DE10227637A1 - Method and device for the plasma treatment of workpieces - Google Patents

Abstract

The method and the device are used for the plasma treatment of workpieces. The workpieces are inserted into an at least partially evacuable chamber of a treatment station and the workpieces are positioned within the treatment station by holding elements. In the area of the treatment station, at least two holding elements are positioned relative to one another by a common carrier.

Description

The invention relates to a method for plasma treatment of workpieces, where the workpieces into an at least partially evacuable plasma chamber of a treatment station are used and in which the workpieces within the treatment station be positioned by holding elements.

The invention also relates to a device for plasma treatment of workpieces, the at least one evacuable Has plasma chamber for receiving the workpieces and in which the Plasma chamber is arranged in the area of a treatment station, as well as the plasma chamber from a chamber floor, a chamber lid and a lateral chamber wall is limited and at least has a holding element for positioning the workpieces.

Such methods and devices are used, for example, to make plastics with surface coatings to provide. In particular, such methods are already in place and devices known to cover inner or outer surfaces of containers coat that are intended for packaging liquids. Furthermore devices for plasma sterilization are known.

In the PCT-WO 95/22413 describes a plasma chamber for the internal coating of bottles made of PET. The bottles to be coated are lifted into a plasma chamber by a movable base and connected to an adapter in the area of a bottle mouth. The interior of the bottle can be evacuated through the adapter. In addition, a hollow lance is inserted through the adapter into the interior of the bottles to supply process gas. The plasma is ignited using a microwave.

It is already from this publication known, a plurality of plasma chambers on a rotating wheel to arrange. This will result in a high production rate of bottles supported per unit of time.

In the EP-OS 10 10 773 a supply device is explained to evacuate a bottle interior and to supply it with process gas. In the PCT-WO 01/31680 describes a plasma chamber into which the bottles are inserted from a movable lid which was previously connected to a mouth region of the bottles.

The PCT-WO 00/58631 also already shows the arrangement of plasma stations on a rotating wheel and describes for such an arrangement a group assignment of vacuum pumps and plasma stations in order to support a favorable evacuation of the chambers and the interior of the bottles. In addition, the coating of several containers in a common plasma station or a common cavity is mentioned.

Another arrangement for performing an internal coating of bottles is in the PCT-WO 99/17334 described. In particular, an arrangement of a microwave generator above the plasma chamber and a vacuum and operating medium feed line through a bottom of the plasma chamber are described here.

In the vast majority of the known methods, container layers made of silicon oxides with the general chemical formula SiO _x are used to improve the barrier properties of the thermoplastic plastic material. In addition, portions of carbon, hydrogen and nitrogen can also be contained in the barrier layers produced in this way. Barrier layers of this type prevent oxygen from entering the packaged liquids and escape of carbon dioxide in the case of liquids containing CO ₂ .

The previously known methods and Devices are not yet sufficiently suitable for for one Mass production to be used in both a low Coating price per workpiece as well as a high production speed must be achieved.

Object of the present invention it is therefore a method of the type mentioned in the introduction to indicate that a quantitative production output with good product quality elevated becomes.

This object is achieved according to the invention solved, that at least two holding elements in the area of the treatment station from a common one carrier be positioned relative to each other.

Another task of the present The invention is such a device of the type mentioned in the introduction to construct that at compact structure, high production output and good product quality are supported.

This object is achieved according to the invention solved, that at least two holding elements held in the area of the plasma station by a common carrier are.

Through the common positioning the holding elements from a common carrier in the area of the treatment station Is it possible, one per treatment station Support production performance. In particular, inserting the workpieces to be processed into the Treatment station and a removal of the finished workpieces the treatment center supports. The common carrier for the Holding elements supported an exactly reproducible positioning of the containers within the plasma station as well as the implementation of input and output processes with short time and high reliability.

To support a quick implementation of transfer operations, it is proposed that at least two holding elements in the direction of egg ner movement carried out at least temporarily during the execution of a treatment process relative to one another are moved together with the carrier.

Simultaneous treatment of one larger number of workpieces with a compact construction of the treatment device is supported in that at least two holding elements transversely to the direction one from the carrier during the execution of a treatment process performed movement at least temporarily are moved relative to each other together with the carrier.

With a coating of hollow Workpieces, the one with its mouth are arranged downwards, it proves advantageous that an evacuation a cavity the plasma station takes place through the chamber floor.

A simple implementation in terms of device technology also supported by that by process gas through the chamber floor supplied becomes.

A quick and even distribution of the process gas in an interior of the workpieces can be achieved in that the process gas through a lance indoors of the workpieces supplied becomes.

Simultaneous insertion and Extract a larger number of workpieces in the treatment station or from the treatment station allows that the carrier is positioned relative to the treatment station.

In particular, it is thought that the carrier with at least one workpiece loaded into the treatment station.

It also proves to shorten handover times as advantageous that the carrier with at least one workpiece loaded from the treatment station.

A continuous implementation of handover processes will supported by that the carrier at least temporarily a rotational movement relative to the treatment station performs.

Simple kinematics when performing transfer operations can can be achieved in that the carrier is loaded with workpieces to be treated by a circumferential transfer element.

When using route-type transfer devices it proves to be advantageous that the transfer element at least at the time of delivery of a workpiece to the carrier is moved at the same speed as the carrier.

To support a controllable ignition of the Plasma is proposed that in Area of the chamber cover of at least one microwave generator generated microwaves are introduced into the cavity.

A typical application is that workpieces out be treated with a thermoplastic.

In particular, it is thought that interiors of the workpieces be treated.

An extensive area of application is opened up by the fact that as workpieces Container treated become.

In particular, it is thought that as workpieces beverage bottles be treated.

A high production rate with great reliability and high product quality can be achieved in that the at least one plasma station from a rotating plasma wheel from an input positioning is transferred to an output positioning.

An increase in production capacity at only slight increased equipment expenditure can be achieved in that several from one plasma station wells to be provided.

