DE19581902T1 - Gesteuerte Cryopumpenregenerationsdrücke - Google Patents

Gesteuerte Cryopumpenregenerationsdrücke

Info

Publication number: DE19581902T1
Authority: DE; Germany
Prior art keywords: cryopump regeneration; controlled; regeneration pressures; pressures; controlled cryopump
Prior art date: 1995-01-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Ceased

Application number

DE19581902T

Other languages

English (en)

Inventor

Bruce R Andeen

Gerald J Fortier

Allen J Bartlett

Michael J Eacobacci

Philip C Lessard

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Azenta Inc

Original Assignee

Helix Technology Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-01-18

Filing date

1995-12-21

Publication date

1998-02-05

1995-12-21 Application filed by Helix Technology Corp filed Critical Helix Technology Corp

1998-02-05 Publication of DE19581902T1 publication Critical patent/DE19581902T1/de

Status Ceased legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- F04B37/085—Regeneration of cryo-pumps
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

DE19581902T 1995-01-18 1995-12-21 Gesteuerte Cryopumpenregenerationsdrücke Ceased DE19581902T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US08/374,140 US5517823A (en)	1995-01-18	1995-01-18	Pressure controlled cryopump regeneration method and system
PCT/US1995/016433 WO1996022465A1 (en)	1995-01-18	1995-12-21	Controlled cryopump regeneration pressures

Publications (1)

Publication Number	Publication Date
DE19581902T1 true DE19581902T1 (de)	1998-02-05

Family

ID=23475479

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE19581902T Ceased DE19581902T1 (de)	1995-01-18	1995-12-21	Gesteuerte Cryopumpenregenerationsdrücke

Country Status (6)

Country	Link
US (1)	US5517823A (de)
JP (1)	JP3888691B2 (de)
DE (1)	DE19581902T1 (de)
FR (1)	FR2729718B1 (de)
GB (1)	GB2311821B (de)
WO (1)	WO1996022465A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6318093B2 (en)	1988-09-13	2001-11-20	Helix Technology Corporation	Electronically controlled cryopump
US6022195A (en) *	1988-09-13	2000-02-08	Helix Technology Corporation	Electronically controlled vacuum pump with control module
US6902378B2 (en) *	1993-07-16	2005-06-07	Helix Technology Corporation	Electronically controlled vacuum pump
DE19781645B4 (de) *	1996-03-20	2005-12-01	Helix Technology Corp., Mansfield	Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung
US20030152495A1 (en) *	1997-06-13	2003-08-14	Tadahiro Ohmi	Gas recovering apparatus, vacuum exhausting method, and vacuum exhausting apparatus
US6116032A (en) *	1999-01-12	2000-09-12	Applied Materials, Inc.	Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
US6122921A (en) *	1999-01-19	2000-09-26	Applied Materials, Inc.	Shield to prevent cryopump charcoal array from shedding during cryo-regeneration
US6327863B1 (en)	2000-05-05	2001-12-11	Helix Technology Corporation	Cryopump with gate valve control
JP4006168B2 (ja) *	2000-05-31	2007-11-14	住友重機械工業株式会社	クライオポンプの再生方法
US6920763B2 (en) *	2003-06-27	2005-07-26	Helix Technology Corporation	Integration of automated cryopump safety purge
EP1980748B1 (de) *	2003-06-27	2011-04-20	Brooks Automation, Inc.	Integration einer automatisierten Kryopumpensicherheitsspülung
US20040261424A1 (en) *	2003-06-27	2004-12-30	Helix Technology Corporation	Integration of automated cryopump safety purge with set point
US6895766B2 (en) *	2003-06-27	2005-05-24	Helix Technology Corporation	Fail-safe cryopump safety purge delay
US7194867B2 (en) *	2004-03-19	2007-03-27	Brooks Automation, Inc.	Integrated rough/purge/vent (RPV) valve
US7451652B2 (en) *	2005-12-28	2008-11-18	Sumitomo Heavy Industries, Ltd.	Interrupted DC operation of thermocouple vacuum gauge
JP4150745B2 (ja) *	2006-05-02	2008-09-17	住友重機械工業株式会社	クライオポンプ及びその再生方法
CN101595305B (zh) *	2007-01-17	2013-02-13	布鲁克机械公司	没有压力爆发的高容量低温泵
GB0808024D0 (en) *	2008-05-02	2008-06-11	Edwards Ltd	Vacuum pump
JP5296811B2 (ja) *	2011-01-17	2013-09-25	住友重機械工業株式会社	クライオポンプ及び真空バルブ装置
TWI646264B (zh) *	2011-03-04	2019-01-01	美商布魯克機械公司	低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法
JP5634323B2 (ja) *	2011-05-13	2014-12-03	住友重機械工業株式会社	クライオポンプシステム、クライオポンプのための再生方法
JP5679910B2 (ja) *	2011-06-03	2015-03-04	住友重機械工業株式会社	クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法
JP6124626B2 (ja) *	2013-03-12	2017-05-10	住友重機械工業株式会社	クライオポンプ及びその再生方法
JP6253464B2 (ja) *	2014-03-18	2017-12-27	住友重機械工業株式会社	クライオポンプ、及びクライオポンプの再生方法
JP2016153617A (ja) *	2015-02-20	2016-08-25	住友重機械工業株式会社	クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4356701A (en) *	1981-05-22	1982-11-02	Helix Technology Corporation	Cryopump
US4555907A (en) *	1984-05-18	1985-12-03	Helix Technology Corporation	Cryopump with improved second stage array
EP0250613B1 (de) *	1986-06-23	1991-07-17	Leybold Aktiengesellschaft	Kryopumpe und Verfahren zum Betrieb dieser Kryopumpe
US4918930A (en) *	1988-09-13	1990-04-24	Helix Technology Corporation	Electronically controlled cryopump
DE59101463D1 (de) *	1990-11-19	1994-05-26	Leybold Ag	Verfahren zur regeneration einer kryopumpe sowie zur durchführung dieses verfahrens geeignete kryopumpe.
JPH04303186A (ja) *	1991-03-29	1992-10-27	Aisin Seiki Co Ltd	クライオポンプの再生装置
US5176004A (en) *	1991-06-18	1993-01-05	Helix Technology Corporation	Electronically controlled cryopump and network interface
DE9111236U1 (de) *	1991-09-10	1992-07-09	Leybold AG, 6450 Hanau	Kryopumpe
JPH0599139A (ja) *	1991-10-08	1993-04-20	Fujitsu Ltd	クライオポンプ再生機構
JPH0633875A (ja) *	1992-07-20	1994-02-08	Fujitsu Ltd	クライオポンプ
US5375424A (en) *	1993-02-26	1994-12-27	Helix Technology Corporation	Cryopump with electronically controlled regeneration
JPH06346848A (ja) *	1993-06-11	1994-12-20	Hitachi Ltd	クライオポンプの再生方法及び真空排気系
JPH0861232A (ja) *	1994-08-24	1996-03-08	Ebara Corp	クライオポンプの再生方法及び再生装置

