9 angled ends shown. The angled areas 91a . 91b cause the strut 7c over its longitudinal extent between the longitudinal ends above the upper edge of the frame profiles 6a . 6b located. This makes it possible for the additional carrying device (eg the aforementioned fork) in a simpler manner between the upper edge of the frame profiles 6a . 6b and top edge of the struts 7 contribute. Also, supporting devices can be used with a higher design, which can thus be made more stable than without the angled areas 91a . 91b the case would be. The angled areas 91 or the clamping devices to be described later (see 5 and 6 ) represent spacer elements, which increase the distance between the upper edge of the lifting elements and the mechanical coupling (here the frame profiles) of the lifting elements.

The lifting device of the table 1 has a rod rotatable about its longitudinal axis 18 on, which are transverse to the longitudinal direction, approximately at the level of the lower edge of the base 3 extending in a horizontal direction. At its ends, the rod points 18 concentric with its axis of rotation in each case a disc 19a . 19b on, at the eccentric in each case an elongated transmission element 17a . 17b is articulated, so that upon rotation of the rod 18 about its axis of rotation, the transmission elements in the longitudinal direction of the table are moved back and forth. This can be the rod 18 rotate in the same direction of rotation to move the transmission elements both back and forth in the longitudinal direction.

With the transmission elements 17a . 17b is articulated in each case a lever element 13 connected, wherein the lever element on the transmission element 17a in the presentation of 1 and 2 is arranged behind the base and therefore not visible. The in the foreground of 1 and 2 but visible mechanism of the lifting device is in the same way mirror image of the longitudinal center axis of the table 1 also behind the base 3 available. This also prevents tilting of the frame 5 when lifting or lowering the frame 5 ,

The lever element 13 is over a coupling rod 11 with another lever element 14 in the longitudinal direction of the table 1 connected opposite end. Both lever elements 13 . 14 are angled, where they articulate at the base of their angled end over swivel joints 15 . 16 each with the base 3 are connected so that they rotate about a horizontal axis of rotation transverse to the longitudinal direction of the table 1 can execute.

At their free ends are the angled legs of the lever elements 13 . 14 in turn articulated with downwardly projecting extensions of the frame profiles 6c . 6d connected. This means that they do not base in this case 3 are connected.

Therefore, the moving (lengthwise to the right) of the transmission elements leads 17a . 17b to a rotational movement of the lever elements 13 . 14 to counterclockwise the aforementioned horizontally extending axis of rotation, so that the frame profiles 6c . 6d and thus the whole frame 5 with the aspirations attached to it 7 is raised. The raised position is in 2 recognizable. The further rotation of the rod 18 in the same direction leads to lowering the frame again 5 , where the lever elements 13 . 14 Turn clockwise around the mentioned horizontal axis of rotation.

Right front in 2 is indicated that the lifting movement can also be generated in other ways. Supported against a background 25 , the z. B. with the base 3 is firmly connected, is a piston / cylinder unit 27 shown, the z. B. can be operated hydraulically or pneumatically. Accordingly, a piston rod moves 28 the unit, as indicated by the double arrow, up or down and thus raises the frame 5 on or lower it. In particular, it is possible that such units 27 at meh places on the frame 5 are arranged. Especially if these units 27 can be operated independently, it is preferred that the lifting movement of the frame 5 additionally led to a tilting of the frame 5 to avoid if one of the units fails or does not work in the same way as the other units.

optional not only in the case of those described in this figure description Embodiments of the invention, a review take place, whether the lifting elements as specified in the lowered Position. Alternatively or additionally, can be monitored be whether the lifting elements as specified in the raised Position. The monitoring can be done indirectly the position (eg position and / or orientation) of parts of the Lifting done, these parts of the lifting device mechanically coupled with the lifting elements.

In particular, it is z. B. possible, in the embodiment according to 1 and 2 the position of at least one of the frame profiles 6 , the position of the frame profiles 6c . 6d down projecting projections on which the lever elements 13 . 14 hinged, the horizontal position of the coupling rods 11 and / or (in the variant with the cylinder units 27 ) to monitor the position of the piston rod.

