DE102004033567A1 - Consumer supply connection system for implementing electric output/power and a fluid through a wall of a chamber in a vacuum chamber supplies a consumer with power via a supply module - Google Patents

Abstract

A supply module is located near a first side (S1) of a wall (3) of a boiler in a vacuum chamber and a consumer is located near a second side (S2) of the wall, on which there is a cabinet (1) for a source of ions and plasma. So as to form a seal, there is an O-ring (2) between the cabinet and the wall. A vacuum or atmospheric pressure prevails near the second side of the wall. An independent claim is also included for a method for implementing electric output and a fluid through a wall of a boiler in a vacuum chamber so as to supply a consumer via a supply module.

Description

The The invention relates to a system and a method each according to the features the generic terms of the independent Claims.

to Supplying a consumer with electrical power and a or a plurality of fluids flowing from a supply module through a wall available are usually made in vacuum technology connection systems used with individual screw and plug contacts. For example can be the interface between a plasma source and a so-called Matchbox for impedance matching several water pipes, high frequency cables, gas pipes and direct current (DC) power lines, which are passed through the boiler wall of a vacuum chamber in which the source is housed. The screw and plug contacts are within arranged the Matchbox, resulting in a considerable size of the Matchbox leads, there to assemble or disassemble the contacts within the matchbox must be handled. The transformation of single screw and Plug contacts increased doing the work involved in the assembly and disassembly of the compounds. Furthermore, in the case of several connections, a mistake is not confused to avoid connections. In addition, a correct installation requires a considerable one Dexterity and care, in their absence, especially leakage problems can occur at the fluid connection points.

task The invention is the creation of a connection system and a Method of implementation of electrical power and at least one fluid through a wall passing through a secure connection state and a simple one and fast transition in a disconnect state as well as a simple and a quick transition from a disconnected state to a secure connection state.

The Task is according to the invention with the features the independent one claims solved.

According to the invention is at a generic connection system provided that the plug contact is designed as a hollow connector and the socket contact a receptacle adapted to the hollow plug and contact opening for the Hollow plug includes and in the connection state, a current-carrying area the hollow connector and a current carrying area the socket contact for the transport of electrical power and an interior area the hollow connector and an inner portion of the female connector for transport the said fluid are connected.

The Production of a connection state or a separation state is by the configuration of plug contact and socket contact as Hollow plug with a socket contact and one adapted to the plug Receiving and contact opening for the hollow connector achieved and the use of plug contact and socket contact both for transporting electrical power and for transport of fluid considerably simplified. By eliminating separate connections for electrical Performance and fluid make assembly and disassembly times considerable shortened.

Further is according to the invention at a generic connection system provided that said plug contact with a plug contact support plate and / or said socket contact in a socket contact support plate is arranged and that storage means are provided for floating Storage of at least one of the components plug contact, socket contact, Plug contact holder plate or socket contact holder plate.

By the floating mounting of at least one of the components plug contact, Socket contact, plug contact holder plate or socket contact support plate Is it possible, through manufacturing tolerances, thermal distortion or intercept forces occurring during assembly or disassembly. This will be one-sided loads of plug contact and socket contact prevented. Such unilateral loads can cause electrical flashovers between the contacts and thus lead to thermal destruction.

further developments of the invention are dependent claims refer to.

In A development of the invention is provided that the electrical Power has at least one high frequency component and the current carrying area for this Component is determined by the skin effect and protection of the Connection area of inner area of the hollow connector and inner area of the female connector against high frequency power loading is reachable.

In a development of the invention is the plug contact holder plate and / or the female support plate formed as an insulation plate, which provides protection against leakage currents is reached.

If either the said plug contact or the said socket contact is fixedly arranged in the plug-in contact support plate or the socket support plate, a stationary continuation of the respectively connected thereto connection to the consumer or the versor be achieved module.

If outside the wall a first connection flange for a connection of the supply module and / or on the supply module, a second connection flange for a Connection to the outside area the wall is provided, wherein the first connection flange and / or the second connection flange as the said plug and socket contacts associated electrical shielding device is formed, may advantageously be an effective high frequency shielding of the connection system be achieved.

