DE102017124404A1 - Yttrium-coated aluminum nitride powder, its preparation and use - Google Patents
Yttrium-coated aluminum nitride powder, its preparation and use Download PDFInfo
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- DE102017124404A1 DE102017124404A1 DE102017124404.2A DE102017124404A DE102017124404A1 DE 102017124404 A1 DE102017124404 A1 DE 102017124404A1 DE 102017124404 A DE102017124404 A DE 102017124404A DE 102017124404 A1 DE102017124404 A1 DE 102017124404A1
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- Prior art keywords
- yttrium
- aln
- aluminum nitride
- powder
- solution
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- 239000000843 powder Substances 0.000 title claims abstract description 52
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 28
- 229910052727 yttrium Inorganic materials 0.000 title claims abstract description 18
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 31
- QDMHRVCNBNESTO-UHFFFAOYSA-K octadecanoate;yttrium(3+) Chemical compound [Y+3].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O QDMHRVCNBNESTO-UHFFFAOYSA-K 0.000 claims abstract description 19
- 238000005245 sintering Methods 0.000 claims description 29
- 239000002904 solvent Substances 0.000 claims description 13
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 12
- 238000003825 pressing Methods 0.000 claims description 10
- 239000006185 dispersion Substances 0.000 claims description 9
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 9
- 235000021355 Stearic acid Nutrition 0.000 claims description 8
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 8
- 239000008117 stearic acid Substances 0.000 claims description 8
- -1 yttrium (III) compound Chemical class 0.000 claims description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 5
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 claims description 4
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 claims description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 239000008096 xylene Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 claims description 2
- 239000001293 FEMA 3089 Substances 0.000 claims description 2
- NHTMVDHEPJAVLT-UHFFFAOYSA-N Isooctane Chemical compound CC(C)CC(C)(C)C NHTMVDHEPJAVLT-UHFFFAOYSA-N 0.000 claims description 2
- 229910021529 ammonia Inorganic materials 0.000 claims description 2
- 239000003125 aqueous solvent Substances 0.000 claims description 2
- 238000009835 boiling Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- JVSWJIKNEAIKJW-UHFFFAOYSA-N dimethyl-hexane Natural products CCCCCC(C)C JVSWJIKNEAIKJW-UHFFFAOYSA-N 0.000 claims description 2
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000000243 solution Substances 0.000 description 20
- 239000000919 ceramic Substances 0.000 description 17
- 239000012071 phase Substances 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 8
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 6
- 150000001342 alkaline earth metals Chemical class 0.000 description 6
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 6
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052791 calcium Inorganic materials 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 229910052712 strontium Inorganic materials 0.000 description 4
- 238000005979 thermal decomposition reaction Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 150000004645 aluminates Chemical class 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000009827 uniform distribution Methods 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 229910052793 cadmium Inorganic materials 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 229910052701 rubidium Inorganic materials 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 description 1
- NGDQQLAVJWUYSF-UHFFFAOYSA-N 4-methyl-2-phenyl-1,3-thiazole-5-sulfonyl chloride Chemical compound S1C(S(Cl)(=O)=O)=C(C)N=C1C1=CC=CC=C1 NGDQQLAVJWUYSF-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-L Oxalate Chemical compound [O-]C(=O)C([O-])=O MUBZPKHOEPUJKR-UHFFFAOYSA-L 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 229910009253 Y(NO3)3 Inorganic materials 0.000 description 1
- 150000000476 acetylides Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- XTEGARKTQYYJKE-UHFFFAOYSA-N chloric acid Chemical compound OCl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- VWWMOACCGFHMEV-UHFFFAOYSA-N dicarbide(2-) Chemical compound [C-]#[C-] VWWMOACCGFHMEV-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000011858 nanopowder Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- MBEGFNBBAVRKLK-UHFFFAOYSA-N sodium;iminomethylideneazanide Chemical compound [Na+].[NH-]C#N MBEGFNBBAVRKLK-UHFFFAOYSA-N 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical compound [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 229910021653 sulphate ion Inorganic materials 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 150000003746 yttrium Chemical class 0.000 description 1
- GRTBAGCGDOYUBE-UHFFFAOYSA-N yttrium(3+) Chemical compound [Y+3] GRTBAGCGDOYUBE-UHFFFAOYSA-N 0.000 description 1
- BXJPTTGFESFXJU-UHFFFAOYSA-N yttrium(3+);trinitrate Chemical compound [Y+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O BXJPTTGFESFXJU-UHFFFAOYSA-N 0.000 description 1
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- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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Abstract
Die Erfindung bezieht sich auf ein zur Herstellung eines Aluminiumnitrid-Sinterkörpers verwendbares Yttrium-beschichtetes Aluminiumnitrid-Pulver (AlN-Pulver), dessen Herstellung und Verwendung. Das Verfahren sieht unter anderem vor, dass Yttriumstearat aus der Lösung auf dem zu beschichtenden AlN-Pulver abgeschieden wird.The invention relates to a yttrium-coated aluminum nitride powder (AlN powder) usable for producing an aluminum nitride sintered body, to the production and use thereof. Among other things, the method provides that yttrium stearate from the solution is deposited on the AlN powder to be coated.
