DE19810657A1 - Rücksaugventil - Google Patents
RücksaugventilInfo
- Publication number
- DE19810657A1 DE19810657A1 DE19810657A DE19810657A DE19810657A1 DE 19810657 A1 DE19810657 A1 DE 19810657A1 DE 19810657 A DE19810657 A DE 19810657A DE 19810657 A DE19810657 A DE 19810657A DE 19810657 A1 DE19810657 A1 DE 19810657A1
- Authority
- DE
- Germany
- Prior art keywords
- valve
- diaphragm
- control
- fluid
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012530 fluid Substances 0.000 claims abstract description 94
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims abstract description 17
- 230000009471 action Effects 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 230000009849 deactivation Effects 0.000 claims description 3
- 230000004913 activation Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 description 43
- 239000011248 coating agent Substances 0.000 description 37
- 238000000576 coating method Methods 0.000 description 37
- 239000004065 semiconductor Substances 0.000 description 14
- 239000010409 thin film Substances 0.000 description 10
- 238000013016 damping Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000036632 reaction speed Effects 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K23/00—Valves for preventing drip from nozzles
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/005—Control of flow characterised by the use of auxiliary non-electric power combined with the use of electric means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Fluid-Driven Valves (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP08855897A JP3952321B2 (ja) | 1997-04-07 | 1997-04-07 | サックバックバルブ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE19810657A1 true DE19810657A1 (de) | 1998-10-22 |
Family
ID=13946204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19810657A Withdrawn DE19810657A1 (de) | 1997-04-07 | 1998-03-12 | Rücksaugventil |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5988524A (ja) |
| JP (1) | JP3952321B2 (ja) |
| KR (1) | KR100256167B1 (ja) |
| DE (1) | DE19810657A1 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7690622B2 (en) | 2006-08-07 | 2010-04-06 | Smc Corporation | Diaphragm-type electromagnetic valve with closing-force strengthening mechanism |
| DE102008054220A1 (de) * | 2008-10-31 | 2010-05-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thermopneumatisches Mikroventil auf Basis von Phasenwechselmaterial |
| DE102011051140A1 (de) * | 2011-02-25 | 2012-08-30 | Embedded Microsystems Bremen GmbH (EMB) Applikationszentrum für Mikrosystemtechnik | Strömungswiderstand |
| DE102020209594B3 (de) | 2020-07-30 | 2021-12-30 | Festo Se & Co. Kg | Fluidgerät |
| DE102020209593A1 (de) | 2020-07-30 | 2022-02-03 | Festo Se & Co. Kg | Fluidgerät |
| CN119617144A (zh) * | 2025-02-12 | 2025-03-14 | 深圳市速牌科技有限公司 | 一种多通道流体控制电磁阀结构 |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6312047B1 (en) * | 1998-06-11 | 2001-11-06 | Ohi Seisakusho Co., Ltd. | Vehicle sunroof device |
| JP3493322B2 (ja) * | 1998-09-25 | 2004-02-03 | Ｓｍｃ株式会社 | 液だれ防止方法およびシステム |
| JP4596614B2 (ja) * | 2000-08-04 | 2010-12-08 | 東芝機械株式会社 | 基材表面に間欠的に塗布剤を塗布する装置 |
| JP3825342B2 (ja) * | 2002-03-06 | 2006-09-27 | Ｓｍｃ株式会社 | サックバックバルブ |
| JP4035728B2 (ja) * | 2003-07-07 | 2008-01-23 | Ｓｍｃ株式会社 | サックバックバルブ |
| JP2006010038A (ja) | 2004-06-29 | 2006-01-12 | Smc Corp | サックバックバルブ |
| JP2006010037A (ja) * | 2004-06-29 | 2006-01-12 | Smc Corp | サックバックバルブ |
