DE10250564B4 - Process for coating a surface, product and use of the product - Google Patents

Abstract

A method of coating a surface of a substrate (2) comprising
Coating the substrate (2) with a first antireflective coating arrangement (10) and
with an anti-scratching layer or a chemical barrier layer in which
the first anti-reflection layer arrangement (10) is applied between the anti-scratch or barrier layer and the substrate (2) and
the substrate (2) is coated with a second anti-reflection layer arrangement (20),
wherein the anti-scratch or barrier layer is applied between the first and second anti-reflection layer arrangement (10, 20), characterized in that
TiO ₂ layers and SiO ₂ layers are applied as anti-reflection layer arrangement and SiO _x C _y H _z as layer material for the anti-scratch or barrier layer.

Description

The The invention relates to a method for coating a surface coated product, as well as the use of the product.

optical Elements, e.g. B. optical lenses are often made of glass. Glass has the advantage that it has high quality requirements the surface quality, hardness and the machinability of the surface, z. As polishability and coatability met.

on the other hand there is a big one Need for replacement materials for Glass, because glass has a high weight and sometimes expensive manufacture and process is. Because of her mostly clear lower weight, ease of use and cost-effective Mass production can be found in this regard transparent plastics more and more use in traditional Glass applications.

Of the Advantage of the lower weight of plastics is z. For use as material for Eyeglass lenses especially interesting as the weight of a pair of glasses with glass lenses essentially determined by the lens weight and here consequently a considerable weight saving potential consists. On the other hand, there is a great demand for light and comfortable glasses.

Therefore enjoy plastic lenses for Glasses are becoming increasingly popular.

But also in other areas such. B. in the automotive industry consists everlasting Need for weight reduction and cost savings, which is why In this area transparent plastics displace more and more glass. exemplary are here called headlight covers. In particular, in the vehicle interior Plastic displays are used in case of accident no broken glass leads to injuries.

plastics but also have significant disadvantages compared to glass.

For the application In the automotive industry, transparent plastics are often not sufficiently UV-resistant.

Further is the resistance across from Chemicals mostly worse than glass.

Especially disadvantageous, however, is the high scratch sensitivity of plastics, in particular z. B. at low cost Polycarbonates.

Out For this reason, plastic surfaces by applying a Scratch-resistant or anti-scratch coating hardened. As an anti-scratch coating is z. For example, a silicon dioxide layer is applied by vapor deposition or an epoxy paint is applied. However, the adhesion properties of the anti-scratch layer are relative bad if this with a physical vapor deposition process is applied directly on a plastic substrate.

Therefore Typically, a primer layer will be under the anti-scratch layer applied.

Another aspect besides the scratch sensitivity is the reflective properties of the substrate or product. To reduce the reflectivity, was already in 1935 by A. Smakula in the patent DE-PS-685 767 proposed by the company Carl Zeiss to apply a thin antireflection film. This revolutionary invention is in its basic features, for. As in optical lenses, still used today.

So z. B. in the document EP 0 619 504 A1 proposed, an antireflection coating of MgF ₂ on spectacle lenses z. B. of polycarbonate with the interposition of further layers. In this method, an adhesive layer z. B. from SiO _X evaporated, and a hard layer such. B. applied as a varnish. However, this method suffers from two major disadvantages.

First be on the same lens layers with different Applied process, so that the production complicated, tedious and therefore costly designed.

Secondly impair In this method, the adhesive layer and the hard layer anti-reflective effect the anti-reflection layer significantly, so that the achieved reflection properties be improved.

From the publication US 2002/0102364 A1 For example, an object with optical layers is known in which an intermediate layer, an optical functional layer and a cover layer are arranged on a substrate.

From the publication DE 44 30 363 A1 An optical lens made of a clear plastic is known in which a borosilicate glass and layers for the purpose of antireflection effect of TiO ₂ , SiO ₂ and Al ₂ O _{3 are} formed on an SiO ₂ layer

The disadvantages described above also apply at least in part to those described in the latter two publications Teach too.

From the publication DE 101 13 030 A1 For example, a plasma coating method and an apparatus for forming as uniform layers as possible by means of a plasma-activated chemical vapor deposition are known.

Furthermore, from the document DE 195 23 444 A1 a method for coating plastics or similar soft materials by means of a plasma-enhanced CVD method, wherein a quartz-like layer is formed.

From that Based on an object of the invention, an antireflection coating provide, in cooperation with a wear layer, in particular an anti-scratching layer and / or with a bonding agent layer has a low reflection.