Description
Die Erfindung bezieht sich auf ein zur Herstellung eines Aluminiumnitrid-Sinterkörpers verwendbares und Yttrium-beschichtetes Aluminiumnitrid-Pulver (AlN-Pulver), dessen Herstellung und Verwendung.The invention relates to a yttrium-coated aluminum nitride powder (AlN powder) usable for producing an aluminum nitride sintered body, its production and use.
Technologischer HintergrundTechnological background
Aluminiumnitridkeramik besitzt aufgrund seiner guten Wärmeleitfähigkeit, Korrosionsbeständigkeit und mechanischen Belastbarkeit ein sich ausweitendes Anwendungsfeld.Aluminum nitride ceramic has an expanding field of application due to its good thermal conductivity, corrosion resistance and mechanical strength.
Aluminiumnitridkeramik wird im keramischen Prozess hergestellt durch Aufbereitung eines feinteiligen AlN-Pulvers. Die Aufbereitung erfolgt im Allgemeinen dabei in den Schritten: Zumischen eines Sinterhilfsmittels, Zugabe eines organischen Presshilfsmittels, gegebenenfalls Erhöhung der Fließfähigkeit durch Granulation, Pressformgebung, thermische Entfernung des Presshilfsmittels (Vorsinterung) und Sinterung. Zu beachten ist hierbei, dass AlN empfindlich gegenüber Luft(-Sauerstoff) oberhalb 650 °C und Feuchte ist.Aluminum nitride ceramics are produced in the ceramic process by processing a finely divided AlN powder. The treatment is generally carried out in the steps: admixing a sintering aid, adding an organic pressing aid, optionally increasing the flowability by granulation, press molding, thermal removal of the pressing aid (presintering) and sintering. It should be noted that AlN is sensitive to air (oxygen) above 650 ° C and humidity.
Wie alle Verbindungen mit hohem kovalenten Bindungsanteil besitzt AlN eine geringe Sinterfähigkeit. Da zudem wegen der thermischen Instabilität des Materials bei Temperaturen oberhalb 2000°C eine Sinterverbesserung durch Anwendung höherer Sintertemperaturen nicht möglich ist, müssen sinterfördernde Hilfsmittel zugesetzt werden. Eine bedeutende Erhöhung der Sintergeschwindigkeit tritt auf, wenn sich bei Sintertemperatur eine schmelzflüssige Phase zwischen den zu sinternden Teilchen bildet. Dabei erleichtert die flüssige Phase einen effektiven Massetransport durch Auflöse- und Ausscheidungsvorgänge.Like all compounds with high covalent bond content, AlN has a low sinterability. In addition, because of the thermal instability of the material at temperatures above 2000 ° C, a sintering improvement by using higher sintering temperatures is not possible, sintering aids must be added. A significant increase in sintering speed occurs when, at sintering temperature, a molten phase forms between the particles to be sintered. The liquid phase facilitates effective mass transport through dissolution and elimination processes.
Eine Komponente der während des Sinterns schmelzflüssigen Phase stellt das stets als Verunreinigung in einer Menge von einigen Zehntel bis zu einigen Prozent im AlN enthaltene Al2O3 dar. Für die anderen Bestandteile der Schmelzphase wurden eine Reihe von Vorschlägen unterbreitet, die vorwiegend auf dem Zumischen fester Oxide, Halogenide oder von Verbindungen, die thermisch in Oxide und Halogenide überführt werden können, beruhen.One component of the molten phase during sintering is Al 2 O 3 , which is always present as an impurity in an amount of a few tenths to a few percent in AlN. For the other components of the melt phase, a number of proposals have been made, mainly for admixing solid oxides, halides or compounds that can be thermally converted into oxides and halides based.