A use of conventional transfer wheels for execution of handover processes too at plasma stations for the treatment of several workpieces thereby enables that the treatment center is positioned by a clocked moving plasma wheel.

This becomes a typical application defines that as Plasma treatment a plasma coating is carried out.

In particular, it is thought that the plasma treatment is performed using a low pressure plasma.

When coating workpieces Plastic proves to be advantageous for plasma polymerization carried out becomes.

A good surface adhesion is supported by the fact that the plasma deposited at least partially organic substances become.

Particularly advantageous usage properties for workpieces for packaging food can be achieved that by the plasma deposited at least partially inorganic substances become.

In the treatment of packaging is especially thought that through the plasma a substance deposited to improve the barrier properties of the workpieces becomes.

To support a high quality of use, it is proposed that additionally a Adhesion promoter to improve adherence of the substance surfaces of the workpieces is deposited.

This can result in high productivity supports be that in a common cavity at least two workpieces be treated at the same time.

Another area of application exists in that as Plasma treatment a plasma sterilization is carried out.

It is also thought that as a plasma treatment a surface activation of the workpieces carried out becomes.

To derive the finished ones workpieces it is proposed that for removal finished workpieces from the area of the carrier at least one unloading station is used.

The workpieces to be treated are fed in that the feed of workpieces to be machined in the area of the carrier at least a loading station is used.

This can result in very short handover times be that the Loading station for feeding workpieces to be machined is formed to a carrier separate from the plasma wheel.

This allows low weights to be transferred when carrying out the transfer processes be achieved that each at least one carrier is arranged in the area of each plasma station.

A simple implementation of the handover processes will supported by that at least two Holding elements are arranged along a circumference of the carrier.

For the feeder of workpieces for carriers rotating together with a plasma wheel, it proves advantageous that to handover of workpieces to be treated to the carrier an input route is provided.

A kinematically simple implementation of the transfer processes is supported by that the input path runs centrally to a center of the plasma wheel.

Locally variable transfer points can can be realized in that the Input path is arranged in the area of a transfer element.

Simple kinematic boundary conditions for the implementation the transfer operations are thereby provided that a Movement speed of the transfer element to a movement speed of the carrier carried by the plasma wheel customized is.

To derive finished treated Workpieces suggested that for Removal of workpieces to be treated from the sluggish one Output route is provided.

Also proven when unloading the workpieces it is advantageous that the Output line runs centrally to a center of the plasma wheel.

It is also used for unloading thought that the Output section is arranged in the area of a transfer element.

A convenient flow of material at Discharge can be achieved by rotating the transfer element is driven.

Optimal process angle utilization is achieved in that two cycle positions with a stationary plasma wheel on the one hand Loading station and on the other hand the unloading station are arranged.

In a clocked mode of operation a simple constructive implementation is achieved in that the loading station is designed as a loading wheel.

In particular, with a clocked Operating mode also thought that the unloading station as a Unloading wheel is formed.

An advantageous kinematics in transfer processes achieved in that the Wheels a peripheral speed according to a transport speed of the carrier in Area of the current transfer area exhibit.

Another mode of operation is thereby defines that for the period between entering the workpieces in the plasma station and an output of the workpieces at least two rotations of rotation of the plasma wheel are provided.

A material flow on an essentially constant Height can can be achieved in that the Plasma station can be positioned at least partially in the direction of the carrier guided is.

Another variant is that the carrier Can be positioned vertically from above into the plasma chamber is led.

Finally, it is also thought that the carrier in perpendicular Direction from below into the plasma chamber is guided.

Exemplary embodiments are shown in the drawings the invention is shown schematically. Show it:

1 A schematic diagram of a plurality of plasma chambers, which are arranged on a rotating plasma wheel and in which the plasma wheel is coupled to input and output wheels.

2 an arrangement similar to 1 , in which the plasma station is equipped with two plasma chambers,

3 1 shows a perspective illustration of a plasma wheel with a multiplicity of plasma chambers,

4 a perspective view of a plasma station with a cavity,

5 a front view of the device according to 4 with closed plasma chamber,

6 a cross section along section line VI-VI in 5 .

7 a representation accordingly 5 with open plasma chamber,

8th a vertical section along section line VIII-VIII in 7 .

9 an enlarged view of the plasma chamber with the bottle to be coated according to 6 .

10 1 shows a perspective view of a support ring of a plasma wheel, on which a plurality of carriers for positioning several holding elements for bottle-shaped workpieces are arranged,

11 is a schematic representation of a plasma wheel, used in the fully equipped carrier for the workpieces in the plasma wheel and after performing the treatment process together with the treated workpieces are removed from the plasma wheel again,

12 one opposite 11 modified embodiment, in which rotatably mounted carriers are arranged on the plasma wheel, which interact with loading and unloading lines, which are arranged outside the plasma wheel,

13 A further modified embodiment in which a cyclic operation of the plasma wheel and a cyclical operation of input wheels and output wheels is provided,

14 a plan view of a holding element for a single workpiece,

15 a perspective view of a holding element according to 14 and

16 the holding element according to 15 with a bottle-shaped workpiece.

From the representation in 1 is a plasma module ( 1 ) to recognize that with a rotating plasma wheel ( 2 ) is provided. Along a circumference of the plasma wheel ( 2 ) are a plurality of plasma stations ( 3 ) arranged. The plasma stations ( 3 ) are with cavities ( 4 ) or plasma chambers ( 17 ) for holding workpieces to be treated ( 5 ) Mistake. To explain the basic construction principle is in 1 only one workpiece at a time ( 5 ) per plasma station ( 3 ). The feeds and discharges of the workpieces also only show schematically the handling of individual workpieces ( 5 ). In fact, every plasma station ( 3 ) at least two workpieces ( 5 ) assigned.