Yet An object of the invention is to provide a method for efficient, simple and / or inexpensive Application of in particular multifunctional layers or layer systems on a substrate available to deliver.

A Another object of the invention is to provide an antireflection coating, which over the entire visible wavelength range has a low reflection.

Yet An object of the invention is to provide a method for the production an anti-reflective coating for to provide a product or product, which avoids or at least reduces the disadvantages of the prior art.

The The object of the invention is surprising simple way already by the subject of claims 1 and 11 solved.

further developments The invention are the subject of the dependent claims. Claim 21 relates to a use according to the invention.

According to the invention is at the method of coating a surface of a product, e.g. B. an optical element first a substrate provided. The product is then replaced with a coated first antireflective layer assembly, the same time serves as a bonding agent. Furthermore, the product with a wear layer, with chemical and / or mechanical functionality, in particular a protective layer coated, wherein the first anti-reflection layer arrangement under the wear layer or between the wear layer and the substrate is arranged.

there the coating of the product is to be understood as meaning either directly on the substrate or already on the substrate Layers is coated. Preferably, therefore, first becomes the first Antireflective coating arrangement, in particular directly on the Substrate, and then the wear layer, in particular directly on applied the first anti-reflection layer arrangement.

The order according to the invention, to arrange the first anti-reflection layer arrangement under the wear layer, represents a most surprising Approach since then usually Antireflection layers applied only at the top or last were.

However, the inventors have found that the arrangement according to the invention also brings about a very effective reduction of the reflectivity to at least the value of a substrate not occupied by a wear layer. Another advantage is that the anti-reflection layer arrangement is protected under the wear layer against external influences such as scratches, especially when the wear layer as anti-scratch layer is formed.

In addition is a second anti-reflection layer arrangement is provided, which enhances the effectiveness The antireflection further improved, so in this combination a significantly reduced reflectivity over the above State of the art is achieved. The first and / or second antireflective layer arrangement preferably each comprise at least one high-index first and a low-refractive second layer, wherein in particular the first and / or second layer of the first antireflective layer arrangement consist of the same material as the first or second layer the second anti-reflection layer arrangement.

When particularly advantageous method for applying the layers, z. B. the wear layer, the first and / or second anti-reflection layer arrangement and / or further single or all layers has become the chemical Vapor deposition (chemical vapor deposition, CVD) proved. Especially special mention should be made of plasma assisted CVD (plasma assisted CVD, PACVD) or plasma enhanced CVD methods (Plasma enhanced CVD, PECVD). This is the material to be deposited provided by means of a low-temperature plasma. Especially preferred are pulsed plasma assisted CVD methods (Plasma Impulse CVD, PICVD). In these, the plasma is replaced by a pulsed direct current (DC), radio frequency (RF) or microwave irradiation (MW) ignited, wherein pulse duration and frequency of the electromagnetic wave adjustable and / or are variable.

advantageously, is the thermal stress of the substrate in the pulsed process opposite continuous Process reduced, which is particularly interesting for plastic substrates is.

By the use of a CVD method for depositing the layers results in the synergetic effect that the substrate in one uniform production process, in one and the same coating plant, z. B. in the same recipient, remains and not for different Layers of different methods are used. This enormous Cost and time advantage comes especially to bear, if the anti-scratch layer and the first anti-reflection layer arrangement and / or an adhesion promoter layer with the same procedure, e.g. B. PICVD vaporized, since so far the anti-scratch layer frequently was applied as a varnish. Preferably, therefore, at least the first anti-reflection layer arrangement and the wear layer, preferably but also single, several or all other layers at least partly applied by the same method or vapor-deposited.

It is also advantageous that the first and / or second anti-reflection layer arrangement, the wear layer and / or individual, several or all other layers of the same, in particular gaseous starting material, a so-called "precursor", z. As TiCl ₄ or hexamethyldisiloxane (HMDSO) or from a mixture of these, can be produced. In particular, only process parameters during coating, such as. As gas pressure, gas composition, pulse duration, pulse rate and / or microwave power varies.

According to one particularly preferred embodiment The invention relates to the first and / or second antireflective coating arrangement multi-layered, d. H. comprise at least 2, 3, 4, 5 or 6 layers. In particular, the refractive index of at least one layer, for. B. the substrate next Layer of the first and / or second anti-reflection layer arrangement higher than the refractive index of the substrate.

Further is the refractive index of the immediately next to the substrate-next layer adjacent layer preferably less than the refractive index the substrate next Layer. As high-index layers are preferably metal oxides used.