So wird vorgeschlagen das Zumischen
- • der Oxide der Erdalkalimetalle, der Seltenen Erden, der Übergangselemente der 4., 5. und 6. Gruppe des Periodensystems, von Al2O3 und/oder SiO2 [
];DE 33 37 630 A1 - • der Erdalkalimetalloxide, von Y2O3 und/oder CaF2 [
];DE 35 34 886 A1 - • mindestens einer Halogenverbindung von einem Metall der Gruppe der Erdalkalimetalle, der Seltenen Erden sowie von Yttrium und einer halogenfreien Verbindung aus der Gruppe derselben Metalle. Die halogenfreie Verbindung kann auch ein Aluminat sein [
;DE 36 27 317 A1 ];EP 0207465 A1 - • von Erdalkalialuminat und einem Oxid oder einer oxidbildenden Verbindung (Carbonat, Oxalat, Nitrat, Nitrit, Bicarbonat, Sulfat, Sulfit, Chlorat, Acetat) eines Elementes der Seltenen Erden [
];DE 37 23 774 A1 - • mindestens einer Verbindung der Erdalkalimetalle oder Seltenen Erden und mindestens ein Element oder dieses enthaltende Verbindung der Gruppen 14, 15, 16 und 17 des Periodensystems [
];EP 0207465 A1 - • der Boride und Carbide von Ca, Sr, Ba oder der Seltenen Erden [
];US 4711861 A - • der Acetylide von Ca, Sr, Ba, Na, K, Rb, Cs, Cu, Ag, Mg, Cd, Hg, Zn, Al, Ce [
];US 4650777 A - • einer Mischung von CaO mit W- und/oder Mo-Oxid [
];EP 0267623 A2 - • der Silicide, Carbide, Boride, Nitride (außer BN, AlN, Be3N2); und
- • von CaCN2 [
].EP 0260865 A1
- • the oxides of the alkaline earth metals, the rare earths, the transition elements of the 4th, 5th and 6th group of the periodic table, of Al 2 O 3 and / or SiO 2 [
];DE 33 37 630 A1 - The alkaline earth metal oxides of Y 2 O 3 and / or CaF 2 [
];DE 35 34 886 A1 - • at least one halogen compound of a metal of the group of the alkaline earth metals, the rare earths and of yttrium and a halogen-free compound from the group of the same metals. The halogen-free compound may also be an aluminate [
;DE 36 27 317 A1 ];EP 0207465 A1 - • alkaline earth aluminate and an oxide or an oxide-forming compound (carbonate, oxalate, nitrate, nitrite, bicarbonate, sulphate, sulphite, chlorate, acetate) of a rare earth element
];DE 37 23 774 A1 - At least one compound of the alkaline earth metals or rare earths and at least one element or compound of the groups 14, 15, 16 and 17 of the periodic table containing the same [
];EP 0207465 A1 - The borides and carbides of Ca, Sr, Ba or the rare earths
];US 4711861 A - The acetylides of Ca, Sr, Ba, Na, K, Rb, Cs, Cu, Ag, Mg, Cd, Hg, Zn, Al, Ce
];US 4650777 A - A mixture of CaO with W and / or Mo oxide
];EP 0267623 A2 - The silicides, carbides, borides, nitrides (except BN, AlN, Be 3 N 2 ); and
- • of CaCN 2 [
].EP 0260865 A1
Neben dem mechanischen Zumischen der Sinterhilfsmittel ist auch vorgeschlagen worden, die Sinterhilfsmittel in gelöster Form dem AlN unterzumischen und das Lösungsmittel anschließend zu verdampfen (
In der Technik hat sich Yttriumoxid (Y2O3) als Sinterhilfsmittel für AlN durchgesetzt. Es wird dem AlN in der Regel als gemahlenes Pulver zugemischt. Besonders feinkristalline Pulver werden durch die thermische Zersetzung von Yttriumstearat erzielt (Synthesis of dispersed Y2O3 Nanopowder from Yttrium Stearate, Jinsheng Li, Xudong Sun et al., Key Ingenieuring Materials Vol., 544 (2013), 3-75).Yttria (Y 2 O 3 ) has become established in the art as a sintering aid for AlN. It is usually added to the AlN as a ground powder. Particularly fine crystalline powders are obtained by the thermal decomposition of yttrium stearate (Synthesis of dispersed Y 2 O 3 Nanopowder from Yttrium Stearate, Jinsheng Li, Xudong Sun et al., Key Engineering Materials Vol., 544 (2013), 3-75).
Obwohl mit einem Teil dieser sinterfördernden Mittel gute Keramikeigenschaften erzielt werden können, sind alle genannten Vorschläge mit Nachteilen verbunden, die aus dem festen Zustand der sinterfördernden Mittel und der damit verbundenen Notwendigkeit einer intensiven mechanischen Mischung mit dem AlN-Pulver resultieren. Beim Mischvorgang wird die Teilchengrößenverteilung des Sinterhilfsmittelpulvers nicht wesentlich verändert. Dadurch bleiben auch größere Sinterhilfsmittel-Agglomerate erhalten, welche in der AlN-Keramik Zweitphasen mit Korngrößen des AlN und gegebenenfalls auch größer bilden können. Des Weiteren ist der Zusatz von temporären Granulier- und Presshilfsmitteln erforderlich zur Formgebung der feinen Pulver.Although good ceramic properties can be achieved with some of these sintering-promoting agents, all of the mentioned proposals are associated with disadvantages resulting from the solid state of the sintering-promoting agents and the associated necessity of intensive mechanical mixing with the AlN powder. During the mixing process, the particle size distribution of the sintering aid powder is not significantly changed. As a result, larger sintering aid agglomerates remain, which can form second phases in the AlN ceramic with grain sizes of AlN and optionally also larger. Furthermore, the addition of temporary granulating and pressing aids is necessary for shaping the fine powders.
