DE10207393A1 - Rapid prototyping of miniature plastics components, e.g. for micro-fluid applications, uses a computer-controlled printer to apply a polymer mixture to a carrier in structured layers where polymer components can be removed - Google Patents
Rapid prototyping of miniature plastics components, e.g. for micro-fluid applications, uses a computer-controlled printer to apply a polymer mixture to a carrier in structured layers where polymer components can be removedInfo
- Publication number
- DE10207393A1 DE10207393A1 DE10207393A DE10207393A DE10207393A1 DE 10207393 A1 DE10207393 A1 DE 10207393A1 DE 10207393 A DE10207393 A DE 10207393A DE 10207393 A DE10207393 A DE 10207393A DE 10207393 A1 DE10207393 A1 DE 10207393A1
- Authority
- DE
- Germany
- Prior art keywords
- carrier
- components
- polymer
- substances
- solidifiable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229920000642 polymer Polymers 0.000 title claims abstract description 11
- 239000004033 plastic Substances 0.000 title claims abstract description 8
- 229920003023 plastic Polymers 0.000 title claims abstract description 8
- 239000012530 fluid Substances 0.000 title abstract 3
- 229920002959 polymer blend Polymers 0.000 title abstract 2
- 238000000034 method Methods 0.000 claims abstract description 31
- 239000000203 mixture Substances 0.000 claims abstract description 5
- 239000000126 substance Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000007639 printing Methods 0.000 claims description 7
- 238000007711 solidification Methods 0.000 claims description 4
- 230000008023 solidification Effects 0.000 claims description 4
- 238000010276 construction Methods 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 17
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical group C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 5
- 239000012965 benzophenone Substances 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012698 light-induced step-growth polymerization Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000006855 networking Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- WHNPOQXWAMXPTA-UHFFFAOYSA-N 3-methylbut-2-enamide Chemical compound CC(C)=CC(N)=O WHNPOQXWAMXPTA-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000005251 capillar electrophoresis Methods 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 238000009419 refurbishment Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B44—DECORATIVE ARTS
- B44C—PRODUCING DECORATIVE EFFECTS; MOSAICS; TARSIA WORK; PAPERHANGING
- B44C3/00—Processes, not specifically provided for elsewhere, for producing ornamental structures
- B44C3/04—Modelling plastic materials, e.g. clay
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/0095—Aspects relating to the manufacture of substrate-free structures, not covered by groups B81C99/008 - B81C99/009
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/34—Component parts, details or accessories; Auxiliary operations
- B29C41/36—Feeding the material on to the mould, core or other substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0197—Processes for making multi-layered devices not provided for in groups B81C2201/0176 - B81C2201/0192
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
Abstract
Description
Der Gegenstand der Erfindung ist eine Verfahren und ein Gerät zur Herstellung von Form- und Funktionsmustern aus Kunststoff, beispielsweise für mikrofluidische Anwendungen. Der Aufbau der Muster erfolgt über die Deposition von kleinen Mengen einer verfestigbaren Substanz und anschließendes Verfestigen dieser Substanz. Eine zusätzliche Strukturierung des Produktes kann durch die Verwendung von Opferschichten oder durch Abtragung während des Druckprozesses erfolgen. The object of the invention is a method and an apparatus for the production of shape and function samples from plastic, for example for microfluidic applications. The structure of the Patterns are made through the deposition of small quantities solidifiable substance and subsequent solidification of this Substance. An additional structuring of the product can through the use of sacrificial layers or through Removal during the printing process.
Bei den bislang bekannten Rapid Prototyping Anwendungen werden große Strukturen (typischerweise mit Abmessungen im Zentimeterbereich) durch das gezielte Polymerisieren von Monomeren in einer Großanlage hergestellt. Weitere Techniken sehen die mechanische Bearbeitung von dünnen Platten vor, um dann durch Verkleben dieser dünnen Schichten zu einem Prototyp zu erreichen. Die Auflösung dieser Methode ist durch die Dickenbeschränkung der einzelnen Platten gegeben. In the previously known rapid prototyping applications large structures (typically with dimensions in Centimeter range) through the targeted polymerisation of monomers manufactured in a large plant. See more techniques machining of thin plates before to then through Gluing these thin layers to achieve a prototype. The resolution of this method is due to the thickness limitation of the given individual plates.