| US8075668B2 (en) | 2005-03-29 | 2011-12-13 | Dresser-Rand Company | Drainage system for compressor separators |
| US8434998B2 (en) | 2006-09-19 | 2013-05-07 | Dresser-Rand Company | Rotary separator drum seal |
| EP2063975B1 (en) | 2006-09-21 | 2011-07-06 | Dresser-Rand Company | Separator drum and compressor impeller assembly |
| US8061737B2 (en) | 2006-09-25 | 2011-11-22 | Dresser-Rand Company | Coupling guard system |
| EP2066453A4 (en) | 2006-09-25 | 2012-04-04 | Dresser Rand Co | FLUID DEFLECTOR FOR FLUID SEPARATION DEVICES |
| US8079622B2 (en) | 2006-09-25 | 2011-12-20 | Dresser-Rand Company | Axially moveable spool connector |
| CA2663751C (en) | 2006-09-25 | 2015-01-27 | William C. Maier | Access cover for pressurized connector spool |
| WO2008039733A2 (en) | 2006-09-25 | 2008-04-03 | Dresser-Rand Company | Compressor mounting system |
| EP2066422B1 (en) | 2006-09-26 | 2012-06-27 | Dresser-Rand Company | Improved static fluid separator device |
| BRPI0908051A2 (pt) | 2008-03-05 | 2015-08-11 | Dresser Rand Co | Conjunto compressor que inclui separador e bomba ejetora |
| US8079805B2 (en) | 2008-06-25 | 2011-12-20 | Dresser-Rand Company | Rotary separator and shaft coupler for compressors |
| US8062400B2 (en) | 2008-06-25 | 2011-11-22 | Dresser-Rand Company | Dual body drum for rotary separators |
| US7922218B2 (en) | 2008-06-25 | 2011-04-12 | Dresser-Rand Company | Shear ring casing coupler device |
| JP5252718B2 (ja) * | 2008-10-23 | 2013-07-31 | パナソニック株式会社 | 流体遮断装置 |
| US8087901B2 (en) | 2009-03-20 | 2012-01-03 | Dresser-Rand Company | Fluid channeling device for back-to-back compressors |
| US8210804B2 (en) | 2009-03-20 | 2012-07-03 | Dresser-Rand Company | Slidable cover for casing access port |
| US8061972B2 (en) | 2009-03-24 | 2011-11-22 | Dresser-Rand Company | High pressure casing access cover |
| US8414692B2 (en) | 2009-09-15 | 2013-04-09 | Dresser-Rand Company | Density-based compact separator |
| EP2533905B1 (en) | 2010-02-10 | 2018-07-04 | Dresser-Rand Company | Separator fluid collector and method |
| US8663483B2 (en) | 2010-07-15 | 2014-03-04 | Dresser-Rand Company | Radial vane pack for rotary separators |
| WO2012009158A2 (en) | 2010-07-15 | 2012-01-19 | Dresser-Rand Company | Enhanced in-line rotary separator |
| WO2012012018A2 (en) | 2010-07-20 | 2012-01-26 | Dresser-Rand Company | Combination of expansion and cooling to enhance separation |
| WO2012012143A2 (en) | 2010-07-21 | 2012-01-26 | Dresser-Rand Company | Multiple modular in-line rotary separator bundle |
| US8596292B2 (en) | 2010-09-09 | 2013-12-03 | Dresser-Rand Company | Flush-enabled controlled flow drain |
| EP2659277B8 (en) | 2010-12-30 | 2018-05-23 | Dresser-Rand Company | Method for on-line detection of resistance-to-ground faults in active magnetic bearing systems |
| US8994237B2 (en) | 2010-12-30 | 2015-03-31 | Dresser-Rand Company | Method for on-line detection of liquid and potential for the occurrence of resistance to ground faults in active magnetic bearing systems |
| US9551349B2 (en) | 2011-04-08 | 2017-01-24 | Dresser-Rand Company | Circulating dielectric oil cooling system for canned bearings and canned electronics |
| US8876389B2 (en) | 2011-05-27 | 2014-11-04 | Dresser-Rand Company | Segmented coast-down bearing for magnetic bearing systems |
| US8851756B2 (en) | 2011-06-29 | 2014-10-07 | Dresser-Rand Company | Whirl inhibiting coast-down bearing for magnetic bearing systems |