Neben den mit der schlechten Sinterfähigkeit des AlN verbundenen Problemen ist bei der Herstellung von AlN-Keramik die Hydrolyseanfälligkeit des Ausgangspulvers zu beachten. Je feiner und damit sinteraktiver ein AlN-Pulver ist, umso größer ist auch die Gefahr einer Reaktion mit Feuchtespuren, die zu Bildung von unerwünschtem Aluminiumhydroxid führt. In addition to the problems associated with the poor sinterability of AlN, the susceptibility to hydrolysis of the starting powder must be taken into account in the production of AlN ceramics. The finer and thus more sinter-active an AlN powder, the greater the risk of a reaction with moisture traces, which leads to the formation of unwanted aluminum hydroxide.
Diese Hydrolyseanfälligkeit ist in allen Stufen des Herstellungsprozesses zu beachten. Dies gilt vor allem für Prozessstufen, in denen Hilfsstoffe (Presshilfsmittel, Granulierhilfen, Sinterhilfsmittel) zugesetzt werden. Gelegentlich wird das AlN mit organischen Stoffen passiviert und damit unempfindlicher gegenüber Feuchtigkeit gemacht z. B. durch Zusätze wie Stearinsäure (
Dies gilt auch für die Verwendung für Suspensionen von organischen Lösungsmitteln und Sinterhilfsmitteln. Auch hier bleiben die Sinterhilfsmittel-Agglomerate im Wesentlichen erhalten. Der Zusatz des Sinterhilfsmittel über eine wasserfreie Lösung ist ebenfalls vorgeschlagen worden (
Zusammenfassung der ErfindungSummary of the invention
Ein oder mehrere der geschilderten Nachteile des Standes der Technik lassen sich mit Hilfe der Erfindung beheben oder zumindest mindern.One or more of the disadvantages of the prior art described can be eliminated or at least reduced with the aid of the invention.
Nach einer ersten Variante des erfindungsgemäßen Verfahrens zur Herstellung eines Yttrium-beschichteten Aluminiumnitrid-Pulvers (AlN-Pulvers), das zur Herstellung eines Aluminiumnitrid-Sinterkörpers verwendbar ist, umfasst das Verfahren die Schritte:
- a) Ansetzen einer ersten Lösung von Stearinsäure und einer Yttrium(III)-Verbindung, bevorzugt Y(NO3)3 × 6 H2O, in einem nicht-wässrigen Lösungsmittel, insbesondere Isopropanol;
- b) Herstellen einer Dispersion aus der ersten Lösung und einem AlN-Ausgangspulver;
- c) Abscheiden von Yttriumstearat auf dem AlN-Ausgangspulver durch Zusatz einer Base, bevorzugt Ammoniak, zur Dispersion; und
- d) Entzug des Lösungsmittels.
- a) preparing a first solution of stearic acid and an yttrium (III) compound, preferably Y (NO 3 ) 3 × 6 H 2 O, in a non-aqueous solvent, in particular isopropanol;
- b) preparing a dispersion of the first solution and an AlN starting powder;
- c) depositing yttrium stearate on the starting AlN powder by adding a base, preferably ammonia, to the dispersion; and
- d) removal of the solvent.
Der Einsatz von Stearinsäure hat mehrere Vorteile. So passiviert Stearinsäure das AlN-Pulver gegen den Angriff von Wasser. Nur so kann insbesondere eine Oberflächenreaktion des Kristallwassers bei Verwendung von Y(NO3)3 × 6 H2O und des immer vorhandenen Wasseranteils einer zugesetzten Ammoniaklösung mit dem AlN-Pulver verhindert werden. Weiterhin reagiert Stearinsäure mit dem gelösten Yttrium(III) zu Yttriumstearat bei Neutralisation. Das Yttriumstearat passiviert die AlN-Oberfläche ebenfalls. Die Stearinsäure ist völlig ungiftig und kann, sofern noch vorhanden, rückstandsfrei thermisch beseitigt werden.The use of stearic acid has several advantages. For example, stearic acid passivates the AlN powder against the attack of water. Only in this way can a surface reaction of the water of crystallization with the use of Y (NO 3 ) 3 .6H 2 O and the ever-present water content of an added ammonia solution with the AlN powder be prevented in particular. Furthermore, stearic acid reacts with the dissolved yttrium (III) to yield yttrium stearate. The yttrium stearate also passivates the AlN surface. The stearic acid is completely non-toxic and, if still present, can be eliminated thermally without residue.
Nach einer zweiten Variante des erfindungsgemäßen Verfahrens zur Herstellung eines Yttrium-beschichteten Aluminiumnitrid-Pulvers (AlN-Pulvers), das zur Herstellung eines Aluminiumnitrid-Sinterkörpers verwendbar ist, umfasst das Verfahren die Schritte:
- a) Ansetzen einer zweiten Lösung von Yttriumstearat in einem nicht-wässrigen Lösungsmittel;
- b) Herstellen einer Dispersion aus der zweiten Lösung und einem AlN-Ausgangspulver; und
- c) Abscheiden von Yttriumstearat auf dem AlN-Ausgangspulver durch Entzug des Lösungsmittels.