Bei den bislang beschriebenen Verfahren kommt es vor allem darauf an, Formmuster zu erzeugen. Kleine und komplexe Strukturen und Funktionsmuster lassen sich mit den bislang üblichen Fertigungsverfahren nicht in einfacher Weise herstellen. Eine Übersicht zu den verschiedenen Fertigungsverfahren beim rapid prototyping bzw. Anwendungen der Verfahren sind zu finden in z. B. Webb, PA: A review of rapid prototyping (RP) techniques in the medical and biomedical sector, Journal of medical engineering & technology 2000, Vol. 24, Iss 4, pp 149-153 oder Calvert, P: Freeforming of polymers, Current opinion in solid state & materials science, 1998, Vol 3 Iss 6, pp 585-588. In the processes described so far, this is what matters most to create shape patterns. Small and complex structures and Functional models can be used with the usual ones Do not manufacture manufacturing processes in a simple manner. A Overview of the different manufacturing processes at the rapid prototyping or applications of the processes can be found in e.g. B. Webb, PA: A review of rapid prototyping (RP) techniques in the medical and biomedical sector, Journal of medical engineering & technology 2000, Vol. 24, Iss 4, pp 149-153 or Calvert, P: Freeforming of polymers, Current opinion in solid state & materials science, 1998, Vol 3 Iss 6, pp 585-588.
Verfestigbare Substanzen im Sinne dieser Erfindung sind neben den herkömmlichen polymerisierbaren bzw. vernetzungsfähigen Substanzen und thermoplastischen Polymeren, die durch Abkühlen bzw. Vernetzen verfestigt werden können, auch alle Arten von beschichteten Partikeln, die für Verfestigungsreaktionen über interpartikuläre Vernetzung geeignet sind. Als Beispiel für solche Partikel sei mit einem benzophenongruppenhaltigen Polymeren beschichtete Mikroglaskugeln genannt. Solidifiable substances in the sense of this invention are in addition to the conventional polymerizable or crosslinkable Substances and thermoplastic polymers by cooling or networking can be solidified, including all types of coated particles used for solidification reactions interparticular networking are suitable. As an example of such Particles with a benzophenone group-containing polymer coated micro glass balls called.
Erfindungsgemäß werden verfestigbare Substanzen auf einen Träger in Form von Tropfen, Linien oder dünnen Schichten aufgebracht. Dabei ist nicht die Art der Aufbringung von Relevanz, sondern die Tatsache, daß ein Aufbau durch Verfestigen von Kunststofflagen stattfindet. Diese Schichten werden verfestigt, vorzugsweise durch Polymerisieren oder Vernetzung. Anschließend wird die nächste Schicht aufgebracht. Vorzugsweise sind diese Schichten sehr dünn (1 nm bis 100 µm) um so eine möglichst exakte Strukturierung des Produktes zu gewährleisten. Bei der Verwendung von Hochgeschwindigkeitsdrucksystemen, wie z. B. Continuous Jet Printern, ist es auch möglich im Produktionsstil mit dieser Technik zu arbeiten. Nach dem Aufbringen der Schicht wird das jeweilige Material verfestigt, z. B. durch thermische oder lichtinduzierte Polymerisation beziehungsweise durch Vernetzten oder durch Abkühlen eines thermoplastisch verformbaren Polymeren. Der Prozess wird solange wiederholt, bis die gewünschte Dicke des Objektes erreicht ist. According to the invention, solidifiable substances are placed on a carrier applied in the form of drops, lines or thin layers. It is not the type of application that is relevant, but the fact that a structure by solidifying Plastic layers takes place. These layers are solidified preferably by polymerizing or crosslinking. Subsequently the next layer is applied. These are preferably Layers very thin (1 nm to 100 µm) so as precise as possible To ensure structuring of the product. When using of high speed printing systems such as B. Continuous Jet Printing, it is also possible to use this technique in the production style work. After applying the layer, the respective Solidified material, e.g. B. by thermal or light-induced Polymerization or by crosslinking or by Cooling down a thermoplastic polymer. The The process is repeated until the desired thickness of the Object is reached.