For monitoring In principle, the same means can be used the in itself in the embodiment mentioned above in the introduction pin-shaped elements are used. For example, the area to be monitored when the desired Position and / or orientation close an electrical contact, so that a corresponding measuring current flows and detects becomes. But it is also possible to reach the predetermined position inductive, d. H. about the change of inductance a measuring coil, within which a part of the lifting device moved to measure. Furthermore, light barriers for position detection used. The invention is not limited to the possibilities mentioned limited. However, the invention has in all cases the advantage that in principle a single monitoring device sufficient, which monitors the predetermined position of the respective lifting element. Are the lifting elements mechanically coupled together, even enough a single monitoring device for the coupled Lifting elements off. In particular for the use of the table in Vacuum this is of particular advantage since electrical connection and control lines to the monitoring devices only needed in very small numbers. Such electrical Lines, which usually have plastic insulation, are in Vacuum and especially disturbing in a high vacuum. If like in the structuring method for structuring mentioned above the surface of the plate-shaped to be processed Object radiation (eg., Laser radiation) is used, can it is due to scattering or reflection of the radiation that the radiation hits the plastic insulation, causing material can evaporate, which is on the surface of the plate-shaped Objects is knocked down. The plate would be in this case highly likely to be unusable for their purpose.

If in this description of glass plates was the speech that edit while they rest on the table, then this does not limit the scope of the invention Table. Rather, instead of glass plates, another plate-shaped Item to be stored on the table, z. B. of semiconductor materials (eg doped silicon), from organic material and / or from Metal.

3 shows a variant of in 1 and 2 illustrated table, which is largely identical. The differences are explained below.

Instead of the drive shaft 18 or rod 18 which rotates about an axis of rotation and thereby drives the lifting device is in the embodiment according to 3 a piston / cylinder unit 35 . 36 provided that the lifting movement or lowering movement of the lifting elements 7 causes. In contrast to the piston / cylinder unit 28 . 27 that as variant in 2 is shown, performs the piston / cylinder unit 35 . 36 the embodiment of 3 but no vertical movement, ie as the unit 27 . 28 a movement in the direction and path equal to the lifting movement of the lifting elements 7 is, but it in turn actuates a lever mechanism. This lever gear is partly the same as the lever gear according to 1 and 2 designed. However, the coupling rods are 11a . 11b Run longer in the longitudinal direction of the table and is the lever element 13 arranged in a modified design and modified arrangement on the front side of the table. The changed lever element 33 and the corresponding lever element on the in 3 Rearward, top left corner of the table are each over a bar 38 mechanically coupled together so that they forcibly perform the same rotational movement when the rod 38 is rotated about its longitudinal axis. This rotation is achieved by (partially) disengaging the piston rod 36 out of the cylinder 35 or by re-engagement of the piston rod 36 in the cylinder 35 causes. The last-mentioned engaged position of the piston rod 36 corresponds to the raised position of the lifting elements 7 , in the 3 is shown. Would the piston rod 36 in this raised state the cylinder 35 disengage (because the cylinder 35 hydraulically or pneumatically subjected to an increased pressure, the lever element would 32 around the longitudinal axis of the rod hinged to the base of the table 38 turned (in 3 seen clockwise from the front) and would be the lever element 14 due to the coupling via the coupling rod 11a . 11b the same rotational movement around here swivel 16 Run so that the frame with the lifting elements 7 gets into the lowered position. Bearings which are attached to the base of the table by the rotational movement of the rod 38 stored relative to the base of the table are in 3 with the reference numerals 39a . 39b designated.