In a development of the connection system is provided that the first storage means have a stationary component, which is part of the second connection flange and as a step area is formed, the at least a part of the edge region of the insulation plate collar-like, wherein between the step area and the said Part of the border area a predetermined game is allowed. In order to let yourself easily realize a functionally safe floating storage.

at a development of the invention, it is provided that the insulation plate has a profile structure for the reduction of leakage current, which an increased High voltage safety of the connection system is achieved.

at a development of the invention is provided that the contact socket accommodated in an insertion socket provided with electrical insulation means is what an increased High voltage resistance of the connection system is achieved.

at a development of the invention is provided that the said Contact socket two or more with the said contact area of the Hollow connector cooperating, preferably resilient RF contact elements having, whereby a secure contact and a simple assembly or Dismantling can be achieved.

In a training is provided that between the first and second Connecting flange electrical connection means are provided, thus achieving improved RF shielding through the flanges can be.

at a development of the invention is provided that a number of at least two of said plug contacts and an equal number are provided by socket contacts, whereby a corresponding number of connections between the consumer and the supply module safe and easy to be realized.

In a development of the invention is provided that the consumer an ion source or a plasma jet source. Especially preferred if it is the source to perform a PVCD vacuum process, preferably with an electrical power of at most 5 KW is formed.

at In a further development, the supply module is a matchbox, which an electrical matching network for an ion source or plasma jet source includes, wherein a reduction of the size of the matchbox can be achieved can. In case of high security against confusion and elimination of Leakage problems can increase the assembly time to a fraction of the usual Assembly time can be reduced.

The The invention further comprises a generic method for carrying out electrical power and at least one fluid provided in accordance with the invention is that the plug contact as a hollow plug from an electrical conductive material is made and the socket contact a the hollow connector adapted receiving and contact opening for the Hollow plug includes and in the connection state, a current-carrying area the hollow connector and a current carrying area the socket contact for transporting electric power and / or an inner area of the hollow plug and an inner area of the socket plug connected to transport said fluid.

Further is in a method according to the invention to carry out provided by electrical power and at least one fluid through a wall, that said plug contact with a plug contact support plate and / or said socket contact in a receptacle contact plate is arranged and that storage means for floating storage of at least one of the components plug contact, socket contact, Plug contact holder plate or socket contact holder plate are provided.

Further Further developments, embodiments and advantages of the invention are independent of their summary in claims and without restriction the generality of the following description and illustration to be taken from drawings.

It show in a schematic representation

1 an inventive connection system in a disconnected state

2 a plug contact and a socket contact of a connection system according to the invention in a connection state.

In 1 is a schematic representation of an inventive connection system in a disconnected state. 2 shows a plug contact and a socket contact of a connection system according to the invention in a connection state. The same components are provided with the same reference numerals. Basically insulators are shown in the figures with double hatching.

A system according to the invention serves to carry out electrical power and at least one fluid through a wall 3 through to supply a consumer through a supply module. The consumer is preferably an HF ion source or an RF plasma jet source, for example for a box coater. Such sources can be advantageously used to perform a PVCD vacuum process. Particularly preferred are smaller systems with sources with an electrical power of less than 5 KW, since a higher compactness is particularly advantageous here. The electrical power performed may be DC (direct current), radio frequency (RF), or more than 1,000 Hertz or more, or a superposition of RF and DC power. Particularly preferred is a high frequency power of 13.56 MHz. The electrical voltages used can be in a range between 10 and several 100 volts, but also up to the kilovolt range. The supply module may be a matchbox formed as a cavity resonator, which comprises an electrical matching network for an ion source or a plasma jet source.

at the one to be carried out Fluids can be water, preferably with a given low conductivity, or to process gases for the consumers to be supplied, in particular sources. Also Vacuum is referred to as fluid in the context of the invention.

The supply module is located in a region of a first side S ₁ and the consumer in a region of a second side S _{2 of} the wall 3 The wall is preferred 3 , a boiler wall of a vacuum chamber. On the wall 3 is the case 1 an ion or plasma source arranged. For sealing is between the housing 1 the ion source and the wall 3 a 0-ring 2 intended. In the area of side S ₂ , vacuum or atmospheric pressure may prevail.