Werden Strukturen benötigt, die keine selbsttragende Aufbauweise ermöglichen, so wird eine zweite Substanz mit aufgebracht, die anschließend durch Auflösen oder chemische Degradation, wieder entfernt werden kann (Opferschicht). Eine solche Substanz kann z. B. ein thermisch instabiler Kunststoff, ein photochemisch degradierbares Polymer oder einfach nur eine wasserlösliche Substanz sein. Are structures required that do not have a self-supporting structure enable, a second substance is also applied, the then by dissolving or chemical degradation again can be removed (sacrificial layer). Such a substance can e.g. B. a thermally unstable plastic, a photochemically degradable one Polymer or just a water soluble substance.
Eine bevorzugte Ausführungsform der Erfindung ist die Herstellung eines mikrofluidischen Systems aus einem inerten Polymer polymethylmethacrylat (PMMA) durch lichtinduzierte Polymerisation von aufgedruckten Methylmethacrylattröpfchen. Als Opferschicht für die Herstellung von Kanälen wird Polydimethylacrylamid eingesetzt. Nach Abschluss der Herstellung des Bauteils wird das Opferpolymer ausgewaschen. Bei der Polymerisation des Methylmethacrylats wird jedoch dabei an den Rändern der mikrofluidischen Kanäle eine monomolekulare Schicht des hydrophile Polydimethylacrylamids an die formgebende Komponente (PMMA) chemische gebunden. Da Diese Monolage chemisch mit dem strukturgebenden Polymeren verknüpft ist, kann sie nicht mit den restlichen Molekülen der Opferschicht ausgespült werden, so dass direkt Kanäle mit einer hydrophilen Oberfläche resultieren. Bei anderen Ausführungen ist es möglich, besonders hydrophobe Monomere zur Ausbildung der Opferkomponente zu verwenden. Da diese ebenso an den Kontaktstellen mit eingebaut werden können, wird so eine gezielte Hydrophobisierung der (inneren) Oberflächen erzeugt. A preferred embodiment of the invention is the production a microfluidic system made of an inert polymer polymethyl methacrylate (PMMA) by light-induced polymerization of printed methyl methacrylate droplets. As a sacrificial layer for the manufacture of channels is used polydimethylacrylamide. After the component has been manufactured, it becomes the sacrificial polymer washed out. In the polymerization of methyl methacrylate however, one at the edges of the microfluidic channels monomolecular layer of the hydrophilic polydimethylacrylamide the shaping component (PMMA) is chemically bound. There This monolayer chemically with the structuring polymer is linked to the rest of the molecules of the Sacrificial layer can be rinsed out, leaving channels directly with one hydrophilic surface result. With other versions it is possible, especially hydrophobic monomers to form the To use victim component. Since this also applies to the Contact points can be built in, so is a targeted Hydrophobization of the (inner) surfaces.
Bei Prozessen, die exakte Kanten oder geringe Rauhigkeiten voraussetzen, kann zudem während des Herstellungsprozesses eine Aufarbeitung durch Laserablation (oder eine äquivalente Technik) erfolgen. Die Printabfolge der Substanzen wird durch ein computergesteuertes System gewährleistet. For processes that have exact edges or low roughness may also require one during the manufacturing process Refurbishment using laser ablation (or an equivalent technique) respectively. The print sequence of the substances is indicated by a computer-controlled system guaranteed.
In einer weiteren bevorzugten Ausführung wird die Formgebung auf einem Halbprodukt, z. B. elektrische Kontakte und Elektroden durchgeführt, so dass mit dieser Methode auch z. B. Kapillarelektrophoreseeinheiten etc. hergestellt werden können. In a further preferred embodiment, the shaping is based on a semi-product, e.g. B. electrical contacts and electrodes performed, so that with this method z. B. Capillary electrophoresis units etc. can be produced.