The workpieces to be treated ( 5 ) according to the simplification of the representation made to the plasma module ( 1 ) in the area of an entry ( 6 ) fed and via a separating wheel ( 7 ) to a transfer wheel ( 8th ) with the positionable support arms ( 9 ) Is provided. The support arms ( 9 ) are relative to a base ( 10 ) of the transfer wheel ( 8th ) arranged pivotably so that a change in the distance of the workpieces ( 5 ) can be performed relative to each other. As a result, the workpieces are handed over ( 5 ) from the transfer wheel ( 8th ) to an input wheel ( 11 ) with a relative to the singling wheel ( 7 ) increased distance between the workpieces ( 5 ) relative to each other. The input wheel ( 11 ) hands over the workpieces to be treated ( 5 ) to the plasma wheel ( 2 ). After the treatment has been carried out, the treated workpieces ( 5 ) from an output wheel ( 12 ) from the area of the plasma wheel ( 2 ) removed and in the area of an output stretch ( 13 ) transferred.

In the embodiment according to 2 To further clarify the design principle, the plasma stations ( 3 ) each with two cavities ( 4 ) or plasma chambers ( 17 ). This allows two workpieces ( 5 ) are treated at the same time. Basically, it is possible to 4 ) to be completely separate from one another, but in principle it is also possible to delimit only partial areas from one another in a common cavity space in such a way that an optimal coating of all workpieces ( 5 ) is guaranteed. In particular, it is contemplated here to separate the partial cavities from one another at least by means of separate microwave couplings.

3 shows a perspective view of a plasma module ( 1 ) with partially assembled plasma wheel ( 2 ). Again, for simplification, there is only one workpiece ( 5 ) per plasma station ( 3 ) mapped. The plasma stations ( 3 ) are on a support ring ( 14 ) arranged as part of a rotary connection and in the area of a machine base ( 15 ) is stored. The plasma stations ( 3 ) each have a station frame ( 16 ) on the plasma chambers ( 17 ) holds. The plasma chambers ( 17 ) have cylindrical chamber walls ( 18 ) and microwave generators ( 19 ) on.

In a center of the plasma wheel ( 2 ) is a rotary distributor ( 20 ) over which the plasma stations ( 3 ) are supplied with resources and energy. In particular, ring lines ( 21 ) are used.

The workpieces to be treated ( 5 ) are below the cylindrical chamber walls ( 18 ).

Lower parts of the plasma chambers ( 17 ) are not shown for simplification.

4 shows a plasma station ( 3 ) in perspective. Again, for simplification, there is only one workpiece ( 5 ) per plasma station ( 3 ) mapped. It can be seen that the station frame ( 16 ) with guide rods ( 23 ) is provided on which a carriage ( 24 ) for holding the cylindrical chamber wall ( 18 ) is performed. 4 shows the sledge ( 24 ) with chamber wall ( 18 ) in a raised state so that the workpiece ( 5 ) is released.

In the upper area of the plasma station ( 3 ) is the microwave generator ( 19 ) arranged. The microwave generator ( 19 ) is about a redirection ( 25 ) and an adapter ( 26 ) to a coupling channel ( 27 ) connected to the plasma chamber ( 17 ) flows into. Basically, the microwave generator ( 19 ) both directly in the area of the chamber cover ( 31 ) as well as a spacer on the chamber cover ( 31 ) coupled with a predeterminable distance to the chamber lid ( 31 ) and thus in a coarser area around the chamber cover ( 31 ) to be ordered. The adapter ( 26 ) has the function of a transition element and the coupling channel ( 27 ) is designed as a coaxial conductor. In the area of a junction of the coupling channel ( 27 ) in the chamber lid ( 31 ) a quartz glass window is arranged. The redirection ( 25 ) is designed as a waveguide.

The workpiece ( 5 ) is in the area of a sealing element ( 28 ) positioned in the area ei chamber floor ( 29 ) is arranged. The chamber floor ( 29 ) is part of a chamber base ( 30 ) educated. To facilitate adjustment, it is possible to remove the chamber base ( 30 ) in the area of the guide rods ( 23 ) to fix. Another variant is to mount the chamber base ( 30 ) directly on the station frame ( 16 ) to fix. With such an arrangement it is also possible, for example, to 23 ) in two parts in the vertical direction.

5 shows a simplified front view of the plasma station ( 3 ) according to 3 in a closed state of the plasma chamber ( 17 ). Again, for simplification, there is only one workpiece ( 5 ) mapped. The sled ( 24 ) with the cylindrical chamber wall ( 18 ) is compared to the positioning in 4 lowered so that the chamber wall ( 18 ) against the chamber floor ( 29 ) drove. The plasma coating can be carried out in this positioning state.

6 shows the arrangement according to in a vertical sectional view 5 , It can be seen in particular that the coupling channel ( 27 ) in a chamber cover ( 31 ) opens out, which has a laterally projecting flange ( 32 ) having. In the area of the flange ( 32 ) is a seal ( 33 ) arranged by an inner flange ( 34 ) the chamber wall ( 18 ) is applied. In a lowered state of the chamber wall ( 18 ) seals the chamber wall ( 18 ) relative to the chamber cover ( 31 ). Another seal ( 35 ) is in a lower area of the chamber wall ( 18 ) arranged to seal relative to the chamber floor ( 29 ) to ensure.

In the in 6 the positioning shown encloses the chamber wall ( 18 ) the cavity ( 4 ), so that both an interior of the cavity ( 4 ) as well as the interior of the workpieces ( 5 ) can be evacuated. To support a supply of process gas in the area of the chamber base ( 30 ) hollow lances ( 36 ) arranged in the interior of the workpieces ( 5 ) can be moved into it. To position the lances ( 36 ) they are lifted by a lance 37 ) held along the guide rods ( 23 ) can be positioned. Within the lance slide ( 37 ) runs a process gas channel ( 38 ) who in the in 6 shown raised positioning with a gas connection ( 39 ) of the chamber base ( 30 ) is coupled. With this arrangement, hose-like connecting elements on the lance carriage ( 37 ) avoided.