Prefers if the product is coated with a primer layer, which is applied in particular directly on the substrate.

According to one Advantageous development, the adhesive layer is an optical functional component of the first antireflective coating arrangement, d. H. it acts by reducing its refraction properties of reflectivity With.

The adhesion promoter layer preferably comprises one or more layers which comprise a metal, a metal compound and / or a metal oxide, in particular TiO ₂ , Al ₂ O ₃ , Ni ₂ O ₅ , Ta ₂ O ₅ , Ti ₂ O ₅ , ZrO ₂ and / or CrO. ₂

• – Substrat
• – Haftvermittlerschicht
• – erste Entspiegelungsschichtanordnung
• – Antikratzschicht
• – zweite Entspiegelungsschichtanordnung
• – Luft

The order of the layer arrangements is preferably directly or with the admission of further layers as follows:

• - Substrate
• - Adhesive layer
• - First anti-reflection layer arrangement
• - Anti-scratch coating
• Second antireflective layer arrangement
• - Air

Tests have shown that a PICVD applied metal oxide adhesion promoter layer leads to a very good adhesion to polycarbonate substrates. This also applies if subsequently a relatively thick SiO ₂ layer is applied as an anti-scratch layer. Due to the high refractive index metal oxide mediator layer and a subsequent anti-scratch layer of e.g. B. SiO ₂ , however, creates a stronger interference ripple than just by a (usually similar to the substrate in the refractive index) anti-scratch layer. Advantageously, the present invention nevertheless prevents strong interference ripples from occurring due to the anti-scratching layer, so that an improved antireflection coating is achieved in comparison to conventional methods.

Preferably For example, the first primer layer comprises a first high refractive index Layer, wherein among high-breaking in particular a material with a refractive index of n = 1.7; 1.8; 1.9; 2.0; 2.1; 2.2; 2,3 or 2,4 is understood.

According to one preferred embodiment of the invention comprises the first anti-reflection layer arrangement a first low refractive layer. Under a low-breaking Layer is understood in particular a layer which has a Refractive index less than that of the primer layer and / or less than 1.7; 1.6 or 1.5. The first low-refractive Layer closes preferably immediately adjacent to the primer layer on the substrate-side facing away.

Further a first anti-reflection layer arrangement from 3, 5 is preferred 7 or more layers which are mirror-symmetric with respect to Layered materials and / or re the layer thicknesses. Alternatively, 4, 6, 8 or more with respect to Layer materials alternating layers can be used.

A Particularly effective antireflection is achieved when the substrate and the entirety of the first antireflective layer assembly together with the wear layer an adjustment with respect to the refractive indices exhibit. Furthermore, the equivalent Refractive index of the first antireflective coating arrangement, in particular approximately in the middle at an interval of +/- 50 between the refractive index of the substrate and the wear layer to provide effective antireflection to achieve.

The wear layer is z. B. formed as anti-scratch and / or as a chemical barrier layer. In this case, the wear layer in particular has a thickness which by a multiple, for. B. at least 5 times or 10 times greater than the thickness of the remaining layers. For the anti-scratch layer are silicon compounds, particularly useful in particular SiO _X C _Y H _Z, since its mechanical and optical properties are advantageous.

The Wear layer is preferred as a gradient layer, z. B. with respect to her Hardness or their refractive index formed.

When Substrate is z. B. a transparent material, in particular a Plastic used. The substrate in this case has a refractive index of n = 1.5; 1.6; 1.7; 1.8; 1.9; 2.0; 2.1; 2.2 or 2.3 on. The However, a process for anti-reflection of a surface is also suitable for the Coating of glass and other materials. As plastics were successfully coated polycarbonate (PC) and polymethylacrylate (PMA).

Preferably are the refractive index and / or the thickness of one, several or all layers of each other and / or to the refractive index adapted to the substrate that the product has a reduced reflectivity.

Preferably is the wear layer over, d. H. Substrate further, the first anti-reflection layer arrangement and the second antireflective layer assembly over the wear layer, respectively directly or under the authorization of further intermediate layers applied.

The first antireflective layer arrangement preferably has a thickness of 10 nm to 1000 nm, in particular 50 nm to 200 nm.

With the method according to the invention a product was prepared which has an average reflectivity of ≤ 4%; 1.5%; 1% or 0.5% in the wavelength range between 380 nm and 780 nm. A redshift of the anti-reflective coating however, to use the invention in the near and far infrared equally possible.

in the The invention is based on preferred embodiments and explained in more detail with reference to the figures. Same or similar Elements are provided with the same reference numerals.