- a) preparing a second solution of yttrium stearate in a nonaqueous solvent;
- b) preparing a dispersion of the second solution and an AlN starting powder; and
- c) deposition of yttrium stearate on the AlN starting powder by removal of the solvent.
Das Lösungsmittel der zweiten Lösung ist vorzugsweise eine organische Flüssigkeit mit einem Siedepunkt von 70°C oder höher. Besonders bevorzugt ist das Lösungsmittel der zweiten Lösung ausgewählt aus der Gruppe umfassend Benzol, Benzin, Cyclohexan, Cyclopentan, Ethylbenzol, Isooctan, Xylol, Polymethylbenzol, Terpentinöl und Gemischen derselben. Ein Masseverhältnis von Yttriumstearat zum Lösungsmittel der zweiten Lösung kann im Bereich von 1:5 bis 1:15 liegen.The solvent of the second solution is preferably an organic liquid having a boiling point of 70 ° C or higher. More preferably, the solvent of the second solution is selected from the group consisting of benzene, gasoline, cyclohexane, cyclopentane, ethylbenzene, isooctane, xylene, polymethylbenzene, turpentine oil, and mixtures thereof. A mass ratio of yttrium stearate to the solvent of the second solution may range from 1: 5 to 1:15.
In beiden Verfahrensvarianten wird vorzugsweise das abgeschiedene Yttriumstearat thermisch zersetzt. Das gebildete Yttriumstearat zerfällt dabei zu Yttriumoxid, welches vor allem mit dem am AlN haftenden Aluminiumoxid bei Sintertemperatur eine flüssige Aluminatphase bildet.In both process variants, the deposited yttrium stearate is preferably thermally decomposed. The yttrium stearate formed decays to yttrium oxide, which forms a liquid aluminate phase above all with the aluminum oxide adhering to the AlN at the sintering temperature.
Ein weiterer Aspekt der Erfindung betrifft Yttrium-beschichteten Aluminiumnitrid-Pulver, das gemäß den vorab beschrieben Verfahren hergestellt wurde.Another aspect of the invention relates to yttrium-coated aluminum nitride powder prepared according to the previously described methods.
Die Erfindung betrifft ferner die Verwendung des erfindungsgemäßen Yttrium-beschichteten Aluminiumnitrid-Pulvers zur Herstellung eines Aluminiumnitrid-Sinterkörpers (oder Aluminiumnitridkeramik) und Aluminiumnitrid-Sinterkörper, die durch Pressen und Sintern dieses Yttrium-beschichteten Aluminiumnitrid-Pulvers hergestellt wurden.The invention further relates to the use of the yttrium-coated aluminum nitride powder of the present invention for producing an aluminum nitride sintered body (or aluminum nitride ceramic) and aluminum nitride sintered bodies prepared by pressing and sintering this yttrium-coated aluminum nitride powder.
Der Erfindung liegt demnach die Erkenntnis zugrunde, dass auf dem AlN-Pulver nach einer ersten Variante des Verfahrens aus flüssiger Phase eine Yttriumverbindung abgeschieden wird, wobei die abgeschiedene feste Verbindung das AlN-Pulver passiviert, bei der Formgebung als Presshilfsmittel fungiert und dann nach deren thermischer Zersetzung als Sinterhilfsmittel dient. In der Keramik verbleibt auf diese Weise ein sehr gleichmäßig verteiltes, äußerst feinteiliges Oxid, welches sich bei Sintertemperatur mit dem im AlN enthaltenen Aluminiumoxid zu Yttriumaluminat-Phasen umsetzt, die nach Ausbildung der Keramikstruktur eine sehr viel geringe Korngröße aufweisen als die dominierende AlN-Matrix. Mit anderen Worten, der mit dem erfindungsgemäß beschichteten AlN-Pulver hergestellte Aluminiumnitrid-Sinterkörper unterscheidet sich morphologisch von Aluminiumnitrid-Sinterkörpern, die auf Basis eines herkömmlichen AlN-Pulvers hergestellt wurden.The invention is therefore based on the finding that on the AlN powder according to a first variant of the method of liquid phase a Yttriumverbindung is deposited, wherein the deposited solid compound passivates the AlN powder, acts as a molding aid in the molding and then serves as a sintering aid after their thermal decomposition. In the ceramic remains in this way a very evenly distributed, extremely finely divided oxide, which converts at sintering temperature with the alumina contained in AlN to yttrium aluminate phases, which have a much smaller grain size after formation of the ceramic structure than the dominant AlN matrix. In other words, the aluminum nitride sintered body made with the AlN powder coated according to the invention differs morphologically from aluminum nitride sintered bodies made on the basis of a conventional AlN powder.