Die Erfindung erlaubt es, in bisher nicht möglicher Art und Geschwindigkeit, Klein- und Kleinstteile aus Kunststoffen herzustellen. Insbesondere die Möglichkeiten zur äußeren und inneren Strukturierung, sowie die Option zur gezielten chemischen Maßschneiderung von Oberflächen erlauben es, mit Hilfe dieser Technik komplizierte Bauteile, z. B. für fluidische Systeme herzustellen und direkt zu testen. The invention allows, in a way not previously possible and Speed, small and small parts made of plastics manufacture. In particular, the possibilities for external and internal structuring, as well as the option for targeted chemical tailoring of surfaces allow using With the help of this technology, complicated components, e.g. B. for fluidic Manufacture systems and test them directly.
Mittels eines Piezostackprinters (z. B. Typ GeSiM) wird ein Formteil von 10 × 10 × 2 mm × mm × mm aufgebaut, in dem im Abstand von 1 mm (Mitte zu Mitte) Vertiefungen von 1 mm generiert werden. Dazu wird ein polymerisierbares Gemisch aus Styrol und Benzophenon (1000 : 1 Mol/Mol) in Tröpfchen von 1 nl gedruckt. Da die Mikropipette aus Silizium ist, kann während des Druckvorganges die Polymerisation mittels UV-Licht (300 nm) induziert werden. Die Tropfen werden dabei so eng gedruckt, dass sie einander nicht berühren, sondern ca. 0,8 Tropfendurchmesser Abstand haben. Die fohlenden Tropfen zum Aufbau der Lage werden in einem zweiten Durchgang gedruckt um das Ineinanderfließen der flüssigen Monomere zu verhindern. Nach Aufbau einer Schicht von 1 mm wird an den Stellen, an denen die Vertiefungen auftreten kein Monomer mehr gedruckt. Nach Erreichen von 2 mm Schichtdicke ist der Vorgang beendet. A molded part is made using a piezo stack printer (e.g. type GeSiM) of 10 × 10 × 2 mm × mm × mm built, at a distance of 1 mm (Center to center) depressions of 1 mm are generated. This will a polymerizable mixture of styrene and benzophenone (1000: 1 mol / mol) printed in droplets of 1 nl. Because the micropipette is out Silicon can cause polymerization during the printing process can be induced by means of UV light (300 nm). The drops will printed so closely that they do not touch each other, but approx. 0.8 drop distance. The foaling drops for Construction of the location will be printed in a second pass to prevent the liquid monomers from flowing into one another. After building up a layer of 1 mm at the points where the depressions no longer appear printed monomer. To The process is complete when the layer thickness reaches 2 mm.
Mittels eines Piezostackprinters (z. B. Typ GeSiM) wird ein Formteil von der Größe 10 × 10 × 3 mm × mm × mm realisiert, in dem in der Mitte ein Kanal mit den Dimensionen 10 × 3 × 1 mm × mm × mm eingebaut wird. Dazu wird ein polymerisierbares Gemisch aus Styrol und Benzophenon (1000 : 1 Mol/Mol) in Tröpfchen von 1 nl gedruckt. Da die Mikropipette aus Silizium ist, kann während des Druckvorganges die Polymerisation mittels UV-Licht (300 am) induziert werden. Nach Aufbau einer Schicht von 1 mm Dicke wird eine zweite Mikropipette an den Stellen, wo der Mikrokanal entstehen soll, ein zweites Gemisch, bestehend aus Dimethylacrylamid und Benzophenon (1000 : 1 Mol/Mol) in Tröpfchen von 1 nl gedruckt. Nach Erreichen der Schichtdicke von 0,2 mm wird nur noch mit dem Styrol/Benzophenon gedruckt, bis eine 1 mm dicke Schicht auf dem hydrophilen Polymer gedruckt ist. Nach dem Aushärten der Polymere, wird das Polydimethylacrylamid durch Auflösen in Wasser entfernt. Der Auflösevorgang wird durch 1 h Ultraschallbehandlung in Wasser, dem ein Tensid zugesetzt wurde, beschleunigt. A molded part is made using a piezo stack printer (e.g. type GeSiM) realized in the size 10 × 10 × 3 mm × mm × mm, in the middle a channel with the dimensions 10 × 3 × 1 mm × mm × mm is installed becomes. A polymerizable mixture of styrene and Benzophenone (1000: 1 mol / mol) printed in 1 nl droplets. There the micropipette is made of silicon, can during the printing process the polymerization can be induced by means of UV light (300 am). To A second micropipette is built up a layer of 1 mm thickness a second where the microchannel is to be created Mixture consisting of dimethylacrylamide and benzophenone (1000: 1 mol / mol) printed in 1 nl droplets. After reaching the Layer thickness of 0.2 mm is only with the styrene / benzophenone printed until a 1 mm thick layer on the hydrophilic polymer is printed. After the polymers have hardened, that becomes Polydimethylacrylamide removed by dissolving in water. The Dissolution process is carried out by 1 h of ultrasound treatment in water, the a surfactant was added accelerated.