On one, for example made of aluminum, housing wall 8th of the supply module is a connection flange 9a for connection to the outside or one on the outside of the wall 3 arranged connection flange 6a intended.

The connection system includes one in a feedthrough area 4a the wall 3 arranged plug contact 5 and a socket contact disposed in the supply module 13 , In 1 are two pairs of plug contacts 5 . 5 ' and socket contacts 13 . 13 ' shown. It is understood that the socket contact according to the invention can be used for the removal of fluid or electrical power, as can be seen from the left pair of hollow plug contact socket. For simplicity, the invention according to 1 essentially on the basis of the contacts 5 and 13 described.

In the execution area of the wall 3 is a plug contact holder plate 4b arranged at the plug contact 5 is housed. The plug contact 5 in this case has a part which projects into the region S ₁ as well as a part which projects into the region S ₂ . The socket contact 13 is in a jack mount plate 11 arranged on the wall 8th of the supply module is arranged.

The plug contact holder plate 4b and / or the socket contact support plate 11 are preferably formed as an insulating plate, preferably made of ceramic or plastic. To prevent creepage currents, the plate 11 a preferably step-like profile. In further embodiments of the invention, one or both support plates are integrated into the wall.

plug contact 5 and socket contact 13 are displaceable in a connection state or in a disconnected state. The plug contact 5 is designed as a hollow connector made of an electrically conductive material and may be a hollow shaft. The hollow connector 5 has an interior area 5a on, which connects the side S ₁ and the side S ₂ . The socket contact 13 is also made of an electrically conductive material and has a hollow connector 5 adapted receiving and contact opening 21 for the hollow connector 5 on. The opening 21 is part of an interior 13a of the socket contact 13 , In the connection state are a current carrying region of the hollow connector 5 and a current carrying area of the socket contact 13 connected to transport electrical power. At the same time are the interior area 5a of the hollow connector 5 and the interior 13a of the socket connector 13 connected to each other for transporting said fluid in the connection state. In addition to the material transport of fluid through the wall can be effected with the system according to the invention, a cooling in the region of the electrical contacts.

The receiving and contact opening 21 for the hollow connector 5 includes one or more with a contact area 5b of the hollow connector 5 cooperating contact elements 15 , Preferably, the contact elements 15 as resilient contacts Lemente, in particular for RF power trained. Particularly preferred is a spring-loaded ring contact 15 ,

The hollow connector 5 is formed in two stages in the present embodiment, and has a contact area 5b with a larger diameter and in an end area 5c with a smaller diameter. In the receiving and contact opening 21 are the hollow connector 5 associated elastic sealing elements provided for a vacuum and fluid seal. This is preferably a 0-ring 14 , In the embodiment of the invention with a two-stage barrel connector 5 is the electrical contact between the hollow plug 5 and contact socket 13 preferably separated from the area in which a vacuum seal takes place. It goes without saying that such a separation of functions can also be useful in the case of a single-stage embodiment since this can reduce electrical and / or thermal stress on the vacuum sealing area.

The contact socket 13 is in a provided with electrical insulation means insertion 12 housed, with the isolation, especially against leakage currents can be improved.

If the electrical power has at least one high-frequency component, the skin effect is preferably taken into account in the connection system according to the invention. The skin effect leads to current conduction at high frequency largely on the surfaces of a conductor. One speaks of a penetration depth of the current into the surface, eg with copper of 20μm. This means that you only need a material thickness of 20 microns with a conductor and all other material inside the conductor for the power supply is not needed. In a preferred embodiment, the current-carrying region of the hollow plug is 5 and / or socket contact 13 for a Hf component of the electrical power determined by the skin effect. In this case, a high conductivity of the surface areas of the contacts in which the current is mainly conducted due to the skin effect is preferred. Such surface areas may be formed, for example, of silver or another highly conductive material. For this component, the current is largely led to the surface in order to take into account the skin effect accordingly.