Brief description of the figures

It demonstrate:

1 a product according to the invention according to a first embodiment,

2 FIG. 4 is a graph of the reflectance as a function of wavelength for the first embodiment; FIG.

three a product according to the invention according to a second embodiment,

4 as 2 but for the second embodiment, first exemplary embodiment

1 shows an optical product 1 comprising a transparent substrate 2 made of polycarbonate onto which an anti-reflection coating arrangement 10 applied by CVD or vapor-deposited. The anti-reflection layer arrangement 10 comprises several optical layers, namely a TiO ₂ layer 11 which are directly on the substrate 2 is applied, an SiO ₂ layer, which directly on the TiO ₂ layer 11 is applied and another TiO ₂ layer 13 which directly on the SiO ₂ layer 12 is applied. The layer thicknesses of the two TiO ₂ layers 11 . 13 are each 5 nm and the layer thickness of the SiO ₂ layer 12 is 61.20 nm. Consequently, the anti-reflection layer arrangement in this embodiment is mirror-symmetrical with respect to the layer materials and the layer thicknesses.

Immediately on the anti-reflection layer arrangement, more precisely directly on the TiO ₂ layer 13 is a wear layer, more precisely an anti-scratch layer 30 from 2000 nm SiO _X C _Y H _Z applied.

Around the stoichiometry To determine the anti-scratch layer, XPS measurements were made on layers made with 15% HMDSO in oxygen. This is about the lower value of those used for the anti-scratch layers Concentrations. Since preferably the HMDSO concentration during a Gradient layer is varied, but this is only a guideline to watch.

hydrogen can not be detected with XPS, but only in very low concentrations occur.

The result of an XPS measurement is as follows: element o percent O 54.5 Si 27.6 C 17.7

This results in the following relationship: SiO _1.97 C _0.64

Immediately on the anti-scratch layer 30 is a second anti-reflection layer arrangement 20 applied, which is a TiO ₂ layer 21 , an SiO ₂ layer 22 , a TiO ₂ layer 23 and a SiO ₂ layer 24 in this order. The second anti-reflection layer arrangement 20 , more precisely, the SiO ₂ layer 24 forms the uppermost layer, ie the interface to the air. The thicknesses and refractive indices of the layers are listed in Table 1. Preferably, the respective parameters are also with respect to the other succeeding the tables in a range of +/- 50%, more preferably in a range of +/- 20% and most preferably in a range of +/- 10% to the listed values. Table 1: material layer thickness Refractive index n at 550 nm Glass n ₂ = 1.520 TiO ₂ 5 nm 2.402 SiO ₂ 81 nm 1,455 TiO ₂ 5 nm 2.402 SiO _X C _Y H 2000 nm n ₃₀ = 1.420 TiO ₂ 12.14 nm 2.402 SiO ₂ 35.24 nm 1,455 TiO ₂ 108.34 nm 2.402 SiO ₂ 86.29 nm 1,455 air 1,000

The three layers 11 . 12 and 13 the first anti-reflection layer arrangement 10 or pre-reflective coating have an equivalent refractive index of n ₁₀ = 1.469.

The refractive index of the substrate 2 , In this embodiment, glass is n ₂ = 1.520. Thus, the refractive index of the anti-reflection layer arrangement is 10 exactly between the refractive index of the substrate 2 and the anti-scratch layer 30 ,

Thus, the TiO ₂ layer is 11 designed so that it fulfills two functions. It is firstly as a primer layer for the further layer structure and secondly as an optically functional constituent of the first antireflective layer arrangement 10 educated.

The anti-scratch layer 30 together with the first antireflective layer arrangement 10 acts at least in a certain wavelength range as a refractive index matching and the subsequent second anti-reflection layer arrangement 20 is significantly more free of ripples and better in the anti-reflection effect.

2 FIG. 12 shows a graph of the reflectivity in percent as a function of wavelength in nm for the first embodiment 1 ,

The curve shows 41 the reflectivity of a product without the first antireflective layer assembly 10 and without the anti-scratching layer, ie for an arrangement consisting solely of the substrate and the second anti-reflection layer arrangement 20 ,

The curve 42 shows a product without the first anti-reflection coating arrangement 10 ie an arrangement consisting only of the substrate 2, a bonding agent of the anti-scratching layer 30 and the second antireflective layer assembly 20 , It can be clearly seen how the anti-reflection effect is impaired by the primer layer and the anti-scratch layer.