In zweiter Variante des Verfahrens wird das AlN-Pulver mit einer passivierenden yttriumhaltigen Lösung versetzt wird, aus der ein ebenfalls passivierendes Presshilfsmittel in feiner Verteilung auf dem AlN-Pulver abgeschieden wird. Dieses Presshilfsmittel wird ebenso nach der Pressformgebung thermisch in das Sinterhilfsmittel umgewandelt, wobei die Sinterhilfsmittel-Phase in der fertigen AlN-Keramik mit sehr feiner Verteilung vorliegt.In the second variant of the process, the AlN powder is mixed with a passivating yttrium-containing solution, from which a likewise passivating pressing assistant is deposited in fine distribution on the AlN powder. This pressing aid is also thermally converted into the sintering aid after the press molding, wherein the sintering aid phase is present in the finished AlN ceramic with very fine distribution.
Die Lösung schützt das AlN-Pulver vor dem Angriff von Wasser. Das in der Lösung nach der zweiten Verfahrensvariante enthaltene Yttriumstearat oder das aus der Lösung durch Anheben des pH-Wertes nach der ersten Verfahrensvariante abgeschiedene ebenfalls passivierende Yttriumstearat dient demnach zunächst als Passivierungsmittel und als Presshilfsmittel, welches nach Formgebung und thermischer Zersetzung in das zugehörige Oxid übergeht und bei Sintertemperatur mit dem im AlN-Pulver immer begleitend enthaltenem Aluminiumoxid flüssige sinterfördernde Yttriumaluminate bildet. Durch die sich einstellende gleichmäßig feine Verteilung des Yttriumoxids wird gleichzeitig die Sinterverdichtung gefördert, so dass niedrigere Sintertemperaturen notwendig sind.The solution protects the AlN powder from attack by water. The yttrium stearate contained in the solution according to the second process variant or the likewise passivating yttrium stearate separated off from the solution by raising the pH according to the first process variant thus serves first as a passivating agent and as a pressing assistant which, after shaping and thermal decomposition, passes into the associated oxide and forms liquid sinter-promoting yttrium aluminates at sintering temperature with the alumina always accompanying the AlN powder. Due to the self-adjusting uniformly fine distribution of the yttrium oxide, the sintering compaction is promoted at the same time, so that lower sintering temperatures are necessary.
Ein besonderer Vorteil des Verfahrens ist, dass durch die gleichmäßige Verteilung der sinterfördernden Yttriumoxid-Komponente auf der Oberfläche der AlN-Teilchen ein unmittelbarer Kontakt zu der die Oberfläche der AlN-Teilchen ebenfalls überziehenden Al2O3-Schicht besteht. Dadurch wird die Bildung der Flüssigphase und mithin der gesamte Sinterprozess beschleunigt.A particular advantage of the method is that the uniform distribution of the sinter-promoting yttria component on the surface of the AlN particles makes direct contact with the Al 2 O 3 layer which also covers the surface of the AlN particles. This accelerates the formation of the liquid phase and thus the entire sintering process.
Bei der thermischen Zersetzung des Stearates werden größere Gasmengen frei. Dies kann bei dicken Keramikscherben zu Fehlern in dem Keramikkörper bei der Entbinderung führen. Vorteilhaft ist in diesem Falle, einen Teil des Yttriumoxids schon in dem AlN-Ausgangspulver unterzubringen. So kann das AlN mit einer Lösung von Y-Stearat in Xylol getränkt werden. Bei ca. 620 °C hinterbleibt AlN mit feinverteiltem Yttriumoxid. Nun kann auf dem schon mit Yttriumoxid versetztem AlN-Pulver aus flüssiger Phase erneut Yttriumstearat abgeschieden werden. Mit anderen Worten, nach der thermischen Behandlung, werden die dem Verfahrensschritt a) folgenden Verfahrensschritte der beiden Verfahrensvarianten vorzugsweise wiederholt.The thermal decomposition of the stearate releases larger amounts of gas. This can lead to defects in the ceramic body during debindering with thick ceramic shards. It is advantageous in this case to accommodate part of the yttrium oxide already in the AlN starting powder. Thus, the AlN can be soaked in a solution of Y-stearate in xylene. At about 620 ° C, AlN remains with finely divided yttria. Yttrium stearate can now be deposited again on the liquid phase AlN powder already mixed with yttrium oxide. In other words, after the thermal treatment, the process steps of the two process variants following the process step a) are preferably repeated.
Optional können die zu beschichtenden AlN-Pulver Legierungsanteile weiterer Nitride oder Oxide von Alkalimetallen, Metallen der 3. Gruppe des Periodensystems, der Seltenen Erden oder Silizium in Mengen bis 10 Masse-% enthalten.Optionally, the AlN powders to be coated may contain alloying portions of other nitrides or oxides of alkali metals, metals of Group 3 of the Periodic Table, rare earths or silicon in amounts up to 10% by mass.