1995
- 1995-01-18 US US08/374,140 patent/US5517823A/en not_active Expired - Lifetime
- 1995-12-21 JP JP52225696A patent/JP3888691B2/ja not_active Expired - Lifetime
- 1995-12-21 GB GB9711344A patent/GB2311821B/en not_active Expired - Fee Related
- 1995-12-21 WO PCT/US1995/016433 patent/WO1996022465A1/en not_active Ceased
- 1995-12-21 DE DE19581902T patent/DE19581902T1/de not_active Ceased
1996
- 1996-01-17 FR FR9600477A patent/FR2729718B1/fr not_active Expired - Fee Related

Also Published As

Publication number	Publication date
GB9711344D0 (en)	1997-07-30
GB2311821A (en)	1997-10-08
JP3888691B2 (ja)	2007-03-07
JPH10512645A (ja)	1998-12-02
WO1996022465A1 (en)	1996-07-25
US5517823A (en)	1996-05-21
GB2311821B (en)	1998-04-01
FR2729718A1 (fr)	1996-07-26
FR2729718B1 (fr)	1997-06-06

Publication	Publication Date	Title
DE19581902T1 (de)	1998-02-05	Gesteuerte Cryopumpenregenerationsdrücke
DE69515720D1 (de)	2000-04-27	Kryopumpe
DE69615350D1 (de)	2001-10-25	Fliesskompensiertes druckkontrollsystem
DK0807036T3 (da)	2002-09-23	Ventilkonnektor
DE59509465D1 (de)	2001-09-06	Druckregelventil
DK0854982T3 (da)	2002-03-25	Ventilsystem
DE69507877D1 (de)	1999-03-25	Drucksteuerventil
DE59603366D1 (de)	1999-11-18	Hydraulikaggregat
DK0817990T3 (da)	2000-06-26	Gastrykregulator
DE69621545D1 (de)	2002-07-11	Mehrstufige Hochdruckpumpe
BR9601163A (pt)	1998-01-06	Válvula
DK0774703T3 (da)	1999-11-22	Trykreduktionsventil
EP0729699A3 (de)	1996-12-11	Pulsationssteuerung
DE59608077D1 (de)	2001-12-06	Druckregelventil
BR9601068A (pt)	1998-01-06	Válvula
BR9607011A (pt)	1997-10-28	Válvula de redução de pressão
ATA225596A (de)	2001-02-15	Druckreduzierventil
KR970002057A (ko)	1997-01-24	압력제어밸브
DE59603602D1 (de)	1999-12-16	Druckwechseladsorptionsanlage
ATA142096A (de)	2000-02-15	Druckventil
KR960035014U (ko)	1996-11-21	배압밸브
KR960036304U (ko)	1996-12-16	압박대
DE59600290D1 (de)	1998-07-30	Druckwechseladsorptionsanlage
KR970041193U (ko)	1997-07-29	가변 피스톤
DE59508099D1 (de)	2000-05-04	Hydraulikaggregat

Legal Events

Date	Code	Title	Description
2003-03-06	8110	Request for examination paragraph 44
2003-04-24	8125	Change of the main classification	Ipc: F04B 3708
2005-04-28	8131	Rejection