The curve 43 shows the reflectivity of the product according to the invention 1 as in 1 represented, ie the substrate 2 with the first and second antireflective layer assembly 10 . 20 and the anti-scratch layer in between 30 , The curve 43 shows a significant reduction in reflectivity versus the curve 42 ,

The excellent antireflection effect, ie low reflectance, is a result of the interposition of the first antireflective coating arrangement 10 which comprise not only a metal oxide layer as the adhesion base, but also a layer system, in this example two metal oxide layers, more precisely TiO ₂ layers 11 . 13 and an SiO ₂ layer interposed therebetween 12 includes.

Second exemplary embodiment

three shows a second embodiment of the invention, in which the second anti-reflection layer arrangement 20 a total of six layers 21 to 26 includes. Otherwise, the second embodiment is formed with respect to the layer sequence according to the first embodiment. Here are the two top layers 25 . 26 a TiO ₂ or SiO ₂ layer. Further, there is the substrate 2 from a spectacle plastic with a refractive index of 1.7. The layer thicknesses and further refractive indices are shown in Table 2. Table 2: material layer thickness Refractive index n at 550 nm Glasses plastic 1,700 TiO ₂ 6 nm 2.402 SiO ₂ 60 nm 1,455 TiO ₂ 6 nm 2.402 SiO _X C _Y H 2000 nm 1,420 TiO ₂ 10 nm 2.402 SiO ₂ 28 nm 1,455 TiO ₂ 46 nm 2.402 SiO ₂ 17 nm 1,455 TiO ₂ 35 nm 2.402 SiO ₂ 96 nm 1,455 air 1,000

Referring to 4 shows the curve 43 the reflectivity of the product according to the invention 1 according to three , The curve 42 shows the reflectivity of a conventional product without the first antireflective layer assembly 10 instead, with only one primer layer in place.

Process for layer deposition

in the Following is the method of applying the different layers closer to the substrate described.

All layers are applied by a pulsed plasma plasma chemical vapor deposition (PICVD) process. In the PICVD process, a starting material or precursor, a so-called precursor, is introduced into a recipient, e.g. B. introduced a vacuum chamber. The basic material is z. Example, TiCl ₄ or HMDSO (hexamethyldisiloxane), which is preheated to about 40 degrees to increase the gas pressure. By means of the microwave power, the compound of the basic substance is smashed to extremely chemically reactive constituents.

at the method according to the invention The microwave power is pulsed, which has the advantage that the thermal load for the substrate is kept low.

This is especially for Plastics advantageous. By means of the process parameters: temperature, Gas composition, gas pressure and coating time in the chamber are the composition and thickness of each layer to be applied adjustable. Advantageously, with one and the same Process and possibly base different layer materials and Thicknesses are generated so that all layers can be created without that the product is removed from the recipient.

The process parameters for the two embodiments of the invention described above are described below. The unit used, sccm, corresponds to cm ³ / min at standard conditions.

The SiO ₂ layers are deposited with the following parameters: parameter Area microwave power 2000 W-8000W print 0.1 mbar-0.5 mbar O ₂ flow 500 sccm-2000 sccm HMDSO flow 20 sccm-100 sccm pulse duration 1 ms-10 ms pulse pause 50 ms-200 ms

The TiO ₂ layers are deposited using the following process parameters: parameter Area microwave power 4000 W-8000 W print 0.1 mbar-0.5 mbar O ₂ flow 500 sccm-2000 sccm HMDSO flow 1 sccm-50 sccm pulse duration 1 ms-10 ms pulse pause 100 ms-500 ms

The SiO _X C _Y H _Z layer is deposited with the following parameters: parameter Area microwave power 2000 W-8000W print 0.1 mbar-0.5 mbar O ₂ flow 500 sccm-2000 sccm HMDSO River (ramp) from up to 500 sccm declining to up to 50 sccm pulse duration 1 ms-10 ms pulse pause 20 ms-200 ms

in this connection It should be noted that the HMDSO flow decreases, in particular continuously can be set down.

It is for those skilled in the art will appreciate that the invention is not limited to the above described embodiments limited is, but rather the layer thicknesses, layer materials and Layer sequences can be varied without the spirit of the invention to leave.