| DE202012010469U1 (de) * | 2012-10-30 | 2012-11-15 | Bürkert Werke GmbH | Vorrichtung zur Stellungsanzeige einer Ventilspindel |
| US10446390B2 (en) * | 2013-06-28 | 2019-10-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for dispensing liquid spin-on glass (SOG) onto semiconductor wafers |
| JP6180267B2 (ja) * | 2013-09-30 | 2017-08-16 | Ckd株式会社 | 流体駆動式遮断弁 |
| KR102223571B1 (ko) | 2014-09-09 | 2021-03-04 | 프로테우스 인더스트리스 인크. | 냉각제 회수를 위한 시스템 및 방법 |
| DE102017122006A1 (de) * | 2017-09-22 | 2019-03-28 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Anordnung mit einer Ventileinheit, einer Rücksaugeinheit und einem Ventilkörper |
| JP7756508B2 (ja) * | 2021-07-12 | 2025-10-20 | 旭有機材株式会社 | サックバックバルブ |
| JP7058790B1 (ja) * | 2021-07-19 | 2022-04-22 | 旭有機材株式会社 | タイミング調整弁及びこれを備えるサックバックバルブ |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3895748A (en) * | 1974-04-03 | 1975-07-22 | George R Klingenberg | No drip suck back units for glue or other liquids either separately installed with or incorporated into no drip suck back liquid applying and control apparatus |
| US4394945A (en) * | 1981-08-06 | 1983-07-26 | Loctite Corporation | Valve having suck-back feature |
| JPS59177929A (ja) * | 1983-03-28 | 1984-10-08 | Canon Inc | サツクバツクポンプ |
| JP2803859B2 (ja) * | 1989-09-29 | 1998-09-24 | 株式会社日立製作所 | 流動体供給装置およびその制御方法 |
| DE4236371C2 (de) * | 1992-10-28 | 1995-08-17 | Erno Raumfahrttechnik Gmbh | Vorrichtung und Verfahren zum Einspritzen |
| JPH0810399A (ja) * | 1994-07-04 | 1996-01-16 | Matsushita Electric Ind Co Ltd | 球発射装置 |
-
1997
- 1997-04-07 JP JP08855897A patent/JP3952321B2/ja not_active Expired - Lifetime
-
1998
- 1998-02-18 US US09/025,242 patent/US5988524A/en not_active Expired - Fee Related
- 1998-03-06 KR KR1019980007482A patent/KR100256167B1/ko not_active Expired - Fee Related
- 1998-03-12 DE DE19810657A patent/DE19810657A1/de not_active Withdrawn
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7690622B2 (en) | 2006-08-07 | 2010-04-06 | Smc Corporation | Diaphragm-type electromagnetic valve with closing-force strengthening mechanism |
| DE102007032684B4 (de) * | 2006-08-07 | 2012-05-24 | Smc Corp. | Elektromagnetisches Membranventil mit einem schließkraftverstärkenden Mechanismus |
| DE102008054220A1 (de) * | 2008-10-31 | 2010-05-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thermopneumatisches Mikroventil auf Basis von Phasenwechselmaterial |
| DE102011051140A1 (de) * | 2011-02-25 | 2012-08-30 | Embedded Microsystems Bremen GmbH (EMB) Applikationszentrum für Mikrosystemtechnik | Strömungswiderstand |
| DE102020209594B3 (de) | 2020-07-30 | 2021-12-30 | Festo Se & Co. Kg | Fluidgerät |
| DE102020209593A1 (de) | 2020-07-30 | 2022-02-03 | Festo Se & Co. Kg | Fluidgerät |
| DE102020209593B4 (de) | 2020-07-30 | 2022-02-17 | Festo Se & Co. Kg | Fluidgerät |
| US11649814B2 (en) | 2020-07-30 | 2023-05-16 | Festo Se & Co. Kg | Fluid device |
| CN119617144A (zh) * | 2025-02-12 | 2025-03-14 | 深圳市速牌科技有限公司 | 一种多通道流体控制电磁阀结构 |
| CN119617144B (zh) * | 2025-02-12 | 2025-04-11 | 深圳市速牌科技有限公司 | 一种多通道流体控制电磁阀结构 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3952321B2 (ja) | 2007-08-01 |
| US5988524A (en) | 1999-11-23 |
| KR19980079991A (ko) | 1998-11-25 |
| KR100256167B1 (ko) | 2000-05-15 |
| JPH10281334A (ja) | 1998-10-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8139 | Disposal/non-payment of the annual fee |