DE19513325A1 - Hall sensor path measuring unit; has offset structure bodies constructed of soft iron - Google Patents
Hall sensor path measuring unit; has offset structure bodies constructed of soft ironInfo
- Publication number
- DE19513325A1 DE19513325A1 DE1995113325 DE19513325A DE19513325A1 DE 19513325 A1 DE19513325 A1 DE 19513325A1 DE 1995113325 DE1995113325 DE 1995113325 DE 19513325 A DE19513325 A DE 19513325A DE 19513325 A1 DE19513325 A1 DE 19513325A1
- Authority
- DE
- Germany
- Prior art keywords
- hall sensor
- soft iron
- measuring unit
- structure bodies
- path measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 title claims abstract 6
- 229910052742 iron Inorganic materials 0.000 title claims abstract 3
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Die Erfindung betrifft eine Hallsensorwegmeßeinrichtung, wie sie insbesondere zur planaren Feinpositionierung im µ-Bereich Anwendung findet.The invention relates to a Hall sensor displacement measuring device, such as they especially for fine planar positioning in the µ range Application.
Im Stand der Technik ist es bekannt, daß neben den offenen Steuerketten für Linear- und Planarantriebe Wegmeßsysteme eingesetzt werden. In der Regel basieren diese Wegmeßeinrichtungen auf der Laserwegmeßtechnik bzw. auf Prinzipien, bei denen die Wegmeßnormale mitgeführt sind oder stationär angebracht sind, wobei ein Wegmeßvorgang ständig durch den Abgleich mit dem Wegmeßnormal erfolgt. Diese Anordnungen sind dabei nachteilbehaftet, da sie einen hohen Wegmeßaufwand benötigen, insbesondere für die Mitführung und für die Anbringung von Wegmeßnormalen und der zugehörigen Abtastsensorik.In the prior art it is known that in addition to the open Timing chains for linear and planar drives be used. As a rule, these are based Path measuring devices on the laser path measuring technology or on Principles with which the measuring standards are carried or are attached stationary, with a displacement measurement process constantly by comparing it with the measuring standard. This Arrangements are disadvantageous because they have a high Need measuring effort, especially for carrying and for the attachment of distance measuring standards and the associated Scanning sensors.
Die Erfindung verfolgt das Ziel, eine Anordnung zu schaffen, die die bekannten Mängel des Standes der Technik mindert und beseitigt und bei den mitgeführte oder angeordnete Wegmeßnormale in Wegfall kommen.The invention aims to provide an arrangement which reduces the known shortcomings of the prior art and eliminated and in the carried or arranged Distance measuring standards cease to exist.
Die Erfindung verfolgt das Ziel, eine Anordnung zu schaffen, die die vorhandene Struktur als Wegmeßsystem mit nutzt. The invention aims to provide an arrangement that uses the existing structure as a measuring system.
Die Erfindung soll anhand der nachfolgenden Zeichnungen näher erläutert werden. Es zeigen im einzelnen:The invention will be described in more detail in the following drawings are explained. The individual shows:
Fig. 1 eine prinzipielle Darstellung der erfindungsgemäßen Anordnung im Vollschnitt; Figure 1 is a schematic representation of the arrangement according to the invention in full section.
Fig. 2 eine prinzipielle Darstellung der erfindungsgemäßen Anordnung im Vollschnitt und Seitenansicht nach Fig. 1; FIG. 2 shows a basic illustration of the arrangement according to the invention in full section and side view according to FIG. 1;
Fig. 3 eine prinzipielle Darstellung einer erfindungsgemäßen Anordnung in Unteransicht nach Fig. 1; Fig. 3 is a schematic representation of an inventive arrangement in a view according to Fig. 1;
Fig. 4 eine Vergrößerung einer prinzipiellen Darstellung der Einordnung einer erfindungsgemäßen Anordnung in ein Läuferelement; Figure 4 is an enlargement of a basic illustration of the arrangement of an inventive arrangement in a rotor element.
Fig. 5 zeigt eine Vorderansicht eines Läufers mit integrierter Anordnung; Fig. 5 shows a front view of a rotor with integrated assembly;
Fig. 6 zeigt einen Läufer mit integrierter Anordnung in Draufsicht; Fig. 6 shows a rotor with an integrated arrangement in plan view;
Fig. 7 zeigt eine Vergrößerung der Anordnung; Fig. 7 shows an enlargement of the arrangement;
Fig. 8 zeigt eine prinzipielle Darstellung einer Einordnung der Meßanordnung in einen Läufer im Vollschnitt; Fig. 8 shows a schematic representation of an arrangement of the measuring arrangement in a rotor in full section;
Fig. 9 zeigt eine prinzipielle Darstellung einer prinzipiellen Meßanordnung in Unteransicht in einen Läufer; Fig. 9 shows a schematic representation of a basic measuring arrangement in a bottom view in a rotor;
Fig. 10 zeigt eine erfindungsgemäße prinzipielle Darstellung der Anordnung in Seitenansicht und Vollschnitt; FIG. 10 is a schematic representation of the present invention shows the arrangement in a side view and a full sectional view;
Fig. 11 zeigt eine Vergrößerung nach Fig. 11. FIG. 11 shows an enlargement according to FIG. 11.