4 shows a portion of the table surface according to the table 1 and 2 or 3 , Shown are a plurality of tiles 4 , which form the table surface and two of the strut-like lifting elements 7b . 7c , However, because of two of the tiles, the visibility of details of the particular illustrated embodiment is omitted, allowing the upper surface of the base to be omitted 3 able to see. The lifting elements 7b . 7c each have a protruding down projection 41b . 41c on. In the raised position of the lifting elements 7 , in the 4 is shown, are the projections 41b . 41c still in the respective assigned slot 2 B . 2c , Because the slots 2 but not so high (the slot height is solely due to the height of the tiles 4 determined, since the base is not slotted on its upper side) as the height of the lifting elements 7 plus the height of the projections 41 , are at the top surface of the base 3 Open recesses (eg holes 43 ) intended. In these receptions occur the projections 41 one (or lower one) when the lifting elements 7 be brought into the lowered position. The projections are tapered 41 towards their lower ends, allowing the entry of the protrusions 41 into the recess of the base 3 is guaranteed.

Out 4 are also chamfers 47 (for the tiles 4x . 4y with the reference numerals 47x . 47y identified) at least at the corner edges of the tiles recognizable that the upper, located on the table surface opening of the slots 2 form. This is when lowering the lifting elements 7 a return of the lifting elements 7 in the slots 2 facilitated.

5 shows a frame 55 , the z. B. instead of the frame 5 in 1 and 2 as part of the table 1 can be used. At this frame 55 are not strive-like, dimensionally stable lifting elements provided, but a plurality of mutually parallel, arranged at the same height strings 57 , In the embodiment, the total of nine strings 57a - 57i intended. The strings lying in the width direction (ie in the horizontal direction perpendicular to the longitudinal direction) 57a . 57i would (if the frame 55 in 1 instead of the frame 5 would be present) not in a slot between columns of tiles 4 but arranged on the outside of the arrangement of tiles 4 , The page 57a would in 1 above the column of tiles with the tiles 4a . 4i arranged the string 57i in 1 down in front of the column with the tile 4a , All other strings 57b - 57h would be in the lowered state, each in a slot between two columns of tiles 4 be arranged (for example, the string 57g between the column with tile 4g and the column with tile 4f ).

As for a string, namely the string 57i out 6 , it can be seen, are the strings 57 at the longitudinally opposite ends of the frame to the frame profiles arranged there 56a . 56b tightened. In particular, the tensioning device as in 6 be configured, ie a fastener 61 is for each of the tensioners 51 on the side of the frame profile 56a respectively. 56b attaches and tightens the end of the string 57i one. For example, the end of the string 57i (not shown) through the fastener 61 extend through and at the bottom of the fastener 61 Be firmly attached to an additional piece of material (such as soldered), leaving the end of the string 57i not through the through hole through the fastener 61 can pass through. Alternatively, however, at least the fastener may be at one of the longitudinally opposite ends of the frame 55 as is the case with music stringed instruments, have a rotatable swivel to control the tension of the string 57 to be able to adjust by the vortex is rotated about its longitudinal axis. The end of the string winds up 57 with a portion of increasing or decreasing length around the vertebra.

In 6 is also the in 5 Front frame profile shown 56c recognizable, the in 5 Rear frame profile shown 56d opposite.

Out 6 Furthermore, one recognizes a special embodiment of the part 51i the tensioning device, which on the top of the frame profile 56a attached with this. How out 7 recognizable, this part indicates 51i a T-shaped profile (the transverse leg 74 T is down). At the top, free end of the long leg of the T points the part 51i a groove 72 on, in which the taut string 57i (please refer 6 ) lies. In the embodiment of the part 51i according to 6 and 7 the groove extends 72 continuously in the longitudinal direction of the table at the top of the part 51 , wherein the top, longitudinally outboard end of the part 51i is rounded to a bent course of the string 57 to avoid.

A variant of the part 51i is in 8th shown. This part 81 is different from the part 51i in that the groove 82 although at the rounded, lying in the longitudinal direction above the outside end of the part 81 runs, but not at the top right in 8th shown, in the longitudinal direction inside end of the part 81 , Rather, the groove ends 82 at one point 85 at the top of the part 81 , The course of the in Nut 82 lying string 87 is in 8th indicated.