7 and 8th show the arrangement according to 5 and 6 in a raised state of the chamber wall ( 18 ). In this position of the chamber wall ( 18 ) it is easily possible to process the treated workpieces ( 5 ) from the area of the plasma station ( 3 ) remove new workpieces to be treated ( 5 ) to use. As an alternative to the positioning of the chamber wall shown in the drawings ( 18 ) in an opened state of the plasma chamber which has been reached by displacement upwards ( 17 ) it is also possible to carry out the opening process by displacing a structurally modified sleeve-shaped chamber wall in the vertical direction downwards.

In the exemplary embodiment shown, the coupling channel ( 27 ) a cylindrical design and is essentially coaxial to the chamber wall ( 18 ) arranged.

9 shows the vertical section according to 6 in an enlarged partial representation in an environment of the chamber wall ( 18 ). In particular, the overlap of the inner flange ( 34 ) the chamber wall ( 18 ) over the flange ( 32 ) of the chamber cover ( 31 ) and the holder of the workpieces ( 5 ) through the sealing elements ( 28 ). It can also be seen that the lance ( 36 ) through a recess ( 40 ) of the sealing element ( 28 ) is passed through.

10 shows a support ring ( 14 ) a further embodiment of the plasma wheel ( 2 ). On the support ring ( 14 ) are a plurality of carriers ( 41 ) arranged, each holding elements ( 42 ) for the workpieces ( 5 ) position. In the embodiment shown, the carriers ( 41 ) essentially circular and six holding elements ( 42 ) are near a circumference of the carrier ( 41 ) arranged. The holding elements ( 42 ) are for positioning bottle-shaped workpieces ( 5 ), whereby the workpieces ( 5 ) are each arranged with mouth openings in the vertical direction downwards.

The carrier ( 41 ) with the holding elements ( 42 ) and the workpieces ( 5 ) in differently designed plasma stations ( 3 ) are used. For example, the plasma station ( 3 ) with only one plasma chamber ( 17 ) and all workpieces ( 5 ) together in this plasma chamber ( 17 ) to use. It is also conceivable to have a corresponding common plasma chamber ( 17 ) in individual cavities ( 4 ) or in the area of the plasma station ( 3 ) separate plasma chambers ( 17 ) for each of the workpieces ( 5 ) or for subgroups of the 41 ) positioned workpieces ( 5 ) to use.

11 shows a schematic representation of a plasma wheel ( 2 ) with a plurality of carriers ( 41 ). The carrier ( 41 ) in the area of a loading station ( 43 ) complete with the workpieces to be treated ( 5 ) and one with the workpieces ( 5 ) equipped carrier ( 41 ) is attached to the plasma wheel ( 2 ) to hand over. After completion of the treatment process and a corresponding rotational movement of the plasma wheel ( 2 ) the one with the workpieces ( 5 ) equipped carriers ( 41 ) from the plasma wheel ( 2 ) removed and into the area of an unloading station ( 44 ) transferred.

After removal of the finished workpieces ( 5 ) the carrier ( 41 ) again in the Be the loading station ( 43 ) with workpieces ( 5 ) and put it back on the plasma wheel ( 2 ) be handed over. In particular, in such an embodiment, it is contemplated that at least one carrier ( 41 ) to use more than at the same time in the area of the plasma wheel ( 2 ) can be arranged. As a result, immediately after removal of a carrier to be unloaded ( 41 ) one finished with workpieces ( 5 ) equipped carrier back to the plasma wheel ( 2 ) be handed over.

With regard to a material flow of the workpieces ( 5 ) different variants are conceivable. For example, it is possible to 5 ) always conveyed on a substantially horizontal transport route. Both loading the carrier ( 41 ) in the area of the loading station ( 43 ), machining the workpieces ( 5 ) in the area of the plasma wheel ( 2 ) and unloading the carriers ( 41 ) in the area of the unloading station ( 44 ) would be carried out at a substantially constant height level. It is also possible, for example, on the plasma wheel ( 2 ), in the area of the loading station ( 43 ) and / or in the area of the unloading station ( 44 ) Lifting movements of the carrier ( 41 ) with the carrier ( 41 ) with the workpieces ( 5 ) or without the workpieces ( 5 ) is positioned in an upward or downward direction. Such a procedure is particularly advantageous if the carrier ( 41 ) together with the workpieces to be machined ( 5 ) into the plasma chamber ( 17 ) is to be lifted in or lowered into it.

12 shows one compared to the representation in 11 modified embodiment. The carrier ( 41 ) are stationary in the area of the plasma wheel ( 2 ) arranged and relative to the plasma wheel ( 2 ) via pivot bearing ( 45 ) rotatably mounted. In particular, the carrier ( 41 ) in the area of the plasma wheel ( 42 ) store that the execution of rotational movements is possible.

As with the embodiment in 11 is also in the embodiment according to 12 especially thought that the plasma wheel ( 2 ) performs a continuous rotational movement with a constant rotational speed. To support this type of operation, the loading station ( 43 ) from a transfer element ( 46 ) and a loading wheel ( 47 ) educated. In the embodiment shown, the workpieces to be machined ( 5 ) via an input path ( 48 ) in the area of the loading wheel ( 47 ) and from there to the transfer element ( 46 ) to hand over.

In the embodiment shown, the transfer element ( 46 ) a circumferential transfer element ( 49 ), which can be implemented, for example, like a chain. The loading wheel ( 47 ) transfers the workpieces to be machined ( 5 ) initially in the area of a transfer position ( 50 ) to the transfer element ( 49 ). The loading wheel ( 47 ) and the transfer element ( 49 ) in the area of the transfer position ( 50 ) moved in the same direction and at the same peripheral speed in order to be able to carry out the transfer process continuously.

To hand over the workpieces ( 5 ) from the transfer element ( 49 ) to the carrier ( 41 ) is a transfer route ( 51 ) provided, which essentially have a curvature corresponding to the path of movement of a center point ( 52 ) of the plasma wheel ( 2 ) facing away part of the carrier ( 41 ) runs. This takes into account that between the carrier ( 41 ) and the transfer element ( 49 ) there is no fixed transfer position, but that the transfer position changes due to the rotation of the plasma wheel ( 2 ) changed.