Claims (12)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10207393A DE10207393A1 (en) | 2002-02-21 | 2002-02-21 | Rapid prototyping of miniature plastics components, e.g. for micro-fluid applications, uses a computer-controlled printer to apply a polymer mixture to a carrier in structured layers where polymer components can be removed |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10207393A DE10207393A1 (en) | 2002-02-21 | 2002-02-21 | Rapid prototyping of miniature plastics components, e.g. for micro-fluid applications, uses a computer-controlled printer to apply a polymer mixture to a carrier in structured layers where polymer components can be removed |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10207393A1 true DE10207393A1 (en) | 2003-09-04 |
Family
ID=27674824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10207393A Withdrawn DE10207393A1 (en) | 2002-02-21 | 2002-02-21 | Rapid prototyping of miniature plastics components, e.g. for micro-fluid applications, uses a computer-controlled printer to apply a polymer mixture to a carrier in structured layers where polymer components can be removed |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE10207393A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004005337A1 (en) * | 2004-02-04 | 2005-08-25 | Studiengesellschaft Kohle Mbh | Microfluidic chips with intrinsic hydrophilic surfaces |
| DE102005026528A1 (en) * | 2005-06-08 | 2006-12-21 | Infineon Technologies Ag | Semiconductor device with media channel and method of making the same |
| DE102004013161B4 (en) * | 2004-03-17 | 2008-04-10 | microTec Gesellschaft für Mikrotechnologie mbH | Microfluidic chip |
| EP2133306A1 (en) * | 2008-06-13 | 2009-12-16 | Stichting Dutch Polymer Institute | Polymer micro-actuators sensitive to one or more inputs |
| DE102014114975A1 (en) | 2013-10-30 | 2015-04-30 | Bpe E.K. | Method for producing a microstructured workpiece |
-
2002
- 2002-02-21 DE DE10207393A patent/DE10207393A1/en not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004005337A1 (en) * | 2004-02-04 | 2005-08-25 | Studiengesellschaft Kohle Mbh | Microfluidic chips with intrinsic hydrophilic surfaces |
| DE102004013161B4 (en) * | 2004-03-17 | 2008-04-10 | microTec Gesellschaft für Mikrotechnologie mbH | Microfluidic chip |
| DE102005026528A1 (en) * | 2005-06-08 | 2006-12-21 | Infineon Technologies Ag | Semiconductor device with media channel and method of making the same |
| US7516543B2 (en) | 2005-06-08 | 2009-04-14 | Infineon Technologies Ag | Method for manufacturing semiconductor component with a media channel |
| DE102005026528B4 (en) * | 2005-06-08 | 2019-08-22 | Infineon Technologies Ag | Semiconductor device having at least one media channel and method for producing semiconductor devices each having at least one media channel |
| EP2133306A1 (en) * | 2008-06-13 | 2009-12-16 | Stichting Dutch Polymer Institute | Polymer micro-actuators sensitive to one or more inputs |
| WO2009150610A1 (en) * | 2008-06-13 | 2009-12-17 | Stichting Dutch Polymer Institute | Polymer micro-actuators sensitive to one or more inputs |
| DE102014114975A1 (en) | 2013-10-30 | 2015-04-30 | Bpe E.K. | Method for producing a microstructured workpiece |
| DE102014114975B4 (en) | 2013-10-30 | 2018-07-05 | Bpe E.K. | Method for producing a microstructured workpiece |
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