Coming back to 5 shows each of the strings 57 at the longitudinally opposite ends in each case a clamping device 51a - 51i (left in 5 ) respectively. 52a - 52i (right in 5 ), z. B. all are executed as in 6 to 8th is shown.

In the 10 The arrangement shown only shows a portion of a table 100 in a vertical section. Except the two illustrated pin-shaped lifting elements 113a . 113b even more such lifting elements or other lifting elements can be provided. The pin-shaped lifting elements 113 are each in a hole 106a . 106b arranged a vertical movement of the pin-shaped elements 113 enable. The holes 106 are total through holes, but with a lower portion of the holes 106 has a larger bore cross section than an upper section 107a . 107b which extends to the table surface. On the table surface is in 10 a plate-shaped object 117 shown. The upper ends 108a . 108b the pin-shaped elements 113 are located at a small distance to the lower surface of the plate-shaped object 117 ,

The pin-shaped elements 113 also have a lower and an upper section. The lower section has a cross-section that allows the section with little play in the lower section of the hole 106 is vertically movable. The upper section 103a . 103b the pin-shaped elements 113a . 113b has a cross-section that is dimensioned so that the section with little play vertically in the upper section 107 the bore 106 is movable. This is how the holes run 106 the vertical movements of the pin-shaped elements 113 ,

Further, in the holes 106 one spring each 114a . 114b arranged. 10 shows a state of the spring in which it is only slightly pressurized by the lower portion of the pin-shaped element 113 at its transition to the upper portion of the pin-shaped element 113 against the lower end of the spring 114 suppressed. This pressure is from an eccentrically rotatably mounted shaft 115 or a corresponding wheel applied by the shaft or the wheel against the lower end of the pin-shaped element 113 suppressed. The upper end of the spring 114 rests on the upper end of the lower section of the hole 106 from.

If the eccentrically mounted shaft 115 or the wheel around the axis of rotation 111 respectively. 111b in the in 10 and 11 indicated arrow direction is rotated due to the eccentric bearing the lower end of the pin-shaped element 113 pushed up until the in 11 shown raised state of the lifting device is reached. In this condition is the spring 114 more compressed and therefore more pressure-loaded. The upper ends 108 the pin-shaped elements 113 have exceeded the level of the table surface of the table 100 raised, because according to the eccentric rotary motion, a lifting movement of the elements 113 took place. Therefore, the plate-shaped element became 117 raised above the level of the table surface.

At the in 12 The arrangement shown are the eccentric wheels or shafts by an actuator 121 replaced in the by the double arrow in 12 indicated direction, that is approximately horizontal, is movable. The device has a wedge-shaped or sawtooth-shaped profile on its upper surface. The individual teeth are denoted by the reference numerals 122a . 122b designated. In the in 12 shown state are about the highest areas of the teeth 122 in contact with the lower end of the pin-shaped elements 113 , Because the device 121 relative to the table can not move down, it pushes the pin-shaped elements 113 in the illustrated raised position or holds them there in position. Would the decor 121 in 12 moved to the left, the spring-loaded elements could 113 dodge down and would get into the lowered position.

In 13 is an actuator 131 represented by three piston / cylinder units 133a . 133b . 133c is movable in the vertical direction. The units 133 grip at different locations on the underside of a plate-shaped area of the device 131 at. They are not aligned on a line. Rather, the attack points form a triangle. Therefore, with appropriate control of the units 133 , the plate-shaped portion are uniformly raised and lowered. But it is also possible to raise the plate-shaped area so that the various pin-shaped elements 113 in the table 100 move a different stroke in the raised position and therefore the plate-shaped object carried by them 117 in an easy out of the aligned horizontal inclined plane.

The in 14 and 15 illustrated table 140 has z. B. a variety of tiles 143 at its top, which form the table surface. However, the table surface can also be formed in other ways. In the illustrated arrangement, a frame rotates 141 the top of the table 140 , In the in 14 illustrated lowered position is the upper surface of the frame 141 not above the level of the table surface. In contrast, this is in the in 15 illustrated raised position of the case.