Jede Struktur in 90° versetzt
Schnitt A-A -- 0°
Schnitt B-B -- 270°
Schnitt C-C - 90°
Schnitt D-D -- 180°
Each structure offset in 90 °
Section AA - 0 °
Section BB - 270 °
Section CC - 90 °
Section DD - 180 °
11
Gesamtanordnung
Overall arrangement
22nd
Gehäuse
casing
33rd
Funktionsplatte
Function plate
44th
linke Meßeinrichtung
left measuring device
55
rechte Meßeinrichtung
right measuring device
66
Übertragungsbereich
Transmission range
77
Trägerplatte (Leiterplatte zur Signalgewinnung)
Carrier board (circuit board for signal acquisition)
88th
linker Verstärker
left amplifier
99
rechter Verstärker
right amplifier
1010th
linker Stellwiderstand
left variable resistor
1111
rechter Stellwiderstand
right variable resistor
1212th
Rückschlußplatte
Back plate
1313
linker Permanentmagnet
left permanent magnet
1414
rechter Permanentmagnet
right permanent magnet
1515
linke Verteilerplatte
left distributor plate
1616
rechte Verteilerplatte
right distributor plate
1717th
linker äußerer Hallsensor
left outer Hall sensor
1818th
linker innerer Hallsensor
left inner Hall sensor
1919th
rechter innerer Hallsensor
right inner Hall sensor
2020th
rechter äußerer Hallsensor
right outer Hall sensor
2121
linker äußerer Strukturkörper
left outer structural body
2222
linker innerer Strukturkörper
left inner structural body
2323
rechter innerer Strukturkörper
right inner structural body
2424th
rechter äußerer Strukturkörper
right outer structural body
2525th
Vergußmasse
Sealing compound
2626
Funktionsplattensitz
Function plate seat
2727
Strukturkörperzahn
Structural body tooth
2828
Strukturkörperzahnlücke
Structural body tooth gap
2929
Strukturkörpersitz
Structural body seat
3030th
Vergußmasse
Sealing compound
3131
Hallsensorzuleitungen
Hall sensor leads
3232
Stator
stator
3333
Läufer
runner
3434
Läuferantriebssystem
Rotor drive system
3535
Statorstruktur
Stator structure
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1995113325 DE19513325A1 (en) | 1995-04-03 | 1995-04-03 | Hall sensor path measuring unit; has offset structure bodies constructed of soft iron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1995113325 DE19513325A1 (en) | 1995-04-03 | 1995-04-03 | Hall sensor path measuring unit; has offset structure bodies constructed of soft iron |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE19513325A1 true DE19513325A1 (en) | 2000-06-15 |
Family
ID=7759216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1995113325 Withdrawn DE19513325A1 (en) | 1995-04-03 | 1995-04-03 | Hall sensor path measuring unit; has offset structure bodies constructed of soft iron |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE19513325A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005011830A1 (en) * | 2005-03-15 | 2006-09-21 | Pasim Direktantriebe Gmbh | Linear axle, has magnetic guiding pieces connected with north and south poles of permanent magnet in even surfaces by magnetic attractive force, where one piece has tooth surrounded by tooth gap and air gap exists between rotor and stator |
| US7489054B2 (en) | 2003-07-02 | 2009-02-10 | Ina Drives & Mechatronics Gmbh & Co Ohg | Planar direct drive unit comprising a position measuring system |
| DE102011002254A1 (en) | 2011-04-22 | 2012-10-25 | Schaeffler Technologies AG & Co. KG | Position sensor, in particular for determining the position of a rotor of a planar direct drive |
-
1995
- 1995-04-03 DE DE1995113325 patent/DE19513325A1/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7489054B2 (en) | 2003-07-02 | 2009-02-10 | Ina Drives & Mechatronics Gmbh & Co Ohg | Planar direct drive unit comprising a position measuring system |
| DE102005011830A1 (en) * | 2005-03-15 | 2006-09-21 | Pasim Direktantriebe Gmbh | Linear axle, has magnetic guiding pieces connected with north and south poles of permanent magnet in even surfaces by magnetic attractive force, where one piece has tooth surrounded by tooth gap and air gap exists between rotor and stator |
| DE102011002254A1 (en) | 2011-04-22 | 2012-10-25 | Schaeffler Technologies AG & Co. KG | Position sensor, in particular for determining the position of a rotor of a planar direct drive |
| WO2012143250A2 (en) | 2011-04-22 | 2012-10-26 | Schaeffler Technologies AG & Co. KG | Position sensor, in particular for determining the position of a rotor of a planar direct drive |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8181 | Inventor (new situation) |
Free format text: DREIFKE, GUENTER, DR., 98529 SUHL, DE DREIFKE, LARS, 98527 SUHL, DE WENDORFF, EKKARDT, DR., 98528 SUHL, DE |
|
| 8141 | Disposal/no request for examination |