If the carrier rotates sufficiently quickly ( 41 ) and a corresponding rotational speed of the transfer element ( 49 ) a relatively short dimensioning of the transfer route ( 51 ) can be carried out and thus a relatively short period of time can be carried out for the execution of the transfer process.

After completion of the treatment process of the workpieces ( 5 ) and a corresponding rotational movement of the plasma wheel ( 2 ) the carrier ( 41 ) in the area of a transfer element ( 53 ) which, together with an unloading wheel ( 54 ) the unloading station ( 44 ) trains. Similar to the transfer element ( 46 ) also has the transfer element ( 53 ) a transfer element ( 55 ), which can be chain-like, for example, and driven in rotation. The execution of the transfer process of the coated workpieces ( 5 ) from the carrier ( 41 ) to the transfer element ( 55 ) and the transfer element ( 55 ) to the discharge wheel ( 54 ) as well as from this to an output section ( 56 ) takes place in the same way as for the input, only in reverse order of the transfer processes to be carried out. Also a handover line ( 57 ) of the transfer element ( 55 ) runs with a curvature corresponding to the transfer distance ( 51 ) of the transfer element ( 49 ).

13 shows a variant in which a cyclical operation of the plasma wheel ( 2 ) is provided. This enables direct loading of the carrier ( 41 ) using the loading wheel ( 47 ) and a direct unloading of the carriers ( 41 ) using the discharge wheel ( 54 ) possible because there are fixed input and output positions. In all embodiments, as an alternative to the loading wheels shown ( 47 ) and unloading wheels ( 54 ) other rotating or alternatingly moved back and forth transfer elements ( 49 . 55 ) be used. However, the wheels shown have advantages both in terms of mechanical stability and in terms of the exact reproducibility of the movements carried out.

14 shows the positioning of a workpiece, not shown ( 5 ) inside the plasma chamber ( 17 ) the holding element ( 42 ). The Haltele ment ( 42 ) is designed like pliers and has two pivoting arms ( 58 . 59 ). The holding arms ( 58 . 59 ) are relative to axes of rotation ( 60 . 61 ) pivotable. To ensure automatic fixation of the workpiece ( 5 ) by the holding element ( 42 ) the holding arms ( 58 . 59 ) of feathers ( 62 . 63 ) pressed into a respective stop position. It is preferable to use leg springs ( 62 . 63 ) thought.

The holding element ( 42 ) is above the carrier ( 41 ) arranged so that after lifting the chamber wall ( 18 ) lateral accessibility of the holding element ( 42 ) given is. The workpiece ( 5 ) can be moved from a positioning element to the holding element ( 42 ) are transferred without a lifting movement of the workpiece ( 5 ) in the direction of a longitudinal axis of the cavity ( 64 ) must be done.

In 14 it can be seen in particular that between the holding arms ( 58 . 59 ) a terminal space ( 65 ) to hold the workpiece ( 5 ) is arranged. The holding arms ( 58 . 59 ) protrude with fixation projections ( 66 . 67 ) in the terminal area ( 65 ) into it. In addition, the holding arms ( 58 . 59 ) the fixing projections ( 66 . 67 ) locking bars arranged facing away ( 68 . 69 ) by locking elements ( 70 . 71 ), preferably together with the chamber wall ( 18 ) can be positioned, can be fixed in a locking position.

For further support and fixation of the workpiece ( 5 ) has the holding element ( 42 ) a stop element ( 72 ) on. The stop element ( 72 ) limits a maximum insertion of the workpiece ( 5 ) in the terminal space ( 65 ). In the locking position, the workpiece ( 5 ) from the fixing projections ( 66 . 67 ) against the stop element ( 72 ) pressed. The stop element ( 72 ) and the fixing projections ( 66 . 67 ) are arranged at approximately the same height level.

14 also shows the sealing element ( 28 ) and the lance ( 36 ) at a lower height level than the holding element due to the selected viewing direction with respect to the drawing plane ( 42 ).

15 shows the holding element ( 42 ) according to 14 in a perspective view and without illustration of the locking elements ( 70 . 71 ). It can be seen in particular that the holding element ( 42 ) a base plate ( 73 ), of which the holding arms ( 58 . 59 ) and the other components are worn. The base plate ( 73 ) can be made using spacer elements ( 74 . 75 ) and connecting elements ( 76 . 77 ) in the area of the carrier ( 41 ) to be assembled.

15 also shows that the fixing projections ( 66 . 67 ) each with bevels ( 78 ) and outlet bevels ( 79 ) are provided. When inserting the workpieces ( 5 ) in the terminal area ( 65 ) the workpiece comes ( 5 ) first in contact with the bevels ( 78 ) and presses the holding arms ( 58 . 59 ) against the forces of the springs ( 62 . 63 ) apart. After a complete insertion of the workpiece ( 5 ) in the terminal space ( 65 ) sweep the holding arms ( 58 . 59 ) due to the forces of the springs ( 62 . 63 ) automatically return to the locking position and press the workpiece ( 5 ) against the stop element ( 72 ). The workpiece ( 5 ) is thus inside the plasma chamber ( 17 ) fixed.

After completion of the treatment of the workpiece ( 5 ) the workpiece ( 5 ) gripped by a transfer element and against the outlet bevels ( 79 ) drawn. The outlet chamfer ( 79 ) is preferably curved and with a course of curvature corresponding to an outer contour of the workpiece ( 5 ) trained in the contact area. The holding arms ( 58 . 59 ) are brought apart again and give the workpiece ( 5 ) free. In particular, it is intended to provide the transfer element with controlled tong arms. The controlled pliers arms enable active gripping of the workpieces ( 5 ) and support the application of compressive and tensile forces on the bevels ( 78 ) or the outlet bevels ( 79 ). In particular, it is contemplated that the controlled pliers of the transfer elements at a substantially same level as the holding arms ( 58 , 59) or at a slightly lower or higher level on the workpiece ( 5 ) to take effect. As a result, the introduction of tipping forces into the workpiece ( 5 ) avoided or greatly reduced.