At the in 16 and 17 variant shown is also still the elongated element 161 recognizable. It is in the representation of 16 in the lowered position and protrudes with its upper surface does not extend beyond the table surface. In contrast, this is in 17 the case. This is the upper surfaces of the frame 141 and the elongated element 161 preferably in one plane. In 17 Bottom left is the bottom of the slot 162 recognizable, in which the elongated element 161 is arranged in the lowered position.

18 shows a cross section through an edge region, for. B. the table 140 according to 14 to 17 , The frame 141 is at the table 140 graded side, with the top of the frame 141 due to the gradation. The step formed by the return 148 is recognizable. The upper, recessed area is with 147 designated. On the upper surface of the step 148 the plate-shaped object rests 117 if the frame 141 this from the table surface of the table 140 raises and in not in 18 shown raised position brings.

The in 19 illustrated frame 141 has a plurality of projections in the horizontal direction, which in the embodiment as webs 192 are formed. Each of the bridges 192 is in a recess 191 the table 140 , where the recess 191 it's the lead 192 allowed, in the vertical direction (ie perpendicular to the image plane of 19 ) to be moved.

Only schematically by a dot-dash line is the edge 194 a resting on the table surface plate-shaped object shown. The object extends in the representation of 19 from the edge 194 out upwards, ie in approximately horizontal direction. If the frame 141 with the projections fixed thereto 192 lifted, lift the projections 192 the edge of the plate-shaped object in the raised position.

The in 20 illustrated table 200 has a plurality of tiles 202 on, which can carry in the illustrated raised position a plate-shaped object, not shown. If the tiles 202 are lowered, their upper surfaces are at the same height level as the upper surfaces of non-movable tiles 204 , In total there are 45 tiles in 20 8 of which are movable tiles 202 are.

Each of the moving tiles 202 is at the same distance from at least one other movable tile 202 ,

At the in 21 illustrated pin-shaped element 103 is it z. B. around the upper portion of the pin-shaped element 113 according to one of 10 to 13 , At its upper end is a ball 221 rotatably mounted. This can be the ball 221 preferably turn in all directions around its spherical center. On the ball 221 rests a plate-shaped object 117 of which in 21 only a short section is shown. The plate-shaped object 117 and the pin-shaped element 103 are shown in the raised position. With 107 is z. B. the upper portion of the bore 106 out 10 to 13 designated.

In 22 is the ball of 21 through a roll 223 at the upper end of the pin-shaped element 103 replaced, with the role 223 around a rotation axis 227 is rotatable, which is perpendicular to the image plane. In this way, the plate-shaped object 117 in the right-left direction of the 22 unroll on the roller surface.

In 23 designated 231 a device for processing a plate-shaped object 117 while on the surface of a table 200 rests. 201 denotes a portion of a support of the table 200 downward.

23 shows the object 117 while standing on the table surface or in an area just above the table surface of a pestle 233 or being pushed by another horizontally movable object. The direction of movement is through the arrow above the plunger 233 indicated. For example, the pestle 233 relative to the support 238 moved or moved within a guide of the support. The loading device 235 on the left side of the table 200 has a pad on top of which a plurality of rollers and / or balls 234 located on the lower surface of the plate-shaped article 117 unroll while it is pushed onto the table surface. A corresponding pestle or other object 257 on a support 255 can be seen in the right area of the 23 , This tappet 257 serves to the plate-shaped object 117 after working on the table surface, push it back to the left on the loading device.

With 232 are at the table surface of the table 200 Rolls and / or balls referred to the z. B. as in 21 or 22 are mounted at the upper end of a pin-shaped lifting element. Accordingly, the shows 23 the raised position of the pin-shaped elements. For example, the plate-shaped object 117 brought from the raised position in the lowered position, as soon as it is positioned with its entire width above the table surface.

The bottom 237 of the plunger 233 can also be on the rollers or balls 234 rest while holding the plate-shaped object 117 pushes or pushes back towards support 238 withdraws.

