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DE10345507A1 - Diodenlaser-Spektrometer - Google Patents

Diodenlaser-Spektrometer Download PDF

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Publication number
DE10345507A1
DE10345507A1 DE2003145507 DE10345507A DE10345507A1 DE 10345507 A1 DE10345507 A1 DE 10345507A1 DE 2003145507 DE2003145507 DE 2003145507 DE 10345507 A DE10345507 A DE 10345507A DE 10345507 A1 DE10345507 A1 DE 10345507A1
Authority
DE
Germany
Prior art keywords
gas
laser diode
measurement
series arrangement
reference signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE2003145507
Other languages
English (en)
Inventor
Michael Ludwig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Priority to DE2003145507 priority Critical patent/DE10345507A1/de
Publication of DE10345507A1 publication Critical patent/DE10345507A1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Die Erfindung betrifft ein Diodenlaser-Spektrometer mit einem Laserlicht erzeugenden Diodenlaser, einer Modulationseinrichtung zur wellenlängenabhängigen Modulation des Diodenlasers mittels eines Modulationssignals, einer ein Referenzgas enthaltenden und von dem Laserlicht durchstrahlten Referenzgasstrecke, einem der Referenzgasstrecke nachgeordneten und ein Referenzsignal erzeugenden Referenzdetektor, einer ein Messgas enthaltenden und von dem Laserlicht durchstrahlten Messgasstrecke und einem der Messgasstrecke nachgeordneten und ein Messsignal erzeugenden Messdetektor. DOLLAR A Um bei dem Diodenlaser-Spektrometer den gerätetechnischen Aufwand zu verringern, ist die Messgasstrecke (5) derart angeordnet, dass sie von dem aus der Referenzgasstrecke (4) austretenden Laserlicht (2) durchstrahlt wird und das Referenzsignal (11) des Referenzdetektors (10) über einen Rückkopplungszweig (12) im Sinne einer Gegenkopplung einem Steuereingang (13) der Modulationseinrichtung (3) zuführt.
DE2003145507 2003-09-30 2003-09-30 Diodenlaser-Spektrometer Ceased DE10345507A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2003145507 DE10345507A1 (de) 2003-09-30 2003-09-30 Diodenlaser-Spektrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003145507 DE10345507A1 (de) 2003-09-30 2003-09-30 Diodenlaser-Spektrometer

Publications (1)

Publication Number Publication Date
DE10345507A1 true DE10345507A1 (de) 2005-05-04

Family

ID=34399110

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003145507 Ceased DE10345507A1 (de) 2003-09-30 2003-09-30 Diodenlaser-Spektrometer

Country Status (1)

Country Link
DE (1) DE10345507A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008145115A3 (de) * 2007-05-25 2009-04-16 Fraunhofer Ges Forschung Vorrichtung und verfahren zur bestimmung der permeationsrate mindestens eines permeaten durch ein eine diffusionssperre bildendes element
DE102009058394B3 (de) * 2009-12-15 2011-02-10 Siemens Aktiengesellschaft Verfahren zur Messung der Konzentration mindestens einer Gaskomponente in einem Messgas
DE102012202893B3 (de) * 2012-02-27 2013-01-17 Siemens Aktiengesellschaft Verfahren zur Messung der Konzentration einer Gaskomponente in einem Messgas und Laserspektrometer
CN104568837A (zh) * 2011-11-28 2015-04-29 横河电机株式会社 激光气体分析仪
US10491160B2 (en) * 2016-07-27 2019-11-26 Siemens Aktiengesellschaft Measuring device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4711118A (en) * 1981-11-05 1987-12-08 American Telephone And Telegraph Company, At&T Bell Laboratories Detection of water entrapped in electronic components
US4937448A (en) * 1988-05-26 1990-06-26 Spectra-Physics, Inc. Self-normalizing single-beam laser spectrometer
WO2004008113A1 (de) * 2002-07-12 2004-01-22 Abb Research Ltd Absorptionsspektrometer und entsprechendes messverfahren

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4711118A (en) * 1981-11-05 1987-12-08 American Telephone And Telegraph Company, At&T Bell Laboratories Detection of water entrapped in electronic components
US4937448A (en) * 1988-05-26 1990-06-26 Spectra-Physics, Inc. Self-normalizing single-beam laser spectrometer
WO2004008113A1 (de) * 2002-07-12 2004-01-22 Abb Research Ltd Absorptionsspektrometer und entsprechendes messverfahren

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008145115A3 (de) * 2007-05-25 2009-04-16 Fraunhofer Ges Forschung Vorrichtung und verfahren zur bestimmung der permeationsrate mindestens eines permeaten durch ein eine diffusionssperre bildendes element
DE102009058394B3 (de) * 2009-12-15 2011-02-10 Siemens Aktiengesellschaft Verfahren zur Messung der Konzentration mindestens einer Gaskomponente in einem Messgas
US8830470B2 (en) 2009-12-15 2014-09-09 Siemens Aktiengesellschaft Method for measuring the concentration of at least one gas component in a measuring gas
CN104568837A (zh) * 2011-11-28 2015-04-29 横河电机株式会社 激光气体分析仪
DE102012202893B3 (de) * 2012-02-27 2013-01-17 Siemens Aktiengesellschaft Verfahren zur Messung der Konzentration einer Gaskomponente in einem Messgas und Laserspektrometer
US9207169B2 (en) 2012-02-27 2015-12-08 Siemens Aktiengesellschaft Laser spectrometer and method for measuring concentration of a gas component in a measurement gas
US10491160B2 (en) * 2016-07-27 2019-11-26 Siemens Aktiengesellschaft Measuring device

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