16 shows the arrangement according to 15 after inserting a bottle-like workpiece ( 5 ) between a support ring ( 80 ) and a shoulder area ( 81 ) from the holding arms ( 58 . 59 ) is applied. A holder of such a bottle-like workpiece ( 5 ) in the neck area shown leads to a very stable fixation of the workpiece ( 5 ). In 16 are the locking elements ( 70 . 71 ). The locking elements ( 70 . 71 ) together with the chamber wall ( 18 ) positioned. In the arrangement shown, the locking elements ( 70 . 71 ) a movement of the holding arms ( 58 . 59 ), so that an uncontrolled opening of the holding element ( 42 ) is prevented.

A typical treatment process is explained below using the example of a coating process and carried out in such a way that the workpieces ( 5 ) using the loading station ( 43 ) to the plasma wheel ( 2 ) are transported and that in a pushed-up state of the sleeve-like chamber wall ( 18 ) inserting the workpieces ( 5 ) in the plasma station ( 3 ) he follows. After completing the insertion process, the chamber wall ( 18 ) lowered into their sealed position and at the same time an evacuation of both the cavity ( 4 ) as well as the interior of the workpieces ( 5 ) carried out.

After sufficient evacuation of the Interior of the cavity ( 4 ) the lances ( 36 ) into the interior of the workpieces ( 5 ) retracted and by moving the sealing elements ( 28 ) partitioning the interior of the workpieces ( 5 ) towards the interior of the cavity ( 4 ) carried out. It is also possible to 36 ) already in sync with the beginning of the evacuation of the interior of the cavity into the workpieces ( 5 ) to move in. The pressure inside the workpieces ( 5 ) is then lowered further. In addition, the positioning movement of the lances ( 36 ) at least partially parallel to the positioning of the chamber wall ( 18 ) to carry out. After reaching a sufficiently low vacuum, process gas is injected into the interior of the workpieces ( 5 ) initiated and with the help of the microwave generator ( 19 ) ignited the plasma. In particular, it is intended to use the plasma to use both an adhesion promoter and the actual barrier layer made of silicon oxides on the inner surfaces of the workpieces ( 5 ) to separate.

The adhesion promoter can be applied, for example, in a two-stage process as the first stage before the barrier layer is applied in the second stage, but it is also conceivable in a continuous process to at least one of the workpiece ( 5 ) to produce the facing part of the barrier layer as a gradient layer at the same time as the application of at least part of the adhesion promoter. Such a gradient layer can be generated in a simple manner during the duration of an already ignited plasma by changing the composition of the process gas. Such a change in the composition of the process gas can be achieved abruptly by changing valve controls or continuously by changing the mixing ratio of components of the process gas. A typical structure of a gradient layer is such that the workpiece ( 5 ) facing part of the gradient layer, an at least predominant part of the adhesion promoter and in a part of the workpiece ( 5 ) facing away from the part of the gradient layer at least predominantly contains a portion of the barrier material. A transition of the respective components takes place continuously in at least part of the gradient layer in accordance with a predeterminable gradient curve.

The interior of the plasma chamber ( 17 ) and the interior of the workpieces ( 5 ) are first evacuated to a pressure level of approximately 20 mbar to 50 mbar. Then the pressure inside the workpieces ( 5 ) further reduced to about 0.1 mbar. A vacuum of about 0.3 mbar is maintained while the treatment process is being carried out.

After the coating process has been completed, the lances ( 36 ) again from the interior of the workpieces ( 5 ) removed and the plasma chamber ( 17 ) and the interior of the workpieces ( 5 ) are ventilated. After reaching the ambient pressure inside the cavity ( 4 ) the chamber wall ( 18 ) raised again to allow removal of the coated workpieces ( 5 ) as well as entering new workpieces to be coated ( 5 ) to carry out. To enable the workpieces to be positioned laterally ( 5 ) or the carrier ( 41 ) the sealing elements ( 28 ) back into the chamber base at least in some areas ( 30 ) move in.

As an alternative to the internal coating of workpieces ( 5 ) Eye coatings, sterilizations or surface activations can also be carried out.

Positioning the chamber wall (18), the sealing elements ( 28 ) and / or the lances ( 36 ) can be done using different drive units. In principle, the use of pneumatic drives and / or electrical drives, in particular in one embodiment as a linear motor, is conceivable. In particular, however, it is thought to support an exact movement coordination with a rotation of the plasma wheel ( 2 ) to implement curve control. The curve control can, for example, be designed such that along a circumference of the plasma wheel ( 2 ) Control cams are arranged, along which cam rollers are guided. The cam rollers are coupled to the components to be positioned.

According to a further embodiment, which differs from the embodiments shown in the drawings, it is possible for each plasma station ( 3 ) at least two carriers ( 41 ) to use. For example, for a plasma station ( 3 ) for the treatment of six workpieces ( 5 ) conceivable, three workpieces each ( 5 ) by a common carrier ( 41 ) and thus two beams ( 41 ) per plasma station ( 3 ) to use.

A constructive structure of the beams ( 41 ) can take place depending on the given structural boundary conditions. For example, the carrier ( 41 ) plate-like and with suitable recesses, for example for the lances ( 36 ) and the sealing elements ( 28 ) to equip. It is also conceivable to 41 ) to be constructed in a ring-like manner or to select a construction in such a way that, starting from a central region, outward-pointing spoke-like support segments are used.

To supply the necessary equipment, in particular negative pressure and process gas, in the area of the chamber base ( 30 ) Channel branches can be arranged, which make it possible to use several control valves with common control valves ( 17 ) or cavities ( 4 ) to supply.

The arrangement of several workpieces ( 5 ) in Be common plasma station ( 3 ) it is possible on the one hand to achieve an increased production output. Another variant consists in simultaneously processing different workpieces on a common machine ( 5 ) to treat. For example, it is possible to use successive carriers ( 41 ) each with different workpieces ( 5 ) and in appropriately adapted plasma stations ( 3 ) to use. In the area of assigned input devices and output devices, the different workpieces to be treated ( 5 ) fed alternately in groups and separated from each other in the area of the output device. In principle, it is also possible to arrange a correspondingly mixed arrangement of different workpieces ( 5 ) also on a common carrier ( 41 ) to be provided if suitable input and output devices are provided. A user therefore does not need multiple machines to process different products or is relieved of complex machine conversions.