The top view of 24 shows the plate-shaped object 117 when loading on the surface of the table 200 , As in 23 Rollers and / or balls are provided both on the table surface and at the top of the loading device. However, the loading device is designed differently than in 23 , First, the plate-shaped object 117 from a driver 245 pushed onto the table surface. The driver 245 runs z. B. together with a band 247 ie the band 247 moves the driver 245 , In addition, the driver pushes 245 the plate-shaped object 117 after working on the table surface continue to the right to one of the support 235 opposite support 241 , on whose surface also rollers or balls are arranged, which when unloading at the bottom of the object 117 roll.

QUOTES INCLUDE IN THE DESCRIPTION

This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.

Cited patent literature

• US 2002/0016075 A1 [0002, 0003, 0004]
• - JP 2006140230 [0004]

Claims (20)

Table ( 1 ), in particular vacuum clamping table, with a table surface for laying on at least one plate-shaped object, wherein the table ( 1 ) Comprises: - a plurality of slots ( 2 ) which are open at the table surface and which are at a distance from each other along a first direction through the table ( 1 ), - a plurality of lifting elements ( 7 ; 57 ) located in a lowered position below a plane defined by the table surface, wherein the lifting elements ( 7 ; 57 ) in the lowered position in each case in one of the slots ( 2 ), - a lifting device ( 18 ; 27 ; 35 ), which is configured, the plurality of lifting elements ( 7 ; 57 ) to bring from the lowered position in a raised position, wherein the lifting elements ( 7 ; 57 ) when lifting all or part of the slots ( 2 ) so that an optionally resting on the table surface plate-shaped object of the lifting elements ( 7 ; 57 ) will be carried. Table according to the preceding claim, wherein the slots ( 2 ) from a side edge of the table ( 1 ) along the first direction through the table ( 1 ) and wherein the lifting elements ( 7 ; 57 ) on the side edge of the table ( 1 ) via a coupling ( 6a . 6b ; 56a . 56b ) are mechanically coupled together, so that the lifting device ( 18 ; 27 ; 35 ) is able to lift the lifting elements ( 7 ; 57 ) via the coupling at the same time. Table according to the preceding claim, wherein the slots ( 2 ) and the lifting elements ( 7 ; 57 ) from the side edge of the table ( 1 ) to an opposite edge of the table ( 1 ) and wherein the lifting elements ( 7 ; 57 ) on the opposite lateral edges of the table ( 1 ) via a respective coupling ( 6a . 6b ; 56a . 56b ) are mechanically coupled to each other. Table according to one of the two preceding claims, wherein the coupling ( 6a . 6b ; 56a . 56b ) or at least one of the couplings ( 6a . 6b ; 56a . 56b ) in the raised position below the upper ends of the lifting elements ( 7 ; 57 ), which form bearing surfaces for supporting the plate-shaped object, is arranged. Table according to one of the preceding claims, wherein the table ( 1 ) is a vacuum chuck having a plurality of tiles ( 4 ), which form the table surface, wherein the slots ( 2 ) at least partially by distances between the tiles ( 4 ) are formed. Table according to one of the preceding claims, wherein of at least one of the lifting elements ( 7 ; 57 ) at least one projection ( 41 ) protrudes downward and wherein the at least one projection ( 41 ) in the raised position still at least partially in the slot ( 2 ) is located. Table according to the preceding claim, wherein the at least one projection ( 41 ) in the lowered position at least partially in a recess ( 43 ) of the table ( 1 ) is located. Table according to one of the preceding claims, wherein at least one of the lifting elements, an elongated, non-dimensionally stable element ( 57 ) is - z. As a rope, wire or mesh of ropes or wires - and wherein the element is fixed at opposite ends to the table, so that the element ( 57 ) is under tension. Table according to one of the preceding claims, wherein the lifting device ( 18 ; 38 ) a lever mechanism ( 11 . 13 . 14 . 