The high power density with small line dimensions and typically occurring reactive currents can to an increased heat stress the conductor Lead areas. According to the invention, it is provided the hollow plug and / or the socket contact are designed in such a way that that a cooling through the performed Fluid takes place so that specified operating temperatures are maintained become.

A supply of electrical power to the socket contact 13 is done by a preferably flexible connection plate 17 , which is preferably designed for high frequency. A supply of fluid is effected by a preferably insulated fluid connection hose 20 , with a fluid fitting 19 using a pressure washer 18 that the connecting plate 17 presses plan, at the socket contact 13 is appropriate.

For floating storage of the socket contact 13 are storage means in the socket holder contact plate 11 provided to intercept occurring forces. Preferably, the floating bearing leaves a radial and / or axial play of the socket contact 13 relative to the socket holder contact plate 11 to. The floating bearing may be formed, for example, by a circumferential groove around a circumference of the socket contact which projects into a projection of the socket-mounting contact plate 11 engages, be trained.

The socket holder contact plate 11 is also floating. The connection flange 9a has a fixed component 9b on, at least part of the edge region of the female support contact plate 11 collar-like, with a predetermined game is allowed. The stationary component is preferably an integrated part of the connection flange 9a , Between the stationary component 9b and the edge portion of the female support contact plate 11 a 0-ring is provided which exerts a certain holding force, so that, for example, during disassembly and subsequent assembly, the position of the plate does not have to be found again.

As already mentioned, is on the wall 3 or boiler wall a connection flange 6a provided, the one connection of the supply module or the connection flange 9a includes. To improve the positioning in the preparation of the connection state, the flanges 6a and 9a associated positioning means acting as a positioning 10a and associated positioning hole 10b are formed.

The connection flanges 6a and 9a are made of a conductive material to allow for improved RF shielding. To ensure a useful electrical connection, there is a connection flange 6a at one area 6b a contact element 7a , preferably designed as a spring-loaded ring contact, provided with a contact area 7b of the ingredient 9b of the connection flange 9a interacts in the connection state. About the parts 6a and 9a a stop is realized.

It it is understood that the invention all embodiments includes, wherein said plug contact in a plug contact support plate and / or said socket contact in a socket contact support plate is arranged and storage means for the floating storage of at least one of the components plug contact, socket contact, plug contact support plate or socket contact support plate are provided.

Prefers are embodiments the invention with a plurality of plug contacts and associated Socket contacts with arrangement patterns that make an interchanging of the Prevent contact pairs, for example, non-rotationally symmetric Inspect. The plug-in or Socket contacts are preferably each floatingly mounted The connection system according to the invention implements a multifunctional implementation, with which the implementation of electrical power and fluid can be integrated. Advantageous is that in the connection state plug contact and socket contact can be connected vacuum-tight, to ensure a safe function of the ion or plasma source.

1

Housing ion source

2

0-ring

3

wall boiler wall

4a

Feed-through area

4b

insulation plate

5

Plug, Hohlstecker

5 '

contact plug or hollow connector

5a

interior

5b

contact area

5c

end

6a

flange

6b

contact area

7a

suspension ring Contact

7b

contact area

8th

housing wall Matchbox

9a

flange

9b

component flange

10a

positioning

10b

positioning bore

11

Contact socket holder, insulation plate

12

Hole connector

13

female contact

13 '

female contact

13a

interior

14

0-ring

15

suspension ring Contact

16

0-ring for floating storage

17

Flashing

18

thrust washer

19

Fluidverschraubung

20

Fluid connection hose

21

Admission- and contact opening

Claims (17)