It is also contemplated to perform a functional grouping of pumps that are used to generate the required negative pressures. For example, it is possible to use pumps of the same type, and successive plasma stations ( 3 ) alternately connected to the respective pumps. This leaves the single plasma station ( 3 ) longer connected to an assigned pump and switching times are saved. With simultaneous treatment of differently shaped workpieces ( 5 ) or workpieces ( 5 ) with different sizes relative to each other, it is also possible to 3 ) or the assigned plasma chambers ( 17 ) with different pumps to match the specific geometry of the workpiece ( 5 ) to provide adapted optimal process conditions. Successive plasma stations ( 3 ) can be connected to different pumps.

Claims (73)

Method for the plasma treatment of workpieces, in which the workpieces are inserted into at least one at least partially evacuable chamber of a treatment station and in which the workpieces are positioned within the treatment station by holding elements, characterized in that at least two holding elements ( 42 ) in the area of the treatment station from a common carrier ( 41 ) are positioned relative to each other. Method according to claim 1, characterized in that at least two holding elements ( 42 ) towards one from the carrier ( 41 ) during the execution of a treatment process at least temporarily movement relative to one another offset together with the carrier ( 41 ) are moved. Method according to claim 1, characterized in that at least two holding elements ( 42 ) transverse to the direction of one of the carrier ( 41 ) during the execution of a treatment process at least temporarily movement relative to one another offset together with the carrier ( 41 ) are moved. Method according to one of claims 1 to 3, characterized in that an evacuation of a cavity ( 4 ) the plasma station ( 3 ) through the chamber floor ( 29 ) occurs through. Method according to one of claims 1 to 4, characterized in that through the chamber bottom ( 29 ) process gas is fed through. Method according to one of claims 1 to 5, characterized in that the process gas by lances ( 36 ) into the interior of the workpieces ( 5 ) is supplied. Method according to one of claims 1 to 6, characterized in that the carrier ( 41 ) is positioned relative to the treatment station. Method according to one of claims 1 to 7, characterized in that the carrier ( 41 ) with at least one workpiece ( 5 ) loaded into the treatment station. Method according to one of claims 1 to 8, characterized in that the carrier ( 41 ) with at least one workpiece ( 5 ) loaded from the treatment station. Method according to one of claims 1 to 9, characterized in that the carrier ( 41 ) at least temporarily performs a rotational movement relative to the treatment station. Method according to one of claims 1 to 10, characterized in that the carrier ( 41 ) from a rotating transfer element ( 49 ) with workpieces to be treated ( 5 ) is populated. Method according to one of claims 1 to 11, characterized in that the transfer element ( 49 ) at least at the time of handing over a workpiece ( 5 ) to the carrier ( 41 ) at the same speed as the carrier ( 41 ) is moved. Method according to one of claims 1 to 12, characterized in that in the area of the chamber cover ( 31 ) from at least one microwave generator ( 19 ) generated microwaves into the cavity ( 4 ) be initiated. Method according to one of claims 1 to 13, characterized in that workpieces ( 5 ) are treated from a thermoplastic. Method according to one of claims 1 to 14, characterized in that the interior of hollow-body-like workpieces ( 5 ) be treated. Method according to one of claims 1 to 15, characterized in that as workpieces ( 5 ) Containers are treated. Method according to one of claims 1 to 16, characterized in that as workpieces ( 5 ) Beverage bottles are treated. Method according to one of claims 1 to 17, characterized in that the at least one plasma station ( 3 ) from a rotating plasma wheel ( 2 ) is transferred from an input positioning to an output positioning. Method according to one of claims 1 to 18, characterized in that from a plasma station ( 3 ) several cavities ( 4 ) to be provided. Method according to one of Claims 1 to 19, characterized in that the treatment station is operated by a plasma wheel ( 2 ) is positioned. Method according to one of claims 1 to 20, characterized in that that as Plasma treatment a plasma coating is carried out. Method according to one of claims 1 to 21, characterized in that that the Plasma treatment is carried out using a low pressure plasma. Method according to one of claims 1 to 22, characterized in that that a Plasma polymerization carried out becomes. Method according to one of claims 1 to 23, characterized in that that by the plasma deposited at least partially organic substances become. Method according to one of claims 1 to 23, characterized in that that by the plasma deposited at least partially inorganic substances become. Method according to one of claims 1 to 25, characterized in that a substance to improve the barrier properties of the workpieces ( 5 ) is deposited. A method according to claim 26, characterized in that in addition an adhesion promoter to improve the adherence of the substance to a surface of the workpieces 5 ) is deposited. Method according to one of claims 1 to 27, characterized in that at least two workpieces ( 5 ) are treated at the same time. Method according to one of claims 1 to 20, characterized in that that as Plasma treatment a plasma sterilization is carried out. Method according to one of claims 1 to 20, characterized in that a surface activation of the workpieces ( 5 ) is carried out. Device for plasma treatment of workpieces, which has at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber is arranged in the region of a treatment station, and in which the plasma chamber is delimited by a chamber base, a chamber cover and a lateral chamber wall, and holding elements for positioning the Has workpieces, characterized in that at least two holding elements ( 42 ) in the area of the plasma chamber ( 17 ) from a common carrier ( 41 ) are supported. Apparatus according to claim 31, characterized in that. at least two holding elements ( 42 ) are arranged offset relative to one another in the direction of a movement orientation of the treatment station. Apparatus according to claim 31, characterized in that at least two holding elements ( 42 ) are arranged offset relative to one another transversely to the direction of movement orientation of the treatment station. Device according to one of claims 31 to 33, characterized