17 ), in which a drive element ( 18 ; 35 ), which drives the lifting movement, via a lever mechanism ( 13 . 14 ) with at least one of the lifting elements ( 7 ; 57 ) connected is. Table according to the preceding claim, wherein the drive element ( 18 ) an element rotating about a rotation axis ( 19a . 19b ), wherein the rotating element ( 19a . 19b ) for generating the lifting movement and for lowering the at least one lifting element ( 7 ) is rotated about the axis of rotation in the same direction of rotation. Method of handling plate-shaped objects on a table ( 1 ), in particular a vacuum clamping table, wherein at least one plate-shaped object on a table surface of the table ( 1 ) and wherein for removing the at least one plate-shaped object from the table surface, a plurality of elongated lifting elements extending in a direction along the table surface (US Pat. 7 ; 57 ), each in a correspondingly elongated slot ( 2 ) of the table ( 1 ) in a lowered position below a plane defined by the table surface, by a lifting device ( 18 ; 27 ; 35 ) is raised, so that the lifting elements ( 7 ; 57 ) when lifting all or part of the slots ( 2 ) Move up and resting on the table surface plate-shaped object of the lifting elements ( 7 ; 57 ) will be carried. Method according to the preceding claim, wherein the slots ( 2 ) from a side edge of the table ( 1 ) along the first direction through the table ( 1 ) and wherein the lifting elements ( 7 ; 57 ) on the lateral edge of the Table ( 1 ) via a coupling ( 6a . 6b ; 56a . 56b ) are mechanically coupled together, so that the lifting device ( 18 ; 27 ; 35 ) the lifting elements ( 7 ; 57 ) via the coupling ( 6a . 6b ; 56a . 56b ) at the same time. Method according to the preceding claim, wherein the slots ( 2 ) and the lifting elements ( 7 ; 57 ) from the side edge of the table ( 1 ) to an opposite edge of the table ( 1 ) and wherein the lifting elements ( 7 ; 57 ) on the opposite lateral edges of the table ( 1 ) via a respective coupling ( 6a . 6b ; 56a . 56b ) are mechanically coupled to each other. Method according to one of the two preceding claims, wherein the coupling ( 6a . 6b ; 56a . 56b ) or at least one of the couplings ( 6a . 6b ; 56a . 56b ) in the raised position below the upper ends of the lifting elements ( 7 ; 57 ), which form bearing surfaces for supporting the plate-shaped object, is arranged. Method according to one of the preceding claims, wherein the table ( 1 ) is a vacuum chuck having a plurality of tiles ( 4 ), which form the table surface, wherein the slots ( 2 ) at least partially by distances between the tiles ( 4 ) are formed. Method according to one of the preceding claims, wherein of at least one of the lifting elements ( 7 ; 57 ) at least one projection ( 41 ) protrudes downwards and wherein the lifting element ( 7 ; 57 ) is lifted only so far that the at least one projection ( 41 ) in the raised position still at least partially in the slot ( 2 ) is located. Method according to the preceding claim, wherein the at least one projection ( 41 ) in the lowered position at least partially in a recess of the table ( 1 ) is located. Method according to one of the preceding claims, wherein at least one of the lifting elements an elongated, non-dimensionally stable element ( 57 ) is - z. As a rope, wire or mesh of ropes or wires - and wherein the element is fixed at opposite ends of the table, so that the element ( 57 ) is under tension. Method according to one of the preceding claims, wherein a drive element ( 18 ; 35 ) via a lever mechanism ( 11 . 13 . 14 . 17 ) at least one of the lifting elements ( 7 ; 57 ), so that the lifting element ( 7 ; 57 ) wholly or partly from the associated slot ( 2 ) moves upwards. Method according to the preceding claim, wherein the drive element ( 18 ) an element rotating about a rotation axis ( 19a . 19b ), wherein the rotating element ( 19a . 19b ) for generating the lifting movement and for lowering the at least one lifting element ( 7 ; 57 ) is rotated about the axis of rotation in the same direction of rotation.