Weitere bevorzugte Ausführungsformen der Erfindung ergeben sich aus der nachfolgenden Beschreibung.Further preferred embodiments of the invention will become apparent from the following description.
Detaillierte Beschreibung der ErfindungDetailed description of the invention
Die Erfindung wird nachfolgend anhand von Ausführungsbeispielen näher erläutert.The invention will be explained in more detail with reference to embodiments.
Ausführungsbeispiel 1Embodiment 1
42,7 g Y(NO3)3 × 6 H2O (Yttriumnitrat) und 144 g C17H35COOH (Stearinsäure) werden in 1,6 l Isopropanol bei 60°C gelöst. In die Lösung werden 2,5 kg AlN eingetragen. Die Aufschlämmung wird unter gelindem Rühren auf 60°C erwärmt. Nach Erreichen der Temperatur werden mit 56 g 25%iger Ammoniaklösung verdünnt in 185 g Isopropanol der pH-Wert der Lösung auf pH = 7 angehoben. Hierbei scheidet sich Y-Stearat auf der Oberfläche des AlN-Pulvers ab.
Die Aufschlämmung wird 1 h weiter gelinde gerührt und danach in 2 Stufen getrocknet (8 h bei 70°C, Isopropanol verdampft) und 8 h bei 180°C (Ammoniumnitrat wird thermisch zersetzt). Das resultierende Pulver ist weich und besitzt eine Schüttdichte von 0,6 g/cm3.The slurry is further stirred gently for 1 h and then dried in 2 stages (8 h at 70 ° C, isopropanol evaporated) and 8 h at 180 ° C (ammonium nitrate is thermally decomposed). The resulting powder is soft and has a bulk density of 0.6 g / cm 3 .
Zur Verbesserung der Fließ- und Pressfähigkeit wird das Pulver mit 50 MPa isostatisch verdichtet, zerkleinert und siebgranuliert. Das Granulat weist eine Schüttdichte von 1,1 g/cm3 auf. Nun wird das Granulat mit 100 MPa verdichtet und der Pressling an Luft durch Erwärmen auf 620°C entbindert (Zersetzung des Yttriumstearates ab ca. 400 °C und Kristallisation des Yttriumoxides ab ca. 500 °C) und bei 1810°C 2 h in einer Stickstoff-Wasserstoffatmosphäre (Volumenverhältnis 1:1) gesintert. Die AlN-Keramik erreicht eine Dichte von 3,26 g/cm3 eine mittlere Korngröße von 4 µm und eine gleichmäßige Verteilung der Yttriumaluminatphase in den Zwickeln der AlN-Körner. Der Yttriumoxidgehalt der Keramik liegt bei 1 Masse-%.To improve the flowability and pressability, the powder is isostatically compacted at 50 MPa, comminuted and sieved. The granules have a bulk density of 1.1 g / cm 3 . Now, the granules are compacted with 100 MPa and the compact in air by heating to 620 ° C entbindert (decomposition of yttrium stearate from about 400 ° C and crystallization of yttrium oxide from about 500 ° C) and at 1810 ° C for 2 h in one Nitrogen-hydrogen atmosphere (volume ratio 1: 1) sintered. The AlN ceramic achieves a density of 3.26 g / cm 3, a mean grain size of 4 μm and a uniform distribution of the yttrium aluminate phase in the gussets of the AlN grains. The yttria content of the ceramic is 1 mass%.
Ausführungsbeispiel 2Embodiment 2
2,5 kg AlN werden bei 100°C mit einer Lösung von 850 g Y-Stearat in 3 kg Xylol zu einem Brei verrührt. Der Brei wird getrocknet und bei 620°C getempert. Die erkaltete Masse wird gesiebt (0,5 mm) und der Prozedur von Ausführungsbeispiel 1 unterworfen.2.5 kg AlN are stirred at 100 ° C with a solution of 850 g of Y-stearate in 3 kg of xylene to a pulp. The slurry is dried and tempered at 620 ° C. The cooled mass is sieved (0.5 mm) and subjected to the procedure of Embodiment 1.
Die AlN-Keramik erreicht eine Dichte von 3,27 g/cm3 eine mittlere Korngröße von 5 µm und eine gleichmäßige Verteilung der Yttriumaluminatphase in den Zwickeln der AlN-Körner. Der Yttriumoxidgehalt der Keramik liegt bei 6 Masse-%.The AlN ceramic achieves a density of 3.27 g / cm 3, a mean grain size of 5 μm and a uniform distribution of the yttrium aluminate phase in the gussets of the AlN grains. The yttria content of the ceramic is 6% by mass.
ZITATE ENTHALTEN IN DER BESCHREIBUNG QUOTES INCLUDE IN THE DESCRIPTION
Diese Liste der vom Anmelder aufgeführten Dokumente wurde automatisiert erzeugt und ist ausschließlich zur besseren Information des Lesers aufgenommen. Die Liste ist nicht Bestandteil der deutschen Patent- bzw. Gebrauchsmusteranmeldung. Das DPMA übernimmt keinerlei Haftung für etwaige Fehler oder Auslassungen.This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.