in that for the evacuation of a cavity ( 4 ) the plasma station ( 3 ) in the chamber floor ( 29 ) at least one vacuum channel is arranged. Device according to one of claims 31 to 34, characterized in that in the chamber floor ( 29 ) at least one channel for supplying process gas is arranged. Device according to one of claims 31 to 35, characterized in that for supplying process gas into the interior of the workpieces ( 5 lances into ( 36 ) relative to the chamber floor ( 29 ) are positioned. Device according to one of claims 31 to 36, characterized in that the carrier ( 41 ) is guided positionable relative to the treatment station. Device according to one of claims 31 to 37, characterized in that for the removal of finished workpieces ( 5 ) from the area of the carrier ( 41 ) at least one unloading station ( 44 ) is used. - Device according to one of claims 31 to 38, characterized in that for feeding workpieces to be machined ( 5 ) in the area of the carrier ( 41 ) at least one loading station ( 43 ) is used. Device according to one of claims 31 to 39, characterized in that the loading station ( 43 ) for feeding workpieces to be machined ( 5 ) to one from the plasma wheel ( 2 ) separate carrier ( 41 ) is trained. Device according to one of claims 31 to 40, characterized in that a transfer device for feeding workpieces ( 5 ) loaded carrier ( 41 ) is used in the area of the treatment station. Device according to one of claims 31 to 41, characterized in that a transfer station for removing carriers ( 41 ) with finished workpieces ( 5 ) from the area of the treatment station. Device according to one of claims 31 to 42, characterized in that in the region of the chamber cover ( 31 ) at least one microwave generator ( 19 ) is arranged. Device according to one of claims 31 to 43, characterized in that the plasma station ( 3 ) for coating workpieces ( 5 ) is formed from a thermoplastic. Device according to one of claims 31 to 44, characterized in that the plasma station ( 3 ) for coating container-like workpieces ( 5 ) is trained. Device according to one of claims 31 to 45, characterized in that the plasma station ( 3 ) for coating the interior of hollow workpieces ( 5 ) is trained. Device according to one of claims 31 to 46, characterized in that the plasma station ( 3 ) for coating workpieces designed in the form of beverage bottles ( 5 ) is trained. Device according to one of claims 31 to 47, characterized in that the at least one plasma station ( 3 ) from a rotating plasma wheel ( 2 ) is worn. Device according to one of claims 31 to 48, characterized in that in the area of the plasma station ( 3 ) several cavities ( 4 ) are arranged. Device according to one of claims 31 to 49, characterized in that one for providing at least two cavities ( 4 ) provided chamber wall ( 18 ) is positioned. Device according to one of claims 31 to 50, characterized in that in each case at least one carrier ( 41 ) in the area of each plasma station ( 3 ) is arranged. Device according to one of claims 31 to 51, characterized in that the carrier ( 41 ) in the area of the plasma station ( 3 ) is rotatably supported. Device according to one of claims 31 to 52, characterized in that at least two holding elements ( 42 ) along a circumference of the carrier ( 41 ) are arranged. Device according to one of claims 31 to 53, characterized in that for the transfer of workpieces to be treated ( 5 ) to the carrier ( 41 ) an input path ( 48 ) is provided. Device according to claim 54, characterized in that the input path ( 48 ) centered on a center point ( 52 ) of the plasma wheel ( 2 ) runs. Device according to claim 54 or 55, characterized in that the input path ( 48 ) in the area of a transfer element ( 49 ) is arranged. Device according to one of claims 54 to 56, characterized in that the transfer element ( 49 ) is driven in rotation. Device according to one of claims 54 to 57, characterized in that a speed of movement of the transfer element ( 49 ) to a speed of movement of the plasma wheel ( 2 ) worn carrier ( 41 ) is adjusted. Device according to one of claims 31 to 58, characterized in that for the removal of workpieces to be treated ( 5 ) from the bearers ( 41 ) an output section ( 56 ) is provided. Device according to claim 59, characterized in that the output section ( 56 ) centered on a center point ( 52 ) of the plasma wheel ( 2 ) runs. Device according to claim 59 or 60, characterized in that the output section ( 56 ) in the area of a transfer element ( 55 ) is arranged. Device according to one of claims 59 to 61, characterized in that the transfer element ( 55 ) is driven in rotation. Device according to one of claims 59 to 62, characterized in that a speed of movement of the transfer element ( 55 ) to a speed of movement of the plasma wheel ( 2 ) worn carrier ( 41 ) is adjusted. Device according to one of claims 31 to 63, characterized in that the plasma wheel ( 2 ) is cyclically driven with phases of movement and rest. Device according to one of claims 31 to 64, characterized in that at two cycle positions with a stationary plasma wheel ( 2 ) on the one hand the loading station ( 43 ) and on the other hand the unloading station ( 44 ) are arranged. Apparatus according to claim 65, characterized in that the loading station ( 43 ) as a loading wheel ( 47 ) is trained. Apparatus according to claim 65, characterized in that the unloading station ( 44 ) as an unloading wheel ( 54 ) is trained. Device according to one of claims 65 to 67, characterized in that the wheels ( 47 . 54 ) a peripheral speed corresponding to a transport speed of the carrier ( 41 ) in the area of its current transfer area. Device according to one of claims 31 to 68, characterized in that for the period between the input of the workpieces ( 5 ) in the plasma station ( 3 ) and an output of the workpieces ( 5 ) at least two rotations of the plasma wheel ( 2 ) are provided. Device according to one of claims 31 to 69, characterized in that the plasma station ( 3 ) at least partially towards the carrier ( 41 ) is guided positionable. Device according to one of claims 31 to 70, characterized in that the carrier ( 41 ) in a vertical direction from above into the plasma chamber ( 17 ) is guided into position. Device according to one of claims 31 to 70, characterized in that the carrier ( 41 ) in a vertical direction from below into the plasma chamber ( 17 ) is guided into position. Device according to one of claims 31 to 72, characterized in that in the region of a chamber base ( 30 ) the plasma station ( 3 ) at least one branch is arranged for the supply of at least one resource provided by a resource.