A connection system for carrying electrical power and at least one fluid through a wall to supply a load by means of a supply module, wherein the supply module in the region of a first side and the consumer is in the region of a second side of the wall, with at least one in the wall arranged plug contact and a plug contact associated, arranged on the supply module socket contact, wherein said plug contact and the said socket contact are displaceable in a connection state or a disconnected state, characterized in that the plug contact is designed as a hollow connector and the socket contact a hollow connector adapted receiving and contact opening for the hollow plug and in the connected state - a current-carrying area of the hollow plug and a current-carrying area of the socket contact for transporting electric power and - an inner area of the hollow plug and an inner portion of the female connector for transporting said fluid are connected. Connection system, in particular according to claim 1, to carry out of electrical power and at least one fluid through a wall through to supply a consumer by means of a supply module, wherein the supply module in the area of a first side and the Consumer lies in the area of a second side of the wall, with at least one arranged in the wall plug contact and one associated with the plug contact, arranged on the supply module Socket contact, wherein said plug contact and said socket contact in a connection state or a disconnection state are displaceable, characterized in that said plug contact in a plug contact support plate and / or said socket contact in a socket contact support plate is arranged and that storage means for floating storage of at least one of the components plug contact, socket contact, Plug contact holder plate or socket contact support plate provided are. Connection system according to claim 1 or 2, characterized in that the electrical power is at least one high-frequency component and the current-carrying area for this Component is determined by the skin effect. Connection system according to at least one of claims 1 to 3, characterized in that the plug contact support plate and / or the socket contact support plate as an insulation plate are formed. Connection system according to at least one of the preceding Claims, characterized in that either said plug contact or said socket contact fixed in the plug contact holder plate or female contact holder plate is arranged. Connection system according to at least one of the preceding Claims, characterized in that in the outer region of the wall, a first Connection flange for a connection of the supply module and / or the supply module a second connection flange for a connection to the outside area the wall is provided, wherein the first connection flange and / or the second connection flange as the said plug and socket contacts associated electrical shielding device is formed. Connection system according to at least one of the preceding Claims, characterized in that the first storage means a fixed Having component, which is preferably integrated part of the second Connecting flange is and is designed as a step area, the at least a part of the edge region of the insulation plate like a collar comprising a predetermined game is allowed. Connection system according to at least one of the preceding Claims, characterized in that the insulation panel has a profile structure for Reduction of leakage current has. Connection system according to at least one of the preceding Claims, characterized in that the contact socket in one with electrical Insulating means provided insertion bushing is housed. Connection system according to at least one of the preceding Claims, characterized in that said contact socket is one or more cooperating with a contact region of the hollow connector, preferably comprising resilient contact elements. Connection system according to at least one of the preceding Claims, characterized in that in the receiving and contact opening of the said contact socket associated with said barrel connector, preferably elastic sealing elements for a fluid seal, in particular at least one 0-ring provided are. Connection system according to at least one of the preceding Claims, characterized in that between the first and second flange electrical Connecting means, preferably sprung ring contacts provided are. Connection system according to at least one of the preceding Claims, characterized in that a number of at least two of said Plug contacts and an equal number of socket contacts provided are. Connection system according to at least one of the preceding Claims, characterized in that the consumer is an ion source or a plasma jet source, particularly preferred for carrying out a PCVD vacuum process, trained is. Connection system according to claim 14, characterized in that that the supply module is a matchbox, which is an electrical Adaptation network for an ion source or a plasma jet source. Method for carrying out electrical power and at least one fluid through a wall for supply a consumer by means of a supply module, wherein the supply module in the area of a first page and the consumer in the area a second side of the wall is located, with at least one in the Wall arranged plug contact and a plug contact assigned, arranged on the supply module socket contact, said Plug contact and the said socket contact in a connection state or a disconnected state, characterized in that the plug contact is designed as a hollow plug and the socket contact a hollow connector adapted receiving and contact opening for the hollow connector includes and in the connection state - a current carrying area the hollow connector and a current carrying area socket contact for transporting electrical power and - an interior area the hollow connector and an inner portion of the female connector for transport be connected of said fluid. Method, in particular according to claim 16, for carrying out electrical power and at least one fluid through a wall for supplying a load to a consumer by means of a supply module, wherein the supply module lies in the region of a first side and the consumer in the region of a second side of the wall, with at least one plug contact arranged in the wall and a socket contact associated with the plug contact, arranged on the supply module, said plug contact and said socket contact being set in a connection state or a disconnection state, characterized in that the said one Plug contact in a plug contact support plate and / or the said socket contact is arranged in a socket contact support plate and by means of storage means at least one of the components plug contact, socket contact, plug contact support plate or socket contact support plate is floating.