Claims (21)

Method for coating a surface of a substrate ( 2 ), comprising coating the substrate ( 2 ) with a first antireflective coating arrangement ( 10 ) and with an anti-scratching layer or a chemical barrier layer in which the first anti-reflection coating arrangement ( 10 ) between the anti-scratch or barrier layer and the substrate ( 2 ) is applied and the substrate ( 2 ) with a second antireflective coating arrangement ( 20 ), wherein the anti-scratch or barrier layer between the first and second anti-reflection layer arrangement ( 10 . 20 ) is applied characterized in that each layer of TiO ₂ layers and SiO ₂ layers and as a layer material for the anti-scratch or barrier layer SiO _x C _y H _{z is} applied as anti-reflection layer arrangement. Method according to claim 1, characterized in that at least one of the layers to be applied ( 11 . 12 . 13 . 30 . 21 . 22 . 23 . 24 . 25 . 26 ) is applied by at least one of the following methods: chemical vapor deposition (CVD); Plasma enhanced chemical vapor deposition (PECVD); Plasma-assisted chemical vapor deposition (PACVD); pulsed plasma chemical vapor deposition (PICVD). Method according to one of the preceding claims, characterized in that the first and second antireflective coating arrangement ( 10 . 20 ) are applied with more than two layers. Method according to one of the preceding claims, characterized in that the substrate ( 2 ) immediately adjacent to the substrate with a primer layer ( 11 ) is coated. Method according to claim 4, characterized in that the substrate ( 2 ) is coated in such a way that an adhesive layer ( 11 ), which is an optically functional constituent of the first antireflective coating arrangement ( 10 ) is applied. Method according to one of claims 4 or 5, characterized in that as a primer layer ( 11 ), a metal or a metal compound, in particular a metal oxide-containing layer is applied. Method according to one of claims 4 to 6, characterized in that as a primer layer ( 11 ) a high refractive index layer is applied. Method according to one of the preceding claims, characterized in that as the first anti-reflection layer arrangement ( 10 ) is applied with respect to the layer materials an alternating or mirror-symmetrical layer sequence of at least three layers. Method according to one of the preceding claims, characterized in that the substrate ( 2 ), the first antireflective layer arrangement ( 10 ) and the anti-scratch or barrier layer are selected such that the equivalent refractive index (n ₁₀ ) of the first anti-reflection coating arrangement ( 10 ) between the refractive index of the substrate ( 2 ) and the anti-scratch or barrier layer is located. Method according to one of the preceding claims, characterized characterized in that the anti-scratch or barrier layer as a gradient layer is applied. Coated substrate comprising a substrate ( 2 ), a first antireflective coating arrangement ( 10 ), an anti-scratching layer or a chemical barrier layer and a second anti-reflection layer arrangement ( 20 ), wherein the first antireflective coating arrangement ( 10 ) between the anti-scratch or barrier layer and the substrate ( 2 ) and the anti-scratch or barrier layer between the first and second anti-reflection layer arrangement ( 10 . 20 ) is arranged, characterized in that each TiO ₂ layers and SiO ₂ layers and as a layer material for the anti-scratch or barrier layer SiO _x C _y H _{z is} applied as anti-reflection layer arrangement. Coated substrate according to claim 11, characterized in that the layers comprise different layer materials (TiO ₂ , SiO ₂ , SiO _x C _Y H _Z ) which are produced by means of a variation of the process parameters of a vapor deposition. Coated substrate according to one of the preceding claims, characterized in that the first and second antireflective coating arrangement ( 10 . 20 ) each have more than two layers. Coated substrate according to one of the preceding claims, characterized in that a primer layer ( 11 ) directly on the substrate ( 2 ) is applied. Coated substrate according to claim 14, characterized in that the adhesive layer ( 11 ) an optically functional constituent of the first antireflective coating arrangement ( 10 ). Coated substrate according to one of claims 14 or 15, characterized in that the primer layer ( 11 ), a metal or a metal compound, in particular a metal oxide. Coated substrate according to one of the preceding claims 14 to 16, characterized in that the adhesion promoter layer ( 11 ) comprises a high refractive index layer. Coated substrate according to one of the preceding claims, characterized in that the first antireflective coating arrangement ( 10 ) with respect to the layer materials comprises an alternating or mirror-symmetrical layer sequence of at least three layers. Coated substrate according to one of the preceding claims, characterized in that the equivalent refractive index (n ₁₀ ) of the first antireflective coating arrangement ( 10 ) between the refractive index of the substrate ( 2 ) and the anti-scratch or barrier layer is located. Coated substrate according to any one of the preceding Claims, characterized in that the anti-scratch or barrier layer is a gradient layer includes. Use of the coated substrate after one the preceding claims, as a spectacle lens or display cover.