Zitierte PatentliteraturCited patent literature
- DE 3337630 A1 [0006]DE 3337630 A1 [0006]
- DE 3534886 A1 [0006]DE 3534886 A1 [0006]
- DE 3627317 A1 [0006]DE 3627317 A1 [0006]
- EP 0207465 A1 [0006]EP 0207465 A1 [0006]
- DE 3723774 A1 [0006]DE 3723774 A1 [0006]
- US 4711861 A [0006]US 4711861 A [0006]
- US 4650777 A [0006]US 4650777 A [0006]
- EP 0267623 A2 [0006]EP 0267623 A2 [0006]
- EP 0260865 A1 [0006]EP 0260865 A1 [0006]
- DE 4039183 A1 [0007, 0012]DE 4039183 A1 [0007, 0012]
- EP 0588171 A1 [0011]EP 0588171 A1 [0011]
Claims (10)
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| EP0207465A2 (en) | 1985-06-28 | 1987-01-07 | Kabushiki Kaisha Toshiba | Aluminum nitride sintered body and preparation thereof |
| DE3627317A1 (en) | 1985-08-13 | 1987-02-19 | Tokuyama Soda Kk | SINTERABLE ALUMINUM NITRIDE COMPOSITION, SINTER BODY FROM THIS COMPOSITION AND METHOD FOR THE PRODUCTION THEREOF |
| US4650777A (en) | 1984-01-19 | 1987-03-17 | Nec Corporation | Method for preparing aluminum nitride ceramics having superior thermal conductivities |
| US4711861A (en) | 1984-10-15 | 1987-12-08 | Tdk Corporation | Sintered aluminum nitride body and method for making |
| DE3723774A1 (en) | 1986-07-18 | 1988-01-28 | Tokuyama Soda Kk | METHOD FOR PRODUCING A SINTER BODY FROM ALUMINUM NITRIDE |
| EP0260865A1 (en) | 1986-09-18 | 1988-03-23 | Sumitomo Chemical Company, Limited | Process for preparation of aluminium nitride sintered material |
| EP0267623A2 (en) | 1986-11-13 | 1988-05-18 | Sumitomo Metal Ceramics Inc. | Black sintered body of aluminum nitride and process for producing the same |
| DE4039183A1 (en) | 1989-12-11 | 1991-06-13 | Zentralinstitut Fuer Kernforsc | High density aluminium nitride ceramic prodn. - from aluminium nitride and metallic sintering aid mixt. in liq. ammonia |
| EP0588171A1 (en) | 1992-09-08 | 1994-03-23 | Hoechst Aktiengesellschaft | Process for the transformation of water - sensitive ceramic powders into a flowable granulate |
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2017
- 2017-10-19 DE DE102017124404.2A patent/DE102017124404A1/en not_active Ceased
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|---|---|---|---|---|
| DE3337630A1 (en) | 1983-10-15 | 1985-04-25 | W.C. Heraeus Gmbh, 6450 Hanau | TEMPERATURE COMPENSATING BODY |
| US4650777A (en) | 1984-01-19 | 1987-03-17 | Nec Corporation | Method for preparing aluminum nitride ceramics having superior thermal conductivities |
| DE3534886A1 (en) | 1984-09-30 | 1986-04-03 | Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa | METHOD FOR PRODUCING ALUMINUM NITRIDE CERAMIC PLATES |
| US4711861A (en) | 1984-10-15 | 1987-12-08 | Tdk Corporation | Sintered aluminum nitride body and method for making |
| EP0207465A2 (en) | 1985-06-28 | 1987-01-07 | Kabushiki Kaisha Toshiba | Aluminum nitride sintered body and preparation thereof |
| DE3627317A1 (en) | 1985-08-13 | 1987-02-19 | Tokuyama Soda Kk | SINTERABLE ALUMINUM NITRIDE COMPOSITION, SINTER BODY FROM THIS COMPOSITION AND METHOD FOR THE PRODUCTION THEREOF |
| DE3723774A1 (en) | 1986-07-18 | 1988-01-28 | Tokuyama Soda Kk | METHOD FOR PRODUCING A SINTER BODY FROM ALUMINUM NITRIDE |
| EP0260865A1 (en) | 1986-09-18 | 1988-03-23 | Sumitomo Chemical Company, Limited | Process for preparation of aluminium nitride sintered material |
| EP0267623A2 (en) | 1986-11-13 | 1988-05-18 | Sumitomo Metal Ceramics Inc. | Black sintered body of aluminum nitride and process for producing the same |
| DE4039183A1 (en) | 1989-12-11 | 1991-06-13 | Zentralinstitut Fuer Kernforsc | High density aluminium nitride ceramic prodn. - from aluminium nitride and metallic sintering aid mixt. in liq. ammonia |
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